precision transmission components quality …€¦ · 2.coordinated customer's precise...
TRANSCRIPT
Precision P
ositioning Stage
2018
PRECISION TRANSMISSION COMPONENTSQUALITY INNOVATION SERVICE
Taiwan Taoyuan Sales Office(T): +886-3-452-9922(F): +886-3-463-6060F., No.1, Ln. 30, Siyuan Rd., Jhongli Dist.,Taoyuan City 32057, Taiwan (R.O.C.)
China Dongguan Sales Office:DONGGUAN SHENGLV AUTOMATION EQUIPMENT TECHNOLOGY CO.,LTD.
(T): +86-769-81075584(F): +86-769-81075673Room 1002 Yihe Business Center , No.516, highway 358,Xinan Community Chang'an Town . Dongguan citywww.sflinear.com
Taiwan Tainan Headquarter+886-6-270-3518+886-6-270-3510No.22, Aly. 53, Ln. 428, Sec. 3, Wenhua Rd., Rende Dist.,Tainan City 717, Taiwan (R.O.C.)[email protected]
SF TECHNOLOGY CO.,LTD.
Manuel positioning stageStage outline & Characteristics _____________________________________ P03
Feeding mode instruction__________________________________________ P04-05
Precision inspection method _______________________________________ P06-09
Installation procedure_____________________________________________ P10-11
Use and handling precautions _____________________________________ P12
Crossed roller guide【 Model no. instruction 】________________________ P13
Crossed roller guide / X-Axis stage _________________________________ P14-21
Crossed roller guide / XY-Axis stage ________________________________ P12-29
Crossed roller guide / Z-Axis stage _________________________________ P30-37
Crossed roller guide / Thin-type /XY-Axis stage ______________________ P38-43
Crossed roller guide / High load capacity & High accuracy / X-Axis stage P44
Linear Ball guide / X-Axis stage ____________________________________ P45-46
Linear Ball guide / Z-Axis stage ____________________________________ P47-48
Linear Ball guide / Horizontal type /Z-Axis stage _____________________ P49-50
Rotary stage /θ-Axis stage ________________________________________ P51-54
Rotary Stage/ Small Angular type / θ-Axis stage _____________________ P55-56
Dovetail guide【 Model no. instruction 】_____________________________ P57
Dovetail guide / Feeding screw type / X-Axis stage ____________________ P58-60
Dovetail guide / Feeding screw type / XY-Axis stage ___________________ P61-63
Dovetail guide / Feeding screw type / Horizontal type /Z-Axis stage _____ P64-65
Dovetail guide / Feeding screw type / Z-Axis stage ____________________ P66-68
Dovetail guide / Feeding screw type / Long lead /X-Axis stage __________ P69-72
Dovetail guide / Rack and Pinion type/ Long stroke/ X-Axis stage _______ P73-79
Dovetail guide / Rack and Pinion type/ Long stroke/ Z-Axis stage _______ P80-82
Dovetail guide / Rack and Pinion type/ X-Axis stage ___________________ P83-85
Dovetail guide / Rack and Pinion type/ XY-Axis stage __________________ P86-88
Dovetail guide / Rack and Pinion type/ Z-Axis stage___________________ P89-91
Dovetail guide / Rack and Pinion type/ Thin-type / X-Axis stage _________ P92-94
Dovetail guide / Rack and Pinion type/ Thin-type / XY-Axis stage ________ P95-97
Dovetail guide / Rack and Pinion type/ Thin-type / Z-Axis stage_________ P98-100
Dovetail guide / α-Axis Goniometer stage ___________________________ P101-106
Dovetail guide /αβ-Axis Goniometer stage___________________________ P107-110
Feeding screw type / Laboratory Jacks /Z-Axis stage___________________ P111-112
Main feeding mode Characteristics Applied for guiding deviceA circle movementof handle rotation
Outline1.Mini-Stage is applied for high precision or mid and heavy capacity of various production
machinery, testing device, precise positioning and quantitative movement.2.There’re many kinds of mini-stages with single axis ( X axis); dual axis ( XY axis); Z axis; θ axis; α axis...can be collocated as needed .
