precision wireless metrology usergroup 080813 · 2019-06-06 · cyberoptics semiconductor, inc....
TRANSCRIPT
![Page 1: Precision Wireless Metrology UserGroup 080813 · 2019-06-06 · CyberOptics Semiconductor, Inc. WaferSenseTM AGS -Precision Wireless Gap Measurement • Wireless, non-contact, wafer-like](https://reader033.vdocuments.us/reader033/viewer/2022050112/5f49d0e89c52e1625860eebb/html5/thumbnails/1.jpg)
Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
CyberOptics Semiconductor, Inc. “innovating measurement technology”
Precision Wireless Metrology Applications for
Improved Productivity and Process Control
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
WaferSenseTM Product Overview
• Wireless, Waferlike, battery powered form-factor with bluetooth communication
• Real-Time data reporting
• Real-Time Adjustments with Direct Feedback
• Ability to Record, Store and Trend Data over Time– Compare Tools, Chambers and Technicians– Correlate Process Results Tool to Tool
• Vacuum Compatible
• Inclination measurement, robot alignment, chamber gap measurement and vibration measurement systems
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
WaferSenseWaferSenseTMTM ALS2ALS2-- Inclination Measurement Inclination Measurement
SystemSystem
• Horizontal capability ±7.0° (±0.03° accuracy)
• Vertical capability ±50° (±0.05° accuracy)
• Wafer-like form factor and wireless communication ensure access to all stations
• Measurement data is logged for reference to CSV file
• Absolute and relative plane measurement
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
ALS2 Value PropositionsALS2 Value Propositions--
FoupFoup and Cassette Validationand Cassette Validation
• X axis is shown as BLUE line and Y axis is shown as PINK line. Y axis is inclined 0.5 degrees to rear at 18th slot.
Wafer Levels in Slots
-0.6
-0.4
-0.2
0
0.2
1 3 5 7 9 11 13 15 17 19 21 23
Slot Numbers from 1 to 24
Inc
lin
ati
on
[D
eg
]18th Slot is inclined
for 0.5 degrees
from 3rd slot.
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
In Tool Inclination ChecksIn Tool Inclination Checks
Easily levels end effectors, lift pins and hot plates to assure smooth wafer transfers and consistent process results
Detects the slightest excursion in pitch and roll
• Accurate to ±0.03°
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
End Effector and Lift Pin LevelingEnd Effector and Lift Pin Leveling
• ALS was transferred from End Effecter Retracted, Stretched, Xfr to Lift Pins and Cool Plate
• Arm/end effecter was pitched and rolled 0.1 and 0.2 degrees. Lift pin set is 0.1 degree pitched. Cool Plate is level
Wafer levels from Transfer, Lift Pins and Plate
-0.2
-0.1
0
0.1
0.2
0.3
1 2 3 4
Arm Retract, Stretched, Lift pins and Plate
Ab
so
lute
In
cli
na
tio
ns
[D
eg
]
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
Vertical Furnace LevelingVertical Furnace Leveling
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
WaferSenseWaferSenseTMTM ATSATS-- Robot Robot
Teaching/Alignment/Positioning SystemTeaching/Alignment/Positioning System
• Vision based target acquisition system
• On Board Camera w/Illumination & DSP
• Align automation handoffs
• Data can be logged to CSV file
• Center wafer placement- spin cups, hot/chill plates, diffusion boats, Deposition and Etch Chambers
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
Automatic Teaching System (ATS)Automatic Teaching System (ATS)
Wafer-like, wireless hardware Intuitive software
Image of Target Feature acquired by
ATS camera
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
ATS Innovative Principle of OperationATS Innovative Principle of Operation
Target Feature
Downward looking camera
x
y
z
• Real-Time Video
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
ATS Theory of OperationATS Theory of Operation
Measured
Offset
Camera AxisPedestal
Center Line
Target
Acquisition
Volume
Target
Feature
Transfer Pins
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
ATS Value PropositionsATS Value Propositions
••ATS does not require equipment dismantling or ATS does not require equipment dismantling or chamber breaking.chamber breaking.
••ATS can access stations through automationATS can access stations through automationand can be used by one technician.
••ATS collects/records objective data for ATS collects/records objective data for consistent process setup and makes it available consistent process setup and makes it available for statistical analysis and recording.for statistical analysis and recording.
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
WaferSenseWaferSenseTMTM AVS: Wireless Vibration AVS: Wireless Vibration
MeasurementsMeasurements
• Wireless, non-contact, wafer-like device for measuring vibrations of wafer transfers in x, y and z axis
• Troubleshoot tool and robot issues
• Repeatable and Objective vibration and acceleration data can be Compared tool to tool
• Automatic handling, speeds setups & troubleshooting
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
WaferSenseWaferSenseTMTM AVSAVS-- OverviewOverview
• Baseline performance can be recorded and periodically monitored for changes.
• Engineers can see the effect of adjustments in real time, speeding equipment alignment and setup, and motion parameters can be optimized.
• Vibration data can be compared not only to past readings but from one tool to another to reduce maintenance and cycle time.
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
AVS: Wireless Vibration System AVS: Wireless Vibration System -- SpecsSpecs
• 3 axis measurement• Dual SW applications for real time recording of events and
replay/comparison of events• Standard wafer sizes of 200 and 300 mm• Freq Response: up to 200 Hz • 1kHz Sample Rate• Range ±2 G• Amplitude Resolution: ±0.01 G• Height 6.3 mm• Weight: 300mm <200g, 200mm <150g, 450mm ~450g• Operational use of more than 4 hours on a single charge• Temperature spec: 20 - 70C continuous; Able to withstand
temperatures of 120C for up to 5 minutes in air, not in contact with heat source
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
VibeViewVibeView™™ Event recording SWEvent recording SW• Real time display of time domain and frequency domain (FFT) data and recording
capable software with selectable scale factor, Go/No Go, event marking, recording length.
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
VibeReviewVibeReview™™ Event replay and comparison Event replay and comparison
SWSW• VibeReviewTM allows you to display recorded event data and can
compare multiple files.
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
AVS Value PropositionsAVS Value Propositions
• Troubleshoot and predict robot and transfer equipment failures before they happen
• Identify Wafer Scraping or Dragging that Impact Yields due to Particle Generation
• Verify acceptable conditions that exist on tools
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
WaferSenseWaferSenseTMTM AGSAGS-- Precision Wireless Gap Precision Wireless Gap
MeasurementMeasurement
• Wireless, non-contact, wafer-like device for measuring critical gaps in Deposition & Etch tools
• Reduce tool calibration time with live feedback
• Objective & reproducible adjustments for better process uniformity
• Automatic handling, speeds setups, maintenance & troubleshooting
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
AGS OperationAGS Operation-- Three capacitance sensors for Three capacitance sensors for
measurement and parallelismmeasurement and parallelism
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
How Does AGS Work?How Does AGS Work?
Shower head
Pedestal
Gases
• Three points define a plane
• Three equal gaps means surfaces are parallel
GapParallelAGS
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
GapViewGapView™™ SW FeaturesSW Features
Current gap measurements
Offset display
Your gap tolerance
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8/18/2008 Copyright © 2008, All rights reserved, CyberOptics Semiconductor, Inc.
AGS Value PropositionsAGS Value Propositions
• Reliable and accurate
• Recordable
•Non-contact, hands free capability
• Time savings
• Potential for better process uniformity