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Photonic Curing Explanation and Application to Printing Copper Traces on Low Temperature Substrates K. A. Schroder October 2011

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  • Photonic Curing Explanation and Application to Printing Copper Traces on

    Low Temperature SubstratesK. A. Schroder

    October 2011

  • www.novacentrix.com

    Abstract

    NovaCentrixs PulseForge tools perform high temperature

    processing of thin films on low temperature substrates such

    as paper and plastic in milliseconds at speeds beyond 100

    m/min in a wide web format using a unique process known

    as Photonic Curing. This flashlamp-based technology dries,

    sinters, anneals, and even modulates chemical reactions.

    The mechanisms and limitations of this process are

    presented along with an example of reducing a CuO based

    ink on plastic and paper

    2

    PresenterPresentation NotesNovaCentrix PulseForge tools can process high temperature materials on polymer and paper at high speed. This talk will focus primarily on forming low cost conductors on plastic and paper with the Photonic Curing process.

  • www.novacentrix.com 3

    NovaCentrix in the Supply Chain

    Printed Electronics Manufacturing

    NovaCentrix Technologies and Products

    RawMaterials

    MfgMaterials

    CuringTools

    Device/Application

    Ink components;Raw substrates

    Inks;Substrates

    Roll-to-roll;Conveyors

    Inkjet;Screen;Aerosol;Flexo;Gravure;

    Ovens;Air knives;New Tech

    Ovens;UV Lamps;Lasers;PulsedThermal Processing;New Tech

    Solar;RFID;Batteries;Transistors;Displays;Packaging;Smart cards

    MaterialHandlers Printers Dryers

    Tool Integrators

    Nanoparticles Metalon inksNovele substrates

    PulseForge toolsSimPulse thermal simulator

    Industryproduct types

    1999 2006 2006

    2010

    Commercialrelease

    PresenterPresentation NotesNovaCentrix was founded in 1999 as a nanotechnology company.Expertise in nanomaterials, pulsed power, equipment design, electronic inks.Creative technology team has developed an extensive patent portfolio.We bring our expertise to our customers to generate value for them by helping them solve their problems.Since NovaCentrix is involved in several parts of the supply chain, it is able to provide better value to its customers by understanding their problems.Our long history and experience with nanotechnology enables vertical integration of our products.

  • www.novacentrix.com

    Recognition and Honors

    PulseForge tools2009: R&D 100 recipient in partnership with Oak

    Ridge National LaboratoryShipped PulseForge 3300 #001 to customer

    2008: Best Development: Manufacturing by IDTechEx for PulseForge 3100

    Metalon ICI copper-based inks2011: Finalist: Technology of the yearby AIMCAL2010: R&D 100 recipient

    Best Development: Materials by IDTechEx2009: Labeled Game Changer by Printed

    Electronics World

    2009PulseForge 3100 and Pulsed Thermal ProcessingWith Oak Ridge National Laboratories

    Technical Development: Materials2010

    2010Metalon ICI Low-Cost Copper Inks

    2011Technical ExcellenceMetalon ICI ICI-020

    PresenterPresentation NotesNovaCentrix has been honored for both equipment development and materials development.

  • www.novacentrix.com 5

    Photonic Curing

    Photonic Curing was first introduced at NSTI in 2006.

    It is the use of a flashlamp to transiently heat a thin film to high temperature on a low-temperature substrate without damage.

    First used to sinter nanosilver and nanocopper inks on plastic and paper.

    PulseForge 3300 Photonic curing is fundamentally a transient thermal process and includes

    sintering, annealing, drying, crystallization, polymerization, chemical reaction initiation and modulation, dopant drive-in, degasification, etc.

    It has become a key enabler to printed electronics as it has enabled high speed processing of high temperature materials on cheap low temperature substrates such as plastic and paper.

    Technology has been scaled to process roll to roll materials in a wide web format at speeds up to 100 m/min.

    PresenterPresentation NotesPulseForge tools can cure many other materials not discussed in this presentation.

  • www.novacentrix.com 6

    PulseForge: Simple Beginnings

    Inspired by a camera flash which has properties of:

    Moderate power: 2 kW/cm2 Low energy: 1 J/cm2 Suitable for certain types of nanoparticle

    processing on low temperature substrates

    PresenterPresentation NotesSmall flash camera can sinter nanosilver on paper or plastic. A video of flash camera initiating the combustion of nanoaluminum is at http://www.youtube.com/watch?v=AJFIoSrvanQ

    However, existing industrial flash lamp systems have inadequate beam quality, control, and speed for industrial Photonic Curing processing.

