product catalogue 2014/2015images.eniro.com/file/customer-web/se/14320993/profilepage/psmp… ·...

Product Catalogue 2014/2015

http://www.piezomotor.com


CONTENTAbout PiezoMotor .................................................................... 5

Markets ................................................................................6-7

How it works ......................................................................8-11

Electronics........................................................................12-13

Motor Characteristics ............................................................ 14

Glossary ................................................................................ 15

PIEZO LEGS LINEAR

Linear 6 N .......................................................................... 16-19

Twin 20 N ........................................................................... 20-23

Twin 40 N ........................................................................... 24-27

Twin-C 20 N ........................................................................ 28-31

Twin-C 40 N ........................................................................ 32-35

Twin-C 300 N ...................................................................... 36-39

Twin-C 450 N ...................................................................... 40-43

Spring 15 N ........................................................................ 44-47

Caliper 20 N ....................................................................... 48-51

PIEZO LEGS ROTARY

30 mNm ............................................................................. 52-55

50 mNm ............................................................................. 56-59

80 mNm ............................................................................. 60-63

WavePlate .......................................................................... 64-67

DRIVERS AND ENCODERS

PMCM21 ............................................................................. 68-69

PMCM31 ............................................................................. 70-73

PMD101 ............................................................................. 74-77

PMD104 ............................................................................. 78-81

PMD206 ............................................................................. 82-85

Encoders ............................................................................ 86-89

Installation guidelines ......................................................90-94

3

ABOUT PIEZOMOTOR ABPiezoMotor is one of the world-leading developers and manufacturers of direct drive, micro motors based on piezoelectric materials. Simple, precise and very small, piezoelectric motors are replacing traditional electromagnetic motors when these no longer meet the demands. Piezo LEGS® motors minimize total product size and deliver much greater precision.

At the company head office in Uppsala Sweden we make sure to have full control from piezo powder to delivering the final motor. This means that within our facilities we have a team of developers designing our motors, a production team to manufacture the piezoceramic material and assemble the motors, and the sales team to support our customers and distributors.

Across the world, there is an ever increasing need for small, strong motors. Miniaturization combined with precision is driven by demand for higher accuracy in manufacturing such as precision machinery and measuring tools. In the medical sector, we see analytical instruments and manipulators becoming more and more advanced and exact. The development of nano technology is further enhancing this development. In the semiconductor industry, there are continuous efforts to develop higher precision instruments in order to scale down devices on the silicon wafer.

In many of these applications, conventional electrical motors do not meet the required features. Our small, strong motors are precise down to the nanometer range. In addition, it has instant response time and does not suffer from the backlash problems which no gearbox can escape from.

5

6

Markets

OPTICSMoving mirrors and lenses in optical applications is a traditional PiezoMotor application. The motors’ open-loop and closed-loop operation makes them particularly attractive in this market. High resolution, high stiffness and high holding force – even without power applied – are additional key success factors. Our LTC type Piezo LEGS motors have dedicated solutions for different mirror mounts. We also offer customized solutions

SEMICONTrends in the semiconductor sector indicate a shift in focus from ever-finer trace width to greater emphasis on advanced packaging. Production capabilities and throughput remain very important. Piezo LEGS motors deliver high throughput, thanks to fast settling times plus high stability and resolution. PiezoMotor continuously develops new products for this market – both motors and drivers. We know this sector. Its demanding environment is part of our everyday life. Most of our solutions are customized.

SEM/TEMRequirements for higher resolution and newer, faster automated sequences continue to drive motor and driver development in the SEM/TEM sector. The extremely high resolution of Piezo LEGS motors matches this need perfectly. Fractions of an Ångström plus high stiffness and stability are combined with low heat dissipation into systems. Our motors are fully compatible with the vacuum environment. For the most demanding applications, they can be made completely non-magnetic.

FACTORY AUTOMATIONThis market is still in its early stages, but a steady increase in the use of Piezo LEGS motors is already evident. Driving forces include increasing demands on high-end assembly equipment plus smaller and smaller parts. Piezo LEGS motors are suitable for slow-speed, high-precision applications. We work together with many motion control specialists, mixing different technologies with Piezo LEGS motors and thereby building optimized motion solutions. Piezo LEGS motors perform well in many applications, but if other solutions appear better, e.g. those offered by our Faulhaber Group partner, we don’t hesitate to recommend them.

Piezo LEGS® motors are very flexible. They find use in a wide range of applica tions and markets, a number of which are outlined below.

7

MEDTECHCompact high-resolution solutions are key success factors for many medtech applications such as probing and cell manipulation. Our motors find many uses here and their very fast settling time is much appreciated by end-users. Fast settling time, in combination with high resolution and slow-speed, makes Piezo LEGS solutions very competitive.

STAGELinear and rotary stages are common building blocks in almost all of the markets mentioned above. PiezoMotor offers a wide range of products for motorizing stages. Our motors can be fully integrated for very compact solutions or mounted externally with a minimum of components. Moreover, Piezo LEGS technology makes it possible to replace an existing DC/Brushless/Stepper solution with a high-resolution piezo alternative. Systems also require position sensors to provide feedback for closed-loop operation. We offer sensors from Renishaw and MicroE Systems, and we help find the solution that best matches your application needs.

DEFENSEMilitary applications often require very robust solutions and even here, friction-based Piezo LEGS motors offer a very good fit. Friction-based motors can be subjected to impact or even being manually moved without any damage to the motor; if the force applied to the motor is higher than the holding force, it will just start sliding. Automatic locking without power consumption is a unique feature that makes our motors suitable for battery-operated equipment. In airborne applications, the very high force-to-weight ratio is also an important success factor.

CUSTOMIZED PRODUCTSOver the years, we have gained much experience with custom adaptations, both with mechanics and electronics. We have the building blocks, skills and experience to make motor solutions to meet your needs. We do in-house sub-assembly of full-motion systems (i.e. motor, guiding, encoder). Contact us to discuss details with our skilled engineers.

8

How it works

OLD PHENOMENA USED IN NEW AND EXCITING WAYS

The piezoelectric effect was discovered in the 1880’s by the Curie brothers. By applying voltage to a piezo electric material, they were able to change its shape. This effect has since been used in many applications; submarine sonars, ultra-sound equipment at hospitals, as well as loudspeakers, for example. A more recent application – piezo-actuated fuel injectors – has improved the fuel economy of modern cars and trucks. This would not be possible without robust piezo electric components able to endure billions of cycles in the harsh environment of the combustion engine.

Until PiezoMotor demonstrated its first commercially available piezo motor in 2002, only a handful of manufacturers existed. Since then, the acceptance of piezo technology has increased dramatically and more and more customers are today enjoying the benefits that our motors deliver.

AN OUTSTANDING SUCCESS STORYThe conventional electromagnetic motor is one of the most successful industrial products of all times. Since its conception some 175 years ago, it has made inroads into every aspect of our lives. Today, close to 10 billion small electric motors are produced each year. What’s more, the numbers keep growing as new applications are added to the list.

In the most basic modern car, for example, we find some 30 to 40 motors handling everything from adjusting rear-view mirrors to opening windows. In a luxury car, close to one hundred motors are used.

SO WHY DO WE NEED ANOTHER TYPE OF MOTOR?The answer is that for most applications we don’t; the well-proven electromagnetic motor will work just fine. But for a growing number of applications and products, this traditional solution has reached the end of the road. A new type of motor is replacing it – a piezoelectric motor – and the demand is growing. All underlying trends support this growth; we want smaller and smaller products, more and more portable devices with more features and longer battery life, plus greater energy efficiency and higher and higher precision.

PIEZO LEGS® TECHNOLOGYPiezo LEGS is in essence a walking machine constructed in one solid piece. Constructed so that each leg can be elongated as well as bent sideways, it moves incrementally by synchronizing the movement of each pair of its four legs, just as an animal would. Note that Piezo LEGS operates directly – there’s no need for gears or mechanical transmission, and the material itself is virtually impossible to wear out. Even if the motor moves incrementally in the nanometer range, it can still be very quick. By taking thousands of steps per second, it can cruise along at centimeter per second speeds.

ROCHELLE SALT

PIEZO LEGS® MOTOR ELEMENT

9

DIFFERENT TYPES OF PIEZO LEGS® MOTORSPiezo LEGS motors are designed for ‘move-and-hold’ applications where precision, minimal space, low energy consumption and simple mechanical design are important factors. As the motor is non-resonant, it is also very easy to scale up and down in size. Unlike resonant piezoelectric motors, which only operate at a given frequency, Piezo LEGS motors offer extraordinary speed dynamics. They can be operated at extremely low speeds (nanometers per second) up to 20 mm/second with full control in the complete dynamic range. A further unique feature is their ability to take extremely small steps (single nanometer range) in combination with long strokes. This means that one Piezo LEGS motor can often replace two motion systems – a DC-motor plus a piezo actuator, for example – without sacrificing performance.

So what do you need to design and integrate a motion system based on Piezo LEGS? To start with, we offer standard Piezo LEGS motors in various sizes plus a range of drivers/controllers. We also help select suitable position sensors as well as guidance and/or design of the mechanical interface of the motor. Our experienced mechanical and electronic designers help you throughout the process.

How it moves STEP-BY-STEP

Orange arrows show the direction of motion of each leg tip. They move as alternate pairs. White arrow show the movement of the rod.

All four legs are electrically activated. All are elongated.1

The first pair of legs maintains contact with the rod and moves right. The second pair retracts. Their tips bend left.

2

The second pair now extends and repositions on the rod. Their tips move right. The first pair retracts and their tips bend left.

3

The second pair of legs moves right.The first pair begins to elongate and move up towards the rod.

4

LL10

LR80

10

WHY USE AN ELECTROMECHANICAL PIEZO MOTOR INSTEAD OF A TRADITIONAL ELECTROMAGNETIC The electromagnetic motor has continuously improved since Michael Faraday converted electrical energy into mechanical motion in 1821. The principle has now reached a stage of very high refinement and precision and is the most widespread industrial product in the world. Piezo LEGS rely on an electro-mechanical principle rather than an electromagnetic one. So what are the differences and what benefits do you get by switching to the new technology?

To answer these questions, let’s take a look at the basics of the different principles. The electromagnetic motor works by creating force through magnetic poles that repel each other. Electrical current fed through wound coils create a magnetic field, where polarity is sequentially reversed to make the rotor spin. Piezo LEGS instead works with direct friction drive; force is created by the inherent preload of the piezoceramic actuator legs in direct friction contact with the rotor or drive shaft. When the legs start walking they are always in mechanical contact. In the following text we will explain how this is beneficial.

RESPONSE AND SETTLING TIMEWhen using a magnetic field to accelerate the rotor of a DC motor, you will always have lag due to inertia. More so, the electrical impedance in the windings of the motor will negatively affect the response time; it simply takes time to push current into the motor to create the electromagnetic field. When settling in on a target position with a DC motor you will have an overshoot and must deal with oscillation. The time to settle and the continuous dithering may be a killer for any precise application.

Piezo LEGS motors work with direct friction drive and will hold the load tightly. Response and settling time is limited by the load and friction between the piezo actuators and the component to be moved. Responsiveness of the piezo actuators is instantaneous and settling time is much faster compared to any traditional motor technology.

STIFFNESSIn many high accuracy applications, motion stiffness is essential. A system designed for holding force by magnetic field is of course a bit spongy in its nature. Stiffness can be increased with different tricks, but in comparison with the Piezo LEGS the traditional motor technologies fall short. Piezo LEGS are firmly holding the rotor or the linear shaft, and consequently you will make use of the high stiffness of the ceramic material. With increasing motor size the level of stiffness will only get higher.

