polymems: plastics in action€¦ · faculty of electrical and computer engineering institute of...
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![Page 1: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/1.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
PolyMEMS:
Plastics in Action
Andreas Richter
18
Andreas Richter
Technische Universität Dresden
Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
Dresden, 20 October 2010
1 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
⇒⇒⇒⇒ founded in March 2010
⇒ team of young scienists
Polymer synthesis µfluidics & energy sources
182 /
LSI systemsHuman machine confluence Unconventional computing
R. Luther S. Klatt
G. Paschew M. Fischer
R. Greiner
M. Allerdißen
M. Tietze
W. Haas
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
⇒⇒⇒⇒ founded in March 2010
⇒ team of young scienists
⇒ located at Andreas-Schubert-
Bau with the
polymer chemistry of TUD
182 /
![Page 4: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/4.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
⇒⇒⇒⇒ founded in March 2010
⇒ team of young scienists
⇒ located at Andreas-Schubert-
Bau with the
polymer chemistry of TUD
Research topics:
Novel approaches of actuator-
182 /
Novel approaches of actuator-
based microsystems
� large-scale integration
� human machine confluence
(virtual and augmented reality)
� unconventional computing
� microfluidics
![Page 5: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/5.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Chair of Polymeric Microsystems
⇒⇒⇒⇒ founded in March 2010
⇒ team of young scienists
⇒ located at Andreas-Schubert-
Bau with the
polymer chemistry of TUD
Research topics:
Novel approaches of actuator-
182 /
Novel approaches of actuator-
based microsystems
� large-scale integration
� human machine confluence
(virtual and augmented reality)
� unconventional computing
� microfluidics
Presentation:
Microsystems based on smart
polymers
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Intrinsically active polymers
Gel looper„Smart“ or intrinsically active polymers
⇒⇒⇒⇒ extraordinary and fascinating
properties
⇒ spectacular examples
⇒ Insider´s tip in the actuator community
However:
⇒ Technical sensor and actuator
183 /
Gong, J.-P. et al.
Hokkaido University, Sapporo
http://altair.sci.hokudai.ac.jp/g2/gelmachine4_e.html
⇒ Technical sensor and actuator
applications of these materials are
very rare
What are smart polymers and which
properties do they have?
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Intrinsically active polymers
Shape memory
polymerConductive
polymers
0V
„Smart“ or intrinsically active polymers
⇒⇒⇒⇒ extraordinary and fascinating
properties
⇒ spectacular examples
⇒ Insider´s tip in the actuator community
However:
⇒ Technical sensor and actuator
183 /
Lendlein, A. et al.
Angew. Chem. 2002, 41, 2034
Smela, E. et al.
Sens. Act. B 2006, 115, 596
0V
-1VWell-known examples
⇒ shape memory polymers
⇒ conductive polymers
⇒ most suitable characteristics profiles
for microsystems applications:
stimuli-responsive hydrogels
⇒ Technical sensor and actuator
applications of these materials are
very rare
What are smart polymers and which
properties do they have?
