production and application of...
TRANSCRIPT
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Global Focus on Knowledge
Lecture One: The production process of matter, e.g., metals (iron and steel).
Lecture Two: Conjugation (device), e.g., semiconductors and inorganic materials.
Lecture Three: Soft matter, e.g., liquid crystals.Lecture Four: Matter in durable earth (device), e.g.,
fuel cells and biochips.
Production and Application of MatterThe University of Tokyo Hiroshi Komiyama
The figures, photos and moving images with ‡marks attached belong to their copyright holders. Reusing or reproducing them is prohibited unless permission is obtained directly from such copyright holders.
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Matter Structure Velocity Conditions
Mechanism Productivity
Purpose
Process
Inclusion
Chemical composition
Crystal phaseShape
SizeUniformity
Dimension
DiffusionFlow
Phase separation
Phase transition
Self-organization
Thermal conduction
Generation rate
Control
Material
Equipment
Phenomena
Chemical reaction
Life process
Operation
PrinciplePolycrystal
Nucleation
Grain boundary
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Semiconductor devices,optical fibers, catalytic reaction apparatus,composition, structure (shape and size in particular), and velocity.
Phenomenon: flow, diffusion and thermal transfer. (In a previous lecture: nucleation and phase separation)
Introduction
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Characteristics of Semiconductors
Impurity insertion, optical irradiation, and electrical fields become the causes of enormous changes in electrical conductivity.
(Transformation of physical properties to 10 digits.)
Metal:10-6 ~10-4 Ω-cmSemiconductor:10-3~108 Ω-cmInsulator:1010 Ω-cm<
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Vacuum tube Electric condenser
Memory Cells are Made of a Control gate and a binary cell
Q=CV
Mechanical switch
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A Brief History of Semiconductors
Coexistence of vacuum tubes and solid-state devices. Invention of the transistor. (1947)Germanium (1950’s) Silicon and Integrated Circuits (IC). (1960’s)Ultra Large Scale Integration (ULSI). (1970’s-)Giga-scale Integration (GSI). (21C)???Quantum devices???
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Characteristics of Semiconductors
Highly-reliable oxide film on Si. The oxide film on Ge is unstable. (Even soluble in water.) III-V family compound semiconductors (e.g., GaAs) are difficult to work with.III-V family compound semiconductors (e.g., GaAs) are highly luminous.
Si Ge GaAs
Eg(eV) 1.12 0.68 1.42
Transitive Indirect transition
Indirect transition
Direct transition
Electron mobility (cm2/Vs)
1450 3900 9200
Hole mobility (cm2/Vs) 500 1900 320
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The Invention of the Transistor by Bell Labs in 1947
December 16, 1947. Transistor action was observed.
Metallic needle (E)Metallic needle (C)
Electrode (B)
Crystal germanium
Point-contact type transistor
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The Vacuum Tube was Replaced by the TransistorTransistors featured low
power consumption, were highly reliable, and had long life.
ENIAC(Electronic Numerical Integrator and Computer)was the world’s first electric digital computer equipped with 18,000 vacuum tubes. It took three seconds to compute a ten-digit ballistic trajectory.
●Power consumption:140kW.●Life span: several hours.Wikipedia
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The First IC in 1958
Texas Instruments Inc.Dr. Jack Killby’s invention in 2000.He was awarded the Nobel Prize for Physics. Photos courtesy of Texas Instruments
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From Transistors to ICs
Development of the transistor. Radar (military purposes). Telephone exchange operation by AT&T (←mechanical cable type).Use in the transistor radio by Sony.Large computers by IBM.
The transistor was gradually replaced by the IC.
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The Source of High Accumulation
①
Speed-up the transistor by dividing it; the working speed is raised to k~k2 times when the the transistor is divided as small as 1/k.
②
Multifunctionalize the transistor by accumulating multiple functions. Mixed loading of CPU, graphic circuit, and memory.→Achievement of a single-chip computer
①
Economical efficiency. E.g., A lower price-per-bit.