Characteristics
Feeding mode instruction
1.Can be customized according to requirements of precise fine turning ; positioning ; quantita-tive movement and able to proceed mass feed of fine tuning.
2.Coordinated customer's precise machinery or instrument and fixed in suitable position.3.Feeding mode diversification such as coarse moving handle / micrometer head ; feed screw ,
rank and pinion with scale and able to manage movement rate.4.The sets of mini stages , XY-axis , XYZ-axis , XZ-axis , and multi-axis modules are able to
effectively reduce assembling process because of adjusting their vertical angle before shipping.
Rack and pinion
Feeding Screw
Micrometer head
1.Suitable for high speed mass feed.
2.Not suitable for precise positioning.
Precise reading Unit:0.01mm is suitable for precise tuning.
1.Use precise thread-screw pitch to proceed simple precise moving situation.
2.Used by various products due to it's cheaper than micrometer head.
Dovetail
1. Dovetail
2. Crossed roller
3. Linear ballbearing
1. Dovetail
2. Crossed roller
3. Linear ballbearing
03
Characteristics of different guide type
Structure
Characteristic
Application
Moving accuracy
Load capacity
Rigidity
Slide way Crossed roller
◆Composed of moving rails with 2 V-groove surfaces harden finish, ground precisely,and roller bearings which are connective and take turns moving in 90 degrees to meet requirement of high parallism and high flatness.In structure, V-groove and crossed roller acquire movement in high accuracy and capacity by linear transmission to act a high precision movement and load capac-ity performance
This applied to precise movement device in high accuracy and high capacity,optical instruments in precise gauging and fine tuning,various machine tool,gauging instrument,precise positioning and quanti-tative movment…etc
Excellent
Excellent
Excellent
04
Linear ball Doventail type
◆Slide way and body is in one unit, and Gothic arc-groove ground precisely to meet requirement of high parallism and high flatness.Gothic arc-groove formed by dual arc-grooves individually on upper and lower rails of body.Ball moving in single groove is structured by 2 point-con-tact,and total 4 contact points in dual arc-groove to form strong rail construc-tion. In case of rails of SUS-STAGE is to set ball assembly in arc-groove to save traditional adjustment and revision time.In addition,without adjustment screw would save accuracy problem and main-tenance time caused by loosen screw,and cheaper as well.
This applied to precise posistioning device in high accuracy and mid-capacity,product and design integrated system,optical experiment precise transportion and fine tuning mechanism application.
◆Dovetail plane─pinion and rack (Main material:Brass or Aluminum alloy)SFT supply proper models suitable for equipped to various modules such as small,rough-vibrate, large size for instal-lation.Driven-adjustment mode is rack and pinion.Apply to higher working frequency,requirement of faster move-ment and large stroke.
◆Screw-driven plan (main meteri-al:brass)Prepared by easy-carry standard and slide mode is screw shaft mode.Apply to lower frequency,fine tuning environ-ment.
This applied to optical instruments and equipments,sampler,detecting device,semi-conductor manufacturing equipment,test machine,micorscope,transit-ing machine,maching center,medical instrument,printer and others.
Excellent
good
good
Fair
good
Excellent
05
Precision inspection method
In linear motion units, geometric straight line decides positions in order from datum point to same direction, differences between length variation in those positions and datum is as measured value, the max. difference of geo-metric line is called " Straightness".
Straightness (refer to JIS B 6191-1993)
Linear motion parts would occur slanting intransmitting, and slanting proportion would cause deflection in linear transmission. Position is decided by same direction from datum point in order, and maximum angular gap mea-sured from horizontal direction of each posi-tion corresponding to the datum is called yawing (deviation). Same situation to have the maximum angular gap from vertical direction of each position corresponding to the datum called pitching.