    New technology was developed to make PulseForge: a web-autosychronized flashlamp system with high power, large area, high uniformity, high speed, and electronic pulse control.

  • www.novacentrix.com 7

    PulseForge: Simple Beginnings

    PresenterPresentation NotesSmall flash camera can sinter nanosilver on paper or plastic. A video of flash camera initiating the combustion of nanoaluminum is at http://www.youtube.com/watch?v=AJFIoSrvanQ

    However, existing industrial flash lamp systems have inadequate beam quality, control, and speed for industrial Photonic Curing processing.

    New technology was developed to make PulseForge: a web-autosychronized flashlamp system with high power, large area, high uniformity, high speed, and electronic pulse control.

  • www.novacentrix.com 8

    PulseForge: Simple Beginnings

    Inspired by camera flash which has properties of:

    High power : 2 kW/cm2 Low energy: 1 J/cm2 Suitable for certain types of nanoparticle

    processing on low temperature substrates

    But camera flash needs improvement for use in printed electronics

    Poor controllability Limited power and energy Erratic output Not well suited for use in roll-to-roll production

    New Technology needed to be developed beyond current industrial systems. Needed the control of laser processing, but the economics of oven processing.

    The result was PulseForge!

    PresenterPresentation NotesSmall flash camera can sinter nanosilver on paper or plastic. A video of flash camera initiating the combustion of nanoaluminum is at http://www.youtube.com/watch?v=AJFIoSrvanQ

    However, existing industrial flash lamp systems have inadequate beam quality, control, and speed for industrial Photonic Curing processing.

    New technology was developed to make PulseForge: a web-autosychronized flashlamp system with high power, large area, high uniformity, high speed, and electronic pulse control.

  • www.novacentrix.com

    PulseForge Tools

    Designed and built specifically to solve the thermal problem.The tools use intense pulsed light to heat functional inks and thin films without damaging temperature-sensitive substrates like plastic films and paper. This process is known as Photonic Curing.

    Designed for development and production use. Developed in cooperation with Oak Ridge National Laboratory. > 10 US and international patents issued or pending relating to using flash

    lamps to sinter nanometal inks on low temperature substrates as well as other processes enabled by this technology.

    Materials processingDryingSinteringAnnealingReacting

    9

    PresenterPresentation NotesPulseForge tools use Photonic Curing. This intense pulsed light technology has many applications to thin film processing including: Drying, sintering, annealing, and reacting thin films. These processes can all be performed on low cost, low temperature substrates such as paper or plastic at high speeds compatible with roll to roll manufacturing.

  • www.novacentrix.com 10

    Typical Thermal Profile

    High temperature processing removes excess solvent and enhances sintering. Substrate is undamaged.

    0100200300400500600700800900

    10001100

    0 5 10 15 20 25 30 35 40t [ms]

    T [C

    ]

    Surface20 micron from surface150 micron from surfacePeak temp >1000 C

    Substrate < 150 C @ 8 ms Thermal equilibrium @ 35 ms (90C)

    Conditions:1 m Ag Film on 150 m(6 mil) PETRadiant exposure: 1 J/cm2Pulse length: 300 s

    Ag Film

    PET

    SimPulseTM Numerical Simulation

    PresenterPresentation NotesThin film can be silver particles, copper particles, or even semiconductors or ceramics!Ordinarily, PET can only be heated up to 150 C.Using PulseForge tools, a thin film can be heated to over 1000 C on ordinary PET without damaging the PET.This type of processing can achieve higher performance in a functional thin film over a conventional oven.Processing is so fast that it can be synchronized to a web and cured on a roll to roll system at speeds beyond 100 m/minute.

