revisions ltr descriptions by/chk'd app'd … quality max dimensional limits apply before...

D

C

B

A

D

C

B

A

1345678

12345678

2

ANDOVER, MA. USA.

2.750[69,85]

.350[8,89]

.750[19,05]

2X.50[12,7]

4.88[124]

SWAGELOK 4VCR

.125[3,18]

1.45[36,8]

3.00[76,2]

.96[24,3]

1.17[29,7]

5.48[139,3]

NORMALLY CLOSEDVALVE

6.12

[155.4]NORMALLY OPEN

VALVE AND METER4.48[113,9]


5.12


VALVE AND METER

5.24[133]


5.87


VALVE AND METER

4.44(112.8)

SWAGELOK 1/4" TUBE FITTINGS

4.56(115.8)

SWAGELOK 4VCO

2X.725[18,42]

.86[21,9]

.125[3,18]

2.75[69,9]

.75[19,1]

.35[8,9]

.125[3,18]

2.25[57,2]

2.75[69,9]

.75[19,1]

.35[8,9]

.375[9,53]

45.0�$

SHT 1 OF 6SCALE NONE-DESIGNEDFOR

THIRD ANGLE PROJECTION

DWG NO.

1042297SIZE

DDIST.

--FIRST

USED IN

UNLESS OTHERWISE SPECIFIEDDIMENSIONS ARE IN INCHES.

TOLERANCES:

X.X �#0.1

X.XX �#0.01 X.XXX �#0.001

X.X�$ �#0.5SURFACE

QUALITY MAX

DIMENSIONAL LIMITSAPPLY BEFORE COATING

TITLE

OUTLINE DRAWING"G" SERIES MFC

-PROJ

MECH

ELEC

CHECKED

DATE

18-Apr-11DRAWN M.COCKROFT

LIST OF MATERIALSQTY

REMARKSDESCRIPTIONPART NO.ITEM001

THIS DOCUMENT IS THE PROPERTY OF MKS INSTRUMENTS, INC., AND ISFURNISHED ON THE CONDITION THAT IT IS NOT TO BE REPRODUCED OR COPIED,AND IS NOT TO BE USED DIRECTLY OR INDIRECTLY IN THE MAKING OF DRAWINGS,PRINTS, APPARATUS, OR PARTS THEREOF, WITHOUT WRITTEN AUTHORIZATION.

THE ACCEPTANCE OF THIS DOCUMENT WILL BE CONSTRUED AS ACCEPTANCEOF THE FOREGOING CONDITIONS, AND AS AN ADMISSION OF THE EXCLUSIVEOWNERSHIP BY MKS INSTRUMENTS, INC. OF THIS DOCUMENT.

PROPRIETARY AND CONFIDENTIAL

THIS DRAWING IS GENERATEDFROM A PRO/E SOLID MODEL

REVISIONSLTR 3 DESCRIPTION BY/CHK'D APP'D DATE

A REL TO PRODUCTION EO MVI-014998 MC 7-22-13

B ADDED SHT 6 EO MVI-016008 MC 1-23-14

C CORRECTED RS485 CONNECTION DIAGRAM EOMVI-016464 MC 5-5-14

MODEL DATAMODEL REV: 1.76+DRAWING REV: . BRANCH: mainRELEASE LEVEL: Preliminary

9-PIN DIGITAL RS-485

PIN SIGNAL

1 POWER & SIGNAL COMMON

2 +11 TO 25 VDC POWER IN

3 NO CONNECTION

4 NO CONNECTION

5 B/B'(RS485+)

6 NO CONNECTION

7 RS485 COMMON

8 SHIELD

9 A/A'{RS485-)

9-PIN RS-485 VERSIONWITH 4VCR & VCO

FITTINGS

NOTES: 1. UNLESS OTHERWISE SPECIFIED, DIMENSIONS ARE NOMINAL VALUES IN INCHES (MM REFERENCED). 2. ALL DIMENSIONS NOT CALLED FOR THE DEVICENET, ANALOG, PROFIBUS AND 4-20 UNITS ARE THE SAME AS THE RS-485.

