radiation damage models: comparison between silvacoand
TRANSCRIPT
Radiationdamagemodels:comparisonbetweenSilvaco andSynopsys
J.Beyera),M.Bomben b),A.Macchioloa),R.Nisiusa)a)MaxPlanckInstitutfĂźrPhysik,MĂźnchenb)LPNHE&UniversitĂŠ ParisDiderot,Paris
20-22.11.201731st RD50Workshop
Introduction&Outline
TCADsimulationbecameanessentialtoolwhendesigningsiliconpixelsensorsandpredictingtheirproperties.
Twomaintoolsareavailable:Silvaco andSynopsysTCADtools.
Aretheycompatiblewithoneanotherindefaultsettingsandsimplequestions?
Docommonradiationdamagemodelsdevelopedwithoneofthem,alsoworkfortheother?
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 2
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 3
SetupforthecomparisonStructureandperspectives
⢠useasimple2DTCADmodeltoreduceanypossibledifferencearisingfromdifferentimplementationsofthestructure
⢠aims:⢠compareCVandIVcurvesfornot-irradiated
caseatvarioustemperatures
⢠compareCV,IVandCCE(MIPbased)afterirradiation⢠comparethemodelswithonesimulator⢠comparethesimulatorswithonemodel
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 4
SetupforthecomparisonRadiationdamagemodels
⢠radiationdamageinTCAD:⢠bulkdamage:
⢠trapscharacterisedbyenergylevel,e/hcross-sectionandintroductionrate
⢠useNewDelhi1 andPerugia20172 irradiationmodelhere
⢠surfacedamage:⢠fixedoxidechargeof1Ă1011cm-2 fornot-irradiatedand
1Ă1012cm-2 forirradiatedsensors⢠nointerfacetraps
⢠radiationlevel:1Ă1015 neqcm-2
⢠temperature:-20oC,0oC,20oC
1 R.Dalal etal.,SimulationofIrradiatedSiDetectors,PoS Vertex2014(2015).
2 F.Moscatelli etal.,EffectsofInterfaceDonorTrapStatesonIsolationPropertiesofDetectorsOperatingatHigh-LuminosityLHC,IEEETrans.onNucl.Science2017
Perugia2017
New
Delhi
EnergylevelsbasedonworkofEremin /Verbitskaya /Li
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 5
SetupforthecomparisonStructureofinterest
highresistivityp-typebulkmaterial(3Ă1012cm-3)
n+ pixelimplant
aluminumcontacttoimplant
SiO2
passivation:
electricalcontactontopofthealuminum
simulatedthicknesses:200Âľm
6
SetupforthecomparisonPhysicsmodels- Synopsys
Mobility:⢠dopingdependentmobilityaccordingtoMasetti model:
⢠highfieldsaturationaccordingtoextendedCanali model(Electricalfieldasdrivingforce):
Recombination:⢠Shokley-Read-Hall(with
doping,temperatureandelectricfield(Hurx lifetime)dependence)
⢠noavalanche
Band-gapnarrowing⢠OldSlotboom
FormulasfromSynopsyssDevicemanual
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 7
SetupforthecomparisonPhysicsmodels- Silvaco
Mobility:⢠Lookuptabledependingonconcentrationandsimplepowerlawtemperaturedependence.⢠Fielddependentmobilitymodel:Caughey andThomasforlowfieldregime;Schwarz andRusse forhighfield
Recombination:⢠ConcentrationdependentSRHrecombinationterm(Roulston,Arora andChamberlain- Lawâ Fossum,Leeand
Lee)
Band-gapnarrowing⢠Klaassen model
Wanttocross-checkphysicsmodelsonebyoneacrossthetwosimulatorsinthefuture!
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 8
FirsttestsNot-irradiatedstructureâ CVcurves
⢠comparingCVcurvesatvarioustemperatures⢠notemperaturedependencebetween
-20oCand20oC
⢠Synopsysvs.Silvaco⢠risingetdge matchesperfectly⢠stepinplateauobservedwithSilvaco
butnotwithSynopsys⢠butagreementintheimportant
(pre)-depletionregionisat%level
0 100 200 300 400 500 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
3010´]-2
[F-2 C
= 0, Synopsys vs. SilvacoFC2V,
Silvaco - T = 20 CSynopsys - T = 20 CSilvaco - T = 0 CSynopsys - T = 0 CSilvaco - T = -20 CSynopsys - T = -20 C
10kHz
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 9
FirsttestsNot-irradiatedstructureâ IVcurves
⢠comparingIVcurvesatdifferenttemperatures
⢠Synopsysvs.Silvaco⢠Synopsyspredictsslightlyincreasing
plateaucurrent⢠differencesbetweenSilvaco and
Synopsysincreasewithincreasingtemperature
⢠bigdifferenceinpredictedplateau⢠whatisthecause?
