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XPoint Memory Comparison Process & Architecture Flash Memory Summit 2017 Santa Clara, CA 1 Jeongdong Choe Senior Technical Fellow, TechInsights Persistent Memory Forum R-12 3D XPoint: Current Implementation s and Future Trends

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Page 1: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint Memory Comparison

Process & Architecture

Flash Memory Summit 2017

Santa Clara, CA

1

Jeongdong Choe Senior Technical Fellow, TechInsights

Persistent Memory Forum R-12 3D XPoint: Current Implementation s and Future Trends

Page 2: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

Contents

Flash Memory Summit 2017

Santa Clara, CA

2

Semiconductor Memory Device Roadmap

XPoint Memory Overview

XPoint Memory Deep Dive

• Process Integration & Materials

• Memory Tile & Cell Design

• Transistors

Leading, Competing or Chasing? • Comparison with DRAM & 3D NAND

Page 3: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

Memory Device Roadmap

Flash Memory Summit 2017

Santa Clara, CA

3

Page 4: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

Questions About XPoint

Flash Memory Summit 2017

Santa Clara, CA

4

*PCM? Materials?

*Selector? Ternary/Quaternary Phase? As doped?

*Multi-Stacked?

*Layouts? PCM patterning? Double patterning used?

*Memory density? Memory array efficiency?

*Overall memory cell design & architecture?

*Technology Node?

*Die floor plan?

*CMOS under Memory Array?

*Functional blocks? Circuits?

*Top/Middle/Bottom electrodes connection?

*Performance? Transistor parameters? Cell set/reset Current?

*Replace NAND? Replace DRAM?

*# Masks? # Process steps? Process sequence?

*Cost? Cost effective product?

*N+1?, N+2?

*Differences from Micron QuantX?

*Throughput? Yield?

* etc.

Page 5: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint Memory Overview

Flash Memory Summit 2017

Santa Clara, CA

5

• 16GB single die in a PKG

• Memory efficiency: 91.4 %

• Memory density (/Die): 0.62 Gb/mm2

• Memory density (/Array): 0.69 Gb/mm2

Page 6: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint: Process Integration

Flash Memory Summit 2017

Santa Clara, CA

6

SEM X-Section (Array)

• GST-based PCM (Phase Change Memory) between M4 and M5

• Storage layer vertically stacked on Selector

• Se-Ge-Si ternary phased OTS Selector with As doped

• Double memory cell stacked

• 1 Poly Si (Co-silicide), 5 Metals (excluding memory/WL/BL layers)

Page 7: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint: Memory/OTS Elements

Flash Memory Summit 2017

Santa Clara, CA

7

• Top & bottom cell stacked

• TWL/TE/PCM/ME/OTS/BE/BL2/BL1/TE/PCM/ME/OTS/BE/BWL

• PCM: Ge0.12Sb0.29Te0.54(Si0.05), OTS: Se0.44As0.29Ge0.1Si0.17,

Top Cell

Bottom Cell

Page 8: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint, could be ……

Flash Memory Summit 2017

Santa Clara, CA

8

1,000 times faster than NAND Flash

10 times denser than DRAM

1,000 times better endurance than NAND

Really?

vs. 3D NAND?

Page 9: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint vs. DRAM: Memory Density

Flash Memory Summit 2017

Santa Clara, CA

9

• Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM)

Page 10: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint vs. DRAM: Cell Size

Flash Memory Summit 2017

Santa Clara, CA

10

• Memory Cell Size: 58% (vs. SS 18nm DRAM), 36% (vs. M 20nm DRAM)

(x10-4 µm2)

Page 11: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint vs. 3D NAND: Memory Density

Flash Memory Summit 2017

Santa Clara, CA

11

• Memory Density: 24% (vs. SS 48L V-NAND TLC), 18% (vs. Toshiba/SanDisk 64L)

2D NAND

3D NAND (48L)

XPoint

3.4

5.6

3D NAND (64L)

0.62 0.69

Page 12: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint vs. 3D NAND: Array Efficiency

Flash Memory Summit 2017

Santa Clara, CA

12

• Memory Array Efficiency … may not represent

Effective Memory

Cell Area Efficiency

2D NAND

3D 64L

NAND

Page 13: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint vs. 3D NAND: Array Efficiency

Flash Memory Summit 2017

Santa Clara, CA

13

• Comparison of Effective Memory Cell Area Efficiency: Higher the better

2D NAND

3D NAND 48L

XPoint

64L

43.9%

48L

3D NAND 64L

53.2%

Page 14: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint vs. 3D NAND: Unit Cell Area

Flash Memory Summit 2017

Santa Clara, CA

14

• Comparison of Effective Unit Cell Area: Lower the better

2D NAND

3D NAND

48L 3D NAND

64L

XPoint

Page 15: Process & Architecture - Flash Memory Summit · PDF fileSanta Clara, CA 9 • Memory Density: x3.2 (vs. SS 18nm DRAM), x6.6 (vs. M 20nm DRAM) XPoint vs. DRAM: Cell Size Flash Memory

XPoint is ……

Flash Memory Summit 2017

Santa Clara, CA

15

6 times denser than Micron 20 nm DRAM

3 times denser than Samsung 1x DRAM

vs. DRAM

vs. NAND

18% memory density of Toshiba/SanDisk 64L NAND

Higher memory cell area efficiency than 2D NAND

Relatively lower cell area efficiency than 3D NAND


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