GE50A MOUNTING HOLES

GM50A MOUNTING HOLES

FLOW

MFC

9-PIN MALE "D" CONNECTOR

2X 8-32 UNC-2B X .25 [4.17] [6.35]

RJ45 CONNECTOR

2X 8-32 UNC-2B X .25 MIN[4.17] [6.35]

4X 8-32 UNC-2B X .25 [4.17] [6.35]

2X M4 X .25 [6.35]180�$APART ON A 1.65 BC [41.9]

CL

D

C

B

A

D

C

B

A

1345678

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2

ANDOVER, MA. USA.

5.65[143,6]

NORMALLY CLOSEDVALVE AND METER

6.26


VALVE

.73(.7 )[18]

.87(.9 )[22]

SHT 2 OF 6SCALE NONE

REV

CDWG NO.

1042297SIZE

DDIST.

SHT 1

TITLE


DEVICENET VERSIONTHIS DOCUMENT IS THE PROPERTY OF MKS INSTRUMENTS, INC., AND ISFURNISHED ON THE CONDITION THAT IT IS NOT TO BE REPRODUCED OR COPIED,AND IS NOT TO BE USED DIRECTLY OR INDIRECTLY IN THE MAKING OF DRAWINGS,PRINTS, APPARATUS, OR PARTS THEREOF, WITHOUT WRITTEN AUTHORIZATION.


REVISIONS

DATEAPP'DBY/CHK'DDESCRIPTIONSLTR

SEE SHEET 1



DEVICENET VERSIONSEE NOTE 2 ON SHT 1

DETAIL ADEVICENET PINOUT

V+

V-

CAN_L

DRAIN

CAN_H

FLOW

MFC

DEVICENET CONNECTOR KEYWAY ORIENTATION MUST BE AS SHOWN IN DETAIL A

CONNECTOR KEYLOCATION

D

C

B

A

D

C

B

A

1345678

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2

ANDOVER, MA. USA.

1.174[29,82]

.399[10,14]

1.336[33,95]

.399[10,12]


REV

CDWG NO.

1042297SIZE

DDIST.

SHT 1

TITLE


ANALOG 9 & 15-PIN THIS DOCUMENT IS THE PROPERTY OF MKS INSTRUMENTS, INC., AND ISFURNISHED ON THE CONDITION THAT IT IS NOT TO BE REPRODUCED OR COPIED,AND IS NOT TO BE USED DIRECTLY OR INDIRECTLY IN THE MAKING OF DRAWINGS,PRINTS, APPARATUS, OR PARTS THEREOF, WITHOUT WRITTEN AUTHORIZATION.


REVISIONS


SEE SHEET 1



9-PIN ANALOG

PIN SIGNAL

1 VALVE OVERRIDE

2 FLOW SIGNAL OUTPUT

3 +15 TO +24 VDC

4 POWER COMMON

5 NO CONNECTION

6 SETPOINT INPUT

7 SIGNAL COMMON

8 SIGNAL COMMON

9 VALVE TEST POINT

15-PIN ANALOG

PIN SIGNAL

1 VALVE TEST POINT

2 FLOW SIGNAL OUTPUT

3 VALVE CLOSE

4 VALVE OPEN

5 POWER COMMON

6 NO CONNECTION

7 +15 TO +24 VDC

8 SETPOINT INPUT

9 NO CONNECTION

10 OPTIONAL INPUT

11 SIGNAL COMMON

12 SIGNAL COMMON

13 NO CONNECTION

14 NO CONNECTION

15 CHASSIS GROUND

ANALOG VERSIONSSEE NOTE 2 ON SHT 1

FLOW

MFC


FLOWFLOW

MFC


D

C

B

A

D

C

B

A

1345678

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2

ANDOVER, MA. USA.

.840[21,34]

2.161[54,88]

.311[7,89]

1.33[33,8]

.40[10,1]


REV

CDWG NO.

