product / process change information 1. pci basic data …1].pdf · 2.2.1 process owner guy cauquil...
TRANSCRIPT
PRODUCT / PROCESS CHANGE INFORMATION
1. PCI basic data
1.1 Company STMicroelectronics International N.V
1.2 PCI No. CRP/18/10710
1.3 Title of PCI ALTERNATIVE METHODOLOGY FOR BIAS & LINEARITY STUDIES IN SEMICONDUCTORINDUSTRY
1.4 Product Category ALL automotive products
1.5 Issue date 2018-05-10
2. PCI Team
2.1 Contact supplier
2.1.1 Name ROBERTSON HEATHER
2.1.2 Phone +1 8475853058
2.1.3 Email [email protected]
2.2 Change responsibility
2.2.1 Process Owner Guy CAUQUIL
2.1.2 Corporate Quality Manager Roberto LISSONI
3. Change
3.1 Category 3.2 Type of change 3.3 Manufacturing Location
Parametric Test Modification of testing method or program withno change of test coverage and no change ofspec limit
The improved methodology is ready to beapplied on all ST manufacturing Front Endplants.
4. Description of change
Old New
4.1 Description To conduct bias & linearity studies, AIAG MSAmanual rely on a statistical approach based ont-test statistical value, which provides a criteriato judge if the difference in bias or linearityresponse is statistically different from zerocompared to the repeatability of the metrologysystem.Bias & Linearity studies based on Tteststatistics approach conducted at several STFront-End manufacturing plants, involvingeither identical or different metrologytechniques tested over their operating range,all exhibit some bias error and nonlinearbehavior.A clear picture on the consequences of thisestablished situation versus the accuracyrequirement has been highlighted by Sematechconsortium few years ago and is summarizedin the Sematech internal document in:http://sematech.org/docubase/document/Semiconductor_Industry_MSA_Practices.pdf
An alternative methodology to outdoingclassical statistical approach as described inthe AIAG MSA Manual - which appears to be nomore suitable to the semiconductor industries- is provided by rather focusing the statisticalstudies on:- The compliance of the bias to the metrologysupplier accuracy- The stability of the linearity response of thesystem over time- The consistency of the linearity responsewithin equipment fleetThe method which is described in the STCompany Specification “MEASURING SYSTEMANALYSIS (M.S.A.)”, DMS #0151977 is basedon a statistical analysis to verify the goodcorrelation (R2) between the values given bythe metrology systems over their operationrange. The method also allow to verify that thelevel of misalignment between metrologysystems does not impact the quality decisionjudgment.
4.2 Anticipated Impact on form,fit,function, quality, reliability orprocessability?
form: no changes in the productfit: no changes in the productfunction: no changes in the productreliability or processability: no changes in the product
5. Reason / motivation for change
5.1 Motivation Modern wafer fab’s requirements have now even surpassed the expectations in the AIAG MSAmanual. To fulfill the aggressive requirement of semiconductor product specifications, themetrology repeatability and stability improved very drastically. Two main aspects can behighlighted:- In many cases, tolerance of reference standards are now much larger than the precision of thesemiconductor metrology equipment themselves. This inevitably leads to the conclusion thatstatistically it exists a significant Bias even if this Bias is included in the tolerance provided bythe best in-class worldwide certified instrument. Being this bias within the potential values, it isfully acceptable.- In the field of semiconductor metrology, metrology systems are used indifferently to measureall parameters in the manufacturing line coming from multiple products and equipmentmonitoring. They have to cover a very wide measurement range not only one productspecifications. Linearity as well as uniformity (change in repeatability over operating range) orconsistency (change in repeatability over time) actually varies significantly over the operatingrange of our metrology equipment. This is totally in compliance with process controlrequirements over the operating range. Still, due to the excellent repeatability of our metrologysystem, which is inherent to our industry requirements, this inevitably leads to the conclusionthat the linearity error of our measurement systems is statistically significantly different fromzero when compared to their repeatability. It appeared that the statistical approach for Bias andlinearity studies as described in AIAG is not adapted to FE metrology semiconductorequipment due to their excellent repeatability.Do not consider following Chapter 8 "Qualification / Validation": Please refer to ATTACHMENTto this notification for all details regarding qualification strategy (10710 PRODUCT - PROCESSCHANGE NOTIFICATION_rev3.docx).
5.2 Customer Benefit QUALITY IMPROVEMENT
6. Marking of parts / traceability of change
6.1 Description ALL automotive products in the list
7. Timing / schedule
7.1 Date of qualification results 2018-01-31
7.2 Intended start of delivery 2018-06-18
7.3 Qualification sample available? Not Applicable
8. Qualification / Validation
8.1 Description
8.2 Qualification report andqualification results
In progress IssueDate
9. Attachments (additional documentations)
10710 Public product.pdf10710 PRODUCT - PROCESS CHANGE NOTIFICATION_rev3.docx