0 100 200 300 400 500 [V]bias V
16-10
15-10
14-10
13-10
12-10
[A]
leak
I
= 0, Synopsys vs. SilvacoFIV,
Silvaco - T = 20 CSynopsys - T = 20 CSilvaco - T = 0 CSynopsys - T = 0 CSilvaco - T = -20 CSynopsys - T = -20 C
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 10
FirsttestsNot-irradiatedstructureâ IVcurves,closerlook
⢠comparingIVcurvesat20oC,varythecarrierlifetimeĎ
⢠canjointhetwosimulatorsbyartificiallychangingthecarrierlifetime
⢠thedifferencesindefaultĎ betweenSilvacoandSynopsysshouldnâtmatterafterirradiation
0 100 200 300 400 500 [V]bias V
0
0.2
0.4
0.6
0.8
1
1.2
12-10´
[A]
leak
I
Silvaco = 1.0e-5 stSilvaco - = 0.933e-5 stSilvaco - = 1.388e-5 stSilvaco -
tSynopsys - std = 1.0e-5 s tSynopsys - = 1.0e-5 s - no conc. dep.tSynopsys -
IrradiatedStructureâ 1Ă1015neqcm-2
1.comparingPerugiaandNewDelhimodels(Synopsys)
2.comparingSynopsysandSilvaco (Perugiamodel)
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 11
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 12
Comparisonofmodels- SynopsysIrradiatedstructureâ CVcurves
⢠comparingCVcurvesatvarioustemperatures
⢠depletionwithPerugia2017inareasonablerangeof100-200V
⢠smalltemperaturedependence
⢠depletionwithNewDelhiat650->>2000Vbiasvoltage
⢠hugetemperaturedependence⢠expectedgiventheenergylevels
aremuchclosertotheintrinsiclevelthaninPerugiamodel
0 500 1000 1500 2000 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
3010´]-2
[F-2
C
, New Delhi vs. Perugia 20172/cmeq = 1e15 nFC2V,
Perugia, T = 20 CNew Delhi, T = 20 CPerugia, T = 0 CNew Delhi, T = 0 CPerugia, T = -10 CNew Delhi, T = -10 CPerugia, T = -20 CNew Delhi, T = -20 C
10kHz
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 13
Comparisonofmodels- SynopsysIrradiatedstructureâ IVcurves
⢠comparingIVcurvesatvarioustemperatures
⢠significantlyhighercurrentwithNewDelhimodel
⢠NewDelhipredictsincreasingplateaucurrent,shouldbeduetonodepletionyet
⢠differencesbetweenthemodelsgetsmallerforincreasingtemperature
0 200 400 600 800 1000 1200 1400 [V]bias V
13-10
12-10
11-10
10-10
9-10
[A]
leak
I
/cm^2, New Delhi vs. Perugia 2017eq = 1e15 nFIV,
New Delhi, T = 20 CPerugia T = 20 CNew Delhi, T = 0 CPerugia T = 0 CNew Delhi, T = -20 CPerugia T = -20 C
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 14
Comparisonofmodels- SynopsysIrradiatedstructureâ chargecollectionefficiency
⢠comparingCCEatdifferenttemperatures⢠temperaturedependenceforPerugia
modelmainlyintherisingedgeinagreementwithdepletionvoltagevariation
⢠NewDelhimodelseemstoexhibitmoredifferenceforhigherbiasvoltages
⢠comparingNewDelhiandPerugia2017model⢠significantlylesschargecollectedusing
NewDelhimodel⢠plateauisnotyetreachedat1000V⢠reason:bulknotyetdepleted(C-2V) 100 200 300 400 500 600 700 800 900 1000
[V]bias V0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
CC
E [%
]
, New Delhi vs. Perugia 20172/cmeq = 1e15 nFCCE,
New Delhi, T = 20 CPerugia T = 20 CNew Delhi, T = -20 CPerugia T = -20 C
IrradiatedStructureâ 1Ă1015neqcm-2
1.comparingPerugiaandNewDelhimodels(Synopsys)
2.comparingSynopsysandSilvaco (Perugiamodel)
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 15
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 16
ComparisonofSimulators- PerugiaIrradiatedstructureâ CVcurves
⢠compareCVcurvesfrombothsimulatorsatdifferenttemperatures⢠overallgoodagreementbetween
SynopsysandSilvaco⢠differencesincreasingwithincreasing
temperature⢠differenceisbetween10Vâ 30V
0 100 200 300 400 500 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
3010´]-2
[F-2 C
, Synopsys vs. Silvaco, Perugia 20172/cmeq = 1e15 nFC2V,
