RFS-1310N/RFS-1305N is the power generator for the plasma process that can output 13.56MHz·1kW/500W.

Downsizing and weight saving are realized by carrying a high efficiency RF amplifier.

Furthermore, power and matching control are capable only by main unit because auto-matching control function is in

the RF power generator.

RF Power Generator [RFS-N Series]

13.56MHz 1kW is Realized with High Efficiency AmplifierEnergy saving is achieved with high power conversion efficiency RF circuit.High-Speed Auto-MatchingHigh-speed auto-matching is realized by high speed algorithm.Built-In Auto-Matching Function in the RF Power GeneratorMatching system control is capable only by main unit. Manual operation of RF power generator and matching box are capable by optional controller.Flexible ControlExternal analog control, serial communication control and control by optional controller are capable.Cooling Water is Not NecessaryForced air cooling systemHigh ReliabilityDesign based on long time experienced know-how as the vacuum process equipment manufacturer

Sputtering

CVD

Plasma etching

RF ion source

Display (LCD/PDP/LED) processing system

Photovoltaic processing system

MEMS processing system

Appl icat ionsFeatures

RFS-1310N

Power Supply

Power Supply

ULVAC, Inc. Components Division www.ulvac.co.jp/en

Overseas Sales in Japan TEL +81-467-89-2261

USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC SINGAPORE PTE LTD Philippines Branch TEL +63-46-437-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC SINGAPORE PTE LTD Vietnam Representative Office TEL +84-8-6299-8262CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 INDONESIA : ULVAC SINGAPORE PTE LTD Indonesia Representative Office TEL +62-21-8990-5070TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-7388883KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006

This catalog is subject to change without notice.This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 2455E-1/2014100500TL

RF Power Generator [RFS-N Series]

RFS-1310N/RFS-1305N(RF POWER SUPPLY)

MBX-1310N(MATCHING BOX)

2510

0

224

150

240

3

495

30

250

120

2040

1531

125187.5

3

328

18

4-M4 M5

48

88

137.5 137.5

7777

172.5

112

112

172.5

10-M6

17

375 14

Dimensions

Unit: mm

Specifications (Power Generator) Specifications (Matching Box)

Model RFS-1305N RFS-1310N

Input Spec. Input rated voltage AC200 to 220VInput voltage fluctuation range AC180 to 242VPhase, frequency 1phase 50/60HzInput connector Bayonet netlock round connector

DCA3106F16-10S G-D-BSN-0Input capacity 1.2 kVA or less 2 kVA or lessInput current 10.0A or lessLeak current 5mA or less

Output Spec. Oscillating frequency 13.56MHzRated traveling-wave power 500W (50Ω load) 1000W (50Ω load)Maximum reflected wave power 100WOutput impedance 50ΩHarmonic distortion ratio -40dB or less (Rated output,Continuous mode)Output connector Coaxial connector output (N type)

Control Control method Power control modeControl precision Rated output ±2% or lessControl guarantee range Rated power 10 to 100%

Demensions W×D×H 240mm×495mm×150mm(Excepting projection portion)

Weight Approx. 11kg

Model MBX-1310N

RF input Input frequency 13.56MHzRated power 50 to 1000WInput connector Coaxial connector (N type)

RF output Allowable output voltage 2.5kVpp or less/2.5kVdc or lessAllowable output current 40A or lessLoad impedance Real part: 0.5Ω≦R≦10.0Ω

(Only the range of regulation voltage and current)Residual reflected wave power Big either input travelling wave power 0.3%

or less or 10W or lessCooling system Forced air cooling system using fanDemensions W×D×H 375mm×250mm×170mm

(excepting projection portion)Weight Approx. 8kg

＊ Operating ambient temperature : 10˚C to 40˚C (non condensing)＊ Operating environment : Avoid a vibration,direct sunlight, heat,dust,do not contain

corrosive gas