progress on nb sn and v si - cernaccelconf.web.cern.ch/accelconf/srf2007/talks/we203_talk.pdf ·...
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Progress onNb3Sn and V3Si
Progress onNb3Sn and V3Si
Beijing, SRF2007 Padova University, Material Science Dept
S.M. Deambrosis*^, G. Keppel*, N. Patron*, N. Pretto,V. Rampazzo*, A. Rossi*^, R.G. Sharma°, S.Stark*, F. Stivanello* and V. Palmieri*^
* INFN - Legnaro National Labs^ Padua University, Science faculty, Material Science Dept
° Nuclear Science Centre, New Delhi
Liquid Sndiffusion
Hybrid Process
Double Furnace System
Samples
Samples
6 GHz
Mechanical Plating
6 GHz
Double Magnetron
Post Magnetron
Samples
6 GHz
NbNb33SnSn
Tin Diffusion Multilayer
Nb3Sn can be obtained using different techniques:
Bronze Process,
Vapor Sn diffusion (Wuppertal),
Liquid Phase DiffusionLiquid Phase Diffusion Annealing
Beijing, SRF2007
Liquid Liquid SnSn DiffusionDiffusion
• No nucleation sites on Nb are required
• Fast growth of Nb3Sn layer
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Linearfeedtrough
Cooling water jacket
Furnace
Liquid Sn
Furnace
Liquid Liquid SnSn DiffusionDiffusion
Beijing, SRF2007
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
HybridHybrid1 step1 step 2 steps2 steps Now:
Cornell Workshop Peking Workshop Peking Workshop
Sn vaporAnnealing
VacuumAnnealing
Sn vapor Annealing+
Vacuum Annealing
Good Tcs, No residual Sn,
No spurious phases
Hybrid ProcessHybrid ProcessNbNb33SnSn NbNb33Sn at LNLSn at LNL--
Beijing, SRF2007
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
• residual Sn• spurious phases
• low Tcs• spurious phases
Hybrid Process: SamplesHybrid Process: Samples
Beijing, SRF2007
Proc T = 975°C, Dipp t = 30’, Ann (Sn) t = 2h, Ann t = 5h
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Angle 2θ (degrees)
Rela
tive
Int
ensi
ty
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Hybrid Process: SamplesHybrid Process: SamplesNbNb33SnSn NbNb33Sn at LNLSn at LNL--
Beijing, SRF2007
T = 975°C, tDipp = 30’, AnnSn t = 2h, AnnV t = 2h
Tc = 16,8 K
ΔTc = 0,16 K
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
“Hybrid” Method for Nb3Sn 6 GHz Cavities
Beijing, SRF2007
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Hybrid Process: 6 GHz cavitiesHybrid Process: 6 GHz cavitiesNbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
DoubleDouble FurnaceFurnace SystemSystem
Beijing, SRF2007
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Annealing Furnace
Dipping Furnace
Built to avoid air contamination of the superconducting thin film while opening the vacuum system
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Mechanical PlatingMechanical Plating
Beijing, SRF2007
Cavity- Mechanical etching- Chemical etching (1:1:1)
Sn pieces- Ultra sonic cleaning
Sn pieces after the treatment
A 6 GHz cavity in the working tumbler
Preliminary preparation:
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Experimentaldesign
Section view of experimental
devicesputtering
system
Balanced Magnetron sources
Target-Substrate
distance = 60 mm
2 inches target diameter
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Beijing, SRF2007
Multilayer: Double MagnetronMultilayer: Double MagnetronNbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Double Magnetron: SamplesDouble Magnetron: Samples
Beijing, SRF2007
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Tann= 600 °CTann= 700 °CTann= 800 °CTann= 930 °C
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Beijing, SRF2007
Double Magnetron: SamplesDouble Magnetron: SamplesNbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
16 17 180,0
0,4
0,8
R (O
hm)
2 A
T (K)
2A R600癈 2A R700癈 2A R800癈 2A R930癈
Tc max = 17.9 K
ΔTc = 0.02 K
RRR = 3.6
Tann= 600 °CTann= 700 °CTann= 800 °CTann= 930 °C
Beijing, SRF2007
NbNb33SnSn NbNb33Sn at LNLSn at LNL--
Double Magnetron: SamplesDouble Magnetron: Samples
Annealing T = 930°C
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Beijing, SRF2007
NbNb33Sn at LNLSn at LNL--NbNb33SnSn
Post Magnetron: 6 GHz CavitiesPost Magnetron: 6 GHz Cavities
Linear Feedthrough
Coil
Window
Water Cooling
Cavity
Cathode Nb(Yellow)/Sn(Green)
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Post Magnetron: 6 Post Magnetron: 6 GHzGHz CavitiesCavities
Beijing, SRF2007
NbNb33Sn at LNLSn at LNL--NbNb33SnSnNbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
NbNb33Sn at LNLSn at LNL--NbNb33SnSn
Beijing, SRF2007
Time of sputtering: 70 minAnnealing Time: 1 h at 850°C
Post Magnetron: 6 Post Magnetron: 6 GHzGHz CavitiesCavities
Nb3Sn multilayer 1: Q-value still lower than for bulk Nb 6 GHz
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Four hypotheses:
1) Sn evaporation due to plasma interaction with the growing film
2) Too thin Film
3) Spurious phases presence (slow annealing ramp time)
4) We suspect the substrate treatment requires even more
attention
Research for the best Chemical Treatment of V
Variables: T, t, p(SiH4)
Beijing, SRF2007
Thermal DiffusionThermal DiffusionVV33SiSi VV33Si at LNLSi at LNL--
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
• SiH4 Decomposition • Si Diffusion• V3Si Nucleation
• Film Growing• Recrystallization• H2 Removal
Beijing, SRF2007
VV33SiSi VV33Si at LNLSi at LNL--
Thermal Diffusion: Experimental Thermal Diffusion: Experimental SetUpSetUp
Nb
V substrates
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Beijing, SRF2007
VV33SiSi VV33Si at LNLSi at LNL--
Thermal Diffusion + Plasma: Experimental Thermal Diffusion + Plasma: Experimental SetUpSetUp
V substrates
Electrode
Lamps on
Plasma on
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Angle (2θ)
Rela
tive
Int
ensi
ty
Process T = 825°C, p (SiH4) = 5,0x 10-4 mbarSilanization t = 10h, Annealing t = 20h
Beijing, SRF2007
Thermal Diffusion: SamplesThermal Diffusion: SamplesVV33SiSi VV33Si at LNLSi at LNL--
NbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
V3Si 5N: 850°C, 1,0x10-3 mbar, 10h+20h
V3Si (Tc = 15,4 K)
V (Tc = 5,0 K)
Beijing, SRF2007
VV33SiSi VV33Si at LNLSi at LNL--
Thermal Diffusion: SamplesThermal Diffusion: SamplesNbNb33SnSn
Liquid Sndiffusion
Double Magnetron
MechanicalPlating
VV33SiSi
Thermal diffusion
ThermalDiffusion
+Plasma
Post Magnetron
Beijing, SRF2007
2) Multilayer:
Double Magnetron: Tc = 17.9 K, ΔTc = 0.02 K
Post Magnetron: the first Nb3Sn 6 GHz cavity has been measured
1) Sn diffusion:
Tc = 16,8 K, ΔTc = 0,16 K,
Nb3Sn 6 GHz cavities has been produced
1) Plasma Silanization:
Tc = 15.7 K, ΔTc = 0.2 K
2) V3Si 6 GHz cavity obtained: Work in progress
NbNb33SnSn
VV33SiSi
SummarySummary