FORCEIn relation to its size, the torque of a rotating electro-magnetic motor or the force of a linear electromagnetic motor is much lower than for Piezo LEGS. This is especially significant in small diameter motors. That’s the reason why electromagnetic motors need a gearbox to create high force and torque. Piezo LEGS motors do not need gearboxes. Piezo LEGS is self-locking and will hold load even when powered off.

RESOLUTION, MINIMUM INCREMENTAL MOTION In precision positioning, the term Minimum Incremental Motion (MIM) is often used. This is the smallest practical mechanical motion on the outgoing axis. Traditionally, we always see a big difference between the MIM and the resolution, since the latter is more closely related to the smallest detectable motion. In contrast, Piezo LEGS dramatically decrease the gap between MIM and resolution, in many cases eliminating it entirely. Resolution is more dependent on the electronics and the position sensor; the limiting factor is not the motor itself. Piezo LEGS thus achieve resolution so high that traditional electromagnetic motors are not even close. You will be able to easily position on a sub-micron level, or even down to sub-nanometers. For the rotary Piezo LEGS we’re talking sub-microradians.

LTC20

11

BACKLASHBacklash is another factor that creates a lot of problems in motion. To illustrate this, you simply have to look at an adjustable spanner in your workshop. Changing the moving direction of the adjustment screw and nothing happens at first because of the play in the mechanics. Motion is created, but only after some delay. This is also the case in all gearboxes as the force is applied on different sides of the gears. There are of course ways of minimizing the backlash in gears, but to have a completely backlash free motion you need the direct drive feature of Piezo LEGS; friction contact is always in place, and changing direction can be done without the slightest play.

ACCURACYAbsolute accuracy is the maximum difference between absolute target position and actual position. As we have seen, accuracy is limited by backlash and non-linearity of the drive mechanics, while other factors that contribute to inaccuracy include temperature drift. What is clear is that achieving the best accuracy requires direct drive and direct metrology systems. For best accuracy the only option is to have position feedback from the point of interest; you simply place the position encoder close to where you want to measure movement.

ENERGY CONSUMPTIONTraditional electromagnetic motors use significant amounts of energy just to keep a motor in a fixed position. Continuous current generate heat in the windings of the DC motor, and can have very unwelcome effects, especially in high-end positioning. Switching off the current will cause the motor to loose its position. Piezo LEGS motors are by far less energy consuming. The capacitive load of the piezoceramic actuators means power is consumed only when moving. When at stand still the motor will hold position without any current draw. For point-to-point movements you will see a really efficient use of energy, and at stand still you will have no heat generation. More so, the torque/force Piezo LEGS can deliver for the amount of power consumed is remarkable.

CONCLUSIONRegardless of your application, it’s highly likely that your next development will have greater motion demands than the last. Many of the problems noted above will require a speedy solution. Switching to Piezo LEGS simply solves so many problems. In many cases, the improvement is dramatic.

We see a fast-growing use of Piezo LEGS. More often than not, using one of our motors is no longer an optional alternative to the electromagnetic motor – it’s a necessity for driving product development forward.

LTC20 AND LTC40

LT40

12

Electronics

Piezo LEGS motors can be used in different ways depending on the requirements of the particular application. Required resolution is always the key question. As its name implies, a Piezo LEGS motor takes steps to create motion and, just as in humans, it can walk in different ways. It can move fast or slow, take long steps, short steps or partial steps, and stop at any point. All accomplished by different movement patterns and frequencies of the legs.

If we study one of the piezoceramic legs in detail, the actuator is built like a bimorph (Figure 1). Left and right side of the leg can be independently activated (0-48V). When energized, the leg can extend and bend a few microns. The tip of the leg (i.e. the friction drive pad) can move to any point within the rhombic area as illustrated in Figure 1. When the leg is not energized, the tip of the leg will be at point a. When only activating one side of the leg, it will bend to the left or to the right (b or d respectively). With both sides of the leg fully activated, it will extend to its maximum height (at point c).

A Piezo LEGS motor will have several actuator legs working together. The motion of the motor will be dependent of the input electrical waveform signals. To achieve motion, two legs (or more) are driven in parallel. In total, each motor will need four separate control signals. Each leg, however, is controlled with two voltages. In Figure 2 two different waveforms are depicted. Rhomb is a rudimentary waveform which will make the tip of the leg move in a rhombic pattern. A more advanced waveform is called Delta. The Delta waveform is optimized for smoothest walking, and is best for high precision positioning.

Standard drive electronics for Piezo LEGS® range from simple and low cost to advanced controllers for closed loop control. The motor is powered by signals below 50 V in amplitude, and custom drive circuitry can even run on battery.

FIGURE 1. Element movement

a b c d

a

c

b d

FIGURE 2. Voltage plots; waveform Rhomb (left), and waveform Delta (right). The two input signals (U1 and U2) will control each separate half of the bimorph leg. Resulting plots describe the motion of the tip of the leg for given waveform type.

-0,01

0,19

0,39

0,59

0,79

0,99

0 0,5 1 1,5 2 2,5 3 3,5 4

u1

time

-0,01

0,19

0,39

0,59

0,79

0,99

0,5 1 1,5 2 2,5 3 3,5 4

u2

time

-0,01

0,19

0,39

0,59

0,79

0,99

0 500 1000 1500 2000

u1

time

-0,01

0,19

0,39

0,59

0,79

0,99

0 500 1000 1500 2000

time

u2

a b c d

a

c

b d

13

For each waveform period the leg will complete one revolution; it will take a full step, also defined as a waveform-step (wfm-step). With fine control of the generated waveform, it is possible to divide the full wfm-step in to smaller increments; so called microsteps. The movement of individual legs is almost linear with the applied voltage. The piezo actuator leg is an analog component, and will move approximately 50 pm/mV. In other words, if the microstep voltage is controlled on mV level, the resolution of incremental motion is ~50 picometers (50•10-12 m). For practical reasons we have limited our standard microstepping drive electronics to microsteps of nanometer size (1•10-9 m).

The piezo actuator legs can be regarded as pure capacitors. To hold the legs in a given position you need to keep the voltage stable. At stand still there is no power draw or heat generation in the piezo. When holding position the motor can respond instantaneous and compensate the slightest deviation by taking nanometer sized microsteps.

The amount of energy consumed by the Piezo LEGS depends on the size of the motor. For example, the linear 6 N motor consumes only 5 mW per wfm-step, of which ≤10% is lost as heat in the piezo. Like other ceramic capacitors the piezo actuator is temperature dependent; capacitance is increasing with temperature. Increase in temperature can be due to ambient changes or operation of the motor. Consequently, with increased temperature the motor will consume more power and put a higher capacitive load on the driver amplifier.

CUSTOMIZED ELECTRONICSIn many applications, it is advantageous for users to integrate the drive electronics into their own system. PiezoMotor is fully open with information about how to control the motion of Piezo LEGS, and will support those who decide to make customized electronics. We do however encourage customers to start using our motors with drivers/controllers supplied by us. Standard drive electronics are available for Piezo LEGS motors both from PiezoMotor as well as from independent suppliers. They range from very simple and low cost to very advanced. See our web page for guidance or contact us for recommendations.

SENSORMany Piezo LEGS applications will require position sensors/encoders. We will help you make the correct choice. Sensors that fit our motors are available in standard as well as custom version from several independent suppliers. If you want the sensors integrated at the factory, just contact us for further assistance.

PMCM21

PMCM31

PMD101

PMD104

PMD206

14

Motor Characteristics

In this catalogue you will find detailed information about the standard products from PiezoMotor. Piezo LEGS are non-resonant walking motors; in several aspects quite different from DC or stepper motors. A Piezo LEGS motor is friction based, meaning the motion is transferred through contact friction between the drive leg and the drive rod/disc. You cannot rely on each step being equal to the next. This is especially true if the motor is operated under varying loads. For each waveform cycle of the drive signal, the motor will take one full step, referred to as a waveform-step (wfm-step). There is dependence between external load on motor and wfm-step length. When external load is high the wfm-step length is reduced. For example, see performance curve of LT20 type motor in Figure 3. At zero external load the typical wfm-step length is ~5 µm, but as load is increased the wfm-step length is shortened one or a few microns when working against load. In opposite, and not shown in diagram, the wfm-step length will be increased one or a few microns when working with load. It should be noted that the wfm-step length will also depend on internal piezo temperature, and on the type of waveform.

The wfm-step length, as described above, can be used to calculate the approximate motor speed. Wfm-step length at a given load is multiplied with the frequency of the drive signal waveform.

EXAMPLE LT20 motor, no load, 2000 wfm-steps per secondWaveform Rhomb: ~5 µm x 2 kHz = ~10 mm/sWaveform Delta: ~3.5 µm x 2 kHz = ~7 mm/s

EXAMPLE LT20 motor, 10 N load, 2000 wfm-steps per secondWaveform Rhomb: ~4 µm x 2 kHz = ~8 mm/sWaveform Delta: ~2.5 µm x 2 kHz = ~5 mm/s

Fine positioning is achieved through dividing the wfm-step into discrete points; so called microsteps. The resolution will be a combination of the number of points in the waveform and the external load. For example, a full wfm-step of 4 µm can be divided into 8192 microsteps that are only ~0.0005 µm (~0.5 nm). The resolution of the motor is all dependent of the electronics and how well they can manage the discrete voltage levels of the waveform.

Piezo LEGS® linear and rotary motors positions down to nanometer range if required. We talk about taking steps but in a different way from traditional stepper motors.

Figure 3. Waveform-step versus external load for LT20 motor. The filled line shows typical curve for waveform Rhomb, and dotted line waveform Delta. Values are typical for room temperature, and mean values for the motor type. Statistical spread is not shown.

0

1

2

3

4

5

6

0 5 10 15 20

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]

15

Glossary

WFM-STEP Waveform-step; the step taken for one full waveform period. Step size is load and temperature dependent. Typical load dependence curve is given for each motor.

MICROSTEP An incremental step within the full wfm-step. The size of the microstep will give the resolution of the motor. For a linear motor the microstep can be sub-nanometer.

WAVEFORM The shape and form of the electrical signals which controls the Piezo LEGS. Waveform Rhomb and Delta are commonly used, and will give different behavior in terms of speed, microstepping performance etc.

STEP LENGTH Linear travel, specified for full wfm-steps in load dependence curve. In specification tables the value is also given for a single microstep.

STEP ANGLE Rotary motion, angular displacement for full wfm-step in load dependence curve. In specification tables the value is also given for a single microstep.

RESOLUTION The piezo actuator legs are analog components which bend to move the drive rod or to rotate the drive disc. Resolution depends only on how well you control the voltage levels of the control signals. It is never difficult to get extreme resolution with the Piezo LEGS.

RECOMMENDED OPERATING RANGE The range of external load recommended for best microstepping performance and life time. Motor will handle higher loads, but the linearity within the wfm-step is impaired.

STALL FORCE / STALL TORQUE Maximum allowed external force / torque that the motor can handle and still give motion.

HOLDING FORCE / HOLDING TORQUE Motor will be able to hold this force / torque without slippage.

Piezo LEGS® Linear 6N


Direct drive – backlash freeNanometer resolutionSimple drive electronicsNo power draw in hold positionQuick response and high speed dynamics

Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the nanometer resolution the technology is quite unique.