Yawing and pitching (refer to JIS B 6191-1993)
Parallelism of plane, and slanting proportionbetween parallel interval to mechanism parts,and degrees between center place of manualstage movement and base plate is calledparallelism. Parallelism measurement is to fixmicrometer on the plate, and operate manualstage with clamping device to measure themaximum of 4 corner errors.
Parallelism (refer to JIS B 6191-1993)
06
To check measured figures from the meter applied to the area between limited strokes during vertical movement. The sum of plus and minus figures measured from the meter means the variation between the movement verticality with base surface.
Vertical Z axis
Vertical value between 2 axes also for one line of geometric line in transmission datum and one in its corresponding right angle. In the other direction(Opposite), to take slanting proportion in linear transmission, reference point of X-axis stage, and geometric line of final tested position as datum axes. X-axis stage as for datum axis, maximum of parallel errors from its vertical geometric line in oppo-sition to datum position of Y-axis stage to final texted position is called XY vertical value.
XY Vertical value (refer to JIS B 7440-1987)
07
Difference of datum circle and geometric circle. All points in line in same plane of 2 concentric circles, radius difference of 2 concentric circles is in case of smallest radial interval difference. Opposite to geometric circle, measured difference is called concen-tricity. Fix rotating stage on the plate, and put micrometer around stage. Have it to rotate one circle(360°) to proceed measuring. Con-centricity is half of top value shown in microm-eter.
Concentricity (refer to JIS B 6191-1993, B 6194-1997)
Rotate as center of single axis, in the period ofplane turning, max. slanting value of deviation of vertical plane to datum axis back to stage vertically is called plane travel amplitude. Take micrometer fixed on the plate to contact upper edge of rotating stage( rotating one circle 360), and proceed measuring. Top value shown in micrometer is called Plane-pulsating.
Plane travel amplitude (refer to JIS B 6191-1993)
08
1 times
1.5 times
1.5 times
AXIS DefinitionAbout definition of moving axis and rotating axis, SFT defines as chart below.X axis, Y axis are in parallel direction: Z axis in vertical direction;Rotating around X, Y, Z axes are called αaxis ,βaxis ,θaxis individually .
Temperature of environment
Volume-loaded limit recommendation
Please operate stages in regular range of temperature as listed.Please contact SFT if products in larger range required
Zaxes
XaxesYaxes
θaxes
αaxesβaxes
Stages classification
Stainless steel stage
Stainless steel slide
Others
Working temperature
09
Single axis
Dual-axes
● Move upper plate back and forth, and secure the screw on the base plate and work piece with tight confirmation.
● Screw security same as single axis.
Installation procedure
10
θ-axes
Other stages
● Move upper plate by rotating, and take the screw through it.
●Proceed taking screws through base plate in order and finding matched holes at same time.
●Lock the stage on the work piece with tight confirmation.
● Considering easy installation fit for other device, threaded hole pattern is made to meet requirement of securing from upper or lower direction, and this provides more options for installation.
11
Installation procedure
NOTICE
Diagrams of representative explanation in catalogs are sampled in SFT products series. Prod-ucts compared to diagrammatic examples in same series may have some difference in shape due to different mechanism design and spec, but basic operation remark are all the same.
Please read notices as follows before operation, this would have SFT series performed as best motion accuracy and usage life.
Operation principles1、SFT product series are all composed of part in high accuracy , please avoid environment of
extreme high temperature , extreme low temperature , huge temperature variation , exposed to sun light , high humidity , high dust , high vibration , high shock and easy-dewed...etc .
2、To maintain motion accuracy and usage life of products in all series , please check allow-able capacity of the product before operation . Don't overload out of rated capacity .
3、Besides allowable capacity limit , please avoid taking gravity of loaded object over the edge of the stage .
4、All kinds of rolling mechanisms set in the product need proper clean and lubricated mainte-nance in the period of operating , depending on situations of operation , and use appropri-ate lubricant .