10. Affected parts
10. 1 Current 10.2 New (if applicable)
10.1.1 Customer Part No 10.1.2 Supplier Part No 10.1.2 Supplier Part No
BAR46AFILM BAR46AFILM
BAT20JFILM BAT20JFILM
BAT54AWFILMY
BAT54CWFILMY
BAT54FILMY
BAT54JFILM BAT54JFILM
BAT54SFILMY
BAT54WFILMY
BU931P BU931P
BU931T BU931T
BU941ZPFI
BU941ZT BU941ZT
BUB941ZTT4 BUB941ZTT4
D44H11 D44H11
DALC208SC6 DALC208SC6
DALC208SC6Y
DVIULC6-4SC6Y
E-L9338MD
E-L9338MD/TR
E-L9637D
E-L9637D013TR
E-L9823
E-L9823013TR
E-L9826TR
E-L9935
E-L9935013TR
E-TDA7375AV
E-TDA7375V
E-TDA7377
E-TDA7377A
E-TDA7379
E-TDA7385
E-TDA7386
E-TDA7391PDTR
E-TDA7396
E-TDA7560
ESDA14V2LY
ESDA14V2SC6 ESDA14V2SC6
ESDA25LY
ESDA25SC6Y
ESDA5V3LY
ESDA5V3SC6Y
ESDA6V1-4BC6 ESDA6V1-4BC6
ESDA6V1-5SC6Y
ESDA6V1L ESDA6V1L
ESDA6V1LY
ESDA6V1SC6Y
ESDALC5-1BT2Y
ESDAVLC8-1BT2Y
ESDAXLC6-1BT2
ESDAXLC6-1BT2Y
ESDCAN01-2BLY
ESDCAN02-2BWY
ESDCAN03-2BWY
ESDCAN05-2BWY
ESDCAN06-2BWY
ESDCAN24-2BLY
ESDLIN03-1BWY
ESDLIN1524BJ
ESDLIN1524BJ-HQ
FDA450LV
HDMIULC6-4SC6
HDMIULC6-4SC6Y
HSP051-4M10
HSP061-4M10Y
L4949EDTR-E
L4949EPTR-E
L4953G
L4979D013TR
L4979DTR-E
L4979MD
L4988DTR
L4989D013TR
L4993DTR
L4993MDTR
L4995AJTR
L4995AKTR
L4995J
L4995JTR
L4995K
L4995KTR
L4995RJTR
L4995RKTR
L5150BNTR
L5150CJTR
L5150CSTR
L5150GJTR
L5300GJ
L5956PDTR
L5957
L5957PDTR
L5958SMTR
L5959
L9301-TR
L9333MD
L9333MD-TR
L9339
L9339-TR
L9349TR-LF
L9374TRLF
L93PI
L9454
L9455
L9524C
L9613B
L9613B013TR
L9615D013TR
L9616
L9616-TR
L9651
L9651-TR
L9733CNTR
L9733XP
L9733XPTR
L9779WD-SPI
L9781TR
L9822EPD013TR
L9825
L9825TR
L9848TR
L9903TR
L9904TR
L9911F
L9911I
L9911P
L9911V
L9914A
L9942XP1TR
L9958SBTR
L9960
L9960T-TR
L9960TR
L9997ND013TR
L99ASC03
L99ASC03GTR
L99DZ100GPTR
L99DZ100GTR
L99DZ120TR
L99DZ80EPTR
L99DZ81EPTR
L99H01QFTR
L99MC6GJTR
L99MC6TR
L99MM70XPTR
L99PM62GXPTR
L99PM72GXPTR
LDP01-26AY
LDP01-28AY
LDP01-30AY
LDP01-33AY
LDP01-35AY
LDP01-39AY
LDP01-42AY
LDP01-56AY
LDP01-68AY
LDP01-82AY
M24128-DRDW8TP/K
M24128-DRMN3TP/K
M24128-DRMN8TP/K
M24256-DRDW8TP/K
M24256-DRMF3TG/K
M24256-DRMN3TP/K
M24256-DRMN8TP/K
M24512-DRDW3TP/K
M24512-DRDW8TP/K
M24512-DRMF3TG/K
M24512-DRMN3TP/K
M24C02-DRDW3TP/K
M24C02-DRDW8TP/K
M24C02-DRMN3TP/K
M24C04-DRDW3TP/K
M24C04-DRMF3TG/K
M24C04-DRMN3TP/K
M24C08-DRMF3TG/K
M24C08-DRMN3TP/K
M24C16-DRDW3TP/K
M24C16-DRDW8TP/K
M24C16-DRMN3TP/K
M24C16-DRMN8TP/K
M24C32-DRDW3TP/K
M24C32-DRDW8TP/K
M24C32-DRMN3TP/K
M24C64-DRDW3TP/K
M24C64-DRDW8TP/K
M24C64-DRMF3TG/K
M24C64-DRMN3TP/K
M93C46-RMN3TP/K
M93C56-RMN3TP/K
M93C66-RMN3TP/K
M93C76-RMN3TP/K
M93C86-RMN3TP/K
M95020-DRDW3TP/K
M95020-DRMN3TP/K
M95040-DRDW3TP/K
M95040-DRMN3TP/K
M95080-DRDW3TP/K
M95080-DRMF3TG/K
M95080-DRMN3TP/K
M95128-DRDW3TP/K
M95128-DRMF3TG/K
M95128-DRMN3TP/K
M95128-DWDW4TP/K
M95160-DRDW3TP/K
M95160-DRMN3TP/K
M95256-DRDW3TP/K
M95256-DRMF3TG/K
M95256-DRMN3TP/K
M95256-DWDW4TP/K
M95320-DRDW3TP/K
M95320-DRMN3TP/K
M95512-DRDW3TP/K
M95512-DRMN3TP/K
M95512-DWDW4TP/K
M95640-DRDW3TP/K
M95640-DRMF3TG/K
M95640-DRMN3TP/K
M95640-DWDW4TP/K
M95M01-DWDW3TP/K
M95M01-DWMN3TP/K
M95M02-DWMN3TP/K
MJB44H11T4-A
MJD31CT4-A
MJD32CT4-A
MJD44H11T4-A
SM15T10AY
SM15T15CAY
SM15T18AY
SM15T200A SM15T200A
SM15T22AY
SM15T24AY
SM15T27AY
SM15T30AY
SM15T30CAY
SM15T33AY
SM15T33CAY
SM15T36AY
SM15T36CAY
SM15T39AY
SM15T39CA SM15T39CA
SM15T39CAY
SM15T47CAY
SM15T56CAY
SM15T68AY
SM15T68CAY
SM15T6V8CAY
SM15T75AY
SM15T82CAY
SM30T10CAY
SM30T12AY
SM30T15AY
SM30T18CAY
SM30T19AY
SM30T21AY
SM30T21CAY
SM30T23AY
SM30T26CAY
SM30T28AY
SM30T28CAY
SM30T30AY
SM30T30CAY
SM30T33AY
SM30T33CAY
SM30T35AY
SM30T35CAY
SM30T39AY
SM30T39CAY
SM30T42AY
SM30T47AY
SM30T47CAY
SM30T56AY
SM30T56CAY
SM30T6.8AY
SM30T6.8CAY
SM30T7.5CAY
SM4T12CAY
SM4T14CAY
SM4T15CAY
SM4T18AY
SM4T18CAY
SM4T21AY
SM4T21CAY
SM4T26AY
SM4T26CAY
SM4T28AY
SM4T28CAY
SM4T30AY
SM4T33CAY
SM4T35AY
SM4T35CAY
SM4T39AY
SM4T39CAY
SM4T47AY
SM4T47CAY
SM4T50CAY
SM4T56AY
SM4T56CAY
SM4T68AY
SM4T68CAY
SM4T6V7AY
SM4T6V7CAY
SM4T7V6CAY
SM4T82CAY
SM6T12AY
SM6T15AY
SM6T15CAY
SM6T16V5CAY
SM6T18CAY
SM6T200A SM6T200A
SM6T22AY
SM6T22CAY
SM6T24AY
SM6T250CAY
SM6T27A SM6T27A
SM6T27AY
SM6T27CAY
SM6T30AY
SM6T30CAY
SM6T33AY
SM6T33CA SM6T33CA
SM6T33CAY
SM6T36AY
SM6T36CAY
SM6T39AY
SM6T39CA SM6T39CA
SM6T39CAY
SM6T42AY
SM6T42CAY
SM6T47CAY
SM6T56AY
SM6T56CAY
SM6T68AY
SM6T6V8AY
SM6T6V8CAY
SM6T75AY
SM6T75CAY
SM6T7V5AY
SM6T82AY
SM6T82CAY
SMA6J188CA-TR
SMA6J5.0CA-TR
SMA6J70CA-TR
SMA6T12AY
SMA6T14AY
SMA6T18AY
SMA6T22AY
SMA6T22CAY
SMA6T28AY
SMA6T28CAY
SMA6T30CAY
SMA6T33CAY
SMA6T39AY
SMA6T39CAY
SMA6T47AY
SMA6T47CAY
SMA6T56AY
SMA6T56CAY
SMA6T68AY
SMA6T68CAY
SMA6T6V7AY
SMA6T82AY
SMAJ15A-TR SMAJ15A-TR
SMAJ170A-TR SMAJ170A-TR
SMAJ188CA-TR SMAJ188CA-TR
SMAJ24CA-TR
SMAJ30CA-TR SMAJ30CA-TR
SMAJ33A-TR SMAJ33A-TR
SMAJ40CA-TR SMAJ40CA-TR
SMBJ26A-TR SMBJ26A-TR
SMBJ33A-TR SMBJ33A-TR
SMCJ24CA-TR SMCJ24CA-TR
SPC560B40L5C6E0X
SPC560B50L3B4E0X
SPC560B50L5C6E0Y
SPC560B54L5B6E0Y
SPC560C50L3C6E0X
SPC560P40L3CEFAR
SPC560P40L3CEFBR
SPC560P50L3BEABR
SPC560P50L3CEFAR
SPC560P50L5CEFAR
SPC563M64L5COAR
SPC564A80B4CFAR
SPC570S50E1CEFAR
ST10F276-6QR3
ST25R3914-AQFT
ST25R3915-AQFT
STA1052Z2
STB100NF04T4
STB120N4F6
STB120N4LF6
STB155N3LH6
STB18NF25
STB18NF30
STB200NF03T4 STB200NF03T4
STB21NK50Z
STB25NF06AG
STB25NF06LAG
STB270N4F3
STB27NM60ND
STB30NF20L
STB36NM60N
STB36NM60ND
STB37N60DM2AG
STB43N65M5
STB45N40DM2AG
STB45N50DM2AG
STB45N60DM2AG
STB46N30M5
STB46NF30
STB60NF06LT4 STB60NF06LT4
STB60NF06T4 STB60NF06T4
STB75NF75LT4 STB75NF75LT4
STB76NF75