The motor is ideally suited for move and hold applications or for automatic adjustments. When

Ordering informationMotorsLL1011A- Stainless SteelLL1011D- Non-Magnetic Vacuum

Drivers and ControllersPMCM21 Handheld push button driver

PMCM31 Analogue driver

PMD101 1-axis microstepping driver




Linear EncodersSee page 87

in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LL10 linear motor is available in a standard version, and in a non-magnetic vacuum version.

LL10 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. Very high speed dynamics and nanometer resolution makes it ideal for numerous applications.

17

http://www.piezomotor.com/products/linear/ll10/

1918

Main Dimensions LL1011AStainless Steel

Pin AssignmentPin Terminal Cable Color1 Phase 1 Yellow

2 Phase 2 Green

3 Phase 3 White

4 Phase 4 Grey

5 Ground (GND) Black or brown

Electrical Connector Types

23,3

10,8

21

9

22

3

L

4

3,3

17,

5

17 Phase 2 GreenPhase 1 Yellow

Phase 4 GreyGND Black

Phase 3 White

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector

-.04LT20-10 SSV M3102070Part No Name REV.

1

21

9

3

22

L

4

17

17,

5

3,3

23,3 10,8

11,5

15,5

6 1,6

GNDPhase 4Phase 3Phase 2Phase 1

02.06LT20-10 SS M3101747Part No Name REV.

1 3 ±

0,05

1

0 -0 0,

2

22

2

10 4,2

4x M1,6 19

+ -0,2

0,5

10,8

4 ±

0,1

L ±1

1,8

15,5 4

M1,6x4

Phase 2 GreenPhase 1 Yellow


Phase 3 White

Unless otherwise stated, motor is supplied with JST 05SR-3S Connector

GNDPhase 4

Phase 3Phase 2

Phase 1

Electrical connections

15,5

1,6

6

-.02LL10-11-SS3333Part No Name REV.

Mechanical Adapter

Note: Refer to drawings for details. Read Installation Guidelines carefully.

Main Dimensions LL1011DNon-Magnetic Vacuum

3 ±

0,05

1

0 -0 0,

2

22

2

10 4,2

4x M1,6 19,

3 + -0,

10,

5

10,8

4 ±

0,1

L ±1

15,5

1,65

6

1,8

15,5 4

M1,6x3

-.06LL10-11-NMV103623Part No Name REV.

3 ±

0,05

1

0 -0 0,

2

22

2

10 4,2

4x M1,6 19

+ -0,2

0,5

10,8

4 ±

0,1

L ±1

1,8

15,5 4

M1,6x4



Phase 3 White


GNDPhase 4

Phase 3Phase 2

Phase 1


15,5

1,6

6


3 ±

0,05

1

0 -0 0,

2

22

2

10 4,2

4x M1,6 19

+ -0,2

0,5

10,8

4 ±

0,1

L ±1

1,8

15,5 4

M1,6x4



Phase 3 White


GNDPhase 4

Phase 3Phase 2

Phase 1


15,5

1,6

6


Drive rod can be fastened using a mechanical adapter with sheet metal extender. Please read Installation Guidelines carefully for notes on how to properly connect the Piezo LEGS motor. Disregarding the instructions given in the guideline document may impair both motor performance as well as life time.

Standard type motor has one connector of type JST BM05B-SRSS-TB.

Vacuum type motor has soldered cables with one connectors of type JST 05SR-3S.

1918

0

1

2

3

4

5

6

7

8

0 1 2 3 4 5 6

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]

Technical SpecificationType LL1011A-

stainless steelLL1011D-non-magnetic

vacuum

Unit Note

Maximum Stroke 80(L−20.8)

80(L−20.8)

mm 100.8 mm rod,no mechanical adapter

Speed Range a 0-15 0-15 mm/s recommended, no load

Step Length b4 4 µm one wfm-step

0.0005 c 0.0005 c µm one microstep c

Resolution < 1 < 1 nm driver dependent

Recommended Operating Range 0-3 0-3 N for best microstepping

performance and life timeStall Force 6.5 6.5 N

Holding Force 7 7 N

Vacuum - 10-7 torr

Maximum Voltage 48 48 V

Power Consumption d 5 5 mW/Hz =0.5 W at 100 Hz wfm-step frequency

Connector JSTBM05B-SRSS-TB

soldered cable w. JST 05SR-3S

Mechanical Size 22 x 19 x 10.8 22 x 19.3 x 10.8 mm see drawing for details

Material inMotor Housing Stainless Steel Non-Magnetic

Weight 23 23 gram approximate

Operating Temp. −20 to +70 −20 to +70 ºC

Note: All specifications are subject to change without notice.

Motor PerformanceItem no. LL1011A-Family nameLEGS LinearStall force 10 = 6.5 NVersionMotor typeA = SS / Stainless SteelD = NMV / Non-Magnetic VacuumDrive rod (standard lengths)030 = 30 mm 060 = 60 mm040 = 40 mm 070 = 70 mm050 = 50 mm 101 = 100.8 mmMechanical adapterA0 = No adapterD1 = One adapter - FrontConnector/CableMotor type A

A00 = JST connector, no cableA05 = Same as K05A15 = Same as K15K05 = 0.5 m cable for driver PMD101 and PMCM31K15 = 1.5 m cable for driver PMD101 and PMCM31L05 = 0.5 m cable-kit for driver PMD206 and PMD236L15 = 1.5 m cable-kit for driver PMD206 and PMD236

Motor type D

B10 = 1.0 m Teflon flying wires PTFE AWG28 for connection to driver PMD101 and PMCM31

For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280.

Note: All combinations are not possible!


Please visit our website for the latest updates and to download CAD files

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC.b. Typical values for waveform Delta, 3 N load, temperature 20ºC.c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series.d. At temperature 20ºC, intermittent runs.

Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). Wfm-step length is the average distance the drive rod moves when the legs take one wfm-step (i.e. for one waveform cycle).

Note: Standard deviation σ of 0.5 µm should be taken into account. Typical values are given for 20ºC.

RhombDelta

Piezo LEGS® Linear Twin 20N



LT20 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. Very high speed dynamics and nanometer resolution makes it ideal for numerous applications.

Ordering informationMotor TypesLT2010A-/20A- Stainless steel

LT2010B-/20B- Stainless steel vacuum

LT2010D-/20D- Non-magnetic vacuum









The motor is ideally suited for move and hold applications or for automatic adjustments.

When in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LT20 linear motor is available in standard version, vacuum version, and non-magnetic vacuum version.

21

http://www.piezomotor.com/products/linear/lt20/

2322


2 Phase 2 Green

3 Phase 3 White

4 Phase 4 Grey



Mechanical Adapter

23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



1

21

9

3

22

L

4

17

17,

5

3,3

23,3 10,8

11,5

15,5

6 1,6



1

Main Dimensions LT2010 AStainless Steel

Main Dimensions LT2010 B/DStainless Steel Vacuum / Non-Magnetic Vacuum


21

9

3

22

L

4

17

17,

5

3,3

23,3 10,8

11,5

15,5

6 1,6



23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



21

9

3 ±

0,05

21,8

L

4 ±

0,1

14,

6

14

17,5

10,8

14,

6

14 1,7

17,

5

01.02LT20-20 SS M1,6101758Part No Name

REV.

Mounting OptionsThere are two mounting options available, either for M3 screws (Ø3.3 mm holes), as seen above, or a slim version for M1.6 screws (Ø1.7 mm holes), see below.

Drive rod can be fastened using a mechanical adapter with sheet metal extender. In this figure the adapter is mounted in front end of drive rod. Please read Installation Guidelines carefully for notes on how to properly connect the Piezo LEGS motor. Disregarding the instructions given in the guideline document may impair both motor performance as well as life time.

21

9

3

22

L

4

17

17,

5

3,3

23,3 10,8

11,5

15,5

6 1,6



Standard type motor has two connectors of type JST BM05B-SRSS-TB.

Vacuum type motor has soldered cables with two connectors of type JST 05SR-3S.

2322

Technical SpecificationType 10A/20A

stainless steel10B/20B

vacuum10D/20D

non-magnetic vacuum

Unit Note

Maximum Stroke 80(L−20.8)

80(L−20.8)

80(L−20.8)

mm 100.8 mm drive rod,no mechanical adapter

Speed Range a 0-10 0-10 0-10 mm/s recommended

Step Length b2.5 2.5 2.5 µm one wfm-step

0.0003 c 0.0003 c 0.0003 c µm one microstep c

Resolution < 1 < 1 < 1 nm driver dependent

RecommendedOperating Range 0-10 0-10 0-10 N for best microstepping

performance and life time

Stall Force 20 20 20 N

Holding Force 22 22 22 N

Vacuum - 10-7 10-7 torr

Maximum Voltage 48 48 48 V

Power Consumption d 10 10 10 mW/Hz =1 W at 100 Hz wfm-step frequency

Connector 2 x JST BM05B-SRSS-TB

soldered cable w.2 x JST 05SR-3S


Mechanical Size 22 x 21 x 10.8 22 x 21 x 10.8 22 x 21 x 10.8 mm see drawing for details

Material inMotor Housing Stainless Steel Stainless Steel Non-magnetic

Weight 29 29 29 gram approximate

Operating Temp. −20 to +70 −20 to +70 −20 to +70 ºC

0

1

2

3

4

5

6

0 5 10 15 20

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]

Motor Performance


Item no. LT2010A-050D1A00Family nameLEGS Linear TwinStall force20 = 20 NVersion 10 = mounts with M3 screws 20 = mounts with M1.6 screwsMotor typeA = SS / Stainless SteelB = SSV / Stainless Steel VacuumD = NMV / Non-Magnetic VacuumDrive rod (standard lengths)030 = 30 mm 060 = 60 mm040 = 40 mm 070 = 70 mm050 = 50 mm 101 = 100.8 mmMechanical adapterA0 = No adapterD1 = One adapter - FrontD2 = One adapter - BackE1 = Two adapters - Front and backConnector/Cable Motor type AA00 = JST connectors, no cablesA05 = 0.5 m cables *A15 = 1.5 m cables *K05 = 0.5 m cable-kit for driver PMD101 and PMCM31K15 = 1.5 m cable-kit for driver PMD101 and PMCM31L05 = 0.5 m cable-kit for driver PMD206 and PMD236L15 = 1.5 m cable-kit for driver PMD206 and PMD236Motor type B and DB10 = 1.0 m Teflon flying wires PTFE AWG28 For connection to driver PMD101 or PMCM31 you need an additional cable-kit, p/n CK6281.For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280.* = does not connect directly to either PM driver







RhombDelta



LT40 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. Very high speed dynamics and nanometer resolution makes it ideal for numerous applications.

Ordering informationMotorsLT4010A-/20A- Stainless steel

LT4010B-/20B- Stainless steel vacuum










When in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LT40 linear motor is available in a standard version and in a vacuum version.

25

http://www.piezomotor.com/products/linear/lt40/

2726


2 Phase 2 Green

3 Phase 3 White

4 Phase 4 Grey



Mechanical Adapter

23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



1

21

9

3

22

L

4

17

17,

5

3,3

23,3 10,8

11,5

15,5

6 1,6



1

Main Dimensions LT4020AStainless Steel

Main Dimensions LT4020BStainless Steel Vacuum


Mounting OptionsThere are two mounting options available, either a slim version for M2 screws (Ø2.1 mm holes), as seen above, or a version for M3 screws (Ø3.3 mm holes), see below.


