pimenoff joe 4808

Flexible electronics – a thin film approach

Joe PimenoffBeneq

“Thin films are thin material layers ranging from fractions of a nanometre to several micrometres in thickness.

Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film

construction.”1

1 http://en.wikipedia.org/

Severe semantics

11.12.2013 Functional Materials. Tekes 2

Thin Film Equipment Lumineq DisplaysThin Film

Coating Services

www.beneq.com11.12.2013 Functional Materials. Tekes

3


Company in brief

Established: 2005

Business units: - Thin Film Equipment- Thin Film Coating Services- Lumineq Displays

Markets addressed: All emerging and growing thin film markets,including solar photovoltaics, organic andflexible electronics and flat glass coating

Personnel: 140

Main office: Vantaa, Finland

Coating center: Espoo, Finland

Sales: China, Germany, USA and Russia

Sales network: 30+ sales representatives worldwide20+ distributors worldwide

Equipment for thin film coating

For industry and research

~ 9.5 s


TFS 200

Thin films, why the big fuss?

Beneq markets

Market growth of thin film-enabled industries

Sourc

e:

IDTechEx,

Dre

sden, April, 2

008



Our strategy

Identifying your opportunity

Beneq – Turning Innovations into Success.

Finding the solutions Building the equipment


New equipment project

New Equipment Project

Identify! Understand! Commercialize!

Customer A

Patent Patent

PatentPatent

$$$

Customer C

Customer B

Customer A


Atomic layer deposition

ALD sequential (digital) deposition of Al2O3.

Properties

• Sequential deposition• Vapor phase

Benefits (e.g.)

• Conformal• Pinhole-free• Nanoscale accuracy

Goal: commercialize Roll-to-Roll ALD

Markets: OLED (display and lighting) and flexible PV

Driver 1 (OLED): encapsulation and barrier films needed to enable longer device lifetime

Driver 2 (OLED): reduce cost of ultra barrier films

Solution 1 (OLED): ALD, some 10’s of nm’s of Al2O3

Solution 2 (OLED): Roll-to-Roll ALD, based on spatial ALD concept


Enter Functional Materials


Milestones in scaling

Large area

Roll-to-roll

Batch

Large-areaALD

Large batch

> 10 m2/min> 0.5 m2/min> 0.05 m2/min

Functional Materials. Tekes 12

Key system features

11.12.2013

1. Vacuum R2R process

2. Web tensioned on drum

3. Proprietary ALD coating head

• Web 500 mm wide• Web speed 2 m/min

Film thickness uniformity target +/-5% reached

WVTR ≤ 5 • 10-4 g/(m2 day) @ 0.25 m/min (non-optimized process)

Functional Materials. Tekes 13

Al2O3 film performance

Position (cm)

Thickness(nm)

2 52,8

10 54,1

20 53,4

30 52,1

40 54,2

48 54,0

Uniformity: +/- 2%

11.12.2013

September 2012: ALD system sold to leading OLED customer for development of flexible OLED products

April 2013: ALD R&D system sold to Fraunhofer COMEDD for OLED thin film encapsulation (del. Q3/2013)

February 2013: World’s first scale-up Roll-to-Roll ALD system delivered to Advanced Surface Technology Research Laboratory (ASTRaL, Lappeenranta Univ. of Techn.)

July 2013: Roll-to-Roll ALD system sold to CPI in UK for demanding moisture barrier applications. (del. Q2/2014)

CPI: UK-based technology innovation hub and part of the High Value Manufacturing Catapult.

first goal: flexible barrier encapsulation

second goal: flexible plastic electronics

Q4/2013: Third Roll-to-Roll unit sold. Currently in build phase.


Commercial outcome


Technology outlook

Scaling to 1+ meter widths

Second generation system currently under construction

Collaboration with the Centre for Process Innovation (UK)

Facilitates rapid technology engagement with industry

Roadmap for R2R ALD

Growing beyond 500 mm, line-integration

Further web speed improvement


Thank you!

pimenoff joe 4808

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