production and regional center at ncu, taiwan
DESCRIPTION
Production and Regional Center at NCU, Taiwan. CMS-PreShower-PRR. W.T. Lin Department of Physics National Central University Chung-Li, Taiwan. Production at ERSO, Hsin-Chu. After the PHOBOS’ sensors production, ERSO’s production line had been re-modified. - PowerPoint PPT PresentationTRANSCRIPT
National Central University
Production and Regional Production and Regional Center at NCU, TaiwanCenter at NCU, Taiwan
W.T. Lin
Department of Physics
National Central University
Chung-Li, Taiwan
CMS-PreShower-PRRCMS-PreShower-PRR
National Central University
Production at ERSO, Hsin-ChuProduction at ERSO, Hsin-Chu
After the PHOBOS’ sensors production, ERSO’s production line had been re-modified.
• Mar. 2000 Integration completed
• Apr. 2000 PE aligner installed
• Jul. 2000 Machine warmed up
• Sep. 2000 R&D runs began
Capacity : 1000 wafers per month
National Central University
PHOBOS vs. CMS PreshowerPHOBOS vs. CMS Preshower
• Tracker vs. Preshower
• 6 masks vs. 4 masks
AC vs. DC, Double metal vs. single metal• Itotal < 5 A @ Vfd
Itotal @100 V < 10 A vs. Itotal@300V < 10 A
• Completed vs. On going project
• 450 sensors vs. 1200 sensors
National Central University
PHOBOS Sensor TechnologyPHOBOS Sensor Technology
Double Metal,Single sided,AC coupled,Polysilicon biased
metal 1metal 1metal 2metal 2
p+ Implant
n+
Polysilicon Drain Resistor
bias bussignal lines
vias
300m 5000kcm
0.2um ONO1.2um ONO
Thin ONO Thick ONO PN junction Polysilicon
National Central University
IV curve of PHOBOS sensorIV curve of PHOBOS sensor
More than 450 wafers have been delivered.
5A
Vfd=60V
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Preshower Detector LayoutPreshower Detector Layout
63 mm
Test key Silicon Detector
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Structural DrawingStructural DrawingPassivation
N+ layer
Metal
P+ strip i-type substrateField oxide
Metal Strip
National Central University
CMS Si-Sensor R&DCMS Si-Sensor R&D
• Depth of p+ and n+ : 3, 5, and 14 m
• Thickness of Al :1.2 m
• Passivation : nitride + oxide 1.2 m
n+
p+
n type (1,1,1)320m
Al Passivation
National Central University
Pilot runs & Pre-productionsPilot runs & Pre-productions
Date batch# wfrs
10/27 90074 12
10/28 90075 12
1/15 90074A 12
3/2 90075A 12
3/16 00017 12
3/2 00018 12
Date batch# wfrs
6/5 cms01 24
6/5 cms02 24
6/15 cms03 24
6/18 cms04 24
6/18 cms05 24
6/15 cms06 24
National Central University
Summary of IV/CV testsSummary of IV/CV tests Date batch# depth of n+ majority I@V>Vfd
6/5 cms01 14 m 50-150 nA/strip
6/5 cms02 50-150 nA/strip
6/15 cms03 5 m 100-150 nA/strip
6/18 cms04 50-100 nA/strip
6/18 cms05 3 m 250-350 nA/strip
6/15 cms06 300-400 nA/strip
• More than one strip have high leakage current that sensor can not be accepted.• 20 accepted sensors : 17 from 03 and 04, 3 from 01 and 02• 23oC, Cstrip=38 - 42 pF, Vfd= 80 - 120 V
National Central University
National Central University
National Central University
National Central University
National Central University
Flow Chart of TestingFlow Chart of Testing1) Sensor received
2) Visual scan
3) Pre-screening : CV, IV
4) sensor dicing
5) Select good sensor for assembly : CV, IV
• Write to the data base during the test
• CV+IV measurement takes about 20 min/wfr
National Central University
Wafer DicingWafer Dicing
45o down viewDiamond saw : 30 m
Spinning : 35K rpm
Speed : 40 mm/sec
210m 300m
35m
Side view IV curves unchanged after dicing
P+/top side
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Production PlansProduction Plans
Milestone of delivery
• Jun 2001 20 pcs
• Dec 2001 130 pcs
• Jun 2002 150 pcs
• Jan 2003 900 pcs
ERSO capacity : 1000 wfrs/month
National Central University
Equip. for Tests & AssemblyEquip. for Tests & Assembly
• Probe card, Switch board, HV isolation
• IV(K236), CV(K590), and HVps(K237)
• Single channel probe station
• Bonding machine (Kulicke Soffa 4123)
• Visual scan station
• Jigs will be ordered from CERN
National Central University
Setup at Regional Lab.Setup at Regional Lab.
IV/CV meters
(NCU and ERSO)
Visual scan and Bondingmachine in 30 m2 clean room
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Time consuming and ManpowerTime consuming and Manpower
• 150 working days for measurement :
(Base on 50% of yield, 20 min/wfrs, deliver 1200 wfrs)
• 2 technicians + 1 Ph.D. student
(extra technician + 2 master students will join when assembly starts)
National Central University
SummarySummary
• IV/CV test benches have been set and tested at NCU and ERSO.
• CRISTAL data base has been set and tested.
• ERSO and Miracle co. are trying to improve the yield