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The First CPU Built by Intel in1971
Busicom Corp. chose Intel to develop an electric calculator-based-CPU. Shima Masatoshi was one of the team members who completed the work.
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MOS Transistor
Metal-Oxide-Semiconductor Structure.Turns on/off the electric current that runs from the source to the drain via the electric voltage applied on the gate.
GateDrainSource
Metal SurfaceOxide
n-type n-type
Formation of channels
Electric current
P-type silicon
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Transistor Condenser
ControlWriting
Reading
A Memory Cell is Made Up of a Control Gate and a Binary Cell
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Structure of a DRAM
Transistor
Condenser
Memory cell (1 bit)
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Structure of a DRAM and its Operating Mechanism (Animation)
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Transistor 1/kConstant
electric fieldConstant voltage
Supply voltage 1/k 11Electric field 11 k
Working speed k k2
Energy consumption 1/k2 k
Major purposesLow energy consumption mobile device
High speed processing
CPU
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Some Transistors Are Already Smaller Than a Virus!
‡
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1 giga memory 109
=(3×104)×
(3×104)
1 cm×1cm (chip)=0.3 micron×0.3 micron
(device)
Necessity for Nanotechnology
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Wiring is Difficult (Multi- layering and Minute Division)
1.31.3--mm Generationmm GenerationInterconnects (Al)Interconnects (Al)
6565--nm Generationnm GenerationInterconnects (Cu)Interconnects (Cu)
1/10 Shrunk down by 101/10 Shrunk down by 10--15 years15 years
‡
‡source: Prof. Takayuki Ohba, Institute of Engineering Innovation, School of Engineering, University of Tokyo
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Making High-purity Silicon
①
Reduction of SiO2 at 1,200℃. SiO2 + C → Si(purity 98%)
+ CO2↑
②
Trichlorosilane production. (Liquid chemical is used.)
Si + 3HCl → SiHCl3 + H2↑
①
Purification process by distillation. SiHCl3(98%) → SiHCl3(99.99999999%)
②
Composition of solid state high-purity Si through CVD process.SiHCl3 + H2 → Si(high-purity) + 3HCl
‡
Source: Sumco Corporationhttp://www.sumcosi.com/laboratory/laboratory1.html
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Silicon Purification ProcessImpurity-rich silicon decomposed to the high-purity silicon.
Quartz cylinder
FilterPolycrystal
Reacting furnaceDistillation columnFluid bed
gas
Cooling
Si shaft
Katsuro Sugawara, Hiroshi Fukuda (1995) “Super LSI Processing”
Baifukan, P55 Chart4.27
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High-purity Polycrystal Silicon Production (Animation)
Electric current
Silicon core
Polycrystal silicon
Insulator
SiHCl3 +H2
Adiabatic wall
Figure removed due tocopyright restrictions
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Monocrystal Si Ingot Pulling
Czochralski (CZ) method①
Dissolution of high-purity polycrystal silicon at high temperature in the crucible.
②
Pull the crystal while a tiny seed crystal is welded together with molten silicon to obtain precipitation.
CZ furnace: structure drawing
Seed crystalSilicon monocrystal
Quartz crucibleCooling chamber
Heat insulation columnHeater
Graphite crucibleCrucible supporterSpill tray
Electrode
Sumco Corporationhttp://www.sumcosi.com/laboratory/laboratory1.html
‡
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Production of Monocrystal Silicon Wafers (Animation)
Komatsu Electric Metals Co., Ltd.
Figure removed due tocopyright restrictions
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The Basics of Fine Processing
Pattern formation (lithography). ①
Resist-dyeing.
②
Ultraviolet Ray exposure and development.③
Plasma etching.
④
Resist removal.
Thin-membrane formation.Thin-membrane formation via PVD and CVD.Impurity distribution via ion implantation.
