plasma accessories 3-fold brochure - manitou systems...
TRANSCRIPT
Products for Plasma-Based Research and Manufacturing
PLASMA
ACCESSORIES
N RF Power Generators
N Low Frequency Plasma
Generators
N RF Matching Networks
N Cathodic Arc Power Supplies
N DC Plasma Power Supplies
N DC Glow Discharge Power
Supplies
N RF Plasma Sources
N Tabletop Plasma Systems
N Microwave Plasma Power
Generators
Addi t ional
Products
Manitou Systems Inc.Manitou Systems Inc.Manitou Systems Inc.
MANITOU SYSTEMS, INC.
Danbury, CT USA
Tel.203.733.2110 Fax.203.746.1459
Email: [email protected]
Web: www.manitousys.com
www.manitousys.com
N RF & DC Switching Modules
N RF Blocking Filters
N Cables
Manitou Systems offers the most comprehensive line of RF/DC and signal power switching products in the industry. Our products enable the connection of multiple plasma loads to one or more RF/DC plasma power generators .
N Available with all industry standard
connectors.
N Compatible with all sputter source &
power generator products.
N Switching high power from DC>450MHz
N Matrixx Standard
N Matrixx Mini
N Matrixx Enhanced
Manitou Systems Eliminator RF filters are used on plasma systems to perform various filtering and isolation functions.
The Eliminator brand of filters can be used to keep conducted RF power from reaching a DC sputtering power supply and reduce harmonics in RF powered plasma process.
Application specific models are used to attenuate RF energy on substrate heaters and thermocouple type temperature monitors in RF powered sputter deposition systems.
Specialized models are used to combine RF + DC power on a magnetron sputtering cathode.
N Eliminator RF Blocking Filters
N Eliminator RF Blocking Filters
MATRIXXTM
SWITCHES
ELIMINATORTM
RF FILTERS
POWERLINETM
HIGH POWER
CABLES
Manitou Systems Inc.Manitou Systems Inc.Manitou Systems Inc.
Manitou Systems Powerline cables provide the proper connection between the RF/DC plasma generator and the magnetron cathode or plasma chamber.
N Powerline High Power Cables