www.boschrexroth-us.com

Precise, Flexible,Efficient –

Automation Solutions for theSemiconductor & Electronics

Manufacturing Industries

The right solution no matter the application.

Customized solutions that leverage multiple technologies.

The largest selection of automation technology for the semiconductor industry.

Multi-technology solutions – Automation Solutions 3

The semiconductor and electronics manufacturing industries have a unique set of automation needs including mechatronic systems designed for smooth motion during product handling, material transport through vacuum environments, and nanometer scale positioning accuracies.

Our expertise is channeled into the development and advancement of new components, modules, and product lines for the entire process. New product innovation focuses on addressing application challenges and providing solutions to meet your needs.

With Bosch Rexroth, you will have access to our team of engineers that can help solve the challenges you face to ensure precise results and optimum performance.

The right solution no matter the application.

Customized solutions that leverage multiple technologies.

The largest selection of automation technology for the semiconductor industry.

4 Automation Solutions – Components and Hardware

Automation Components and Hardware

LINEAR MOTION TECHNOLOGIESIf you are looking for reliable guidance and precise positioning with diversity and functionality unmatched in the industry, our comprehensive range of profiled rail systems, linear bushings and shafts, ball screw assemblies, and linear modules is just what you need.

Ball & Roller Rail Systems• Size range from miniature 7mm to 125mm• Interchangeable rails & runner blocks across

all six accuracy classes & preloads• Low vibration• Stainless steel & corrosion resistant

plating options

Integrated Measuring System• Encoder system built into the block & rail• Absolute and incremental variants

5

Ball & Roller Screw Assemblies• Size range from 6mm to 80mm diameter• Many different leads to choose from• Precision classes from T3 (0.012/300mm) to T9• High rigidity, low noise, high speed• Corrosion resistant designs• Customized or standard end machining available• Full line of related accessories including end bearings,

pillow blocks, and nut housings

Linear Module Systems• Ball screw, belt, and linear motor driven• Configurable to the application needs including lengths

and precision class• Clean room and corrosion resistant options

Cartesian Robot Systems• Configurable to your application• Basic mechanical solution to

advanced solution including pre-configured controls

6 Automation Solutions – Components and Hardware

Automation Components and Hardware

ASSEMBLY TECHNOLOGIESFrom state-of-the-art transfer systems, to smooth clean room and ESD certified profiles, Rexroth gives you access to customized solutions to meet your production needs today with maximum versatility for the future.

The Original Aluminum Modular Profile SystemStrong profiles• Guaranteed performance data• Fully machined, corrosion-resistant surfaces• Re-usability

Industry-best connection technology• Easier to assemble• Easier to reconfigure• Greater flexibility

“Quick & Easy”• 30 different machining options for each profile• 500,000 combination options• Easy, fast configuration with planning software

Material Flow Technology• Many standard sizes to choose from• From simple to precise• Chain- and belt-driven solutions• Precision linear motor-based solutions

7

ELECTRIC DRIVES AND CONTROLSProvide production solutions that are future-proof with precise motion performance, reduced engineering time, and maximum reliability.

Rotary and Linear Servo Motors• Multiple encoder options• Kit rotary and linear motors• Excellent force to size ratios• Vacuum-rated encapsulation options

Smart Compact Servo Drives• Cabinet and machine mount variations• Ethernet-based communication• Multi-encoder interface• Safety on Board• Option for integrated control for up to

10 synchronized axes

Motion Control and I/O• Runtime system with motion, robot, and logic control• Open software architecture for tailored system solutions• Multiple programming languages• Compliant safety control & I/O

• Control Algorithms• Diagnostics and tracing• Simulation• Predictive maintenance

Ideation & EngineeringRexroth and the customer defined a full list of information that included technical specifications, finite envelope restrictions, and other know challenges such as chemical exposure and humidity.

Critical success factors included a maximum size through-hole and optimal size-to-torque ratio. Engineers from both sides, including experts from Germany, worked in collaboration to find the optimal solution.

Design, Validation, ProductionSome unique design challenges included large moment load, cooling, integration of load cell, accommodation of leveling, and mounting features that were solved utilizing several sizing tools such as IndraSize and Linear Motion Design (LMD) and the help of our experts.

Validation took place in our testing lab in Charlotte to fine tune mounting and leveling features as well as validating expected life numbers. Production is ongoing. Integration will be managed by the customer with support from Rexroth at the time of commissioning.