STB7ANM60N
STB80NF03L-04T4 STB80NF03L-04T4
STB80NF55-06-1
STB9NK80Z
STBR3012WY
STD100N3LF3
STD105N10F7AG
STD10NF30
STD120N4F6
STD120N4LF6
STD14NM50N
STD155N3LH6
STD15N50M2AG
STD15P6F6AG
STD1802T4-A
STD18NF03L
STD18NF25
STD20NF06LT4 STD20NF06LT4
STD20NF06T4 STD20NF06T4
STD25NF10LA
STD25NF20
STD26NF10
STD28P3LLH6AG
STD30NF06LT4 STD30NF06LT4
STD30NF06T4 STD30NF06T4
STD35NF06LT4 STD35NF06LT4
STD44N4LF6
STD45P4LLF6AG
STD47N10F7AG
STD4NK100Z
STD5NM50T4 STD5NM50T4
STD60NF55LAT4
STD65N55F3
STD65N55LF3
STD7ANM60N
STD85N10F7AG
STD86N3LH5
STD8NF25
STD901T
STD95N4F3
STD95N4LF3
STD95P3LLH6AG
STD96N3LLH6
STD9NM50N
STGB10NB40LZT4 STGB10NB40LZT4
STGB18N40LZT4
STGB20N40LZ
STGB20N45LZAG
STGB25N40LZAG
STGD10HF60KD
STGD18N40LZT4
STGD19N40LZ
STGD20N40LZ
STGD20N45LZAG
STGD25N40LZAG
STGWA40M120DF3
STH145N8F7-2AG
STH185N10F3-2
STH185N10F3-6
STH270N8F7-6
STH275N8F7-2AG
STH275N8F7-6AG
STH300NH02L-6
STH315N10F7-2
STH315N10F7-6
STH410N4F7-2AG
STH410N4F7-6AG
STI270N4F3
STI55NF03L
STI76NF75
STL10N3LLH5
STL115N10F7AG
STL120N4F6AG
STL120N4LF6AG
STL135N8F7AG
STL140N4F7AG
STL15DN4F5
STL190N4F7AG
STL20NF06LAG
STL40DN3LLH5
STL45N10F7AG
STL58N3LLH5
STL66DN3LLH5
STL66N3LLH5
STL70N4LLF5
STL7DN6LF3
STL7N6LF3
STL8DN6LF3
STL8N10LF3
STL8N6LF3
STL92N10F7AG
STM8AF52AATCY
STM8AF6223PCAU
STM8AF6223PCX
STM8AF6246TCSSSX
STM8AF6248TAY
STM8AF6266TCX
STM8AF6268TCY
STM8AF62A6UCY
STM8AL3166UCY
STN3NF06L STN3NF06L
STN4NF03L STN4NF03L
STN4NF06L
STP100NF04 STP100NF04
STP141NF55
STP150NF04
STP315N10F7
STP36NF06L STP36NF06L
STP45N40DM2AG
STP45N60DM2AG
STP46NF30
STP76NF75
STP80NF55-08 STP80NF55-08
STP85NF55 STP85NF55
STP85NF55L STP85NF55L
STPA001
STPA003OD-4WX
STPA008-4WX
STPA008-QIX
STPS0540ZY
STPS10170CG-TR
STPS1045BY-TR
STPS1150AY
STPS140AY
STPS140UY
STPS140ZY
STPS1545G-TR STPS1545G-TR
STPS15H100CB-TR STPS15H100CB-TR
STPS15H100CBY-TR
STPS15L45CB-TR STPS15L45CB-TR
STPS15L45CBY-TR
STPS15L60CB-TR STPS15L60CB-TR
STPS160AY
STPS160UY
STPS1H100AY
STPS1H100UY
STPS1L40AY
STPS1L40ZFY
STPS1L60ZFY
STPS200170TV1Y
STPS20H100CGY-TR
STPS20L60CGY-TR
STPS2150A STPS2150A
STPS2200U
STPS2545CGY-TR
STPS2H100AY
STPS2H100UY
STPS2H100ZFY
STPS2L40ZFY
STPS2L60AY
STPS2L60ZFY
STPS30150CG-TR STPS30150CG-TR
STPS3045CG-TR STPS3045CG-TR
STPS3045CGY-TR
STPS3045DJFY-TR
STPS30H60CGY-TR
STPS30H60CKY-TR
STPS30L30CG-TR STPS30L30CG-TR
STPS3150U STPS3150U
STPS3150UY
STPS340B-TR STPS340B-TR
STPS340U STPS340U
STPS340UY
STPS360AFY
STPS3H100AFY
STPS3H100UFY
STPS3L40SY
STPS3L60SY
STPS3L60UY
STPS4045CWY
STPS40L45CG-TR STPS40L45CG-TR
STPS41H100CGY-TR
STPS41H100CTY
STPS5H100AFY
STPS5H100B-TR STPS5H100B-TR
STPS5H100BY-TR
STPS5L60SY
STPS640CBY-TR
STPS660DDJFY-TR
STPS8H100G-TR STPS8H100G-TR
STPS8L30BY-TR
STPSC10H065DY
STPSC10H065GY-TR
STPSC10H12DY
STPSC10H12GY-TR
STPSC12065DY
STPSC15H12DY
STPSC20065DY
STPSC20065WY
STPSC20H065CWY
STPSC20H12GY-TR
STS5DNF60L
STS5NF60L STS5NF60L
STTH1002CBY-TR
STTH1002CGY-TR
STTH1003SBY-TR
STTH102AY
STTH110UFY
STTH112UFY
STTH1502DI
STTH1512GY-TR
STTH15RQ06DY
STTH15RQ06GY-TR
STTH1602CT STTH1602CT
STTH16L06CG-TR STTH16L06CG-TR
STTH16L06CGY-TR
STTH16L06CTY
STTH1L06A STTH1L06A
STTH1L06UFY
STTH1R04AY
STTH1R06UFY
STTH208UFY
STTH2L06UFY
STTH2R02A
STTH2R02AFY
STTH2R02UY
STTH2R06UFY
STTH3010GY-TR
STTH30L06GY-TR
STTH30L06WY
STTH30R04DY
STTH30RQ06GY-TR
STTH30ST06WY
STTH310S STTH310S
STTH310UFY
STTH3L06UFY
STTH3R02AFY
STTH3R06UFY
STTH4R02SY
STTH4R02UY
STTH5R06BY-TR
STTH5R06GY-TR
STTH602CBY-TR
STTH802BY-TR
STTH8L02DDJFY-TR
STV270N4F3
STW19NM60N
STW22N95K5
STW36NM60ND
STW45N60DM2AG
STW46NF30
STW47NM60ND
STW50N65DM2AG
STW58N60DM2AG
STW62N65M5
STW65N65DM2AG
STW72N60DM2AG
STW75NF30
STW78N65M5
T3035H-6I
T835-600B-TR T835-600B-TR
TDA2005R
TDA7303
TDA7376B
TDA7376PDTR
TDA7387EP
TDA7388
TDA7388A
TDA7391
TDA7391LV
TDA7391LVPDTR
TDA7391PDUTR
TDA7415CB
TDA7418
TDA7418TR
TDA7419TR
TDA7561
TDA75610S-48X
TDA75610S-8ZT
TDA75610SEP-HLX
TDA75612LV-48X
TDA75613LV
TDA7562
TDA7562B
TDA7563A
TDA7563AH
TDA7563B
TDA7563BH
TDA7569BLV
TDA7575B
TDA7575BPDTR
TDA7576B
TDA7577BLV
TDA7705
TDA7716N
TDA7718B
TDA7718N
TDA7719
TDA7802
TDA7802SMTR
TDA7850
TDA7850A
TDA7850H
TDA7851A
TDA7851F
TDA7868
TIP107 TIP107
TMMBAT46FILM TMMBAT46FILM
TN2015H-6FP
TN2015H-6T
TN5050H-12WY
TS820-600FP
TYN612MFP TYN612MFP
TYN612MRG TYN612MRG
USBLC6-2SC6 USBLC6-2SC6
USBLC6-2SC6Y
USBLC6-4SC6Y
VB325SP-E
VB525SP-E
VB525SPTR-E
VN1160C-1-E
VN1160TR-E
VN380SPTR-E
VN5010AK-E
VN5010AKTR-E
VN5012AKTR-E
VN5016AJ-E
VN5016AJTR-E
VN5025AJ-E
VN5025AJTR-E
VN5050AJ-E
VN5050AJTR-E
VN5050JTR-E
VN5160S-E
VN5160STR-E
VN5770AKP-E
VN5770AKPTR-E
VN5772AK-E
VN5772AKTR-E
VN5E006ASPTR-E
VN5E010AHTR-E
VN5E010MHTR-E
VN5E016AHTR-E
VN5E016MH-E
VN5E025AJTR-E
VN5E025MJTR-E
VN5E050AJ-E
VN5E050AJTR-E
VN5E050J-E
VN5E050JTR-E
VN5E050MJTR-E
VN5E160AS-E
VN5E160ASOTR-E
VN5E160ASTR-E
VN5E160MS-E
VN5E160MSTR-E
VN5E160S-E
VN5E160STR-E
VN5R003H-E
VN5R003HTR-E
VN5T006ASPTR-E
VN5T016AHTR-E
VN610SP-E
VN610SPTR-E
VN7003AHTR
VN7003ALHTR
VN7004CHTR
VN7004CLHTR
VN7007AHTR
VN7007ALHTR
VN7010AJTR
VN7016AJTR
VN7020AJTR
VN7040AJTR
VN7040ASTR
VN7050AJTR
VN7050ASTR
VN7140AJTR
VN7140ASTR
VN750B5-E
VN750B5TR-E
VN750PEP-E
VN750PS-E
VN750PSTR-E
VN750PT-E
VN750PTTR-E
VN750SMPTR-E
VN770KP-E
VN772KP-E
VN800PS-E
VN800PSTR-E
VN820B5-E
VN820B5TR-E
VN820PT-E
VN820SP-E
VN820SPTR-E
VN920B5-E
VN920B5HTR-E
VN920B5TR-E
VN920SP-E
VN920SPTR-E
VNB10N07-E
VNB10N07TR-E
VNB14NV04-E
VNB14NV04TR-E
VNB20N07-E
VNB20N07TR-E
VNB35N07-E
VNB35N07TR-E
VNB35NV04-E