Front

Mounting side

Cable side

1,65

3

4 8

11,85

14

2,5

0,5

26,7

3

32,1

25,

1

11

5,3

L

3,3 17

20,

9

3,3 17

20,

9 2

6,7

-.04LT40-10 NMV M3104467Part No Name REV.

Drive rod can be fastened using a mechanical adapter with sheet metal extender. In this figure the adapter is mounted in front end of drive rod. Please read Installation Guidelines carefully for notes on how to properly connect the Piezo LEGS motor. Disregarding the instructions given in the guideline document may impair both motor performance as well as life time.

3

32,1

25,

1

11

10

5,3

L

2,1 24

19,

1

14 23,1

2

LT40-20 SSV M2

LHR

REVISED H12/h12 1

PvM 2013-11-25

PvM 2013-08-15

104403 LT40-20 SSV M2 00 312:1104403

2013-11-25

DO NOT SCALE DRAWING

FINISH

MATERIAL

DIAMETER ANGLES

APPROVED

REVIEWED

DRAWN

REV.

OFSHEET

A3DWG. NO.

CAD FILE:

SIZE

SCALE 00

THREADS ARE: ISO 965-1,2 6H/6g

LT4020B

3

25,

1

11

32,1

10

5,3

24

L

2,1

19,

1

14

2

23,1

1,65

8

3

4

LHR

2013-11-20REVISED

PvM 2013-11-20

100375 LT40-20 SS M2 01 312:1100375

2013-11-20

PvM


FINISH

MATERIAL

APPROVED

REVIEWED

REV.

OFSHEET

A3DWG. NO.

CAD FILE:

SIZE

SCALE 01

DRAWING

3

25,

1

11

32,1

10

5,3

24

L

2,1

19,

1

14

2

23,1

1,65

8

3

4

LHR

2013-11-20REVISED

PvM 2013-11-20

100375 LT40-20 SS M2 01 312:1100375

2013-11-20

PvM


FINISH

MATERIAL

APPROVED

REVIEWED

REV.

OFSHEET

A3DWG. NO.

CAD FILE:

SIZE

SCALE 01

DRAWING


Vacuum type motor has soldered cables with two connectors of type JST 05SR-3S.

2726

0

1

2

3

4

5

6

7

8

9

0 5 10 15 20 25 30 35 40

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]

Item no. LT4010A-050D1A00Family nameLEGS Linear TwinStall force40 = 40 NVersion 10 = mounts with M3 screws 20 = mounts with M2 screwsMotor typeA = SS / Stainless SteelB = SSV / Stainless Steel VacuumDrive rod (standard lengths)040 = 40 mm 060 = 60 mm050 = 50 mm 101 = 100.8 mmMechanical adapterA0 = No adapterD1 = One adapter - FrontD2 = One adapter - BackE1 = Two adapters - Front and backConnector/Cable Motor type AA00 = JST connector, no cableK05 = 0.5 m cable for driver PMD101 and PMCM31K15 = 1.5 m cable for driver PMD101 and PMCM31L05 = 0.5 m cable-kit for driver PMD206 and PMD236L15 = 1.5 m cable-kit for driver PMD206 and PMD236

Motor type BB10 = 1.0 m Teflon flying wires PTFE AWG28 For connection to driver PMD101 or PMCM31 you need an additional cable-kit, p/n CK6281.

For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280.




Technical SpecificationType 10A/20A

stainless steel10B/20B

vacuumUnit Note

Maximum Stroke 73(L−28)

73(L−28)

mm 100.8 mm drive rod,no mechanical adapter


Step Length b4.5 4.5 µm one wfm-step



RecommendedOperating Range 0-20 0-20 N for best microstepping

performance and life timeStall Force 40 40 N

Holding Force 44 44 N

Vacuum - 10-7 torr


Power Consumption d 20 20 mW/Hz =2 W at 100 Hz wfm-step frequency

Connector JST BM05B-SRSS-TB


Mechanical Size 32.1 x 25.1 x 14 32.1 x 25.1 x 14 mm see drawing for detailsMaterial inMotor Housing Stainless Steel Stainless Steel




Motor Performance




RhombDelta

Piezo LEGS® Linear Twin-C 20N


Direct drive – backlash freeNanometer resolutionOptical mount interfaceQuick response and high speed dynamics

Ordering informationMotorsLTC2013-013 Clamp mount, shaft w. M2.5

LTC2014-013 Nut mount, shaft w. M2.5









LTC20 enclosed linear motor is intended for use in a large range of applications; laser and optics applications, moving mirror mounts, replacement for micrometer screws etc. Very high speed dynamics and nanometer resolution makes it ideal for numerous applications.

When in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LTC20 linear motor is available in two different mounting versions.

29

http://www.piezomotor.com/products/linear/ltc20/

3130

Note:Refer to drawings for details. Drive shaft has only limited bending moment capability, and absolutely no rotational torque is allowed. In order to safely mount an endpiece in the threaded hole, you must first release the motor completely (it must not be fixed in position). Thereafter, hold on only to the flat part of the shaft and fasten endpiece tightly.

Main Dimensions LTC2014-013

21

27

M2.5x0.45

851,2

9,5

5

2–15

4,5

5

Pin 1

02.00LT20C-13 M2.5 Clamp mount101748Part No Name REV.

21

27

M2.5x0.45

15,8

6,4

51,2

9,5

2–15

5

3/8"-40 UNS

4,5

5

Pin 1

02.00LT20C-14 M2.5 Thread mount101749Part No Name REV.


3130

Technical SpecificationType LTC2013-013

clamp mountLTC2014-013

nut mountUnit Note

Stroke 12.8 12.8 mm


Step Length b2.5 2.5 µm one wfm-step



Recommended Operating Range 0-10 0-10 N for best microstepping

performance and life timeStall Force 20 20 N

Holding Force 22 22 N


Power Consumption d 10 10 mW/Hz =1 W at 100 Hz wfm-step frequency

Connector USB mini-B USB mini-B

Mechanical Size 51.2 x 27 x 21 51.2 x 27 x 21 mm see drawing for detailsMaterial inMotor Housing

Stainless Steel, Aluminum

Stainless Steel,Aluminum


Operating Temp. 0 to +50 0 to +50 ºC

Mounting Clamp

21

27

M2.5x0.45

851,2

9,5

5

2–15

4,5

5

Pin 1


Nut

21

27

M2.5x0.45

15,8

6,4

51,2

9,5

2–15

5

3/8"-40 UNS

4,5

5

Pin 1

02.00LT20C-14 M2.5 Thread mount101749Part No Name REV. Note: All specifications are subject to change without notice.

Connector TypeMotor connector is USB mini-B. Motor cable is included (2 m with USB mini-B to JST 05SR-3S). Cable connects directly to driver PMD101 and PMCM31. For connection to driver PMD206 and PMD236 you also need a D-sub adapter (p/n CK6280).

21

27

M2.5x0.45

851,2

9,5

5

2–15

4,5

5

Pin 1


Pin AssignmentPin Terminal Cable Color1 Ground (GND) Black or brown

2 Phase 4 Grey

3 Phase 3 White

4 Phase 2 Green

5 Phase 1 Yellow



0

1

2

3

4

5

6

0 5 10 15 20

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]




Motor PerformanceRhombDelta


Direct drive – backlash freeNanometer resolutionOptical mount interfaceQuick response and high speed dynamics

Ordering informationMotorsLTC4012-013 Clamp mount, shaft with ball tip

LTC4013-013 Clamp mount, shaft with M2.5

LTC4014-013 Nut mount, shaft with M2.5

LTC4016-013 Flange mount, shaft with M2.5







LTC40 linear motor is intended for use in a large range of applications; laser and optics applications, moving mirror mounts, replacement for micrometer screws, etc.

Very high speed dynamics and nanometer resolution makes it ideal for numerous applications.


The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LTC40 linear motor is available with a few different mounting options - clamp, nut, or flange.

33





3534

M2.5x0.45

32

40

2,7

27

35

63,2 8 0,5 - 14

5

9,

5

7

32

4,5

3

28

Pin 1

8 0,5 - 14

5

9,

5

7

00.02LT40C-16 M2.5 flange mount103652Part No Name REV.

Note:Refer to drawings for details. Drive shaft has only limited bending moment capability, and absolutely no rotational torque is allowed. In order to safely mount an endpiece in the threaded hole, you must first release the motor completely (it must not be fixed in position). Thereafter, hold on only to the flat part of the shaft and fasten endpiece tightly.

5

63,2 8 2-15

9,

5

28

32

SØ0,397 [0.16"] AISI 420C Hardened

5

8 2-15

9,

5


28

32


00.02LT40C-12 round tip Clamp m.100100Part No Name REV.

M2.5x0.45

32

40

2,7

27

35

63,2 8 0,5 - 14

5

9,

5

7

32

4,5

3

28

Pin 1

8 0,5 - 14

5

9,

5

7


63,2 8

9,55

0,5-14

3

4,5

Pin 1

32

28

M2.5x0.45

8

9,5 5

0,5-14


5

63,2 8 2-15

9,

5

28

32


5

8 2-15

9,

5


28

32




Main DimensionsLTC4012-013



Pin 1

63,2

5

9,

5

0,5 - 14 15,8

3

4,5

3/8"-40 UNS

32

28

M2.5 x0,45

5

9,

5

0,5 - 14 15,8

6,4

3/8"-40 UNS

00.02LT40C-14 M2.5 tip100355Part No Name REV.

Pin 1

63,2

5

9,

5

0,5 - 14 15,8

3

4,5

3/8"-40 UNS

32

28

M2.5 x0,45

5

9,

5

0,5 - 14 15,8

6,4

3/8"-40 UNS


3534

Technical SpecificationType LTC40 Unit NoteMinimum Stroke 12.8 mm

Speed Range a 0-16 mm/s recommended, no load

Step Length b4.5 µm one wfm-step

0.0005 c µm one microstep c

Resolution < 1 nm driver dependent

Recommended Operating Range 0-20 N for best microstepping

performance and life timeStall Force 40 N

Holding Force 44 N

Maximum Voltage 48 V

Power Consumption d 10 mW/Hz =2 W at 100 Hz wfm-step frequencyConnector USB mini-B

Mechanical Size 63.2 x 32 x 28 mm see drawing for detailsMaterial inMotor Housing

Stainless Steel,Aluminum

Weight 165 gram approximate

Operating Temp. 0 to +50 ºCVersions LTC4012-013 LTC4013-013 LTC4014-013 LTC4016-013

5

63,2 8 2-15

9,

5

28

32


5

8 2-15

9,

5


28

32



63,2 8

9,55

0,5-14

3

4,5

Pin 1

32

28

M2.5x0.45

8

9,5 5

0,5-14


Pin 1

63,2

5

9,

5

0,5 - 14 15,8

3

4,5

3/8"-40 UNS

32

28

M2.5 x0,45

5

9,

5

0,5 - 14 15,8

6,4

3/8"-40 UNS


M2.5x0.45

32

40

2,7

27

35

63,2 8 0,5 - 14

5

9,

5

7

32

4,5

3

28

Pin 1

8 0,5 - 14

5

9,

5

7


Connector TypeMotor connector is USB mini-B. Motor cable is included (2 m with USB mini-B to JST 05SR-3S). Cable connects directly to driver PMD101 and PMCM31. For connection to driver PMD206 and PMD236 you also need a D-sub adapter (p/n CK6280).