5、All kinds of rolling mechanisms set in the product are adjusted and leveled by engineers before shipment , please do not try any adjustment if not trained or authorized .
6、Please use right lock unit , tools and wrench torque while processing products in positioning security and connecting security .
7、For accessories of SFT product series or related information , SFT sales could offer best consultation .
8、SFT also provide customized service for special purpose application or other unique spec .
12
【 Crossed roller guide/Model no. instruction 】SEMY60-AC
Feeding Postion
Side feeding
Vertical side feeding
Reve
rsed
side
Feed
ingRe
verse
d Vert
ical sid
e fee
ding
Reversed Vertical side feeding Reversed Vertical side feeding
Central feeding
Axis Material Feeding
Specifications
A: Aluminum alloy
S: Side
SR: Reversed side
SZ : Side feeding with micrometer on the top
SZR: Reversed side feeding with micrometer on the top
C: Central feeding
CR: Reversed Central feeding
R: Right side feeding
L: Left side feeding
S: Staniniess steel
F: Carbon steel
Stagetable size
M: Manual X: Single axis
Selectable Spec
Y: Dual axes
ZL: X axis+L bracket
R: θ axis
R: Angle θ axis
YW: Super thin dual axes
ZA: Z axis
13
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Crossed roller guide X-Axis stage
4-M3 Bolt holes
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
14
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Crossed roller guide X-Axis stage
9-M4 6.5DP
4-M4 Bolt holes
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
15
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
13-M4 5.5DP
4-M4 Bolt holes
16
Crossed roller guide X-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
15-M4 5.5DP
4-M4 Bolt holes
17
Crossed roller guide X-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
9-M3 6.5DP
4-M3 Bolt holes
18
Crossed roller guide X-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
9-M4 6.5DP
4-M4 Bolt holes
19
Crossed roller guide X-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
13-M4 5.5DP
4-M4 Bolt holes
20
Crossed roller guide X-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
4-M4 Bolt holes
15-M4 5.5DP
21
Crossed roller guide X-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
4-M3 Bolt holes
22
Crossed roller guide XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
9-M4 6.5DP
4-M4 Bolt holes
23
Crossed roller guideXY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
13-M4 5.5DP
4-M4 Bolt holes
24
Crossed roller guide XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
15-M4 5.5DP
4-M4 Bolt holes
25
Crossed roller guideXY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
9-M3 6.5DP
4-M3 Bolt holes
26
Crossed roller guide XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
9-M4 6.5DP
4-M4 Bolt holes
27
Crossed roller guideXY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
13-M4 5.5DP
4-M4 Bolt holes
28
Crossed roller guide XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
15-M4 5.5DP
4-M4 Bolt holes
29
Crossed roller guideXY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
Aluminum alloy
9-M3 6.5DP
9-M3 Bolt holes
30
Crossed roller guide Z-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
Aluminum alloy
9-M4 6.5DP
9-M4 Bolt holes
31
Crossed roller guideZ-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
Aluminum alloy
13-M4 5.5DP
4-M4 Bolt holes
32
Crossed roller guide Z-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
Aluminum alloy
15-M4 5.5DP
33
Crossed roller guideZ-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
Aluminum alloy
9-M3 6.5DP
9-M3 Bolt holes
34
Crossed roller guide Z-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
Aluminum alloy
9-M4 6.5DP
9-M4 Bolt holes
35
Crossed roller guideZ-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
Aluminum alloy
13-M4 5.5DP
4-M4 Bolt holes
36
Crossed roller guide Z-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
Aluminum alloy
15-M4 5.5DP
37
Crossed roller guideZ-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
8-M3 6.0DP
4-M3 Bolt holes
58.9
58.9
38
Crossed roller guide Thin-type XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
8-M3 6.0DP
4-M4 Bolt holes
39
Crossed roller guideThin-type XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
4-M4 6.5DP
4-M4 Bolt holes
40