VNB35NV04TR-E
VND10N06-E
VND10N06TR-E
VND14NV04-1-E
VND14NV04-E
VND14NV04TR-E
VND1NV04-1-E
VND1NV04-E
VND1NV04TR-E
VND3NV04-E
VND3NV04TR-E
VND5012AK-E
VND5012AKTR-E
VND5025AK-E
VND5025AKTR-E
VND5050AJ-E
VND5050AJTR-E
VND5050AK-E
VND5050AKTR-E
VND5050J-E
VND5050JTR-E
VND5050KTR-E
VND5160AJ-E
VND5160AJTR-E
VND5160J-E
VND5160JTR-E
VND5E004A30TR-E
VND5E006ASPTR-E
VND5E012MYTR-E
VND5E025AKTR-E
VND5E025ASTR-E
VND5E025BKTR-E
VND5E025MKTR-E
VND5E050ACKTR-E
VND5E050KTR-E
VND5E160AJ-E
VND5E160AJTR-E
VND5E160ASOTR-E
VND5E160JTR-E
VND5E160MJTR-E
VND5N07-1-E
VND5N07-E
VND5N07TR-E
VND5T016ASPTR-E
VND5T035AKTR-E
VND5T035LAKTR-E
VND5T100AJTR-E
VND5T100LAJTR-E
VND600SP-E
VND600SPTR-E
VND7004AYTR
VND7020AJTR
VND7030AJTR
VND7040AJTR
VND7050AJ12TR
VND7050AJTR
VND7140AJ12TR
VND7140AJTR
VND7N04TR-E
VND7NV04-E
VND7NV04TR-E
VND830ETR-E
VND830P-E
VND830PTR-E
VND830SP-E
VND830SPTR-E
VNH3SP30TR-E
VNH5019ATR-E
VNH5050A-E
VNH5050ATR-E
VNH5180A-E
VNH5180ATR-E
VNH7013XPTR-E
VNH7070ASTR
VNH7070BASTR
VNH7100ASTR
VNH7100BASTR
VNH9013YTR
VNL5030JTR-E
VNL5030S5TR-E
VNL5050N3TR-E
VNL5050S5-E
VNL5050S5TR-E
VNL5090N3TR-E
VNL5090S5TR-E
VNL5160N3TR-E
VNL5160S5TR-E
VNL5300S5-E
VNL5300S5TR-E
VNLD5090-E
VNLD5090TR-E
VNLD5160TR-E
VNLD5300-E
VNLD5300TR-E
VNN1NV04PTR-E
VNN3NV04PTR-E
VNN7NV04PTR-E
VNP10N06-E
VNP10N07-E
VNP14NV04-E
VNP20N07-E
VNP35N07-E
VNP35NV04-E
VNP5N07-E
VNQ500NTR-E
VNQ500PEPTR-E
VNQ5027AK-E
VNQ5027AKTR-E
VNQ5050AK-E
VNQ5050AKTR-E
VNQ5050K-E
VNQ5050KTR-E
VNQ5160K-E
VNQ5160KTR-E
VNQ5E050AKTR-E
VNQ5E160AK-E
VNQ5E160AKTR-E
VNQ5E160KTR-E
VNQ5E250AJ-E
VNQ660SP-E
VNQ660SPTR-E
VNQ690SP-E
VNQ690SPTR-E
VNQ7140AJTR
VNQ810P-E
VNQ810PTR-E
VNQ830P-E
VNS14NV04PTR-E
VNS1NV04DP-E
VNS1NV04DPTR-E
VNS1NV04P-E
VNS1NV04PTR-E
VNS3NV04DP-E
VNS3NV04DPTR-E
VNS3NV04PTR-E
VNS7NV04PTR-E
VNV20N07TR-E
VNV35N07TR-E
VPS2535HTR
X0202MN 5BA4 X0202MN 5BA4
FDA801-VYT
STPSC12065GY-TR
L9916
IMPORTANT NOTICE – PLEASE READ CAREFULLY
STMicroelectronics NV and its subsidiaries (“ST”) reserve the right to make changes, corrections, enhancements, modifications, and improvements to ST products and/or to this document at any time without notice. Purchasers should obtain the latest relevant information on ST products before placing orders. ST products are sold pursuant to ST’s terms and conditions of sale in place at the time of order acknowledgement.
Purchasers are solely responsible for the choice, selection, and use of ST products and ST assumes no liability for application assistance or the design of Purchasers’ products.
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Information in this document supersedes and replaces information previously supplied in any prior versions of this document.
© 2016 STMicroelectronics – All rights reserved
PRODUCT / PROCESS CHANGE NOTIFICATION
ALTERNATIVE METHODOLOGY FOR BIAS & LINEARITY STUDIES IN SEMICONDUCTOR INDUSTRY What is the change? Current condition: To conduct bias & linearity studies, AIAG MSA manual rely on a statistical approach based on ttest statistical value, which provides a criteria to judge if the difference in bias or linearity response is statistically different from zero compared to the repeatability of the metrology system. Bias & Linearity studies based on Ttest statistics approach conducted at several ST Front-End manufacturing plants, involving either identical or different metrology techniques tested over their operating range, all exhibit some bias error and nonlinear behavior. A clear picture on the consequences of this established situation versus the accuracy requirement has been highlighted by Sematech consortium few years ago and is summarized in the Sematech internal document in: http://sematech.org/docubase/document/Semiconductor_Industry_MSA_Practices.pdf
New condition: An alternative methodology to outdoing classical statistical approach as described in the AIAG MSA Manual - which appears to be no more suitable to the semiconductor industries - is provided by rather focusing the statistical studies on: The compliance of the bias to the metrology supplier accuracy The stability of the linearity response of the system over time The consistency of the linearity response within equipment fleet
The method which is described in the ST Company Specification “MEASURING SYSTEM ANALYSIS (M.S.A.)”, DMS #0151977 is based on a statistical analysis to verify the good correlation (R2) between the values given by the metrology systems over their operation range. The method also allow to verify that the level of misalignment between metrology systems does not impact the quality decision judgment. Why? Modern wafer fab’s requirements have now even surpassed the expectations in the AIAG MSA manual. To fulfill the aggressive requirement of semiconductor product specifications, the metrology repeatability and stability improved very drastically. Two main aspects can be highlighted: In many cases, tolerance of reference standards are now much larger than the precision of the semiconductor
metrology equipment themselves. This inevitably leads to the conclusion that statistically it exists a significant Bias even if this Bias is included in the tolerance provided by the best in-class worldwide certified instrument. Being this bias within the potential values, it is fully acceptable. This is illustrated in the figure below in a very schematic way.