21

27

M2.5x0.45

851,2

9,5

5

2–15

4,5

5

Pin 1


Pin AssignmentPin Terminal Cable Color1 Ground (GND) Black or brown

2 Phase 4 Grey

3 Phase 3 White

4 Phase 2 Green

5 Phase 1 Yellow


Please visit our website for the latest updates and to download CAD file

Note: All specifications are subject to change without notice.a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC.b. Typical value for waveform Delta, 20 N load, temperature 20ºC.c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series.d. At temperature 20ºC, intermittent runs.

0

1

2

3

4

5

6

7

8

9

0 5 10 15 20 25 30 35 40

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]



Motor PerformanceRhombDelta


Ordering informationMotorLTC30011-020 Standard

Drivers and ControllersPMD101 1-axis microstepping driver




Direct drive – backlash freeNanometer resolutionNo power draw in hold positionQuick responseHeavy loads

LTC300 linear motor is intended for high force and precision applications. This includes applications in vacuum for the semiconductor industry.

The advantage of using the Piezo LEGS technology is the very precise positioning resolution, as well as automatic locking giving true set-and-forget performance. The technology is based on direct drive without any backlash.

Piezo LEGS technology is characterized by its outstanding precision. Quick response time, as well as long service life are other benefits. In combination with the nanometer or even sub-nanometer resolution the technology is quite unique.

37


3938

M5x0.8

40

(4x) 4,3

40

50

50 2

110 (max stroke)

24

80

20mm stroke

49

10

03.03BigLEGS 300 N wideLEGS-BL01S-11Part No Name REV.

Main Dimensions LTC30011-020Standard version

Electrical Connector Type

Cable AssignmentTerminal Cable ColorPhase 1 Yellow

Phase 2 Green

Phase 3 White

Phase 4 Grey

Ground (GND) Black or brown

23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



Motor has multiple options for connectors depending on customer requirements. Options include LEMO connector, JST connector, or conventional D-sub type connector.

3938

0

1

2

3

4

5

6

7

0 50 100 150 200 250 300

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]

Motor Performance






standard versionUnit Note

Maximum Stroke 20 mmSpeed Range a 0-0.3 mm/s recommended, no load

Step Length b3 µm one wfm-step



RecommendedOperating Range 0-150 N for best microstepping


Holding Force > 300 N


Power Consumption d 0.2 W/Hz = 10 W at 50 Hz wfm-step frequency

Connector On request

Mechanical Size 80 x 50 x 50 mm see drawing for detailsMaterial in Motor Housing Stainless Steel


Operating Temperature +10 to +70 ºC

Note: All specifications are subject to change without notice.a. Max value is typical for waveform Rhomb at 50 Hz, no load, temperature 20ºC.b. Typical value for waveform Delta, 150 N load, temperature 20ºC.c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series.d. At temperature 20ºC, intermittent runs.

RhombDelta


Direct drive – backlash freeNanometer resolutionNo power draw in hold positionQuick responseHeavy loads

Ordering informationMotorLTC45011-020 Standard

Drivers and ControllersPMD101 1-axis microstepping driver




LTC450 linear motor is intended for high force and precision applications. This includes applications in vacuum for the semiconductor industry.

The advantage of using the Piezo LEGS technology is the very precise positioning resolution, as well as automatic locking giving true set-and-forget performance. The technology is based on direct drive without any backlash.

Piezo LEGS technology is characterized by its outstanding precision. Quick response time, as well as long service life are other benefits. In combination with the nanometer or even sub-nanometer resolution the technology is quite unique.

41


4342

Main Dimensions LTC45011-020Standard version

Electrical Connector Type

40

40

50

50

M5 8 (4x) 4,3

24

2 98

128 (max stroke)

20mm stroke

10

54

-.01BigLEGS 450 N wideLEGS-BL02S-11Part No Name REV.

Note: Refer to drawings for details.

Cable AssignmentTerminal Cable ColorPhase 1 Yellow

Phase 2 Green

Phase 3 White

Phase 4 Grey

Ground (GND) Black or brown

23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



Motor has multiple options for connectors depending on customer requirements. Options include LEMO connector, JST connector, or conventional D-sub type connector.

4342

0

1

2

3

4

5

6

7

0 50 100 150 200 250 300 350 400 450

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]

Motor Performance






standard versionUnit Note

Maximum Stroke 20 mmSpeed Range a 0-0.3 mm/s recommended, no load

Step Length b2 µm one wfm-step







Power Consumption d 0.3 W/Hz = 15 W at 50 Hz wfm-step frequency

Connector On request

Mechanical Size 98 x 50 x 50 mm see drawing for detailsMaterial in Motor Housing Stainless Steel


Operating Temperature +10 to +70 ºC

Note: All specifications are subject to change without notice.a. Max value is typical for waveform Rhomb at 50 Hz, no load, temperature 20ºC.b. Typical value for waveform Delta, 225 N load, temperature 20ºC.c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series.d. At temperature 20ºC, intermittent runs.

RhombDelta

Piezo LEGS® Linear Spring 15N


Motor for linear stage mountDirect drive – backlash freeNanometer resolutionNo power draw in hold positionQuick response and high speed dynamics

LS15 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. The very high speed dynamics and nanometer resolution makes it ideal for numerous applications.

Ordering informationMotorsLS1510B- Stainless steel

Drive rods100361-40 Drive rod 40 mm

100361-50 Drive rod 50 mm

100361-60 Drive rod 60 mm

100361-101 Drive rod 100.8 mm

100361-150 Drive rod 150 mm









The motor is ideally suited for move and hold applications or for automatic adjustments of

a linear stage unit. When motor is in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. This means the motor has no mechanical play or backlash. Piezo LEGS 15N linear motor is vacuum compatible.

45

4746

Main Dimensions LS15


2 Phase 2 Green

3 Phase 3 White

4 Phase 4 Grey




Motor has soldered cables with one connector of type JST 05SR-3S.

23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



1

23,

3

42 35

2 x 3.3 THRU ALL4x M4 - 6H 6

22

2

17,

6

3,4

Cables out this direction

15

2x M3

35

03LS15-10 Spring mount SSV102032Part No Name REV.

Phase 3 White

GND BlackPhase 4 Grey

Phase 1 YellowPhase 2 Green

4746

0

1

2

3

4

5

6

7

8

9

0 3 6 9 12 15

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]

Technical SpecificationType LS1510B

vacuumUnit Note

Speed Range a 0-16 mm/s recommended, no load

Step Length b4.5 µm one wfm-step






Vacuum 10-7 torr


Power Consumption d 7 mW/Hz =0.7 W at 100 Hz wfm-step frequency

Connector soldered Teflon wires w.JST 05SR-3S

Mechanical Size 42 x 23.3 x 15 mm see drawing for detailsMaterial inMotor Housing Stainless Steel

Weight 70 gram approximate, without cables

Operating Temp. −20 to +70 ºC

Motor PerformanceItem no. LS1510B-B10Family nameLEGS Linear SpringStall force15 = 15 NVersion 10Motor typeB = SSV / Stainless Steel VacuumConnector/Cable B15 = 1.5 m Teflon flying wires PTFE AWG28* * = Connects directly to driver PMD101 and PMCM31

For connection to driver PMD206 or PMD236 you needa D-sub adapter, p/n CK6280.

Note: Drive rod has to be ordered separately.



Note: All specifications are subject to change without notice.a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC.b. Typical values for waveform Delta, 7.5 N load, temperature 20ºC.c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series.d. At temperature 20ºC, intermittent runs.



RhombDelta

Piezo LEGS® Caliper 20N


For stage integrationDirect drive – backlash freeNanometer resolutionSimple drive electronicsQuick response and high speed dynamics

LC20 linear motor is intended for motorizing linear stages or goniometer stages. It is miniaturized to such a degree it will fit within the stage block.

Ordering informationMotorsLC2010 Motor for goniometer stage

LC2020 Motor for linear stage








Manufacturers can with the Caliper motor reach new degrees of miniaturization in stage motorization. The very high speed dynamics and nanometer resolution makes it ideal for motorized stages.


When the motor is in hold position it does not consume any power. The drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash.

49

http://www.piezomotor.com/products/linear/lc20/

5150


2 Phase 2 Green

3 Phase 3 White

4 Phase 4 Grey


Electrical Connector TypesMotor has two fitted cables with JST 05SR3S connectors on the end. The cables must be connected in parallell to the driver.

Note: All specifications are subject to change without notice. Detailed drawings can be found in the document Installation Guidelines for the Piezo LEGS Caliper on our website.

20,

4

60 8 44

15,

7

20,

7

15,

7 ±0

,03

44

60 ±0,1

5 ±

0,03

20,

7

40 ±0,1 8

A

20,

4 ±0

,1

14,

4

3

20 20

(4x) 1.6 5.2 M2 - 6H 4

5,2

±0,

02

27 ±0,1 (4 x) 2.4 THRU ALL 4.4 2.4

10

±0,0

2

3 54

(2x) 3 g7 --0,0020,012

3

0,03 A

0,01

-.03Caliper Linear103174Part No Name REV.

Main Dimensions LC20

Piezo LEGS Caliper is designed for stage integration. It is miniaturized to a degree where it will fit inside a linear stage or a goniometer stage. The motor is easily mounted in the stage blocks using eight screws. No further adjustments have to be made. Please look at the document Installation Guidelines for the Piezo LEGS Caliper for information on how to design the stage blocks and how to correctly mount the motor. Guideline document also has more detailed drawings of the motor.

Our PiezoMotor staff will be happy to assist you with details on system integration and can provide mechanical engineering expertise. On our webpage you can find CAD files for download (motor units and mockup stages).

Installation

23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



1

5150

0

10

20

30

40

50

60

0

1

2

3

4

5

6

0 5 10 15 20W

FM-S

TEP

AN

GLE

[µr

ad]

WFM

-STE

P LE

NG

TH [

µm]

EXTERNAL FORCE [N]

Motor PerformanceItem no. LC20 A-044Family nameLEGS CaliperStall force 20 = 20 NVersion10 = for goniometer stage mount20 = for linear stage mountMotor typeA = SS / Stainless SteelDrive rod (standard lengths)044 = 44 mm (will give stroke according to specifications)Connector/Cable A15 = 1.5 m cables - does not connect directly to either PM driver K15 = 1.5 m cable-kit for driver PMD101 and PMCM31 L15 = 1.5 m cable-kit for driver PMD206 and PMD236



Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). Wfm-step length/angle is the average distance the drive rod moves when the legs take one wfm-step (i.e. for one waveform cycle).


Technical SpecificationType LC2010

for gonio stageLC2020

for linear stageNote

Stroke ±10º a 29 mm

Minimum Radius 86 mm - see installation guidelines

Speed Range b 0-7 º/s a 0-10 mm/s recommended, no load

Step Angle/Length c30 µrad a 2.5 µm one wfm-step

0.004 µrad a d 0.0003 µm d one microstep d

Resolution < 10 nrad a < 1 nm driver dependent

RecommendedOperating Range 0-10 N 0-10 N for best microstepping

performance and life time

Stall Force 20 N 20 N

Holding Force 22 N 22 N

Maximum Voltage 48 V 48 V

Power Consumption e 10 mW/Hz 10 mW/Hz =1 W at 100 Hz wfm-step frequency

Connector 2 x soldered cablewith JST 05SR-3S

2 x soldered cablewith JST 05SR-3S

Mechanical Size 60 x 20.7 x 20.4 mm 60 x 20.7 x 20.4 mm see drawing for details

Material inMotor Housing



Weight 110 grams 110 grams

Operating Temp. 0 to +50 ºC 0 to +50 ºC

Note: All specifications are subject to change without notice.a. Value is valid for minimum radius 86 mm.b. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC.c. Typical values for waveform Delta, 10 N load, temperature 20ºC.d. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series.e. At temperature 20ºC, intermittent runs.

