Plasma Assisted Synthesis and Application of

Diamond-like Carbon Films

Thin Film Technology Research Center

Korea Institute of Science & Technology

Introduction• Since 1991, our group has developed world-wide core

competencies in the synthesis and application technology of hard amorphous carbon films (also referred to as diamond-like carbon (DLC) films).

• Using various deposition techniques ranging from r.f.-PACVD to filtered vacuum arc process, we could have investigated wide range of DLC films from soft polymeric one to very hard tetrahedral amorphous carbon.

• We also developed the core technologies to control the residual stress and to improve adhesion against which are prerequisite for the application of DLC films.

• Starting from DLC coated VCR head drum, four of our technologies were transferred to Korean companies and successfully commercialized.

Materials and Processes

• (Hydrogenated) Amorphous Carbon Films

• Tetrahedral Amorphous Carbon Films

• Carbon Nanotube

• Nanostructured Thin Films

• RF-PACVD

• Filtered Cathodic Arc Deposition System

• Ion Plating

• Direct Ion Beam Deposition

• Thermal CVD

• Hybrid System of Above Processes

Applications

• Anti-wear Low Friction Coatings – Various Sliding Components

– Diesel Engine Parts

– Protective Coating for Hard Disk, etc.

• DLC coated Tools and Dies– IC Packaging Tools

– PCB Micro Drills, etc.

• Abrasion Resistant AR coating for IR Windows

• Cold Cathode using Carbon Base Materials

Research Interests

• Synthesis and Application Technology of DLC– Process Development

– Structure and Property Control by Third Element Addition

– Residual Stress Control and Adhesion Improvement

• Tribochemical Behavior of DLC films

• Residual Stress and Mechanical Behavior of Thin Films

• Synthesis of Carbon Nanotubes

• Field Emission Behavior of Carbon Base Materials

• Computational Simulation of Thin Films

다이아몬드상 카본필름의 합성 및 응용기술 개발

한국과학기술연구원박막기술연구센터

소개• 본 연구진은 1991 년 이후 다이아몬드상 카본 (DLC)

필름이라고도 불리우는 경질탄소박막의 합성 및 응용기술의 개발연구를 수행하여 왔다 .

• 본 연구진은 r.f.-PACVD 로 부터 filtered vacuum arc 공정에 이르는 매우 다양한 방법의 합성기술을 이용하여 , 광범위한 물성의 다이아몬드상 카본 필름의 합성거동을 연구하고 물성제어기법을 개발하고 있으며 , 박막의 잔류응력 조절과 접착력 증진기술의 개발을 통해 DLC 필름의 응용을 위한 기반을 구축하고 있다 .

• 본 연구진은 DLC coating VCR head drum 등 4 건의 기술이전을 성공적으로 달성하였으며 , DLC 필름의 산업응용을 위해 계속 노력하고 있다 .

• 본 연구진은 ERC 에 참여함으로써 , 고기능성 탄소계 복합 박막의 합성기술을 개발하고 이를 산업화하기 위한 연구를 추진하고자 한다 .

합성박막소재 및 공정기술• (Hydrogenated) Amorp

hous Carbon Films

• Tetrahedral Amorphous Carbon Films

• Carbon Nanotube

• Nanostructured Thin Films

• RF-PACVD

• Filtered Cathodic Arc Deposition System

• Ion Plating

• Direct Ion Beam Deposition

• Thermal CVD

• Hybrid System of Above Processes

개발응용기술• 고윤활성 내마모 박막

– 섭동 기계부품의 고체윤활 코팅– 디젤엔진 부품의 내마모 윤활코팅– 차세대 하드디스크의 보호코팅 , 등 .

• DLC 코팅 공구 및 금형– 반도체 Packaging 공구 – PCB 가공용 마이크론 드릴 , 등 .

• 적외선 창의 내마모성 무반사 코팅기술• 탄소계 냉음극 개발

연구 분야• Synthesis and Application Technology of DLC

– Process Development

– Structure and Property Control by Third Element Addition

– Residual Stress Control and Adhesion Improvement

• Tribochemical Behavior of DLC films

• Residual Stress and Mechanical Behavior of Thin Films

• Synthesis of Carbon Nanotubes

• Field Emission Behavior of Carbon Base Materials

• Computational Simulation of Thin Films