Bias becomes statistically significant compare to precision for semiconductor industries
In the field of semiconductor metrology, metrology systems are used indifferently to measure all parameters in the manufacturing line coming from multiple products and equipment monitoring. They have to cover a very wide measurement range not only one product specifications. Linearity as well as uniformity (change in repeatability over operating range) or consistency (change in repeatability over time) actually varies significantly over the operating range of our metrology equipment. This is totally in compliance with process control requirements over the operating range (ex: use of ellipsometry module for thin films with tinny specifications and use of reflectometry for thicker films with larger process tolerance). Still, due to the excellent repeatability of our metrology system, which is inherent to our industry requirements, this inevitably leads to the conclusion that the linearity error of our measurement systems is statistically significantly different from zero when compared to their repeatability. It appeared that the statistical approach for Bias and linearity studies as described in AIAG is not adapted to FE metrology semiconductor equipment due to their excellent repeatability.
This is illustrated below with the linearity test for overlay optical microscope metrology system.
Linearity test of an overlay metrology system.
Reference values are defined from NIST traceable standards. When? The improved methodology is ready to be applied on all ST manufacturing Front End plants. How has the change been qualified? Bias and linearity are unavoidable criteria to be controlled as part of a metrology system management and, in the semiconductor fabs, those characteristics are actually effectively controlled but in a different method than the one proposed by the AIAG. Indeed what is known to be more important for most internal semiconductor metrology needs is the stability and consistency/matching of the results given by the metrology systems over their operating range. The change consists in establishing an engineering approach for Bias and linearity study leaning on the wide-spread monitoring of matching and stability critical metrology characteristics in order to provide an effective way to control bias and linearity.
Consistency/Matching: The difference in readings between equipment used to measure the same characteristics in the semiconductor fab is of critical importance. This is controlled through measurement of same samples over the entire fleet. The verification sample set generally also contains several samples covering the operating range. The consistency of the linearity response and the mismatching (Bias) from
multiple metrology systems within the fleet can then be followed and compared against established (supplier) and/or process required specifications.
Stability: This characteristic is controlled very closely through regular measurement of the same monitoring check samples on the metrology equipment and through SPC control charts management. The check samples used to monitor the metrology equipment stability generally include several samples covering the operating range so that the linearity signature of the metrology equipment can be verified and maintain constant over time.
What is the impact of the change? - Form: No change on product - Fit: No change on product - Function: No change on product - Reliability, or Processability: NA (Not applicable). How can the change be seen? No change on product
Risk assessment The new method developed by our Company adapts to the semiconductor environment the requirements included into the AIAG MSA core tool for specific cases where classical statistical approach is not fulfilled, even in front of state-of-the-art measurement methodologies. No risks associated have identified, instead, we are proposing an improving methodology to assess bias and linearity otherwise not possible (based on classical statistical approach), proven by the assessment described in the document.
Public Products List
Publict Products are off the shelf products. They are not dedicated to specific customers, they are available through ST Sales team,
or Distributors, and visible on ST.com
PCI Title : ALTERNATIVE METHODOLOGY FOR BIAS & LINEARITY STUDIES IN SEMICONDUCTOR INDUSTRY
PCI Reference : CRP/18/10710
Subject : Public Products List
Dear Customer,
Please find below the Standard Public Products List impacted by the change.
SPC560B50L3B4E0X SPC564L70L3BCOSR SPC560P40L3CEFAR
SPC564L60L5BCOQR M95040-DRMN3TP/K M24C16-DRDW8TP/K
M24C16-DRMN3TP/K SPC56EL60L3CBFSY M24128-DRDW8TP/K
SPC564B64L7C9E0X M24C32-DRDW3TP/K SPC564B70L7B9ECX
SPC560D40L3B3E0X M95160-DRMN3TP/K SPC560B50L5B4E0X
SPC560D40L1C4E0X SPC56EC64B3C9EEY SPC560P34L1CEFAY
SPC560B64L7C6E0Y SPC560D30L3B3E0X M95128-DRDW3TP/K
SPC560C50L3C6E0X M24C64-DRMN3TP/K SPC560B64L7B6E0X
SPC560B54L5B6E0X SPC560B60L7B6E0X SPC560D30L1B4E0X
M95320-DRDW3TP/K M95020-DRDW3TP/K SPC560P50L5CEFAR
SPC560B64L3B6E0X M95080-DRMF3TG/K SPC560P50L5BEAAY
M24256-DRMN3TP/K SPC564B74L7B8E0X SPC560B60L5B6E0Y
SPC560B50L5B6E0X M95640-DRMF3TG/K SPC560B60L3C6E0Y