    Chart5

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    89.8889.8387.68

    89.8889.8387.69

    89.8789.8387.69

    89.8789.8287.69

    89.8789.8287.69

    89.8689.8287.7

    89.8689.8187.7

    89.8689.8187.7

    89.8589.8187.7

    89.8589.8187.7

    89.8589.887.71

    89.8489.887.71

    89.8489.887.71

    89.8489.887.71

    89.8489.7987.72

    89.8389.7987.72

    89.8389.7987.72

    89.8389.7887.72

    89.8289.7887.72

    89.8289.7887.73

    89.8289.7887.73

    89.8289.7787.73

    89.8189.7787.73

    89.8189.7787.74

    89.8189.7787.74

    89.889.7687.74

    89.889.7687.74

    89.889.7687.74

    89.889.7687.75

    89.7989.7587.75

    89.7989.7587.75

    89.7989.7587.75

    89.7889.7587.76

    89.7889.7487.76

    89.7889.7487.76

    89.7889.7487.76

    89.7789.7387.76

    89.7789.7387.77

    89.7789.7387.77

    89.7689.7387.77

    89.7689.7287.77

    89.7689.7287.77

    89.7689.7287.78

    89.7589.7287.78

    89.7589.7187.78

    89.7589.7187.78

    89.7489.7187.79

    89.7489.7187.79

    89.7489.787.79

    89.7489.787.79

    89.7389.787.79

    89.7389.787.8

    89.7389.6987.8

    89.7389.6987.8

    89.7289.6987.8

    89.7289.6987.8

    89.7289.6887.81

    89.7189.6887.81

    89.7189.6887.81

    89.7189.6887.81

    89.7189.6887.81

    89.789.6787.82

    89.789.6787.82

    89.789.6787.82

    89.789.6787.82

    89.6989.6687.82

    89.6989.6687.83

    89.6989.6687.83

    89.6989.6687.83

    89.6889.6587.83

    89.6889.6587.83

    89.6889.6587.84

    89.6789.6587.84

    89.6789.6487.84

    89.6789.6487.84

    89.6789.6487.84

    89.6689.6487.84

    89.6689.6387.85

    89.6689.6387.85

    89.6689.6387.85

    89.6589.6387.85

    89.6589.6387.85

    89.6589.6287.86

    89.6589.6287.86

    89.6489.6287.86

    89.6489.6287.86

    89.6489.6187.86

    89.6489.6187.87

    89.6389.6187.87

    89.6389.6187.87

    89.6389.687.87

    89.6389.687.87

    89.6289.687.87

    89.6289.687.88

    89.6289.687.88

    89.6289.5987.88

    89.6189.5987.88

    89.6189.5987.88

    89.6189.5987.89

    89.6189.5887.89

    89.689.5887.89

    89.689.5887.89

    89.689.5887.89

    89.689.5887.89

    89.5989.5787.9

    89.5989.5787.9

    89.5989.5787.9

    89.5989.5787.9

    89.5889.5687.9

    89.5889.5687.9

    89.5889.5687.91

    89.5889.5687.91

    89.5789.5687.91

    89.5789.5587.91

    89.5789.5587.91

    89.5789.5587.91

    89.5789.5587.92

    89.5689.5587.92

    Surface

    20 micron from surface

    150 micron from surface

    t [ms]

    T [C]

    1-micron-PET-graph

    NovaCentrix Heat Conduction Simulation v2.0

    layermaterialthicknessn_cellscell_distribution

    layer1silver11000

    layer2PET203600

    layer3PET1304450

    material properties

    conductivity (W/m K)

    429.00 0.0 0.0 layer1

    0.24 0.0 0.0 layer2

    0.24 0.0 0.0 layer3

    density (gm/cm^3)

    10.50 0.0 0.0 layer1

    1.37 0.0 0.0 layer2

    1.37 0.0 0.0 layer3

    specific heat (J/kg K)