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Spin-coating of ResistPhotoresist
Silicon base
High-speed s
A change in interference colors is observed as the resist becomes thinner. Starting from the spin speed of 300 per-revolution, then continue until 3,000 spins per-revolution. Photo taken at Takeda Advanced Intellectual Building Super Clean Room,
The University of Tokyo.
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Ultraviolet Ray Exposure
Photo mask
Silicon base
Ultraviolet radiation
Ultraviolet irradiation is carried out after alignment.
Photo taken at Takeda Advanced Intellectual Building Super Clean Room, The University of Tokyo.
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Development
Developing solution
Photo taken at Takeda Advanced Intellectual Building Super Clean Room, The University of Tokyo.
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Plasma Etching
+ + ++ +
++++
+
+ + + ++
-
- - --
----
- - --
- -
Two types of gasses (digging gas and sidewall protecting gas) are supplied alternatively; causing a color change in the plasma.
Photo taken at Takeda Advanced Intellectual Building Super Clean Room, The University of Tokyo.
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Cold base
HeaterHot baseHeater
Sublimation→Atom→Solid condensation Gas→Attachment→Surface reaction
Thin-membrane Forming ProcessPhysical Vapor Deposition Chemical Vapor Deposition
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Heater
SiH4 +N2
Silicon wafer
Quartz container Wafer
Mass Production CVD Apparatus
FlowFlow
Why is a film formed even though the mixture of gas does not flow in?
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Optical Fiber ProductionThe maximal fractional index distribution toward the center of an optical fiber is compressed in the radial direction.Control the distribution of germanium and silicon.Produce the distribution via the huge Kiritanpo-(tube-shaped, half-mashed rice cake)-shaped precursor.Melt and pull to make the optical fiber thinner. (Spinning) High-purity→non-relay transmission distance.
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Optical Fiber Production Process
The Furukawa Electric Co., Ltd.
‡
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Composition of a Precursor Having an Optical Density Spectrum
The Furukawa Electric Co., Ltd.
‡
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Spinning Process
The Furukawa Electric Co., Ltd.
‡
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Matter Structure Velocity Conditions
Mechanism Productivity
Purpose
Process
Inclusion
Chemical composition
Crystal phaseShape
SizeUniformity
Dimension
DiffusionFlow
Phase separation
Phase transition
Self-organization
Thermal conduction
Generation rate
Control
Material
Equipment
Phenomena
Chemical reaction
Life process
Operation
PrinciplePolycrystal
Nucleation
Grain boundary
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Development (Flow and Diffusion)
Monocrystal pullingUsing a seed crystal.
No nucleation occurs.
Complete Temperature control.
Makes the flow calm.
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Flow: Laminar Flow and Turbulent Flow
Laminar flowThe streamline can be followed.
Turbulent flowThe flow has an eddy current.The streamline cannot be followed.
μρdv
=Red : characteristics lengthv :flow rater :flow densitym :viscosity coefficient
Figure removed due tocopyright restrictions
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Adding Milk After Stirring Slowly
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Adding Milk After Stirring Intensely
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The Mix of Turbulent Flows: Blends in Well
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Laminar Flow: Does Not Blend In
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A smudge appearing in the ink-dripped water.
A lump of sugar left without stirring.
Sugar sprinkled on ice.E.g., frozen strawberry.
Getting a Sense of DiffusionLiquid phase diffusion and vapor phase diffusion.
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Honeycomb-type Catalytic Reactor
Eminox Continuously Regenerating Trap (CRT®) Systemhttp://www.eminox.com/products/crt.shtml
‡
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An automobile exhaust purification catalyst.Honeycomb type. Traveling inside the five millimeter tube by the speed of one hundred meters per-second.Every atom is in contact with the catalysts on the wall.
Small talk:The impurity atoms contained in a glass of pure water: There is one impurity atom (electron) for every nanodot.
A Vapor Phase Performs Fast Diffusion
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Six billion collisions per-second at every 0.1 micron with a traveling speed of four hundred meters per-second.