Crossed roller guide Thin-type XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
4-M4 6.5DP
4-M4 Bolt holes
41
Crossed roller guideThin-type XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
4-M4 6.5DP
4-M4 Bolt holes
42
Crossed roller guide Thin-type XY-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
4-M4 6.5DP
4-M4 Bolt holes
43
Crossed roller guideThin-type XY-Axis stage
Specifications
Minimum reading scale :0.01mm
Ball screw lead :1.25mm
Surface finish :black anodized
Model No Table size Travel stroke Parallelism Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy7075
8-M4 8DP
4-M6 Bolt holes
44
Crossed roller guide High load capacity & High accuracy X-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :Electroless nickel plating
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightness Loadcapacity
carbon steel
4-M3 6.0DP
4-M3 Bolt holes
45
Linear Ball guideX-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :Electroless nickel plating
Model No Table size Travel stroke Parallelism Pitching Yawing Weight MaterialStraightness Loadcapacity
carbon steel
4-M4 6.0DP
4-M4 Bolt holes
46
Linear Ball guide X-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :Electroless nickel plating
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
carbon steel
3.5THRU
4-M3 6DP
47
Linear Ball guideZ-Axis stage
Specifications
Micrometer minimum reading capability :0.01mm
Surface finish :Electroless nickel plating
Model No Table size Travel stroke Pitching Yawing Weight MaterialStraightness Loadcapacity
carbon steel
4.5THRU
4-M4 6DP
48
Linear Ball guide Z-Axis stage
Specifications
Surface finish :Electroless nickel plating
3.5THRU
4-M3 5.0DP
Model No Table size Travel stroke Minimum reading scale Weight MaterialParallelism Loadcapacity
carbon steel
49
Linear Ball guideHorizontal type Z-Axis stage
Specifications
Surface finish :Electroless nickel plating
4.5THRU
4-M4 6.0DP
Model No Table size Travel stroke Minimum reading scale Weight MaterialParallelism Loadcapacity
carbon steel
50
Linear Ball guide Horizontal type Z-Axis stage
Specifications
Travel stroke : Coarse 360° Fine ±5°
Surface finish :black anodized
9-M2 4DP
4-M3 Bolt holes
Model No Table size Eccentric Weight MaterialLoadcapacity
Aluminum alloy
51
Rotary stageθ-Axis stage
Specifications
Travel stroke : Coarse 360° Fine ±5°
Surface finish :black anodized
8-M3 6DP
4-M4 8DP
4-M4 Bolt holes
Model No Table size Eccentric Weight MaterialLoadcapacity
Aluminum alloy
52
Rotary stage θ-Axis stage
Specifications
Travel stroke : Coarse 360° Fine ±5°
Surface finish :black anodized
8-M4 7DP8-M3 6DP
4-M4 Bolt holes
Model No Table size Eccentric Weight MaterialLoadcapacity
Aluminum alloy
Rotary stageθ-Axis stage
53
Specifications
Travel stroke : Coarse 360° Fine ±5°
Surface finish :black anodized
4-M3 6DP 12-M4 7DP
4-M4 Bolt holes
Model No Table size Eccentric Weight MaterialLoadcapacity
Aluminum alloy
Rotary stage θ-Axis stage
54
Specifications
Minimum reading scale : ≒1’51”mm
Travel stroke : ±10°
Surface finish :black anodized
4-M4 6.4DP
Model No Table size Parallelism Weight MaterialLoadcapacity
Aluminum alloy
55
Rotary stageSmall Angular type θ-Axis stage
Specifications
Minimum reading scale : ≒1’12”mm
Travel stroke : ±10°
Surface finish :black anodized
4-M4 6.4DP
Model No Table size Parallelism Weight MaterialLoadcapacity
Aluminum alloy
56
Rotary stage Small Angular type θ-Axis stage
Transmission
Manual
Guide Axis Feeding specification Stage Table Size
Selectable Spec
1: X axis A: Feeding screw
C: Rack and pinion Long stroke
D: Rack and pinion
E: Feeding screw(Long lead)
2 : XY axis
3 : Z axis
4 : X axis+L bracket
C: Dovetail Guide
Dovetail guide【 Model no. instruction 】SEMC2A-60
57
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M2 3DP4-M2 Bolt holes
Model No Table size Travel stroke Parallelism Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
58
Dovetail guide Feeding screw type X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M3 5DP4-M3 Bolt holes
Model No Table size Travel stroke Parallelism Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
59
Dovetail guide Feeding screw type X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M4 6DP4-M4 Bolt holes
Model No Table size Travel stroke Parallelism Weight MaterialStraightnessMoving Parallelism
Loadcapacity
