Tool Audit Report for ProMOS DV34Remarks

Date: 16 Apr 2013

Tool ID: CS-ASE-02

Serial Number: #0875

Software version: 1.A.1400.1

PC version: TC – 3.5.0.2 IC – 3.5.0.0

Main Unit:

2 X Asyst Isoports with wafer mapper Able to initialize Loadports

1 X Brooks Robot with Aluminum end effectors Able to initialize Robot (SN: 0501-11985)

1 X Brooks Robot controller

2 X Flip stations Able to initialize Flip Stations

Emergency Rinse installed

Aero ionizer bar and controller at the Robot handling area No error observed

ECO unit

2 X ETEL ECO linear unit Initialization of ECO module failed

2 sets of ECO grippers

PSL1 Able to initialize PSL1

1 X Chuck

1 X Spindle unit

1 X Elevating unit

1 X Med 1 dispenser set

1 X Med 2 dispenser set

1 X DI dispenser set

1 X N2 dispenser set

2 X Quad ionizers

Chuck N2 with MFC

Dry N2 with MFC

PSL2 Able to initialize PSL2PSL2 Able to initialize PSL2

1 X Chuck

1 X Spindle unit

1 X Elevating unit

1 X Med 1 dispenser set

1 X Med 2 dispenser set

1 X DI dispenser set

1 X N2 dispenser set

2 X Quad ionizers

Chuck N2 with MFC

Dry N2 with MFC

PSR1 Able to initialize PSR1

1 X Chuck

1 X Spindle unit

1 X Elevating unit

1 X Med 1 dispenser set

1 X Med 2 dispenser set

1 X DI dispenser set

1 X N2 dispenser set

2 X Quad ionizers

Chuck N2 with MFC

Dry N2 with MFC

PSR2 Able to initialize PSR2

1 X Chuck

1 X Spindle unit

1 X Elevating unit

1 X Med 1 dispenser set

1 X Med 2 dispenser set

1 X DI dispenser set

1 X N2 dispenser set

2 X Quad ionizers

Chuck N2 with MFCChuck N2 with MFC

Dry N2 with MFC

CHC1 CHC 1 function not tested. No DIW available

Current Application: PolyEtch at 25°C

1 X Levitronix pump for Main Tank with controller

1 X Inline heater for Main Tank Both Mix and Main Tank Filter housings

1 X Trebor pump for Mix Tank have turned Brownish.

1 X Inline heater Mix Tank

Cooler installed

2 X Buffer Tanks and pumps

2 X Paddle Wheels

No analyzer installed

CHC2 CHC 2 function not tested. No DIW available

Current Application: BHF at 25°C

1 X Levitronix pump for Main Tank with controller

1 X Inline heater for Main Tank

1 X Trebor pump for Mix Tank

1 X Inline heater Mix Tank

Cooler installed

2 X Buffer Tanks and pumps

1 X Paddle Wheel

No analyzer installed

PDB

Power requirements 208VAC with Transformer and Power meter

External Module and Additional materials

1 X Camera rack No power to Camera Module

Overall Summary / Problems encountered

CS-ASE-02 was installed in ProMOS around June 2005.

CHC1 Buffer Tank B and Filter Housings have turned brownish.

Exhaust units need to change as it was catered for both Acid and Alkaline.

Tool not recommended for onsite refurbishment.

Parts needed / Parts to be changed

No Quantity Price

1 4

2 1 set

3 SCR149815 Implementation of DICO2 1

4 2311030-00 4

5 Labor Hours 40

6 200

7 150

8

9

10

11

Total

2310403-00

Part Number Description

no part number

Filter housing

Exhaust unit and tubes

NC Chuck

Decommissioning

Labor Hours

Labor Hours

Installation up to Tier 2

Implementation of SCR149815