IndraSize

a = ∆V ∆t

CALIFORNIA

Location

Requirements

HOLLOW SHAFT

TORQUE

SPEED

Customer Situation Wafer Spin Motor Custom Assembly

8 Customized Solutions – Case Study: Custom Assembly

Case Study: Custom Assembly

COMPACT ENVELOPE

9

Results

ENGINEERING COST SAVINGS

PRODUCT COST SAVINGS

ENGINEERING TIME SAVINGS

FAST TIME TO MARKET

Rexroth successfully provided a custom solution that saved in engineering time and costs, and met the customer’s deadline.

Service for the unit was deliberately designed into the system allowing for easier maintenance, or if a problem were to arise, the unit could easily be replaced to minimize downtime.

Rexroth Solution

MBTTorqueMotor

Ball Rail

Ball Screw

MS2NMotor

Near Mi Drive to power the motors

SummaryWafer Spin Motor Custom Assembly

When off the shelf products just won’t work, Rexroth will partner with you to develop a custom solution that is unique to your specific requirements! Our comprehensive approach ensures your needs will be met with successful results. One such example is explained below.

10 Automation Solutions – Factory of the Future

FTS – Flexible Transport SystemA non-contact and flexible motion system, FTS moves individual bi-directional carriers moving at varying independent speeds. The technology is suited for all load factors, precision levels, and motion profiles. This system is also suited for vacuum environments when mounting our coils outside of the chamber and usage of our vacuum rated magnets.

Factory of the FutureNow. Next. Beyond.

11

What is i4.0, and how does it relate to the semiconductor industry?Industries worldwide are undergoing a deliberate shift in how they use digitalization to reduce costs and improve efficiency. Industry 4.0, or i4.0, is the presence of automation and data utilization in business.

When it comes to manufacturing for the semiconductor industry, i4.0 means the inclusion of the Internet of Things (IoT), cloud computing, and machine learning. At Rexroth, we call it “Factory of the Future.” When i4.0 technology is integrated into existing or new equipment, data becomes more accessible and the production becomes more dynamic. With data accessibility, actionable insights can be gained and acted upon to make faster and more accurate decisions to avoid downtime and increase productivity. A dynamic production line responds faster to changes in processes to meet custom requirements seamlessly.

How can Rexroth help?At the heart of i4.0 is the data that is collected through machine interfaces and the results are precise actions manufacturers can take to optimize their operations. Data can be used within the processes of manufacturing to track the progress and location of parts, reduce errors, and provide transparency in the accuracy and adaptability of

the process itself. The use and compliance to truly open standards is at the heart of this collection utilizing well known protocols such as OPC-UA. In addition, we are involved in the consortium of the development of Time-Sensitive Network (TSN), a convergence of real-time automation and IT data communications.

With Rexroth by your side, you can benefit from leaders that supply relevant hardware, as well as software and consultation services. We can help you develop a clear plan for how to integrate automation and data technologies Now, what you need to do Next, and how to prepare for Beyond.

What makes Rexroth unique?Bosch Rexroth is in the unique position to use i4.0 technologies in our own plants. We also supply the same technologies to our parent company, Bosch, for use in their network of over 200 facilities worldwide. This in-house proving grounds gives us the ability to truly understand what manufacturers need to be successful with i4.0.

Connected automation in manufacturing leads to a faster and more flexible production process, greater efficiency of material, and reduction of complexity and downtime. Let us put our real-world experience and use cases together to help you bring your equipment and factory into the future!

Industry 4.0: Are you ready?

RA08042/10.2019 replaces: 06.2012© Bosch Rexroth Corporation 2019 Printed in the United States

Bosch Rexroth CorporationCorporate Headquarters 14001 South Lakes DriveCharlotte, NC 28273Telephone (800) REXRROTH (800) 739-7684info@boschrexroth-us.com www.boschrexroth-us.com

Bosch Rexroth CorporationAutomation & Electrification 5150 Prairie Stone ParkwayHoffman Estates, IL 60192Telephone (847) 645-3600info@boschrexroth-us.comwww.boschrexroth-us.com

Bosch Rexroth CorporationTechnical Center West5880 W Las Positas Boulevard #39Pleasanton, CA 94588Telephone (925) 227-1074info@boschrexroth-us.comwww.boschrexroth-us.com

Global partnerships that transcend bordersRexroth is unique in our ability to pool our global resources to provide the service you need. You have access to a team of semiconductor industry experts in Europe, America, and Asia. Our people have first-hand experience and understand the specific needs in every region. Our ability to provide seamless, best-in-class support becomes particularly evident in cross-border projects. Because our production operations have an international footprint, we are able to exploit local sourcing opportunities to your advantage.

You can rely on us to remain at your side well after commissioning. Our extensive service network places us in close proximity to our customers and yours, ensuring fast response times. A global partnership with Rexroth offers distinct advantages over the entire lifecycle: perfect automation solutions for the semiconductor industry.

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