![Page 8: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/8.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Stimuli-responsive hydrogels
… cross-linked plastic materials
- able to change their volume reversibly and
reproducible more than one order of
magnitude by small alterations of certain
environmental parameters
⇒ highest volume change of solid-state
materials
Ela
sti
cit
y
Range of phase transition
184 /
Reason: Volume phase transition behavior
Vo
lum
e,E
las
tic
ity
Physical Value (T, c, pH)
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Stimuli-responsive hydrogels
… cross-linked plastic materials
- able to change their volume reversibly and
reproducible more than one order of
magnitude by small alterations of certain
environmental parameters
⇒ highest volume change of solid-state
materials
184 /
Reason: Volume phase transition behavior
Precondition:
Polymer is at a critical swelling equilibrium
⇒ appears in two phases
⇒ small impairments of the polymer-solution
interactions, e.g., by small changes of T
or c lead to a general change into the
second swelling equilibrium
Separated phase
Polymer-Polymer
interactions
⇒ as smallest volume
as possible
Mixed phase
Polymer-Solution
interactions
⇒ as biggest volume
as possible
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Triggering factors of phase transition
Concentrations of solvents
- neutral hydrogels
10
12
14
16MethanolEthanol1-Propanol2-PropanolAceton
De
gre
e o
f s
we
llin
g
Poly(N-Isopropylacrylamide)
185 /
0 10 20 30 40 50 60 70 80 90 1000
2
4
6
8
Aceton
De
gre
e o
f s
we
llin
g
Solvent content in vol%
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Triggering factors of phase transition
Concentrations of solvents
- neutral hydrogels
Concentrations of ions, pH value
- polyelectrolyte hydrogels
1,6
1,8
2,0
2,2
Fil
m t
hic
kn
es
s i
n µ
m
Polyvinyl alcohol – polyacrylic acid
185 /
0 2 4 6 8 10 12 14
1,2
1,4
1,6
Fil
m t
hic
kn
es
s i
n
pH value
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Triggering factors of phase transition
Concentrations of solvents
- neutral hydrogels
Concentrations of ions, pH value
- polyelectrolyte hydrogels
Temperature 10
12
14
16
18
De
gre
e o
f s
we
llin
g
PNIPAAm
PVME
185 /
Temperature
- hydrogels with:
- LCST
- UCST (not really available)
0 10 20 30 40 50 600
2
4
6
8
10
Temperature in °C
De
gre
e o
f s
we
llin
g
PVME
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Alterable properties
Optical properties
- refractive index
- transmission
- color
Range of phase transition
186 /
n,
Physical value (T, c, pH)
swollen: Refractive index = 1,36
shrunken:Refractive index = 1,46
Kuckling et al., Macromol. 2002, 35, 6377
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Alterable properties
Optical properties
- refractive index
- transmission
- color
Mechanical properties
- Young´s modulus
- softness
Range of phase transition
186 /
- softness
n,
Physical value (T, c, pH)
swollen: E = 13 kPa
shrunken:E = 85kPa
E,
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Alterable properties
Optical properties
- refractive index
- transmission
- color
Mechanical properties
- Young´s modulus
- softness
Range of phase transition
186 /
- softness
Size
- volume
- length, height n,
Physical value (T, c, pH)
swollen: QV = 16
shrunken:QV = 2,1
E,V
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator properties
Muscle-like actuator type
- big volume change
- medium energy density
-3]
101
102
103
SMAMetall
Magn.Formge-dächtnis
Ac
tua
tor
str
en
gth
σσ σσm
ax
[MP
a]
Energy density [Jm -3]
101
102
10
SMAmetall
Hydrau-
licsMagn.
shape
memory
σσ σσ
Electrostriction
Therm. exp.10K
Magnetostriction
Therm. expansion100K
186 /
10-510-6 10-310-4 10-110-2 101110-2
10-1
1
Hydro-gele
dächtnis
Max. Strain εεεεmax
Ma
x. A
ctu
ato
r s
tre
ng
th
Piezo-LS
Piezo
10-510-6 10-310-4 10-110-2 101110-2
10-1
1
-
memory
Piezo
polymer
Piezo
LS
Pneumatics
Human
muscle
Solenoid
Hydro-gels
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator properties
Muscle-like actuator type
- big volume change
- medium energy density
Time behavior
- swelling is diffusion controlled
⇒ size dependent
1cm
Response time
min - hours
hours - days
186 /
⇒ size dependent
⇒ Centimeter size: response time
in h or days
⇒ Micro size: response time
in 100 ms range can be
obtained
1mm
1µm
200µm
-
1µm ms
100 ms – sec.
Microsystems
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Hydrogel-based platform technology
Preconditions:
Fabrication technology
Mechanisms to control
active elements
187 /
active elements
Active elements
in microfluidics:
- micro pumps
- microvalves
- …
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Micro structuring of hydrogels
Photo lithography
- dry films: UV crosslinking
- prepolymer solution:
UV polymerisation
⇒ monolithic microsystems
Microgel preparation
Photo lithography
UV crosslinking UV polymerisation
188 /
Microgel preparation
- Suspension, dispersion, emulsion
polymerisation
size: 20nm … mm
Further methods:
- Electron beam lithography
- moulding polymerisation
- plasma polymerisation
- …
100µm
50µm
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Controllability
Electric controlScience 218 (1982), 467
⇒ ∆V = 90 %
… in 4 days !!