M95320-DWDW4TP/K SPC560B60L5B6E0X SPC560B50L5C6E0Y
SPC560B40L3B4E0X M24C04-DRMN3TP/K M95160-DWDW4TP/K
SPC56AP60L3BEAAR ST72F321AR9TCTXS M24C16-DRMN8TP/K
SPC560P50L3CEFAY M95128-DRMN3TP/K M24512-DRMF3TG/K
SPC560D40L3C4E0Y SPC564B74L7B9ECX M95128-DWDW4TP/K
M24C64-DRMF3TG/K SPC560P40L3CEFBR SPC56EL60L5CCOSR
SPC564L60L3BCOQR M95320-DRMN3TP/K SPC56EL60L3CBFSR
SPC560P44L3CEFAR SPC560B64L5C6E0Y M24256-DRDW8TP/K
M95256-DRDW3TP/K SPC560B50L3C6E0X M95020-DRMN3TP/K
M24C64-DRDW3TP/K M95M01-DWDW4TP/K STM8AF6246TCSSSX
SPC560P44L3CEFAY M24128-DRMN8TP/K SPC560P54L5CEAAR
M95040-DWDW4TP/K M95640-DWDW4TP/K STGYA120M65DF2AG
M95256-DWDW4TP/K SPC564B64L7B8E0X SPC560B64L5C6E0X
SPC56EC74L7C9ECY SPC570S50E1CEFAR SPC560D40L1B4E0X
M24256-DRMF3TG/K SPC560P34L1CEFAR SPC560B54L3C6E0X
STPS41H100CGY-TR SPC560B54L5B6E0Y SPC560B50L3B6E0X
SPC560B40L3B6E0Y M24C08-DRMF3TG/K SPC560P50L5BEFAR
SPC56EL60L5CBFQR M24C02-DRMN3TP/K STTH8L02DDJFY-TR
SPC560B60L7C6E0X M24C64-DRDW8TP/K SPC560C50L3B4E0X
SPC564L70L5BBOSR SPC560B54L5C6E0X SPC560P50L3BEABY
SPC560B40L3C4E0X SPC560P50L3CEFBR SPC56EL70L5CBFSR
SPC56EL70L5CBFSY M24128-DRMN3TP/K SPC560D40L3B4E0X
SPC560B60L7B6E0Y M24512-DRDW8TP/K SPC560P54L3BEABR
Public Products List
SPC560P50L3BEABR SPC560B50L3C6E0Y M95512-DWDW4TP/K
M95M02-DWMN3TP/K M95640-DRDW3TP/K SPC564B64L7C8E0X
M24C32-DRMN3TP/K SPC560P60L3BEABR SPC570S50E1CEFAY
M24C32-DRDW8TP/K SPC564L54L3BCFQR M95040-DRDW3TP/K
SPC56EL70L5CBOSY SPC56AP60L5CEFAY ST72F324BK6TCTXS
SPC560B60L5C6E0X SPC560B50L1B4E0X M95256-DRMF3TG/K
SPC560D40L1B3E0X M95080-DRDW3TP/K SPC560P40L1CEFAR
M95128-DRMF3TG/K SPC560B50L1C6E0Y SPC560B40L5C6E0X
M24C04-DRMF3TG/K M95160-DRDW3TP/K SPC564B64L7C800Y
M95512-DRMN3TP/K SPC560B40L3B6E0X M24C02-DRDW3TP/K
SPC560P54L5BEAAR SPC560P60L5CEAAR M24C02-DRDW8TP/K
SPC560P44L3BEAAY SPC560P50L3CEFAR M95256-DRMN3TP/K
M95M01-DWMN3TP/K SPC560P40L3BEAAY M24C16-DRDW3TP/K
M24512-DRDW3TP/K STM8AF6246TDSSSX SPC560B54L3B4E0X
SPC564L54L3BCOQR M24C08-DRMN3TP/K M24256-DRMN8TP/K
SPC560B50L5C6E0X M24512-DRMN3TP/K M24C04-DRDW3TP/K
SPC560B40L3C6E0X M95640-DRMN3TP/K SPC560B54L3B6E0X
STPS15H100CBY-TR M95M01-DWDW3TP/K SPC560B60L3C6E0X
SPC560B64L7C6E0X SPC560P40L1CEFBR SPC560C50L3C6E0Y
M95512-DRDW3TP/K M95080-DRMN3TP/K SPC564L60L5CCFQR
STD20NF06LT4 VND5004BSP30TR-E VND5160AJTR-E
ESDA6V1-5SC6Y VN5E050J-E STPSC10H12GY-TR
L99DZ81EPTR L5150BNTR VND7N04TR-E
VND7004AYTR ESDLIN1524BJ-HQ VND5T035AKTR-E
VN750SMPTR-E VN5E160MS-E VN5772AKTR-E
TDA7718B TDA7851L STB75NF75LT4
VN772KPTR-E ESDA6V1LY VND10N06-E
VND10N06TR-E STD1HN60K3 STGD18N40LZT4
LDP01-35AY STTH4R02SY STPS1545G-TR
VNV35N07-E SMAJ30CA-TR STPS4045CWY
SM30T7.5CAY STM8AL3166UCY SM6T75AY
VND600SPTR-E STM8AF6246UCY STTH1R06UFY
STD25NF20 STGB10NB40LZT4 SM4T7V6CAY
SM4T6V7AY STD28P3LLH6AG VNP5N07-E
STPS3150U ESDA6V1L SMA6T33CAY
ST10F273M-4T3 VN5E016MH-E VNH5050A-E
STM8AF6248TAY VND5E160MJTR-E L9911V
SM4T35AY BAT54JFILM STTH1512GY-TR
VN800PTTR-E STA1085EOA3TR L9960
STD14NM50N TDA7851FH-QIX TDA7567PDTR
VND5T100AJ-E VND7012AYTR STA1080EOA
VN5E010AH-E STB120N4F6 L4949EPTR-E
STA1095EOA E-L9637D VNQ830PTR-E
SM4T18AY L9658TR SM30T42AY
M93C76-RMN3TP/K STL10N3LLH5 FDA4100LV
VN800PS-E L99DZ80EPTR STH185N10F3-6
VNB10N07TR-E STD18NF03L ESDALC5-1BT2Y
SMA6T68CAY STH315N10F7-6 VNQ500PEP-E
L9733XPTR STTH1003SBY-TR HSP051-4M10
VN610SPTR-E SM6T39CAY SM6T39AY
Public Products List
L99ASC03TR L9733CNTR TDA7569BDLVPDTR
ESDA14V2SC6 STM8AL3148TCX L9779WD-SPI-TR
VND5025AK-E VN7050AJTR STM8AF6266UCX
SM4T30AY E-L9637D013TR VN7020AJTR
STB155N3LH6 STPS340UY VND5E004A30TR-E
STGD19N40LZ SM6T82AY SMAJ24CA-TR
L99PM72GXPTR VNQ5027AKTR-E ESDCAN03-2BWY
L9349TR-LF STD9NM50N F272-BAR-P-TX
STB85NF55LT4 STD105N10F7AG VNB10N07-E
STM8AF6286TAY STTH2R02A VND7020AJTR
L9524C-TR SMA6T56AY L9959S-TR-D
STPS360AFY STD95N4LF3 STPSC10H065GY-TR
VNL5300S5TR-E SMA6T47AY STM8AF6268TCY
SMA6T6V7AY VNLD5300-E L9951TR
TDA75612LV-48X TDA7418TR SM4T21AY
VNB35NV04TR-E STPS5H100B-TR VN5E050AJ-E
VN5E050AJTR-E VG6640AB1M SM6T68CAY
VND5E025AYTR-E VN5050JTR-E VN7040AJTR
HDMIULC6-4SC6 VNS3NV04DP-E VN771KPTR-E
STPS2H100UY STPS2H100AY VND5E160JTR-E
STTH30ST06WY VN5010AKTR-E VNS7NV04P-E
VNQ830P-E VND5050AK-E STB80NF03L-04T4
STPS3L60SY VN920B5-E STPA008-4WX
VNQ600AP-E ST72F361K9TCS VND5050KTR-E
TDA7801PDTR TDA75610LV VN5E160S-E
STPS3150UY STPS1045BY-TR STPS15H100CB-TR
TDA7391LVPDTR SMA6T22AY VND3NV04TR-E
STPS140AY VND5T100LASTR-E SM30T33CAY
SM4T15CAY STA1090HOA VNQ660SP-E
TDA7562 STL15DN4F5 VNP35N07-E
VND5T016ASP-E STN3NF06L VN820SP-E
STM8AF6288TDX STL8N10LF3 VNP10N06-E
L9651 VN820B5TR-E STGB20N40LZ
STM8AF6286TAX VNL5050S5TR-E SM15T36AY
STB170NF04 VNQ690SP-E L9805E
STA1085EOA3 VN5050AJTR-E VNL5160N3TR-E
FDA801B-VYT VN750PT-E VN7007ALHTR
VN5E050MJTR-E VNB14NV04TR-E TN5050H-12WY
VNS14NV04PTR-E STP100NF04 VN5E160AS-E
TDA7303 STL8N6LF3 STL135N8F7AG
VNB20N07TR-E VN5050J-E VND7030AJTR
TDA7387EP E-L9823013TR VN7016AJTR
VND5004ATR-E STD65N55LF3 L9777B13TR
STPSC20065WY SM30T6.8CAY SM4T6V7CAY
STPS3H100UFY L99DZ70XPTR L9680TR
STW78N65M5 VN5770AKP-E SM30T28CAY
L9177TR STPS5L60SY L5150GJTR
VG6640AB1M/1 SM30T12AY L4993MDTR
L5150CJTR STW75NF30 SMA6T39CAY
L99CL01XPTR M93C86-RMN3TP/K STP80NF55-08
Public Products List
STTH1602CT SMA6T14AY STTH30RQ06WY
VND5E050ACJTR-E STPA002OD-4WX SM30T56CAY