RhombDelta

Piezo LEGS® Rotary 30 mNm


Direct drive – backlash freeIntegrated Absolute EncoderMicroradian resolutionNo power draw in hold positionQuick response

LR17 rotary motor is a high precision second generation of Piezo LEGS Rotary. It is intended for a large range of applications where high speed dynamics and positioning with precision is crucial. High torque output in a small package is also beneficial.

Ordering informationMotorLR17 Standard version

Drivers and ControllersPMCM31 Analogue driver





Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the micro radian resolution the technology is quite unique.

The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. Drive technology is direct, meaning no gears are needed to create motion. The motor has no mechanical play or backlash.

Motor comes with an integrated high resolution magnetic encoder. Feedback from the encoder gives resolution of 0.2 mrad (0.01º) in closed loop operation. Open loop resolution of the motor is 0.1 µrad (0.000006º).

53

http://www.piezomotor.com/products/rotary/lr17/

5554

(3 x) M2 - 6H 2.5

(3x)120°

12

17

32,2

1

7

3

f7 - -0,

006

0,01

6

10,3 8

-.06Rotating Motor Ø17103068Part No Name REV.

Main Dimensions LR17


Electrical Connector TypeConnector on the motor is a 16 pin dual row CviLux connector CI1116M2VD0, which mates with socket from the CviLux CI1116 family.

(3 x) M2 - 6H 2.5

(3x)120°

12

17

32,2

1

7

3

f7 - -0,

006

0,01

6

10,3 8

-.06Rotating Motor Ø17103068Part No Name REV.

16 915 14 13 12 11 10

1 82 3 4 5 6 7

Pin AssignmentPin Terminal Note1 Sensor +5V/+3V3

2 - Do not connect

3 - Do not connect

4 Motor Phase 3

5 Motor Phase 4

6 - Do not connect

7 - Do not connect

8 - Do not connect

9 Motor Phase 2

10 Motor Phase 1

11 Sensor Data (SDA)

12 Sensor Clock (SCK)

13 - Do not connect

14 Sensor Ground (GND)

15 - Do not connect

16 Motor Ground (GNDM)

EncoderLR17 has an integrated magnetic absolute encoder. It gives 15 bit SSI data. SCK (Sensor Clock) and SDA (Sensor Data) are normally at high level (idle). When receiving a clock pulse from the controller, the LR17 will respond with position data. The SCK frequency should be 70-180 kHz. Data should be read shortly before the positive flank. The timeout between positive flanks is 2030 µs. The output data is 15 bits (msb first), followed by a stop bit. If SCK continues beyond the stop bit, there will be a second stop bit followed by repeated 15 bit data and a stop bit. A minimum of 120 µs is needed after position readout to ensure refresh of position data. Reading position every 0.5 ms is the maximum recommended rate for continuous operation.

SDA

SCK

idle = 1

idle = 1

20 µs ≤ tm ≤ 30 µs

idle = 1

idle = 1

A B C

A: 1st clock pulse, SDA stays idle until positive flank.B: 2nd clock pulse, SDA output is bit1 (msb).C: 16th clock pulse, SDA output is bit15 (lsb).

5554

0

0,2

0,4

0,6

0,8

1

1,2

1,4

1,6

1,8

0 5 10 15 20 25 30

WFM

-STE

P AN

GLE

[m

rad]

EXTERNAL TORQUE [mNm]

Motor PerformanceItem no. LR17-030A20E1Family nameLR = LEGS RotaryDiameter17 = Ø 17 mmStall torque 030 = 30 mNmMotor typeA = SS / Stainless SteelVersionEncoderE1 = Magnetic 15 bit SSI encoderConnector/CableA00 = Connector, no cableA15 = 1.5 m cable - does not connect to either PM driverK15 = 1.5 m cable - for driver PMD101 and PMCM31L15 = 1.5 m cable - for driver PMD206 and PMD236



Technical SpecificationType LR17 Unit NoteDiameter 17 mm

Angular Range 360 º continuous

Speed Range a 0-170 º/s recommended, no load

Step Angle b800 µrad one wfm-step0.1 c µrad one microstep c

Motor Resolution < 0.1 µrad driver dependentEncoder Type Magnetic, absolute SSI

Encoder Accuracy 6.3 mrad in a non-magnetic environment

Encoder Resolution 0.2 mrad 32768 CPR(15 bit)

Recommended Operating Range 0-15 mNm for best microstepping

performance and life timeStall Torque 30 mNm

Holding Torque > 30 mNm

Shaft Load, Max. 12

NN

- radial (6.5 mm from mounting face)- axial

Shaft Press Fit Force, Max. 5 N


Power Consumption d 3.5 mW/Hz =0.35 W at 100 Hz wfm-step frequency

Connector CviLux CI1116M-2VD0 Mates with socket CviLux CI1116S

Material in Motor Housing Aluminium,Stainless Steel


Operating Temperature 0 to +50 ºC

Note: All specifications are subject to change without notice.a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC.b. Typical value for waveform Delta, 15 mNm torque, temperature 20ºC.c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series.d. At temperature 20ºC, intermittent runs.

Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). Wfm-step angle is the average distance the drive disc rotates when the legs take one wfm-step (i.e. for one waveform cycle).

Note: Standard deviation σ of 0.1 mrad should be taken into account. Typical values are given for 20ºC.

RhombDelta

Piezo LEGS® Rotary 50 mNmnon-magnetic


Non-magneticDirect drive – backlash freeMicroradian resolutionNo power draw in hold positionQuick response

LR50 rotary motor is nonmagnetic. It is intended for a large range of applications where there is demand for non-magnetic material in motor.

Ordering informationMotorLR5012D- Non-magnetic vacuum







non-magnetic

Very high speed dynamics and micro radian precision makes it ideal for numerous applications. High torque output in a small package is also beneficial.


The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. Drive technology is direct, meaning no gears are needed to create motion. It has no mechanical play or backlash. LR50 non-magnetic motor is available in a standard version, and in a vacuum version.

57


5958

Main Dimensions LR5012DNon-Magnetic Vacuum


2 Phase 2 Green

3 Phase 3 White

4 Phase 4 Grey



(2x) M2

19

6

3

f7

6,50 0,50

34,70

23

00.02LR50-12 NMV100444Part No Name

REV.


23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



1

Vacuum type motor has soldered cables with one connector of type JST 05SR-3S.

5958

0

0,1

0,2

0,3

0,4

0,5

0,6

0,7

0,8

0,9

1

0 10 20 30 40 50

WFM

-STE

P AN

GLE

[m

rad]


Motor PerformanceItem no. LR5012D-00B10Family nameLEGS RotaryStall torque50 = 50 mNmVersionMotor typeD = NMV / Non-Magnetic VacuumEncoder00 = No Encoder (only option)Connector/Cable B10 = 1.0 m Teflon flying wires PTFE AWG28 for connection to driver PMD101 and PMCM31 For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280.

Piezo LEGS® Rotary 50 mNmnon-magnetic


Technical SpecificationType LR5012D

non-magnetic vacuumUnit Note

Angular Range 360 º continuous


Step Angle b550 µrad one wfm-step

0.07 c µrad one microstep c

Resolution < 0.1 µrad driver dependent

RecommendedOperating Range 0-25 mNm for best microstepping


Holding Torque 55 mNm

Shaft Load, Max.3 N radial (5 mm from mounting face)2 N axial

Shaft Press Fit Force, Max. 5 N

Vacuum 10-7 torr


Power Consumption d 7 mW/Hz =0.7 W at 100 Hz wfm-step frequency

Connector soldered cablewith JST 05SR-3S

Mechanical Size Ø23 x 34.1 mm see drawing for details

Material inMotor Housing Non-magnetic

Weight 60 gram

Operating Temperature −20 to +70 ºC




Rhomb

Delta


Direct drive – backlash freeNanometer resolutionNo power draw in hold positionQuick response

LR80 rotary motor is intended for a large range of applications. Very high speed dynamics and microradian precision makes it ideal for numerous applications.

Ordering informationMotorsLR8012A- Standard version, stainless steel

LR8012B- Vacuum version, stainless steel







High torque output in a small package is also beneficial.


The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. Drive technology is direct, meaning no gears are needed to create motion. It has no mechanical play or backlash. LR80 motor is available in standard version, and vacuum version.

61


6362


2 Phase 2 Green

3 Phase 3 White

4 Phase 4 Grey



23,3

10,8

21

9

22

3

L

4

3,3

17,

5



Phase 3 White



1

21

9

3

22

L

4

17

17,

5

3,3

23,3 10,8

11,5

15,5

6 1,6



1

3 f7

6,50 0,50

34,1

6

23

(2x) M2x0.4

18

01.01LR80-12 SS102360Part No Name REV.

Main Dimensions LR8012A and LR8012BStandard and Vacuum



Vacuum type motor has soldered cables with one connector of type JST 05SR-3S.

6362

0

0,1

0,2

0,3

0,4

0,5

0,6

0,7

0,8

0,9

1

0 10 20 30 40 50 60 70 80

WFM

-STE

P AN

GLE

[m

rad]


Motor PerformanceItem no. LR8012A-00A15Family nameLEGS RotaryStall torque80 = 80 mNmVersionMotor typeA = SS / Stainless SteelB = SSV / Stainless Steel VacuumEncoder00 = No Encoder01 = Magnetic 13 bit encoderConnector/CableMotor type AA00 = JST connector, no cableA05 = Same as K05A15 = Same as K15 K05 = 0.5 m cable for driver PMD101 and PMCM31K15 = 1.5 m cable for driver PMD101 and PMCM31L05 = 0.5 m cable-kit for driver PMD206 and PMD236L15 = 1.5 m cable-kit for driver PMD206 and PMD236Motor type BB10 = 1.0 m Teflon flying wires PTFE AWG28 for connection to driver PMD101 and PMCM31 For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280.




Technical SpecificationType LR8012A

(standard)LR8012B(vacuum)

Unit Note

Angular Range 360 360 º continuous

Speed Range a 0-100 0-100 º/s recommended, no load

Step Angle b450 450 µrad one wfm-step

0.05 c 0.05 c µrad one microstep c

Resolution < 0.1 < 0.1 µrad driver dependent

Recommended Operating Range 0-40 0-40 mNm for best microstepping

performance and life timeStall Torque 80 80 mNm

Holding Torque 90 90 mNm

Shaft Load, Max.3 3 N radial (5 mm from mounting face)2 2 N axial

Shaft Press Fit Force, Max. 5 5 N

Vacuum - 10-7 torr


Power Consumption d 7 7 mW/Hz =0.7 W at 100 Hz wfm-step frequency


soldered cablewith JST 05SR-3S

Mechanical Size Ø23 x 34.1 Ø23 x 34.1 mm see drawing for details

Material inMotor Housing Stainless Steel Stainless Steel

Weight 60 60 gram





Rhomb

Delta

Piezo LEGS® WavePlate


Unlimited rotationCenter thru hole for 0.5” insertsSub-microradian resolutionNo power draw in hold positionQuick response

Piezo LEGS WavePlate is primarily for use in laser applications with standard 0.5 inch (12.7 mm) inserts. The inserts are locked in place with the provided retaining rings.