Control of hydrogel microactuators
189 /
Tanaka, T. et al., Science 218 (1982),467
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Controllability
Electric controlScience 218 (1982), 467
⇒ ∆V = 90 %
… in 4 days !!
Optical controlNature 346 (1990), 347
⇒ ∆
Control of hydrogel microactuators
18
⇒ ∆V = 70 %
… limited reversibility !!
9 /
Tanaka, T. et al., Nature 346 (1990), 347
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Heating meander
Channel
Controllability
Electric controlScience 218 (1982), 467
⇒ ∆V = 90 %
… in 4 days !!
Optical controlNature 346 (1990), 347
⇒ ∆
Control of hydrogel microactuators
18
Electrothermic interface
⇒ standard method of electronic control of
hydrogel actuators Gel actuator
Polym. Adv. Techn. 11 (2000), 496-505.
⇒ ∆V = 70 %
… limited reversibility !!
⇒⇒⇒⇒ microfluidic basic elements
9 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Inlet Outlet
Problem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
Microfluidic propulsion
18
Pump chamberHeating
meander
Lab Chip 9 (2009), 613
10 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Inlet
Actuator
Elastic
Membrane
Heating element
FelastFquellProblem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
a) Diffusion micropump
• Actuator is placed within the
pump chamber
• Actuator loads the chamber with
Microfluidic propulsion
18
Lab Chip 9 (2009), 613
liquid and stretches the elastic membrane
• Membrane pushes the liquid to the outlet
10 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Inlet
Actuator
Elastic
Membrane
Heating element
FelastFquellProblem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
a) Diffusion micropump
• Actuator is placed within the
pump chamber
• Actuator loads the chamber with
Microfluidic propulsion
18
Lab Chip 9 (2009), 613
liquid and stretches the elastic membrane
• Membrane pushes the liquid to the outlet
10 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
6
8
10
12
14
Vo
lum
e [
µl]
Peristaltic: 0,54µlmin-1
Pulsatile:
Long-time 1,2µlmin-1
1 Stroke 3,31µlmin-1
Problem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
a) Diffusion micropump
• Actuator is placed within the
pump chamber
• Actuator loads the chamber with
Microfluidic propulsion
18
Pumping pressure
• pmax = f (Felast) = 1,3kPa
0 2 4 6 8 10 120
2
4
6
Vo
lum
e [
µl]
Time [min]
liquid and stretches the elastic membrane
• Membrane pushes the liquid to the outlet
Lab Chip 9 (2009), 613
10 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Problem:
Hydrogel absorbs liquid by swelling
⇒ no displacement of liquid
a) Diffusion micropump
Inlet
Hydrogel actuator
Movable
membranePump chamber
• Actuator is placed within the
pump chamber
• Actuator loads the chamber with
Microfluidic propulsion
18
Lab Chip 9 (2009), 613
b) Displacement micropump
•Due to the membrane the actuator
displaces the liquid
Pumping pressure
• pmax = f (Fswell) = 15kPa
Pump chamberHeating meander
Outlet
Actuator
chamber
Lab Chip 9 (2009), 613
Pumping pressure
• pmax = f (Felast) = 1,3kPa
liquid and stretches the elastic membrane
• Membrane pushes the liquid to the outlet
10 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Open
Heater
Actuator chamber
TH ≥ TPT Hydrogel
(shrunken)
Microvalves•Actuator directly placed within the channel
Principle
•Open valve: Heating the valve seat above
TPT
⇒ Hydrogel actuator shrinks
•Closing: switch-off the heater
⇒ below T the hydrogel actuator swells
Microfluidic switching
18
J. Microelectromech. Syst. 12 (2003), 748
(shrunken)
TH < TPT Hydrogel
(swollen)
Closed
Heater
⇒ below TPT the hydrogel actuator swells
11 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
20
25
30
35
20
25
30
35
Tem
pera
ture
in
°C
Flo
w in
µl/
min
Microvalves•Actuator directly placed within the channel
Principle
•Open valve: Heating the valve seat above
TPT
⇒ Hydrogel actuator shrinks
•Closing: switch-off the heater
⇒ below T the hydrogel actuator swells
Microfluidic switching
18
J. Microelectromech. Syst. 12 (2003), 748
0 2 4 6 8 10 12 14 16 18 200
5
10
15
0
5
10
15
Tem
pera
ture
in
Flo
w in
µl/
min
Time in min
⇒ actuator absorbs the liquid during
swelling