Synopsys - T = 20 CSilvaco - T = 20 CSynopsys - T = 0 CSilvaco - T = 0 CSynopsys - T = -20 CSilvaco - T = -20 C
10kHz
17
ComparisonofSimulators- PerugiaIrradiatedstructureâ closerlook:CVcurves
Tool Silvaco Synopsys
Vdepl [V] ~240 ~160
0 100 200 300 400 500 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
3010´]-2
[F-2 C
= 1e15, T = 20C, Perugia 2017FC2V,
Silvaco
=1e-5s, no avalanche, reduced physicstSynopsys,
⢠investigatingtheimpactofphysicsmodels
⢠startwithSynopsysreducedphysicsandadaptedcarrierlifetimetomatchIVnot-irr
10kHz
0 100 200 300 400 500 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
3010´]-2
[F-2 C
= 1e15, T = 20C, Perugia 2017FC2V,
Silvaco
=1e-5s, no avalanche, reduced physicstSynopsys,
=1e-5s, no avalanchetSynopsys, Perugia physics,
18
ComparisonofSimulators- PerugiaIrradiatedstructureâ closerlook:CVcurves
Tool Silvaco Synopsys +physics
Vdepl [V] ~240 ~160 ~400V
⢠investigatingtheimpactofphysicsmodels
⢠startwithSynopsysreducedphysicsandadaptedcarrierlifetimetomatchIVnot-irr
⢠useadvancedphysicsmodelsasusedbythePerugiagroup 10kHz
19
ComparisonofSimulators- PerugiaIrradiatedstructureâ closerlook:CVcurves
Tool Silvaco Synopsys +physics +default đ
Vdepl [V] ~240 ~160 ~400V ~220
0 100 200 300 400 500 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
3010´]-2
[F-2 C
= 1e15, T = 20C, Perugia 2017FC2V,
Silvaco
=1e-5s, no avalanche, reduced physicstSynopsys,
=1e-5s, no avalanchetSynopsys, Perugia physics,
, no avalanchetSynopsys, Perugia physics, default
⢠investigatingtheimpactofphysicsmodels
⢠startwithSynopsysreducedphysicsandadaptedcarrierlifetimetomatchIVnot-irr
⢠useadvancedphysicsmodelsasusedbythePerugiagroup
⢠usethedefaultcarrierlifetimeagain10kHz
20
ComparisonofSimulators- PerugiaIrradiatedstructureâ closerlook:CVcurves
Tool Silvaco Synopsys +physics +default đ
Vdepl [V] ~240 ~160 ~400V ~220
0 100 200 300 400 500 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
3010´]-2
[F-2 C
= 1e15, T = 20C, Perugia 2017FC2V,
Silvaco
=1e-5s, no avalanche, reduced physicstSynopsys,
=1e-5s, no avalanchetSynopsys, Perugia physics,
, no avalanchetSynopsys, Perugia physics, default
, avalanche ontSynopsys, Perugia physics, default
⢠investigatingtheimpactofphysicsmodels
⢠startwithSynopsysreducedphysicsandadaptedcarrierlifetimetomatchIVnot-irr
⢠useadvancedphysicsmodelsasusedbythePerugiagroup
⢠usethedefaultcarrierlifetimeagain⢠addavalanche
10kHz
21
ComparisonofSimulators- PerugiaIrradiatedstructureâ closerlook:CVcurves
Tool Silvaco Synopsys +physics +default đ
Vdepl [V] ~240 ~160 ~400V ~220
⢠investigatingtheimpactofphysicsmodels
⢠startwithSynopsysreducedphysicsandadaptedcarrierlifetimetomatchIVnot-irr
⢠useadvancedphysicsmodelsasusedbythePerugiagroup
⢠usethedefaultcarrierlifetimeagain⢠addavalanche⢠comparetodatasimulatedbythePerugia
group
0 100 200 300 400 500 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
3010´]-2
[F-2 C
= 1e15, T = 20C, Perugia 2017FC2V,
Silvaco
=1e-5s, no avalanche, reduced physicstSynopsys,
=1e-5s, no avalanchetSynopsys, Perugia physics,
, no avalanchetSynopsys, Perugia physics, default
, avalanche ontSynopsys, Perugia physics, default
Synopsys, Perugia group data
Cfr.Bomben,28th RD50WS,Torino,June2016
10kHz
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 22
ComparisonofSimulators- PerugiaIrradiatedstructureâ influenceoffrequencyonCV
0 100 200 300 400 500 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
1800
3010´]-2
[F-2 C
, Perugia 20172/cmeq n1510´ = 1F = 0.45 kHz, t = -10 C, nC2V,
= 10 kHz - Synopsysn = 10 kHz - Silvacon = 0.45 kHz - Synopsysn = 0.45 kHz - Silvacon