Air (vapor)
Water (liquid)Traveling with the speed of four hundred meters per-second; however,in a congested state.
Ice (solid)Oscillation occurs, but atoms are basically fixed.
The uniform state obtained by the exchange of atoms.
The Identity of Diffusion
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mm orderHuge amount of gas is flowing.
µm orderHuge amount of gas is flowing.
nm orderThe molecules diffuse the catalytic layers.
Honeycomb-type monolith catalysts
Catalytic layer
Catalytic particle
Decomposition via catalysts.
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Heater
SiH4 +N2
Silicon wafer
Quartz container
Diffusion is Necessary for Film Production
x
Wafer
0
W
The mixture of gas is carried into the apparatus by flow. Diffusion further carries the gas onto the wafer surface.
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Cross Section of a Device
Katsuro Sugawara, Hiroshi Fukuda (1995) “Super LSI Processing”
Baifukan, Chart4.6
‡
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Step CoverageThe gaps can be filled out if the step coverage conditions of
the oxide film formation (CVD method) is adjusted.
The analysis results by simulations.
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Composition of Optical Fiber Precursor
High-speed reaction generates particles: diffusion control
Tetrachlorosilane is found in the core.Germaniumtetrachlorid is found outside.
Water and oxygen exist outside.
SiO2 exists in the core and GeO2
exists outside.
A quadruplet tube.
SiCl4 +2H2 O → SiO2 +4HClGeCl4 +2H2 O →GeO2 +4HCl
Achieved preform
(madreporite)
Low temperature
High temperature
Adhesion of
Multi-tube discharge
Water
oxygen flame
‡Hiroshi Komiyama, Kensaku Mizoguchi 1994 “New System Chemical Engineering Functional Materials Process Engineering”, Ohmsha, Ltd., P103, Chart5・13
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Vapor phase Film formation apparatus
Honeycomb catalyst
Utilization Control
Optical fiber(particle formation by high-speed reaction)
Liquid phase Multi-layer film forming(high-speed pulling)
Solid phase DopingAkashi fiber (alloying)
Optical fiber(smooth distribution)
High-purification: gas or liquid phase
Liquid phase reaction(Stir: diffusion at atomic level)
Examples of Diffusion Utilization and Control
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QrLFQvdzdTr πρκπ 22 =⎟
⎠⎞
⎜⎝⎛ +
QvdzdT
LFr Q
ρκ +=
2
Controlled by pulling speed and temperature distribution.
Thermal conduction Latent heat =
Emissionr, L:silicon crystal radius, lengthk:heat conductivityv:pulling speedr:silicon densityQ:latent heat of freezingFQ :heat radiation flux from silico
The heat balance of an ingot.
Control of Wafer Diameter by Heat Balance
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What Are the Practical Uses of a 400mm Wafer?
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Examples of Semiconductor Production Cost
①
Plant and equipment investment required to manufacture (monthly production 10 thousand wafers)
Assume an investment of 150 billion yen and a plan for ten years production (1.2 million wafers).
150 billion yen÷1.2 million wafers=125,000 yen/wafer
②
Process cost(per single wafer) 200 yen/process×600 process=120,000 yen/wafer:CPU 200 yen/process×200 process=
40,000 yen/wafer:DRAM
③
Wafer cost 30,000 yen/wafer
④
Chip unit price(1,000 chips/wafer) 275,000 yen/wafer=275 yen/chip:CPU 195,000 yen/wafer=195 yen/chip:DRAM
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RF Devices: Mu-chip
The mu-chip was inserted in the tickets used by the Aichi International Exposition during printing.
Mu-chip
‡「μ-Chip」
Hitachi, Ltd.