⇒ valve closes displacement free
•Excellent properties
• Back pressure up to 8 bar
• Particle tolerance and leakage free
• Response time:
- opening: 300ms
- closing: 1s (uncooled)
⇒ below TPT the hydrogel actuator swells
11 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Microfluidic switching
Microvalves•Actuator directly placed within the channel
Principle
•Open valve: Heating the valve seat above
TPT
⇒ Hydrogel actuator shrinks
•Closing: switch-off the heater
⇒ below T the hydrogel actuator swells
18
Microscopy tool MicCell of GeSiM mbH containing 6
hydrogel microvalves
⇒ since 2004 commercialized by
GeSiM mbH11 /
⇒ actuator absorbs the liquid during
swelling
⇒ valve closes displacement free
•Excellent properties
• Back pressure up to 8 bar
• Particle tolerance and leakage free
• Response time:
- opening: 300ms
- closing: 1s (uncooled)
⇒ below TPT the hydrogel actuator swells
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Microgravimetric pH sensor
•Changes in V, m and E of a
hydrogel-coating lead to a change
of the complex resonance frequency
of a quartz crystal
Chemical sensing
18
Sens. Actuat. B 99 (2004), 579
Sensors 8 (2008), 561
Time
∆∆ ∆∆z
12 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Da
mp
ing
sh
ift
in k
Hz
Fre
qu
en
cy s
hif
t in
kH
z
15
20
25
30
15
20
25
30
⇒⇒⇒⇒ within the area of phase
transition the accuracy of
measurement is ± 0,042 pH units
Microgravimetric pH sensor
•Changes in V, m and E of a
hydrogel-coating lead to a change
of the complex resonance frequency
of a quartz crystal
Chemical sensing
18
2.50 2.75 3.00 3.25 3.50
Da
mp
ing
sh
ift
in k
Hz
Fre
qu
en
cy s
hif
t in
kH
zpH value
0
5
10
0
5
10
measurement is ± 0,042 pH units
Sens. Actuat. B 99 (2004), 579
Sensors 8 (2008), 561
12 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
1.5
2
2.5
Fre
qu
en
cy s
hif
t in
kH
z
pH 3.11pH 3.19
⇒⇒⇒⇒ within the area of phase
transition the accuracy of
measurement is ± 0,042 pH units
Microgravimetric pH sensor
•Changes in V, m and E of a
hydrogel-coating lead to a change
of the complex resonance frequency
of a quartz crystal
Chemical sensing
18
0 50 100 150 2000
0.5
1
Fre
qu
en
cy s
hif
t in
kH
zTime in s
pH 1.84 pH 1.84
•Time behavior:
- Solutions with high ionic strength
tResponse = (500 … 800) ms
⇒ real-time measurements
measurement is ± 0,042 pH units
Sens. Actuat. B 99 (2004), 579
Sensors 8 (2008), 561
12 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
⇒⇒⇒⇒ within the area of phase
transition the accuracy of
measurement is ± 0,042 pH units
Microgravimetric pH sensor
•Changes in V, m and E of a
hydrogel-coating lead to a change
of the complex resonance frequency
of a quartz crystal
Chemical sensing
18
•Time behavior:
- Solutions with high ionic strength
tResponse = (500 … 800) ms
⇒ real-time measurements
measurement is ± 0,042 pH units
12 /
⇒ commercialized by SITA Messtechnik
GmbH
Dresdner Transferbrief 01/2010, 8
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
1mm
•Control device to regulate a concentration
•Design similar to microvalves
• hydrogel acts as both sensor and actuator
Chemical transistor
18
Adv. Mater. 19 (2007), 1109
Inlet
Outlet
T-Sensor
Heater
Hydrogel
Fabricated by GeSiM
1mm
Sens. Actuat. B 125 (2007), 569
13 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
•Control device to regulate a concentration
•Design similar to microvalves
• hydrogel acts as both sensor and actuator
• Transistor characteristics:
- opens if the threshold concentration is
reached50
60
70
µl/
min
]
Transistor characteristics
Regulation of a methanol
concentration in H2O (27°C)
Chemical transistor
18
- closes below the threshold concentration
13 /
2 3 4 5 6 7 8-10
0
10
20
30
40
50
Flo
w r
ate
[µ
l/m
in
cMetOH [mol/l]
cThreshold
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
26
30
34
co
ntr
ol[°
C]
Methanol Ethanol
1-Propanol
•Control device to regulate a concentration
•Design similar to microvalves
• hydrogel acts as both sensor and actuator
• Transistor characteristics:
- opens if the threshold concentration is
reached
Chemical transistor
18
0 2 4 6 8 10 12
14
18
22
Tco
ntr
ol
cAlcohol [mol/l]