Aluminum alloy
60
Dovetail guide Feeding screw type X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M2 3DP4-M2 Bolt holes
Model No Table size StraightnessTravel stroke Weight XY vertical value MaterialLoadcapacity
Aluminum alloy
61
Dovetail guide Feeding screw type XY-Axis stage
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M3 5DP4-M3 Bolt holes
Model No Table size StraightnessTravel stroke Weight XY vertical value MaterialLoadcapacity
Aluminum alloy
62
Dovetail guide Feeding screw type XY-Axis stage
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M4 6DP4-M4 Bolt holes
Model No Table size StraightnessTravel stroke Weight XY vertical value MaterialLoadcapacity
Aluminum alloy
63
Dovetail guide Feeding screw type XY-Axis stage
Specifications
Surface finish :black anodized
Travel distance per rotation of knob : 0.5mm
4-M3 6.0DPA visual angle
3-M4 THRUM3 Bolt holes
6.0DP
Feeding Konb
Model No Table size ParallelismTravel stroke Weight MaterialLoadcapacity
Aluminum alloy
64
Dovetail guide Feeding screw type Horizontal type Z-Axis stage
Specifications
Surface finish :black anodized
Travel distance per rotation of knob : 0.5mm
8-M4 8DPA visual angle
3-M5 THRUM4 Bolt holes
Feeding Konb
Model No Table size ParallelismTravel stroke Weight MaterialLoadcapacity
Aluminum alloy
65
Dovetail guide Feeding screw type Horizontal type Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M2 3DP
2.5 THRU
Model No Table size StraightnessTravel stroke Weight MaterialLoadcapacity
Aluminum alloy
66
Dovetail guide Feeding screw type Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M3 5DP
8-M3 Bolt holes
Model No Table size StraightnessTravel stroke Weight MaterialLoadcapacity
Aluminum alloy
67
Dovetail guide Feeding screw type Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Travel distance per rotation of knob : 0.5mm
Surface finish :black anodized
8-M4 6DP
9-M4x0.8
Model No Table size StraightnessTravel stroke Weight MaterialLoadcapacity
Aluminum alloy
9-M4.2 THRU 8x4.5 Bolt holes
37(11.5)
(20.
5)85
68
Dovetail guide Feeding screw type Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Feeding screw long lead type: 4.5mm
8-M3 5DP
4-M4 THRU 6 Bolt holes 3.5DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
69
Dovetail guide Feeding screw type Long lead X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Feeding screw long lead type: 4.5mm
8-M4 6DP
4-M5 THRU 8 Bolt holes 4.5DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
70
Dovetail guide Feeding screw type Long lead X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Feeding screw long lead type: 4.5mm
6-M4 6DP
4-M5 THRU 8 Bolt holes 4.5DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
71
Dovetail guide Feeding screw type Long lead X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Feeding screw long lead type: 4.5mm
10-M4 6DP
8-M5 THRU 8 Bolt holes 4.5DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
72
Dovetail guide Feeding screw type Long lead X-Axis stage
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Moving Parallelism
Load capacity (Vertical )
Aluminum alloy
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
6-M3 Bolt holes
6-M4 5DP4-M2 4DP
73
Dovetail guide Rack and Pinion type Long stroke X-Axis stage
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Moving Parallelism
Load capacity (Vertical )
Aluminum alloy
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
8-M3 Bolt holes6-M4 5DP
4-M2 4DP
74
Dovetail guide Rack and Pinion type Long stroke X-Axis stage
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Moving Parallelism
Load capacity (Vertical )
Aluminum alloy
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
6-M4 5DP4-M2 4DP
12-M3 Bolt holes
75
Dovetail guide Rack and Pinion type Long stroke X-Axis stage
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Moving Parallelism
Load capacity (Vertical )
Aluminum alloy
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
16-M3 Bolt holes6-M4 5DP4-M2 4DP
76
Dovetail guide Rack and Pinion type Long stroke X-Axis stage
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Moving Parallelism
Load capacity (Vertical )
Aluminum alloy
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Above travel stroke value is for 1 blocks .The travel stroke reduce 40mm when adding 1 block.
