resistive coating on spacers by ald - university of chicago · anil mane, qing peng, jeffrey elam...
TRANSCRIPT
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Resistive coating on spacers by ALD
(LAPD weekly meeting) Nov-02-2010
Anil Mane, Qing Peng, Jeffrey Elam ALD Research Program, Process Technology Research Group
Energy Systems Division.
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Background:
To align 8”x8” MCP(s) stacking use of rod and spacers with appropriate resistance to reduce charging effect
Prior to 8”x8” MCP pair testing, use of 4 pairs of 33mm MCPs with 4 holesfor the rods and spacers
A pairs of 33mm MCPs with 4 holes for rods and spacers
Concept #1
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Spacers resistance calculation:
The goal is to tune the resistance of the spacers as per applied MCPs voltages
Each pair of MCPc will have 12 spacers‐ 4x 0.5mm‐4x 1mm‐4x 2.5mm
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Spacers resistance measurement in-situ set-up:
After ALD Before ALD
Thickness monitors
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In-situ tuning of spacers resistance with ALD chem-1:
Achieved right resistance range for the spacers by varying the ALD process parameters
Total resistance spacers R = R1+R2+R3
Spacer 1 (R1)Spacer 2 (R2)
Spacer 3 (R3)
E.g. if a) I=100µA R= 8Mb) I=50 µA R= 16Mc) I=25 µA R= 32M
Chem ‐1Compositon‐1
Chem ‐1Compositon‐2
R
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Batch processing of the spacers (for statistics):
44 spacers deposited simultaneously Uniform coating appearance on all spacers
Before
After ALD
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Photographs of the spacers
Before ALD
Before ALD
After ALD
• Prior to ALD 5min ultrasonic acetone clean/dry• Uniform and conformal deposition on spacers
R3=2.5mm
R2=1mm
R1=0.5mm
After ALD
Rough surface(contact issue?)
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Spacers resistance range:
Spacer thickness 0.5mm R= 6‐16M Spacer thickness 1mm R= 8‐18M
Spacer thickness 2.5mm R= 14‐55M
Variation may cause by:‐Both side spacer roughness‐Electrical contact (No contact electrode)‐Size variation ‐ALD reactant gradient across length
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0.5mm spacers resistance comparison(glass vs. alumina)
Spacer thickness 0.5mm R= 6‐16M Alumina Spacer thickness 0.5mm R= 7‐34M
• 0.5mm glass spacers are very brittle compare to alumina• Noticed size (height) variation for both glass and alumina• Alumina spacers has non‐uniform cutting
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Follow-up work:
• Fine tuning of spacers resistance• Oreo cookie fabrication • Electrical performance testing • Work on alternative scheme “concept #2” grid spacer• Grid spacer resistance tuning
Question: Grid or Spacers?