Ordering informationMotorLW2011A- WavePlate motor



PMD101 1-axis microstepping driverPMD104 4-axis microstepping driver



For added mounting flexibility, the turnable part has four M1.6 threaded holes. Fine adjustments are made using the innovative Piezo LEGS friction drive technology with sub-microradian resolution. Manual override of the turnable part allows for coarse positioning.

WavePlate is ideally suited for move and hold applications within optics or other

high precision fields. When the rotary part is in hold position the WavePlate does not consume any power. The drive technology is direct, meaning no gears are needed to create motion. There is no mechanical play or backlash in the motion.

65

http://www.piezomotor.com/products/rotary/lw20/

6766


2 Phase 2 Green

3 Phase 3 White

4 Phase 4 Grey




21

9

3

22

L

4

17

17,

5

3,3

23,3 10,8

11,5

15,5

6 1,6



1

Main Dimensions LW20

4x M1.6

33

15

30 22

2,35 (2x retaining Nut)

12

,8

10

14,1

10,8

24

24

Ø29

2x M3x0,5

01.00LR Waveplate SS100331Part No Name REV.


6766

0

50

100

150

200

0

0,1

0,2

0,3

0,4

0,5

0,6

0,7

0,8

0,9

1

0 5 10 15 20

WFM

-STE

P AN

GLE

[ar

c se

c]

WFM

-STE

P AN

GLE

[m

rad]

EXTERNAL TORQUE [N]

Motor PerformanceItem no. LW2011A-00A00Family nameLEGS WavePlateStall torque20 = 20 mNmVersionMotor typeA = SS / Stainless SteelEncoder00 = No Encoder (only option)Connector/Cable A00 = JST connector, no cableA05 = Same as K05A15 = Same as K15 K05 = 0.5 m cable for driver PMD101 and PMCM31K15 = 1.5 m cable for driver PMD101 and PMCM31L05 = 0.5 m cable-kit for driver PMD206 and PMD236L15 = 1.5 m cable-kit for driver PMD206 and PMD236





Technical SpecificationType LW2011A Unit NoteAngular Range 360 º continuous


Step Angle b0.55 mrad 113 arc sec 32 mº one wfm-step

0.0001c mrad 0.01c arc sec 0.004c mº one microstep c

Resolution <0.0001 mrad <0.01 arc sec <0.004 mº driver dependent

Recommended Operating Range 0-10 mNm for best microstepping


Holding Torque 25 mNm


Power Consumption d 3.5 mW/Hz =0.35 W at 100 Hz wfm-step frequency


Mechanical Size 33 x 30 x 24 mm see drawing for details

Material in Motor Housing Stainless Steel

Weight 107 gram

Operating Temp. −20 to +70 ºC


RhombDelta

[mNm]

PiezoMotor® Driver PMCM21


PMCM21 is a simple hand-held push-button driver for Piezo LEGS motors (linear and rotary) that offers sub-micron resolution linear motion. Pushing the button to move in one direction ramps up speed by utilizing phase-shifting of the drive signal. Maximum speed, determined by the size of the motor (capacitive load) is generally in the few millimeters per second range. A quick press of the button generates sub-micron steps. Positioning below 0.1 µm is possible by altering direction.

Ordering informationDriverPMCM21-02 1-axis analogue driver for

Piezo LEGS motors

Easy to useAnalog controlLow power consumptionSmall size

69

http://www.piezomotor.com/products/drivers/pmcm21/


PMCM31 is a 1-axis analog driver for use with Piezo LEGS motors from PiezoMotor. This driver enables single digit nanometer positioning in combination with mm/s speeds. Maximum speed, determined by the size of the motor (capacitive load) is generally in the few millimeters per second range.

Ordering informationDriverPMCM31-02 1-axis analogue driver for

Piezo LEGS motors

Nanometer resolutionAnalog controlLow power consumptionSmall size

71

http://www.piezomotor.com/products/drivers/pmcm31/

7372

Functional principleThe driver controls the Piezo LEGS motor by feeding waveform signals which elongates and bends each of the piezo drive legs. The waveforms are specially designed to make the motor drive legs perform a precise walking motion. The motion of the drive legs is transferred via friction contact to a linear rod or to a rotary disc.

For each waveform cycle the Piezo LEGS motor will take steps, by definition called waveform-steps (wfm-steps). The wfm-step length is load dependant and also depends on the signal phase shift. With maximum phaseshift (90˚) the step size is in the range of a few

micrometers for a linear Piezo LEGS motor. Rotary Piezo LEGS motors have their drive legs working on the perimeter of a drive disc. The wfm-step angle depends on the diameter of the rotary motor but is usually less than one milliradian.

The maximum step length (and hence the speed) is reduced by internal phase shifting of the waveform signal, and fine positioning is performed through analog bending of the drive legs. The user of the PMCM31 driver will only need to change the control signal voltage level in order to go from full step size down to high precision positioning.

Main Dimensions PMCM31

17,2

1

73,6

71

64

62

4,5

7372



Technical SpecificationType PMCM31-01 NoteNumber of Axis 1

Electrical Phases per Axis 4

Control Signal Range ± 9.6 V

Waveform Voltage 47 ±3 V

Waveform Trapetzodal

Power Supply Current 0.3 A<0.02 A

at maximum speedat standby

Open Loop Operation Yes

Temperature range +10 to +50 °C

Storage temperature –25 to +85 °CMotor Connector JST BM05B-SRSS-TB

Port Connector 8-pol socket Phoenix type

Power Supply Voltage 12 ±0.5 V DC stabilized

Dimensions 73.6 x 71 x 17.2 mm

Weight 70 gram

Part Number PMCM31-01 PMCM31 revision 01

PiezoMotor® Microstep Driver PMD101


Nanometer resolutionClosed loop regulationOpen loop modeGeneral I/O

PMD101 is a 1-axis driver for use with Piezo LEGS motors from PiezoMotor. It is one of the more advanced drivers in the product range giving the Piezo LEGS motors resolution down in the nanometer/microradian range. Driving the motors in closed loop is possible when reading back position from an positional sensor. PMD101 supports quadrature encoders, and serial SSi sensors. Issuing a single command will guide the motor to the exact encoder count, taking in to account the parameter settings for ramping behavior.

Ordering informationDriverPMD101 1-axis microstep driver for

Piezo LEGS motors

75

http://www.piezomotor.com/products/drivers/pmd101/

7776

Functional principleDriver controls the Piezo LEGS motor by feeding waveform signals which elongates and bends each of the piezo drive legs. Waveforms are specially designed to make the drive legs perform a precise walking motion. Motion of the drive legs is transferred via friction contact to a linear rod or to a rotary disc.

For each waveform cycle the Piezo LEGS motor will take one full step, by definition called a waveform-step (wfm-step). The wfm-step length is load dependant but in the range of a few micrometers for a linear Piezo LEGS motor. Rotary Piezo LEGS motors have their drive legs working on the perimeter of a drive disc. The wfm-step angle depends on the diameter of the rotary motor but is usually less than one milliradian.

Generated signal waveform is made up of a large number of voltage target points in time. Each small voltage change will move the motor only by a fraction of a wfmstep, defined as a

microstep. PMD101 driver gives a maximum resolution of 2048 microsteps per full wfm-step. One microstep with highest resolution settings equals ~2 nanometer (0.002 µm) of linear motion, or ~0.5 microradian of angular motion.

Working with the driverPMD101 communicates with the host (PC) via USB. Communication with the driver is through a protocol language (ASCII commands). User can run in closed loop target mode, or in open loop mode, with full access to set resolution, step frequency (speed) etc. Positional sensors are used to keep track of the precise position of the Piezo LEGS motors. The driver can read limit switches and reset at index. Ramping parameters are set to prevent overshooting when closing in on target in closed loop operation. The PMD101 is a full featured driver for demanding applications.

Main Dimensions PMD101

36

106

66

7776



Technical SpecificationType PMD101 NoteNumber of Axis 1


Signal Voltage Range 0-45 V

Max Resolution 2048 µsteps / wfm-step example LT20 motor at no load:one wfmstep ≈ 5 µmone µstep ≈ 2.4 nm


Closed Loop Operation Yes

Number of Sensor Axis 1

Supported Sensors QuadratureAnalogue

Serial

with index (ABZ)

SSiQuadrature Counting Frequency 5 MHz

General I/O 3 in2 out

only 1 input pin available when using 2 limit switches

I/O Port Features Step direction interface,Analog run

Host Communication RS232 (via USB) hardware implemented USB-to-RS232,commands are sent in plain ASCII format

Host Connector USB

Motor Connector JST BM05B-SRSS-TB

Sensor Connector JST BM06B-SRSS-TB

I/O Port Connector 2 x 8 pin header for 16 pole IDC plug

Power Supply 12-24 V DC 15 V (1200 mA) AC-DC adaptor included

Dimensions 106 x 66 x 36 mm


Nanometer resolutionClosed loop regulationOpen loop modeAnybus module

PMD104 is a 4axis driver for Piezo LEGS motors. It is one of the more advanced drivers in the product range giving the Piezo LEGS motors resolution down in the nanometer/microradian range. Driving the motors in closed loop is possible when reading back position from an positional sensor. PMD104 supports quadrature sensors and a few different serial sensors. Issuing a single command will guide the motor to the exact encoder count, taking in to account the parameter settings for ramping behavior.

Ordering informationDriverPMD104 4-axis Microstep driver for Piezo

LEGS motors

79

8180



Generated signal waveform is made up of a large number of voltage target points in time. Each small voltage change will

move the motor only by a fraction of a wfmstep, defined as a microstep. PMD104 driver gives a maximum resolution of 2048 microsteps per full wfm-step. One microstep with highest resolution settings equals ~2 nanometer (0.002 µm) of linear motion, or ~0.5 microradian of angular motion.

Working with the driverPMD104 communicates with the host (PC) via RS232 or TCP/IP. Communication with the driver is through a protocol language. The user can run in closed loop target mode, or in open loop mode, with full access to set resolution, step frequency (speed) etc. Positional sensors are used to keep track of the precise position of the Piezo LEGS motors. The driver can read limit switches and reset at index. Ramping parameters are set to prevent overshooting when closing in on target in closed loop operation. The PMD104 is a full featured driver for demanding applications.


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Technical SpecificationType PMD104 Note

Number of Axis 4



Max Resolution 2048 µsteps / wfm-step example linear LT20 motor at no load:one wfm-step = 5 µmone µstep = 2.4 nm




Supported Sensors QuadratureSerial

with index (ABZ)

Sensor Counting Frequency 35 MHzFirmware Bootloader Yes

Host Communication RS232 and TCP/IP

Host Connector 1 x D-sub DE91 x RJ45

RS232TCP/IP (via Anybus interface)

Motor Connector 1 x D-sub DB25F motor 1-4

Sensor Connector 2 x DA15F1 x DC37F

sensor 1, sensor 2sensor 3-4

Power Supply 24 V DC 24 V (4 A) AC-DC adaptor included

Dimensions 267 x 251 x 87 mm




Nanometer resolutionClosed loop regulationOpen loop modeGeneral I/O

PMD206 is a 6-axis driver for use with Piezo LEGS motors from PiezoMotor. The 200-series drivers are the most advanced in the product range, giving Piezo LEGS resolution down in the sub-nanometer/sub-microradian range. Driving the motors in closed loop is possible when reading back position from positional sensors. PMD206 supports quadrature encoders and serial SSi sensors. Issuing a single command will guide the motor to the exact encoder count, taking into account the parameter settings for ramping behavior.