2 -M4 8DP 8-M3 6DPM6 7 DP
4-M4 Bolt holes
77
Dovetail guide Rack and Pinion type Long stroke X-Axis stage
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Moving Parallelism
Load capacity (Vertical )
Aluminum alloy
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Above travel stroke value is for 1 blocks .The travel stroke reduce 40mm when adding 1 block.
2 -M4 8DP
M6 7 DP 8-M3 6DP6-M4 Bolt holes
78
Dovetail guide Rack and Pinion type Long stroke X-Axis stage
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Moving Parallelism
Load capacity (Vertical )
Aluminum alloy
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Above travel stroke value is for 1 blocks .The travel stroke reduce 40mm when adding 1 block.
2 -M4 8DPM6 7 DP
8-M3 6DP
79
Dovetail guide Rack and Pinion type Long stroke X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
6-M4 5DP
4-M2 4DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
80
Dovetail guide Rack and Pinion type Long stroke Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
6-M4 5DP4-M2 4DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
81
Dovetail guide Rack and Pinion type Long stroke Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
4-M2 4DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
82
Dovetail guide Rack and Pinion type Long stroke Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
8-M4 7.5DP
4-M4 Bolt holes
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
83
Dovetail guide Rack and Pinion type X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
6-M4 7.5DP
4-M4 Bolt holes
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
84
Dovetail guide Rack and Pinion type X-Axis stage
10-M4 7.5DP
4-M4 Bolt holes
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
85
Dovetail guide Rack and Pinion type X-Axis stage
8-M4 7.5DP
4-M4 Bolt holes
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
86
Dovetail guide Rack and Pinion type XY-Axis stage
6-M4 7.5DP
4-M4 Bolt holes
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
87
Dovetail guide Rack and Pinion type XY-Axis stage
10-M4 7 .5DP
4-M4 Bolt holes
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
88
Dovetail guide Rack and Pinion type XY-Axis stage
8-M4 7.5DP
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
89
Dovetail guide Rack and Pinion type Z-Axis stage
6-M4 7.5DP
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
90
Dovetail guide Rack and Pinion type Z-Axis stage
10-M4 7.5DP
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
91
Dovetail guide Rack and Pinion type Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
8-M4 7.5DP
4-M4 Bolt holes
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
92
Dovetail guide Rack and Pinion type Thin-type X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
4-M4 Bolt holes
6-M4 7.5DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
93
Dovetail guide Rack and Pinion type Thin-type X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
10-M4 7.5DP
4-M4 Bolt holes
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity (Horizontal)
Load capacity (Vertical )
Aluminum alloy
94
Dovetail guide Rack and Pinion type Thin-type X-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
8-M4 7.5DP
4-M4 Bolt holes
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
95
Dovetail guide Rack and Pinion type Thin-type XY-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
6-M4 7.5DP
4-M4 Bolt holes
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
96
Dovetail guide Rack and Pinion type Thin-type XY-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
