plasma cleaner
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Plasma Cleaner. Instructions for Use. Fischione 1020 Plasma Cleaner. General. Most of the cleaning process with the 1020 are automatic. The process is started by entering a cleaning time. - PowerPoint PPT PresentationTRANSCRIPT
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Plasma Cleaner
Instructions for Use
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Fischione 1020 Plasma Cleaner
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General• Most of the cleaning process with the 1020 are
automatic.• The process is started by entering a cleaning
time.• Once the process starts the specimen chamber
will automatically pump and initiate plasma cleaning. The chamber will remain under vacuum until vented by the user.
• VENTING TAKES 3 – 4 MINUTES. TURBO PUMP MUST SPIN DOWN.
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Gas Supply• Make sure the gas
supply is on and there is gas.
• Gas is an Argon – Oxygen mixture.
• NOTE, just check the gauge. Do NOT adjust ANY valves.
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Check Control Panel• Normally the
specimen holder will be under vacuum.
• First check the control panel.
• If the “HIGH VACUUM” light is illuminated, you must vent the specimen chamber.
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Venting the Specimen Chamber• Press VENT on the
control panel.
• The VENTING LED will illuminate.
• It takes 3 – 4 minutes to vent the chamber.
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Chamber at Atmosphere• Wait until the ATMOSPHERE LED is illuminated
before opening chamber.
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Remove the plug• After the chamber is
vented, remove the plug from the TEM specimen port.
• Place the plug in the plastic bag on top of the plasma cleaner.
• The chamber is now ready for insertion of the TEM specimen holder.
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Insert TEM Specimen Holder
• Insert the TEM specimen holder into the chamber.
• The specimen holder may come to a stop but may not be fully inserted (see image). Do not push on the specimen holder at this time. WAIT.
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Set Cleaning Time• Using the number pad
on the control panel input the cleaning time. Cleaning time for most TEM specimens is 30 sec to 5 minutes.
• Press SET to start the pump down and cleaning cycle.
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Check Holder and Clean Cycle• When the pumping
cycle starts the holder should then move into the specimen chamber. CHECK THIS.
• When cleaning is underway, the gas mixture will luminesce. This can be observed through the window.
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Clean cycle end and vent• The timer will count
down as the cleaning cycle continues. At zero cleaning will end but the chamber remains under vacuum.
• To Vent, press VENT.• REMEMBER: 3 to 4
minutes to vent chamber.
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Shut Down # 1• Remove the holder
from the specimen chamber.
• Replace the Plug
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Shut Down # 2• Press PUMP to pump
down the chamber.• Chamber is left under
vacuum
• Wait and make sure the chamber returns to HIGH VACUUM
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APPENDIX• An accessory is
available for inserting SEM stubs (FEI type).
• A vacuum pumping station for TEM holders is also avaible.
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Remove the TEM Port• The TEM port must be
removed before the SEM specimen holder can be placed in the cleaning chamber.
• Unscrew the black retaining ring and remove.
• Take out the TEM port and place on a clean surface. Be careful of, and check the large O-ring
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Insert the SEM specimen holder• Insert the SEM
specimen holder. Be careful of the large O-ring.
• The holder sits flushin the opening when fully inserted.
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High Vacuum Docking Stations• TEM holders can be
kept under vacuum in the TEM Docking station.
• To use:– Contact CAF
personnel.