1042297SIZE

DDIST.

SHT 1

TITLE


-THIS DOCUMENT IS THE PROPERTY OF MKS INSTRUMENTS, INC., AND ISFURNISHED ON THE CONDITION THAT IT IS NOT TO BE REPRODUCED OR COPIED,AND IS NOT TO BE USED DIRECTLY OR INDIRECTLY IN THE MAKING OF DRAWINGS,PRINTS, APPARATUS, OR PARTS THEREOF, WITHOUT WRITTEN AUTHORIZATION.


REVISIONS


SEE SHEET 1



FLOWFLOW

MFC

FLOWFLOW

MFC

PROFIBUS VERSIONSEE NOTE 2 ON SHT 1

4-20 VERSIONSEE NOTE 2 ON SHT 1

1 No Connection 2 No Connection 3 Power + 4 No Connection 5 Power Return 6 No Connection 7 No Connection 8 No Connection 9 No Connection

PIN SIGNAL

POWER PROFIBUS

PIN SIGNAL

1 No Connection 2 No Connection 3 Profibus Comm. B 4 Repeater Control 5 Profibus Ground 6 Profibus +5V 7 No Connection 8 Profibus Comm. A 9 No Connection

PROFIBUS CONNECTORPINOUTS

1 * Setpoint Input Return 2 No Connection 3 No Connection 4 Flow Output Current (4-20 mA) 5 +15 to +28 VDC 6 No Connection 7 * Setpoint Input Current (4-20 mA) 8 No Connection 9 Power Common10 Flow Output Return11 No Connection12 * Valve Override Input13 No Connection14 Chassis Ground15 No Connection

PIN SIGNAL

4-20mA

* Not Applicable For MFM

9-PIN MALE "D" CONNECOR 9-PIN FEMALE "D"

CONNECTOR15-PIN MALE "D" CONNECTOR

D

C

B

A

D

C

B

A

1345678

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2

ANDOVER, MA. USA.1.45[36,8]

4.14[105,2]

3.622[92]

2X.591[15,01]

.40[10,1] 1.74

[44,2]

2X 1.182[30,01]

.259[6,58]

.99[25]

5.24[133,1]

5.86


VALVE

5.48[139,2]

6.10


VALVE

.58[14,7]

2.98[75,6]

.40[10,1]

1.90[48,3]

.86[21,9]

4.51[114,6]

5.13


VALVE

1.45[36,8]

SHT 5 OF 6SCALE 1.000

REV

CDWG NO.

1042297SIZE

DDIST.

SHT 1

TITLE




REVISIONS


SEE SHEET 1



DOWNMOUNT C-SEAL9-PIN ANALOG VERSION DOWNMOUNT W-SEAL

15-PIN ANALOG

FLOWFLOW

MFC

FLOWFLOW

MFC


4X .2215,61[ ]

CL


RJ45 CONNECTOR

D

C

B

A

D

C

B

A

1345678

12345678

2

ANDOVER, MA. USA.

4.44[112,8]

4.44[112,8]

5.28[134,1] 4.72

[120]

4.72[120]

5.60[142,3]

.125[3,18]

4.64[117,8]

NORMALLY CLOSEDVALVE AND METER

5.26


VALVE

3.97[100,8]

.12[3]

.50[12,6]

.49[12,4]

.54[13,8]

1.09[27,6]

4X.24[6]

4.96[126]


REV

CDWG NO.

1042297SIZE

DDIST.

SHT 1

TITLE




REVISIONS


SEE SHEET 1



FLOW

MFC

SWAGELOK 1/8" TUBE FITTING

FLOW

MFC

SWAGELOK 6MMTUBE FITTING

FLOW

MFC

SWAGELOK 8MMTUBE FITTING

FLOW

MFC

SWAGELOK 8VCR TUBE FITTING

FLOW

MFC

SWAGELOK 1/2" TUBE FITTING

revisions ltr descriptions by/chk'd app'd … quality max dimensional limits apply before...

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