⢠compareC-2Vwiththedefault10kHzand0.45kHzat-10oCforbothsimulators
⢠sametrendofhigherdepletionvoltageforhigherfrequency
⢠smallerinfluenceonSilvaco simulation⢠overallsmallinfluenceonly
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 23
ComparisonofSimulatorsâ DelhiIrradiatedstructureâ influenceoffrequencyonCV
0 500 1000 1500 2000 2500 3000 [V]bias V
0
200
400
600
800
1000
1200
1400
1600
1800
3010´]-2
[F-2 C
, New Delhi2/cmeq n1510´ = 1F = 0.45 kHz, t = -10 C, nC2V,
= 10 kHz - Synopsysn = 10 kHz - Silvacon = 0.45 kHz - Synopsysn = 0.45 kHz - Silvacon
⢠compareC-2Vwiththedefault10kHzand0.45kHzat-10oCforbothsimulators
⢠sametrendofhigherdepletionvoltageforlowerfrequency(oppositeofPerugia)
⢠smallerinfluenceonSilvaco simulation⢠hugeinfluencebyfrequency
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 24
ComparisonofSimulators- PerugiaIrradiatedstructureâ IVcurves
⢠compareIVcurvesfrombothsimulatorsatdifferenttemperatures⢠smalldifferencebetweenthetwo⢠currentlowerinSynopsys⢠constantratioâ differencecouldbedue
totemperaturescaling
EvaluationofthecurrentrelateddamagerateÎąat20C(norescalefortemperatureneeded)gives:
Tool Silvaco Synopsys
Îą[10-17 A/cm] 4.2Âą0.1 3.5Âą0.10 200 400 600 800 1000
[V]bias V
13-10
12-10
11-10
10-10
9-10
[A]
leak
I
, Synopsys vs Silvaco, Perugia 20172/cmeq = 1e15 nFIV,
Silvaco - T = 20 CSynopsys - T = 20 CSilvaco - T = 0 CSynopsys - T = 0 CSilvaco - T = -20 CSynopsys - T = -20 C
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 25
ComparisonofSimulators- PerugiaIrradiatedstructureâ chargecollectionefficiency
⢠comparechargecollectionefficiencyforPerugiamodelat-20oCand20oC
⢠normalised tocollectedchargeat200V-500V,beforeirradiation
⢠exactsamerisingedge⢠sametemperaturedependence⢠plateauefficiencydifferentby~5%
100 200 300 400 500 600 700 800 900 1000 [V]bias V
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
CC
E [%
]
, Synopsys vs. Silvaco, Perugia 20172/cmeq = 1e15 nFCCE,
Silvaco - T = 20 CSynopsys - T = 20 CSilvaco - T = -20 CSynopsys - T = -20 C
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 26
ComparisonofSimulators- DelhiIrradiatedstructureâ chargecollectionefficiency
100 200 300 400 500 600 700 800 900 1000 [V]bias V
0
0.1
0.2
0.3
0.4
0.5
0.6
CC
E [%
]
, Synopsys vs. Silvaco, New Delhi2/cmeq = 1e15 nFCCE,
Silvaco - T = 20 CSynopsys - T = 20 CSilvaco - T = -20 CSynopsys - T = -20 C
⢠comparechargecollectionefficiencyforNewDelhimodelat-20oCand20oC
⢠bothdonotreachaplateau⢠efficiencydifferentby~14%at1000V
21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 27
Summary
1. ComparingNewDelhiandPerugia2017radiationdamagemodels⢠depletionvoltagemuchhigherandmuchlargertemperaturedependenceusingNewDelhimodel⢠highercurrentsandnosaturationofcurrentupto1500Vgiventhehighdepletionvoltage⢠CCEis~80%forPerugiaand~50%forNewDelhi@1000Vand1x15neq/cm2
2. ComparingSynopsysandSilvaco TCADtools⢠CVagreesdowntothe%levelbeforeirradiation,afterirradiationsmalldifferenceswithPerugiamodel⢠IVdifferentbeforeirradiationduetodifferentĎ value,afterirradiationclosetogether,compatiblewith2016data⢠CCEingoodagreementintherisingedge,plateauslightlydifferent,differenceis5%-14%
3. Outlook:⢠projecthasjuststarted,morecooperationplanned
⢠DEFPIXELSproject,EmbassyofFranceinGermanyandDAADProcope grantcall⢠comparethephysicsmodelsinmoredetailbetweenthetwosimulators⢠morecomplexstructurestospothigherorderdifferences⢠compareavalanchemodels
Thankyouforyourattention!
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21.11.17 J.BeyerandM.Bomben,ComparingSilvacoandSynopsys 28