VNB20N07-E L9524C STB80NF55-06T
STPS140UY VND810PEP-E VN7140AJTR
STPS1L60ZFY STPS2545CTY STM8AF52AATAX
VN5772AK-E VND5E160ASOTR-E STPS1L40ZFY
STTH30RQ06DY VN750PTTR-E SM6T24AY
STH315N10F7-2 SMA6T39AY L99H01QFTR
STPS2L60AY VN5R003H-E VND5012AK-E
SM4T50CAY L9825TR STPS8L30BY-TR
VN5770AKPTR-E STPS660DDJFY-TR VND7050AJTR
STA680 ESDCAN06-2BWY STPS3045CGY-TR
STPS1L40AY VNQ5E050K-E VNL5030S5TR-E
TDA7851F VNL5160S5-E VND5E025MK-E
TDA7564B STM8AF6269TCX ESDA14V2LY
STB45NF06T4 STPS1H100AY STH275N8F7-2AG
SM6T7V5AY SM6T27CAY VNQ5E160AK-E
LDP01-39AY VNP10N07-E TDA7802PDTR
STW62N65M5 VNS1NV04PTR-E TMMBAT46FILM
MJD44H11T4-A L4995RJTR VB525SP-E
TDA7563B VNQ5E250AJTR-E L9301-TR
L99ASC03 STPS5H100BY-TR L4979D013TR
L99MD02XPTR VND600SP-E STM8AF6246UCX
VN7140AS12TR STF40NF06 STB21NK50Z
VND5N07TR-E STPSC15H12DY SM15T30CAY
VNQ600PTR-E BAR46AFILM STPS140ZY
VN5E050JTR-E VNL5160S5TR-E TDA7850H
ST25R3914-AQFT VN5E025AJTR-E L93PI
VNQ5160K-E VNQ6040STR-E STPS15L45CB-TR
TDA7715LV VND830SPTR-E TDA7562B
L9942XP1TR TDA75610LVPDTR DALC208SC6
SM15T75AY SMBJ26A-TR TDA7419TR
STGD3NB60SDT4 L9333MD STPS30H60CGY-TR
ESDA6V1-4BC6 STTH2L06UFY VND5N07-1-E
STTH1210DY L9904TR STPS15L45CBY-TR
E-L9758BBTR STB45N60DM2AG L9959T-TR-D
STA1085EOA VN5E025MJ-E VND5050AKTR-E
VNH5200ASTR-E STTH4R02UY SM15T27AY
STB60NF06LT4 L9733XP ST72F361AR9TAXS
VNS1NV04DP-E L99PM60JTR STD44N4LF6
TIP107 STPS30150CG-TR SM15T56CAY
L9911P STD25NF10LA VND5E160J-E
L5150CSTR VN5016AJ-E SPC563M64L5COAR
M93C46-RMN3TP/K STH270N8F7-6 VNP20N07-E
SM4T56CAY STPS2045CGY-TR STM8AF52A8TDX
BU941ZPFI VN7004CHTR SM15T36CAY
VNP8TD8 VND5012AKTR-E STL58N3LLH5
VN5E010AHTR-E SMAJ15A-TR SMA6J5.0CA-TR
STTH112UFY L9960T-TR VND5E008AYTR-E
VNQ5050K-E TDA7576B VN5012AKTR-E
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L9474N STTH15RQ06GY-TR STTH3R06UFY
LDP01-42AY TDA7569BLV ESDCAN24-2BLY
VND7NV04TR-E L9362013TR STTH3010WY
LDP01-82AY STD26NF10 VND14NV04-E
VNB14NV04-E STP150NF04 LDP01-68AY
STS5DNF60L VNQ5E160AKTR-E STTH5R06BY-TR
SM30T15AY SM4T35CAY VB526SPTR-E
USBLC6-2SC6Y L5300AH7TR L9779WD-TR
STD95N4F3 SM6T22CAY STPS10170CG-TR
STA1080EOAS1 VB525SPTR-E STB150NF55T4
VNN7NV04PTR-E ST10F276-6QR3 VNQ690SPTR-E
L9339-TR L5963Q-V0T STD96N3LLH6
VND5E004ATR-E SPC564A80B4CFAR VND14NV04TR-E
VNH7070BASTR MJB44H11T4-A BAT54AWFILMY
STTH16L06CTY VND5E006ASPTR-E VND5E025BK-E
VN920SPTR-E STP95N4F3 L5956PDTR
STPSC12065DY SM30T19AY VND5E050KTR-E
E-TDA7386 VNQ5050AK-E STD120N4F6
STP80NS04ZB VNH3SP30TR-E STTH16L06CGY-TR
VN7007AHTR STL120N4F6AG VN5E006ASPTR-E
BAT54FILMY VND7140AJ12TR STTH102AY
VN610SP-E STD45P4LLF6AG ESDCAN01-2BLY
STW36NM60ND SMA6T56CAY STP76NF75
VNQ5E050KTR-E TDA7706CB STL8DN6LF3
VN820PT-E STTH208UFY E-TDA7391PDTR
L4995J STTH16L06CG-TR SMA6T12AY
SM6T200A STM8AF52A8TCX STGB18N40LZT4
VNQ5E050AKTR-E STTH3L06UFY STD120N4LF6
STP85NF55 VN800PSTR-E STPS340U
STPSC10H065DY STPS41H100CTY VNB35NV04-E
SM15T68CAY STH145N8F7-2AG BAT54CWFILMY
ST72F561K6TCS VND3NV04-E SM6T12AY
VND5E050ACKTR-E TDA7719TR STPS1H100UY
VN5E016AFHTR-E VND5E160AJTR-E STPS200170TV1Y
L9959U-TR-D TDA7708S SM30T26CAY
VN5010AK-E VN5E160STR-E VND5025AKTR-E
LDP01-33AY STA1080HOA STPS1L40UY
DVIULC6-4SC6Y VNH5180A-E VND5E012MYTR-E
VND5E025AKTR-E VN5E160MSTR-E E-TDA7385
L9654TR VN5T006ASP-E SM4T82CAY
STM8AF5288TAX L9822EPD013TR VNQ6040S-E
SM15T22CAY STD10NF30 VND5T016ASPTR-E
L5300GJTR STM8AF6266TCX ESDLIN1524BJ
SM4T18CAY VND830PTR-E STGB20NB41LZT4
VNQ7050AJTR VND7140AJTR L9380-TR-LF
VNB35N07TR-E STB76NF75 STN4NF06L
SM30T47AY STP185N55F3 L4995AJTR
TDA2004R STPS2L60ZFY SM6T15CAY
TDA7718N VNN3NV04PTR-E TYN612MFP
VND5E025BKTR-E VN920SP-E VN7008AJTR
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VNQ5E250AJ-E SMAJ188CA-TR VND830SP-E
STD18NF25 STA1085POA3 STTH30L06WY
STPSC20H065CWY VNQ5027AK-E SM6T30CAY
SM15T39CAY VNS3NV04PTR-E STB25NF06AG
SM6T33CA STGD25N40LZAG E-L9826TR
VN7003ALHTR ESDA5V3SC6Y SM15T27CAY
VNH5050ATR-E L99H01XPTR VNLD5160TR-E
VN5050AJ-E ESDCAN05-2BWY STM8AF6266TAX
VN920B5TR-E STPS1150AY STGD20N40LZ
SM4T12CAY STA1052S1 TDA7802
STPS160UY STTH2R06UFY ESDAXLC6-1BT2
VND5E050MCKTR-E SM6T18CAY TN2015H-6FP
STGD20N45LZAG SM6T36AY VN7050ASTR
STPS3H100AFY L9952GXPTR SM6T16V5CAY
STB120N4LF6 TDA7721TR SM15T22AY
STB30NF20L VN820SPTR-E STPA003OD-4WX
SM6T30AY STL92N10F7AG STM8AF6248TCX
TDA75613LV L9339 ESDA6V1SC6Y
STB9NK80Z STD3N95K5AG TDA7391
SM4T28AY SM30T39CAY SM6T36CAY
TDA7851A VNS7NV04PTR-E STL20NF06LAG
L99DZ100GTR SM6T6V8CAY STPS2150A
L99PM62GXPTR STV270N4F3 SMA6T30AY
STPA001 VNQ600P-E STPS2200U
FDA2100LV FDA801B-VYY STP315N10F7
L9997ND013TR STB18NF25 L99DZ120TR
TDA7850A ST72F324BK6TCS STP180NS04ZC
TDA7563AH VN5025AJTR-E L4989D013TR
TDA7575BPDTR L9951XPTR VND5E050MCJTR-E
STM8AF5288TCX VN7010AJTR VND5050AJ-E
VND5T100LAJ-E STM8AF52AATCY L99MM70XPTR
VN770KP-E VND5160J-E VND5N07-E
L9911F STB85NF55T4 TDA7387
VNN1NV04PTR-E SMCJ24CA-TR SM6T250CAY
SM6T42CAY VND7NV04-E VNH7070ASTR
TDA7718NTR L9916 TDA7388A
STD86N3LH5 D44H11 STW72N60DM2AG
L9950TR DALC208SC6Y STP36NF06L
L9348-TR STP46NF30 TDA7575B
TDA7454 VNS1NV04P-E SM30T35AY
SM15T68AY VN5025AJ-E L4979MD
L9911I VND14NV04-1-E VN5160S-E
SM6T6V8AY VNP35NV04-E VN5E016MHTR-E
STH410N4F7-2AG VNLD5090TR-E TDA75610S-8ZT
VND5E050ASOTR-E L9374TRLF L4993DTR
SM4T47AY VNH7013XPTR-E VND830P-E