10-M4 7.5DP
4-M4 Bolt holes
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
97
Dovetail guide Rack and Pinion type Thin-type XY-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Sectional view
8-M4 7.5DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
98
Dovetail guide Rack and Pinion type Thin-type Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
Sectional view
6-M4 7.5DP
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
99
Dovetail guide Rack and Pinion type Thin-type Z-Axis stage
Specifications
Minimum reading scale : 0.1mm
Surface finish :black anodized
10-M4 7.5DP
Sectional view
Model No Table size ParallelismTravel stroke Weight MaterialLoad capacity
Aluminum alloy
100
Dovetail guide Rack and Pinion type Thin-type Z-Axis stage
4 5.0DP L4-M2 4.0DP L4-M3 6.0DP L
4-M3 Bolt holes
Specifications
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Material Load
capacity
Aluminum alloy
101
Dovetail guide α-Axis Goniometer stage
4 4.0DP L4-M2 4.0DP L4-M3 6.0DP L
4-M3 Bolt holes
Specifications
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Material Load
capacity
Aluminum alloy
102
Dovetail guide α-Axis Goniometer stage
4 5.0DP L 4-M2 4.0DP L 4-M3 6.0DP L
4-M3 Bolt holes
Specifications
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Material Load
capacity
Aluminum alloy
103
Dovetail guide α-Axis Goniometer stage
4 5.0DP L 4-M3 4.0DP L 4-M4 6.0DP L
4-M4 Bolt holes
Specifications
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Material Load
capacity
Aluminum alloy
104
Dovetail guide α-Axis Goniometer stage
4 5.0DP L 4-M3 4.0DP L 4-M4 6.0DP L
4-M4 Bolt holes
Specifications
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Material Load
capacity
Aluminum alloy
105
Dovetail guide α-Axis Goniometer stage
4 5.0DP L 4-M3 4.0DP L4-M4 6.0DP L
4-M4 Bolt holes
Specifications
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Material Load
capacity
Aluminum alloy
106
Dovetail guide α-Axis Goniometer stage
4 5.0DP L 4-M2 4.0DP L 4-M3 6.0DP L
4-M4 Bolt holes
Specifications
Aluminum alloy
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Load
capacity
Upper axis±20°;Lower axis±15° Upper axis≒2.2°;Lower axis≒1.89°
107
Dovetail guide αβ-Axis Goniometer stage
4 5.0DP L 4-M2 4.0DP L 4-M3 6.0DP L
4-M4 Bolt holes
Specifications
Aluminum alloy
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Load
capacity
Upper axis±15°;Lower axis±10° Upper axis≒1.89°;Lower axis≒1.33°
108
Dovetail guide αβ-Axis Goniometer stage
4-M4 Bolt holes
4-M4 6.0DP L
4 5.0DP L
Specifications
Aluminum alloy
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Load
capacity
Upper axis±25°;Lower axis±20° Upper axis≒2.0°;Lower axis≒1.3°
109
Dovetail guide αβ-Axis Goniometer stage
4-M4 Bolt holes
4-M3 4.0DP L4 5.0DP L
4-M4 6.0DP L
Specifications
Aluminum alloy
Surface finish :black anodized
Minimum reading scale : 0.1mm
Model No Table size Travel distance per rotation of knobTravel strokeHeight of rotation center Weight Load
capacity
Upper axis±20°;Lower axis±15° Upper axis≒1.3°;Lower axis≒1.0°
110
Dovetail guide αβ-Axis Goniometer stage
6-M4 Bolt holes
12-M4 10.0DP L
Specifications
Surface finish :black anodized
Travel distance per rotation of knob : 2mm
Model No Table size ParallelismTravel stroke Weight Material Loadcapacity
Aluminum alloy
111
Dovetail guide Laboratory Jacks Z-Axis stage
Specifications
Surface finish :black anodized
Travel distance per rotation of knob : 3mm
Model No Table size ParallelismTravel stroke Weight Material Loadcapacity
Aluminum alloy
112
Dovetail guide Laboratory Jacks Z-Axis stage