Ordering informationDriverPMD206 6-axis microstep driver for Piezo LEGS

motors

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http://www.piezomotor.com/products/drivers/pmd206/

8584



Generated signal waveform is made up of a large number of voltage target points in time. Each small voltage change will move the motor

only by a fraction of a wfmstep, defined as a microstep. PMD206 driver gives a maximum resolution of 8192 microsteps per full wfm-step. One microstep with highest resolution settings equals ~0.6 nanometer (0.0006 µm) of linear motion, or ~0.1 microradian of angular motion.

Working with the driverPMD206 communicates with the host (PC) via TCP/IP or by serial 4wire RS485. Communication with the driver is through a protocol language (ASCII commands). User can run in closed loop target mode, or in open loop mode, with full access to set resolution, step frequency (speed) etc. Positional sensors are used to keep track of the precise position of the Piezo LEGS motors. Driver can read limit switches and reset at index. Ramping parameters are set to prevent overshooting when closing in on target in closed loop operation. PMD206 is a full featured driver for demanding applications.


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1 3

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Technical SpecificationType PMD206 Note

Number of Axis 6



Max Resolution 8192 µsteps / wfm-stepexample LT20 linear motor at no load:

one wfmstep ≈ 5 µmone µstep ≈ 0.6 nm




Supported Sensors QuadratureSerial

with index (ABZ)SSi

Quadrature Counting Frequency 20 MHz

General I/O 3 out, 4 in on each sensor axis

Host Communication RS485TCP/IP commands are sent in plain ASCII format

Host Connector 1 x D-sub 9M (COM1)1 x RJ45 (TCP/IP)

Motor Connector 6 x D-sub 9F (M1-M6)

Sensor and I/O Connector 6 x D-sub HD 15F (S1-S6)External Sensor 1 x D-sub 9M (COM2)

1 x RJ45 (TCP/IP)Power Supply 110-230 V AC, 50/60 Hz

Dimensions 328 x 298 x 83 mmNote: All specifications are subject to change without notice.


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Linear Encoders

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SelectionWith high resolution motors it is important to exercise great care in selecting the appropriate encoder, and even more important – the correct encoder location. The rule of thumb is to place the encoder as close as possible to the point of interest. This will minimize issues like thermal drift in the mechanical structure. Experts at PiezoMotor are available regarding design and selection questions.

System designTo make a complete closed loop motion system a number of key components are required:

Piezo LEGS linear motor

Piezo LEGS microstep driver

Linear guide (roller bearing)

Encoder

Scale, with/without index mark

Cabling

Piezo LEGS linear motors are capable of extreme resolution, down to the sub-nanometer range. Position encoders are required to build a system with high repeatability and accuracy.

PiezoMotor offers linear encoders from Renishaw® and from MicroE Systems®. Both companies are supplying very high quality, top of the line encoders. Encoders of two different resolutions from each company are kept in stock at PiezoMotor. They are offered as an add-on to the motor purchase, complete with cables, instructions, drawings and CAD files, giving the customer an easy integration. Common features to all encoders:

Linear Encoders

Non-contact optical encodersQuadrature interface – A/B and indexCompatible with all PiezoMotor microstepping drivers

Installation GuidelineIn a closed loop system, the motor, encoder and driver act together to move an object to a given target position. Accuracy of the position is given by the accuracy of the sensor. With the high resolution motor, Piezo LEGS, it is possible to regulate to a position within ±1 sensor count. The total system accuracy is depending on where the sensor is mounted, how it is mounted and of course the mechanical stability and thermal behavior of the complete assembly.

Mechanical InstallationLinks to the manufacturer manuals can be found at www.piezomotor.com. The documentation provides information about the correct mounting of the encoder and encoder scale. The mechanical design and the location of the sensor is very important. For example, 10 mm of steel (with thermal expansion coefficient of 12·10-6 ºC-1) located between the sensor position and the position of interest will introduce an error due to thermal drift of 1.2 µm for a 10°C temperature change.

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With a high resolution Piezo LEGS motor, it is possible to continuously operate in closed loop correcting for thermal changes in other parts of the structure, but one must be able to rely on the encoder readout.

All of the encoders discussed here are incremental encoders. They are only giving counting pulses of the encoder resolution when moving. To have an absolute position we need to find a known position where the position is set to zero, or to a desired value. Movement away from this position will then be counted by the driver and the position will be continuously updated. An absolute reference point can be found by the encoder if the scale is equipped with an index mark. The driver can search for the index mark and reset the position when it is encountered.

Electrical InstallationThe supplier manuals provide information about the correct installation from an electrical point of view. Moving at 10 mm/s with a 5 nm sensor will give 2 MHz pulses from the encoder. This is a fairly high frequency and the wiring should be made according to the instructions in the supplier manuals. The different parts of the system must be grounded properly. For a complex system with multiple sources of electrical noise, finding the correct grounding may require testing of several solutions.

Encoders are designed to work with a specified supply voltage. Due to power consumption there can be a voltage drop in the wiring to the encoder. This is more likely to occur when operating a high resolution encoder at high speed.

Maximum counting frequency of the encoder should be set lower than the maximum counting frequency of the driver. This is to ensure that counting pulses are counted correctly in the driver and that no pulses are lost. Keep in mind that the instantaneous speed can be higher than the average speed.

OperationThe motor driving direction and the encoder counting direction can be switched in a particular design. The Motion System software from PiezoMotor will verify this when a new system is setup. If a different software package is used the user must set the direction parameters separately before using the system in closed loop. See the driver manual for details. Failure to set the parameter will result in movement to limit in one direction.

8988

Ordering informationReadhead and interpolator PiezoMotor p/n Renishaw p/n NoteTonic™Resolution 100 nm (i.e. 0.1 µm)

REN-LENC-T-0100 T1001-15A; Ti0200A4A 1.5 m cable

Tonic™Resolution 5 nm (i.e 0.005 µm)

REN-LENC-T-0005 T1001-15A; Ti4000A4A 1.5 m cable

Driver Connector Cable PiezoMotor p/n Renishaw p/n NoteCable for PMD101 CK6351-15 - 1.5 m cable

Cable for PMD206 / PMD236 CK6350-15 - 1.5 m cable

Scale PiezoMotor p/n Renishaw p/n NoteRGSZ20 Gold Scalewith INTRACK index mark

REN-SCALE-RZ-100 A-9420-0010 length = 100 mmindex mark in center

P Limit RENSCALELIMP A-9653-0138 10 mm magnet, north pole facing

Q limit RENSCALELIMQ A-9653-0139 10 mm magnet, north pole facing

Tape scale end clamps (2 pcs) REN-SCALE-CLAMP A-9523-4015

Ordering informationReadhead and interpolator PiezoMotor p/n MicroE p/n NoteMercury II™ 6000Resolution 100 nm (i.e. 0.1 µm)

MIELENCM0100 MII6510AB200320 1 m cable

Mercury II™ 6000Resolution 5 nm (i.e 0.005 µm)

MIELENCM0005 MII6710AB4000320 1 m cable

Driver Connector Cable PiezoMotor p/n MicroE p/n NoteCable for PMD101 CK6351-15 - 1.5 m cable

Cable for PMD206 / PMD236 CK6350-15 - 1.5 m cable

Scale PiezoMotor p/n MicroE p/n NotePurePrecision™ Laser Tape Scale MIESCALETS100 TS-00100 length = 100 mm

Set of 8 index markers MIESCALEINDEX IMS

Set of 4 pairs of limit markers MIESCALELIM LMS

Tape scale end caps (2 pcs) MIESCALECAPS EC

Accessories PiezoMotor p/n MicroE p/n NoteSmartPrecision Alignment Tool MIEACCALIGNEU ATMII5000SEU with power supply of

European standardSmartPrecision Alignment Tool MIEACCALIGNUS ATMII5000SUS with power supply of

US standard

Linear Encoders

Installation Guidelinesfor LL and LT motors

Drive rod

The Piezo LEGS is a high precision motor. A few simple instructions must be followed in order to get the best performance and lifetime. If the motor is installed poorly both performance as well as life time is severely affected.

The motor drive rod must not be subjected to non-axial force – even small loads or torques on the end of the drive rod may cause loss of proper friction contact between drive legs and drive rod. The motor function can be impaired and the motor can be damaged.

Mechanical Notes

✔YES ✘NO ✘NO

F F

M

POORFRICTION CONTACT

POORFRICTION CONTACT

PRELOADDrive legs - piezo actuators

Mechanical adapter with sheet metal extender

Piezo LEGS® Linear Twin 20N Piezo LEGS® Linear 6N

The Piezo LEGS is a direct drive motor. Proper friction coupling between drive legs and drive rod is essential for optimum performance. When properly installed the motor can position down to the nanometer range without backlash.

Installation Guidelines for LL and LT motors

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9392

Always mount using a mechanical adapter with flexible sheet metal extender so that transverse loads and torques on the drive rod are minimized. Never directly connect the drive rod and moving part in your application (for example when connecting the motor to a linear bearing). Mounting directly will introduce loads large enough for the drive rod to loose proper friction contact.

✔YES ✘NO

✔YES

✔YES

✘NO

✘NO4 mounting screws

2 mounting screws

Always mount using the intended mounting holes. Do not use the non-threaded holes in motor housing for fastening the motor. Do not clamp the motor.

9392

If a mechanical adapter with metal sheet extender cannot be used because of space limitations, we suggest the motor work against a spring loaded linear bearing. Small non axial loads can be reduced by pressing against a spherical surface. Note that angular misalignments may generate non-axial loads resulting in impaired function.

✔YES ✘NO

FSFS

F

Misalignments in the drive plane are less critical but should be avoided. If the drive rod is aligned poorly there is risk for contact between drive rod and motor housing. Contact may impair function.

✔YES ✘NO

✔YES ✘NO

F

Always align the drive rod so that there are no loads transverse the drive rod axis of motion. Even small angular misalignment may impair motor function.


If acceptable, insert a thin piece of hard rubber between drive rod and stage block to remove vibrations.

The drive rod must not be removed from the motor, and it must not be moved to a position where contact with any drive leg is lost. The drive legs can be severely damaged if they are not preloaded while motor is running. Repositioning a drive rod that has come out of place may crack the ceramic drive legs. Contact PiezoMotor for instructions on how to reposition the drive rod.

✘NO

The maximum voltage of +48 V relative to GND must never be exceeded. Overvoltage or reverse polarities can damage the motor.

Be careful not to overheat motor! Continuous operation at higher drive frequencies may damage the motor. In non-continuous applications higher drive frequencies may be tolerated, but please consult PiezoMotor in these cases.

Twin configured motors must be connected with two motor cables. The two sides of a twin configured motors are run in parallel. Use a Twin Connect Board for proper wiring.

When using PiezoMotor drivers, be sure to check driver data sheet or manual for notes on maximum drive frequency for different capacitive loads.

Electrical Notes


PiezoMotor Uppsala AB

Stålgatan 14

SE-754 50 Uppsala, Sweden

Telephone: +46 18 489 50 00

Fax: +46 18 489 50 01

[email protected]

www.piezomotor.com

ABOUT PIEZOMOTORPiezoMotor is a world-leading developer and manufacturer of direct-drive, micro-motors based on piezoelectric materials. Simple, precise and very small, piezoelectric motors are replacing traditional electromagnetic motors when these fail to meet exacting space/performance demands. Piezo LEGS® motors minimize total product size and deliver much greater precision. Leading multi-national companies number among our many clients.

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