SM6T22AY VND5E050JTR-E VNB35N07-E
L9958SBTR VNV20N07-E ESDCAN02-2BWY
STP150NF55 STA1085POA L4995RKTR
SM15T47AY VNQ5160KTR-E TDA7705TR
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STW65N65DM2AG STB270N4F3 SM30T35CAY
L9856-TR-LF SM4T47CAY VN5R003HTR-E
L9615D013TR L9616 SM15T30AY
VND810PEPTR-E E-L9826 STTH2R02UY
SM6T56AY L5957PDTR STBR3012WY
STM8AL3166UAY SM6T47AY SM15T200A
L9613B SM6T47CAY VNL5050N3TR-E
VN5E010MHTR-E L9916BDTR SM15T33CAY
STPS160AY STI55NF03L VND5T100LAJTR-E
STGB25N40LZAG STW19NM60N STPS8H100G-TR
STGD10HF60KD VN7140ASTR F272-BAR-P
SM4T26CAY STPS3045DJFY-TR VNH7100BASTR
VNL5090N3TR-E SM6T82CAY L9949TR
L5957 TDA7563BH VN5E016AHTR-E
STD65N55F3 VN770KPTR-E VN750SMP-E
STD85N10F7AG VND5160JTR-E SM4T39CAY
L99DZ100GPTR SM6T33CAY MJD32CT4-A
VN7003AHTR VNLD5160-E STPS2L40ZFY
SM6T56CAY VPS2535HTR STD15P6F6AG
TDA7388 VNQ600APTR-E SM4T39AY
VND7N04-E STTH8R06GY-TR VND5050JTR-E
SM15T15CAY L9613B013TR STPA008-QIX
M93C66-RMN3TP/K STB36NM60ND SM6T39CA
VND7050AJ12TR L9409F E-L9935
SMAJ33A-TR LDP01-28AY STM8AF6223PCX
FDA2100LV-T STB46N30M5 VND7040AJTR
TDA7705 BU941ZT SM6T10AY
STP141NF55 SM15T39AY STPSC12065GY-TR
SM6T24CAY STH185N10F3-2 L99SD01-E
BU931T STW50N65DM2AG STP120N4F6
SM6T27AY STTH1R04AY VNH5180ATR-E
SMAJ40CA-TR SM6T33AY SMA6T18AY
VND5E025MKTR-E VN750PS-E ESDAXLC6-1BT2Y
LDP01-56AY L9950XPTR FDA450LV
STTH2R02AFY L4925PD013TR STPS2H100ZFY
L4988DTR VN5T016AHTR-E ST72F561R9TAXS
SMAJ170A-TR SM30T28AY VNLD5090-E
VNS1NV04DPTR-E L99SD01TR-E VNQ5E160KTR-E
L5300GJ SM4T68AY VN820B5-E
E-L9823 VND5E025ASTR-E VNLD5300TR-E
STTH802BY-TR TDA75610S-48X VNQ660SPTR-E
TDA7801PD STL45N10F7AG TDA75610DLVPDTR
VN5160STR-E STL66DN3LLH5 L4995JTR
SM30T18CAY VN820PTTR-E STTH3R02AFY
SMA6T30CAY STPA001A STTH1L06UFY
L99PM72PXPTR VN5E025ASOTR-E STD8NF25
SM6T18AY SM4T56AY TDA7418
SM4T30CAY TDA7850 ESDA25LY
TDA75610S-QLX SM15T39CA STB27NM60ND
L4995K L9651-TR SM15T18AY
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STPS0540ZY STL70N4LLF5 E-L9935013TR
STD30NF04LT STPS340B-TR SM30T47CAY
STPSC20065GY-TR TDA75610S-ZST L9466N
STTH1L06A STPS640CBY-TR STPS3L60UY
SM15T82AY ST72F521R9TCXS STS5NF60L
L9825 HDMIULC6-4SC6Y TDA7719
STA5630ATR VN5E160ASOTR-E SM30T21CAY
STP85NF55L STPS5H100AFY ST25R3915-AQFT
SM6T75CAY STTH1002CBY-TR STM8AF6288TCY
STTH310S E-L9338MD STD4NK100Z
MJD31CT4-A STPSC20065DY STL40DN3LLH5
STD7ANM60N VN5E160ASTR-E LDP01-26AY
TDA7707 STB45N40DM2AG VNQ5E160K-E
STP45N40DM2AG STTH6010WY M93C56-RMN3TP/K
X0202MN 5BA4 SM30T30AY ESDAVLC8-1BT2Y
STH270N4F3-6 TDA7415CB STD901T
SMA6T68AY STL7N6LF3 VNL5030JTR-E
E-L9338MD/TR E-TDA7375AV VNH5019ATR-E
ST72F324BK6TAXS SMA6T28CAY TDA7715
BU931P L9904 STM8AF6268TCX
STPS30L30CG-TR L9777A13TR STB37N60DM2AG
SM30T10CAY STH300NH02L-6 L9352B-TR-LF
STB43N65M5 VN750B5-E STB200NF03T4
STM8AF6268TAX SMA6J188CA-TR STD70NS04ZL
STPSC10H12DY STD100N3LF3 VNV35N07TR-E
TDA7391LV L4953G L99MD01XPTR
SMA6T18CAY STD30NF06T4 STM8AF6223PCAU
L9616-TR STA5620ATR STTH310UFY
L9914A SM15T33AY ST72F321AR9TAXS
STPS2545CGY-TR STL120N4LF6AG VN5T016AH-E
VNV20N07TR-E SM15T6V8CAY FDA450LV-T
SMBJ33A-TR SMA6J70CA-TR E-TDA7560
SM15T10AY STB18NF30 VND5T100AJTR-E
VNL5300S5-E STPS40L45CG-TR VND10N06-1-E
STTH1002CGY-TR STD155N3LH6 TYN612MRG
USBLC6-4SC6Y STL140N4F7AG L9333MD-TR
STTH30L06GY-TR L4995AKTR VN750PSTR-E
SM6T68AY VN750B5TR-E SM15T47CAY
STGB20N45LZAG STL115N10F7AG VNL5050S5-E
SMA6T22CAY SM4T26AY SM30T56AY
TDA7718BTR L9468N STL210N4F7AG
VNQ5050AKTR-E VNH7100ASTR SM15T24CAY
T3035H-6I STTH30RQ06GY-TR L9958TR
VND5004ASP30TR-E STPS20H100CGY-TR SM6T42AY
SM30T30CAY VN7040ASTR L9662TR
TDA7563A VND5E025LKTR-E STB80NF55-06-1
SM30T39AY L9779WD-SPI T835-600B-TR
VN772KP-E BAT54WFILMY STW22N95K5
L9953LXPTR TDA7376PDTR VN5T006ASPTR-E
ESDA5V3LY SM6T27A SM4T21CAY
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STB36NM60N TDA7376B ST72F321R6TAS
VN7004CLHTR STP45N60DM2AG STTH602CBY-TR
USBLC6-2SC6 L4949EDTR-E STPS15L60CB-TR
STH410N4F7-6AG VNQ7140AJTR TDA2005R
STTH110UFY VND5050AJTR-E VND5E012AYTR-E
SM30T21AY L99ASC03GTR VND5E160AJ-E
BAT20JFILM STTH3010GY-TR SM6T15AY
VN5016AJTR-E SM15T82CAY SM15T24AY
L9958XPTR E-TDA7375V SM4T68CAY
TDA7802SMTR TDA7577BLV STM8AF6266TDX
STTH5R06GY-TR ESDLIN03-1BWY L5959
L4995KTR STPS40L45CGY-TR SMA6T6V7CAY
VNS3NV04DPTR-E L5962TR SM4T33AY
L9915-CB STTH15RQ06DY STD1802T4-A
STW45N60DM2AG SMA6T82AY STPS1545CGY-TR
VND5E006ASP-E L9484 SM30T23AY
L9953XPTR STH275N8F7-6AG L4979MD013TR
VNQ5050KTR-E STB60NF06T4 HSP061-4M10Y
STL7DN6LF3 SMA6T33AY SMA6T28AY
BAT54SFILMY STL190N4F7AG VNQ500PEPTR-E
TN2015H-6T L9679PTR SM30T33AY
STN4NF03L STW47NM60ND STW58N60DM2AG
STPS3045CG-TR STB7ANM60N VNQ6004SATR-E
STB130NS04ZB-1 L9848TR L5958SMTR
L9954LXPTR E-TDA7342N STPS20L60CGY-TR
ESDA25SC6Y SMA6T47CAY STTH30R04DY
SM4T14CAY STB45N50DM2AG VN800PT-E
L9678PTR VNL5090S5TR-E STW46NF30
STGWA40M120DF3 L99H01QF STTH1R04UY
TDA7561 L99MC6GJTR STD35NF06LT4
STD15N50M2AG STTH1502DI VN5E025MJTR-E
L9960TR STL66N3LLH5 L9779WD
STD47N10F7AG VND5160AJ-E VND1NV04-1-E
STB46NF30 SM4T28CAY VND5050J-E
TDA7563BPDTR SM30T6.8AY E-TDA7396
STM8AF6286TCX LDP01-30AY STPSC20H12GY-TR
TDA7569BLVPDTR L9903TR SMA6T24CAY
TDA7577BLVPDTR STPS3L40SY STM8AF62A6UCY
SM4T33CAY TS820-600FP VND5T035LAKTR-E
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