An On-Line Semiconductor Fabrication Laboratory CourseProvost’s Challenge 2013

James Morris, Electrical & Computer EngineeringLemmy Meekisho, Mechanical & Materials EngineeringRajendra Solanki, PhysicsPeter Phelps, MCECS Computer Action Team

Background

Oregon is the Silicon Forest, which means:Integrated Circuit (IC) Manufacturing• Intel drives Moore’s Law worldwide!

Does PSU support this IC manufacturing?Three lecture courses address IC fab• ECE 416/516 Introduction to IC technologies

(Morris)• MME 410/510 Introduction to MEMS

(Meekisho)• PH 545/546/547 Microelectronic device fabrication

(Solanki)

Semiconductor Fab Lab

But need laboratory reinforcement• Experiential learning component

University semiconductor fabrication labs• They exist, but are not common

Costs:• Capital equipment -> industry donations• Clean room -> µm not nm for education• Consumables -> alumni donations• Space• Power (mostly 3-phase)

On-Line LaboratoryModern equipment• Computer controlled• Networked to central computer• Easy to interface to on-line• Space -> possibly off-campus if on-line

Manpower• Used to need close supervision for safety• No “wet” chemistry now• On-line -> mainly load wafers

Benefits• PSU and regional student• National & international enrollments

Research