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SiP Devices
MPEG2 Encoder
64Mbit FCRAM×32bit Dual port
800mW/256mm2
SiP
‡FUJITSUhttp://pr.fujitsu.com/jp/news/2001/11/20.htm
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Three-dimensional Packaging Technology
Si chip (Al wiring and Cu bump forming) Cu penetrating electrode
Oxide film
Encapsulation resin
Si interposer (Al wiring and Cu bump forming) Penetrating electrode layered structure cross section
Electrode pitch:
Thickness of chip:
Penetrating electrode cross section
Thickness 50μm chip x 4 layers ‡ASET
http://www.aset.or.jp/p
ress_release/si_20020319/si_200203
19.htm
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Mechanism and Structure of LEDs
Light emission
Electrode
Resin package(lens)
Semiconductor chip
ElectronPositive hole
The electrons and positive hole do not pile up on each other.
Ther
mal
equ
ilibr
ium
stat
e n-type p-type
Light emission
Electron and a positive hole combine.
+ー
Supe
rimpo
sed
volta
ge
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Studies of LEDs at University Facilities
GaN thin film deposited using the metal-organic vapor phase epitaxial growth (CVD method).
Deposition of electrode material (PVD method).
The emission of light by a completed blue LED.
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Metal-organic Vapor-phase Epitaxial Growth
Sapphire base
Low temperature GaN
n-GaN
p-GaN
InGaNLuminous layer
Photo taken at Nakano and Sugiyama Laboratory, Department of Electrical Engineering, The University of Tokyo.
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Blue Luminescence Measurement
Sapphire base
n-GaN
p-GaN
p Electrode
n Electrode
Needle
Photo taken at Takeda Advanced Intellectual Building, Electric Engineering Laboratory,The University of Tokyo.
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Experiments Dealing With Future Technology
E.g., light and electrons, quantum devices, and self-organization.
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(1) Si clean surface forming. (3) Ge and Si quantum dot growth.
(2) Ultra-thin Si oxide film growth.
1250ºC heating Oxidation : 600ºC,10min2x10-4Pa (O2 )
Ge deposition : 450-500 ºC1.8-2.5 thickness atomic layer.
Ge, SiGe and Si quantum dot
Ultra-thin Si oxide film(~0.3nm)
Si clean surface
Independent Growth Method for Quantum Dots in Ge and Si
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Si is vapor despositioned by 4 atomic layers at 500 ℃.
Independent Growing Ge and Si Quantum Dots on Ultra-thin Si Oxide Film
Ge is vapor despositioned by 2.5 atomic layers at 500 ℃.
Size:~5nm
Surface density:1012cm-2
<
15nm 15nm
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Ge/SiO2 /Si(001)
Transmission Electron Microscope Images of Ge Quantum Dots
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Ge Energy Band Gap Increase by Quantum Size Effect
5nm
5.6nm
5nm
2nm
Energy band gap
3.0
2.5
2.0
1.5
1.0
0.5
Ene
rgy
gap
(eV
)
765432Crystal size (nm)Dot size d (nm)
Ene
rgy
band
gap
(eV
)
Energy band gap
Ge quantum dot
2
22ghE E
dμ≈ +
Eg :band gap in bulkd : dot sizem : reduced mass of carrierh : Planck constant
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Detection of Strong Light Emission From the Ge Quantum Dot Sample
The wavelength range for optical communication (~1.5 mm)
Development to the Si photonics.
1.2x10-8
1.0
0.8
0.6
0.4
0.2
0.0
Inte
nsity
(a.u
.)
1.11.00.90.8Energy (eV)
900℃・HeCd laser・4K・Annealed for 30min in O2
as grown
700℃
800℃
Si-TO
Annealing temperature
Photon
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Device (principle, physical properties, process, and applications)
Phenomenon:Flow:laminar flow and turbulent flow.Diffusion:vapor phase, liquid phase, and solid phase.Heat transfer:conduction(thermal conductivity×temperature gradient)Comparison: diffusion (diffusion coefficient×concentration gradient)
Radiation and convection currentChemical reaction and self-organization
Pull toward good fortune: (transistor and nanocarbon)
In the next lecture: (Soft matter and self-organization)
Summary of Lecture Two: Production and Application