Adv. Mater. 19 (2007), 1109
⇒Threshold concentration is adjustable
by control the temperature of the
hydrogel actuator
⇒ different from the fixed threshold of
electronic transistors
⇒ precondition of broad practical use
13 /
- closes below the threshold concentration
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator elements
Pumps Valves
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
• hydrogel-based platform offers a unique
range of active microfluidic elements
Intermediate conclusion
18
Chem. Sensors
Chemical
transistors
Sens. Actuat. B 99 (2004), 579 Adv. Mater. 19 (2007), 1109
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
12 (2003) 5, 748
14 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator elements
Pumps Valves
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
• hydrogel-based platform offers a unique
range of active microfluidic elements
But what is the potential to realize
integrated microsystems?
⇒ new features ?
Intermediate conclusion
18
Chem. Sensors
Hydrodynamic
transistors
Sens. Actuat. B 99 (2004), 579 Adv. Mater. 19 (2007), 1109
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
12 (2003) 5, 748
⇒ new features ?
⇒ can be solved big challenges?
14 /
![Page 40: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/40.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator elements
Pumps Valves
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
• hydrogel-based platform offers a unique
range of active microfluidic elements
But what is the potential to realize
integrated microsystems?
⇒ new features ?
Intermediate conclusion
18
Chem. Sensors
Hydrodynamic
transistors
Sens. Actuat. B 99 (2004), 579 Adv. Mater. 19 (2007), 1109
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
12 (2003) 5, 748
⇒ new features ?
⇒ can be solved big challenges?
Of particular interest are:
• Medium-scale integrated (MSI) systems
(10-100 active components)
•Large-scale integrated (LSI) systems
(>100-10.000 active components)
14 /
![Page 41: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/41.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Actuator elements
Pumps Valves
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
• hydrogel-based platform offers a unique
range of active microfluidic elements
But what is the potential to realize
integrated microsystems?
⇒ new features ?
Intermediate conclusion
18
Chem. Sensors
Hydrodynamic
transistors
Sens. Actuat. B 99 (2004), 579 Adv. Mater. 19 (2007), 1109
Lab Chip 9 (2009), 613 J. Microelectromech. Syst.
12 (2003) 5, 748
⇒ new features ?
⇒ can be solved big challenges?
Of particular interest are:
• Medium-scale integrated (MSI) systems
(10-100 active components)
•Large-scale integrated (LSI) systems
(>100-10.000 active components)
⇒⇒⇒⇒ a LS system integration will be introduced
by an example outside the microfluidics
14 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Infrared image of a resistive heater on
Polymer substrate
Electrothermic interface
Problem:
If dS < dcritical
⇒ than the functionality of the neighbor
component can be affected
Question: Is the electrothermic control
suitable to realize small spacings between the
Actuator
Large-scale system integration
18
RHeat
15 /
suitable to realize small spacings between the
active components?
1mm
ds
ds – Spacing between two hydrogel
components
![Page 43: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/43.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
swollenshrunken
Electrothermic interface
Problem: If the
If dS < dcritical
⇒ than the functionality of the neighbor
component can be affected
Question: Is the electrothermic control
suitable to realize small spacings between the
Large-scale system integration
18
• to switch a hydrogel actuator from the fully
swollen state to fully shrunken ⇒ ∆T = 6K
Temperature [°C]
10 20 30 40 50 600
4
8
12
16
Sw
ell
ing
de
gre
e
Adv. Mater. 21 (2009), 979
• active cooling
⇒ dissipates excess heat and keeps the
controlling temperature field stable
⇒ independency from the environment
15 /
suitable to realize small spacings between the
active components?
![Page 44: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/44.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Time behavior
Electrothermic interface
• light-induced T-field controlled by
a business video projection system
⇒ black substrate converts the absorbed light
into heat and transmits it directly to the
actuators
Large-scale system integration
18
Adv. Mater. 21 (2009), 979
15 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• T-field occurs nearly in real-time
Time behavior
Electrothermic interface
• light-induced T-field controlled by
a business video projection system
⇒ black substrate converts the absorbed light
into heat and transmits it directly to the
actuators
Large-scale system integration
18
• T-field occurs nearly in real-time
t = 400ms
• stable for a desired period of time
Adv. Mater. 21 (2009), 979
15 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
33
34
35
36
Tem
pera
ture
[°C
]
xA2
x = 6
K• T-field occurs nearly in real-time
Time behavior
Electrothermic interface
• light-induced T-field controlled by
a business video projection system
⇒ black substrate converts the absorbed light
into heat and transmits it directly to the
actuators
Large-scale system integration
18
100 300 500 700 900 110013001500170028
29
30
31
32
Tem
pera
ture
[Distance [µm]
xRes
xA1
xP
∆∆ ∆∆T
Wo
rk
∆∆ ∆∆T
= 6
K
xP = xRes + xA1 + xA2
Pitch
Actuator sizeResolution
Obtained maximum parameters:
DA = 566 A cm-2
xP = 420 µm Adv. Mater. 21 (2009), 979
15 /
• T-field occurs nearly in real-time
t = 400ms
• stable for a desired period of time
![Page 47: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/47.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Adv. Mater. 21 (2009), 979
16 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• intermodal functionalities
visual:
Transmission light modulator
⇒ Monochrome display
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Adv. Mater. 21 (2009), 979
16 /
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Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• intermodal functionalities
visual:
Transmission light modulator
⇒ Monochrome display
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Adv. Mater. 21 (2009), 979
16 /
tactile:
Multimodal modulators
⇒ intermodal display providing
impressions about
⇒ Softness of surfaces
∆E ≈ 70kPa
![Page 50: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/50.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• intermodal functionalities
visual:
Transmission light modulator
⇒ Monochrome display
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Adv. Mater. 21 (2009), 979
16 /
tactile:
Multimodal modulators
⇒ intermodal display providing
impressions about
⇒ Softness of surfaces
∆E ≈ 70kPa
⇒ Outlines
![Page 51: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/51.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
• intermodal functionalities
visual:
Transmission light modulator
⇒ Monochrome display
Imaging system with
• 4.320 (60x72) actuator pixels
• DA = 297 components per cm²
Intermodal Imaging system
18
Knobs
Adv. Mater. 21 (2009), 979
16 /
tactile:
Multimodal modulators
⇒ Outlines
⇒ intermodal display providing
impressions about
⇒ Softness of surfaces
∆E ≈ 70kPa
⇒ Profils and Textures
∆l = 250µm
![Page 52: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/52.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Virtual and augmented reality
Haptic touchpad• free programmable keypad
⇒ smart phones
⇒ tablet PCs
⇒ operating consoles
1817 /
![Page 53: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/53.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Virtual and augmented reality
Haptic touchpad• free programmable keypad
⇒ smart phones
⇒ tablet PCs
⇒ operating consoles
3D- Percept-System
1817 /
3D- Percept-System• convey the impression,
⇒ to see a virtual object really
and
⇒ touch it and feel it with bare
hands as if it was the real
three-dimensional object
![Page 54: PolyMEMS: Plastics in Action€¦ · Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems PolyMEMS: Plastics in Action Andreas Richter 18 Technische](https://reader034.vdocuments.us/reader034/viewer/2022051812/602b0302e18ddd21da6c4d6c/html5/thumbnails/54.jpg)
Faculty of Electrical and Computer Engineering Institute of Semiconductors and Microsystems
Thank you for your
attention !
18
attention !
18 /