    234.80 0.0 0.0 layer1

    729.90 0.0 0.0 layer2

    729.90 0.0 0.0 layer3

    t_pulse300

    q_o0.99

    freq20

    n_pulses1

    T_top25

    T-bot12

    h_top15

    h_bot15

    To25

    time_step5

    t_print25

    Temperature (C) vs. time (ms) for each layer

    time(ms)topinterface1interface2bottom

    025252525

    0.025243.72237.692525

    0.05322.05318.5225.0225

    0.075466.29459.4125.1825

    0.1517.66513.2825.7325

    0.125634.63627.5226.9825

    0.15676.01671.1229.1924.99

    0.175776.14768.9532.5124.99

    0.2812.74807.4937.0224.99

    0.225900.78893.5642.7224.99

    0.25934.82929.2949.5724.99

    0.2751013.521006.3157.524.99

    0.31018.671014.2966.4424.99

    0.325904.34902.2476.324.99

    0.35832.45830.9886.9724.99

    0.375778.9777.7698.2624.99

    0.4736.21735.29109.8224.99

    0.425700.81700.04121.2824.99

    0.45670.69670.02132.3224.99

    0.475644.55643.97142.7424.99dfsdsdsds

    0.5621.55621.04152.4124.99

    0.525601.08600.62161.2924.99

    0.55582.67582.26169.3824.99

    0.575565.99565.62176.7124.99

    0.6550.78550.44183.3224.99

    0.625536.83536.52189.2624.99

    0.65523.96523.67194.5824.99

    0.675512.05511.78199.3524.99

    0.7500.96500.71203.6124.99

    0.725490.62490.39207.4224.99

    0.75480.94480.72210.8124.99

    0.775471.85471.64213.8224.99

    0.8463.29463.09216.524.99

    0.825455.21455.02218.8824.99

    0.85447.56447.39220.9824.99

    0.875440.32440.16222.8324.99

    0.9433.44433.29224.4624.99

    0.925426.9426.75225.8824.99

    0.95420.66420.52227.1324.99

    0.975414.71414.58228.224.99

    1409.02408.89229.1324.99

    1.025403.58403.45229.9224.99

    1.05398.36398.24230.5924.99

    1.075393.35393.24231.1524.99

    1.1388.55388.44231.624.99

    1.125383.92383.82231.9624.99

    1.15379.47379.37232.2424.99

    1.175375.18375.09232.4424.98

    1.2371.05370.95232.5724.98

    1.225367.06366.96232.6424.98

    1.25363.2363.11232.6524.98

    1.275359.47359.39232.624.98

    1.3355.87355.78232.5124.98

    1.325352.37352.29232.3724.98

    1.35348.99348.91232.224.98

    1.375345.71345.63231.9824.98

    1.4342.53342.45231.7424.98

    1.425339.44339.37231.4624.98

    1.45336.44336.37231.1524.98

    1.475333.52333.45230.8224.98

    1.5330.69330.62230.4724.98

    1.525327.93327.86230.0924.98

    1.55325.24325.18229.724.98

    1.575322.63322.57229.2824.98

    1.6320.08320.02228.8624.98

    1.625317.6317.54228.4124.98

    1.65315.18315.12227.9624.98

    1.675312.81312.76227.4924.98

    1.7310.51310.46227.0124.98

    1.725308.26308.21226.5324.98

    1.75306.06306.01226.0324.98

    1.775303.91303.86225.5324.98

    1.8301.81301.76225.0224.98

    1.825299.76299.71224.524.98

    1.85297.75297.71223.9824.98

    1.875295.79295.74223.4524.98

    1.9293.87293.82222.9224.98

    1.925291.98291.94222.3924.98

    1.95290.14290.1221.8524.98

    1.975288.33288.29221.3124.98

    2286.57286.53220.7724.98

    2.025284.83284.79220.2224.98

    2.05283.13283.09219.6824.98

    2.075281.47281.43219.1324.98

    2.1279.83279.79218.5824.98

    2.125278.23278.19218.0424.98

    2.15276.65276.62217.4924.98

    2.175275.11275.07216.9424.98

    2.2273.59273.56216.424.98

    2.225272.1272.07215.8524.98

    2.25270.64270.6215.3124.99

    2.275269.2269.17214.7624.99

    2.3267.79267.75214.2224.99

    2.325266.4266.37213.6824.99

    2.35265.03265213.1424.99

    2.375263.69263.66212.624.99

    2.4262.37262.34212.0624.99

    2.425261.07261.04211.5324.99

    2.45259.8259.7721124.99

    2.475258.54258.51210.4725

    2.5257.3257.27209.9425

    2.525256.08256.06209.4125

    2.55254.89254.86208.8925

    2.575253.71253.68208.3725

    2.6252.54252.52207.8525.01

    2.625251.4251.37207.3325.01

    2.65250.27250.25206.8225.01

    2.675249.16249.14206.3125.01

    2.7248.07248.04205.825.02

    2.725246.99246.96205.2925.02

    2.75245.92245.9204.7925.02

    2.775244.88244.85204.2925.03

    2.8243.84243.82203.7925.03

    2.825242.82242.8203.2925.04

    2.85241.82241.8202.825.04

    2.875240.83240.81202.3125.04

    2.9239.85239.83201.8325.05

    2.925238.89238.86201.3425.05

    2.95237.93237.91200.8625.06

    2.975236.99236.97200.3825.07

    3236.07236.05199.9125.07

    3.025235.15235.13199.4325.08

    3.05234.25234.23198.9725.09

    3.075233.36233.34198.525.09

    3.1232.48232.46198.0325.1

    3.125231.61231.59197.5725.11

    3.15230.75230.73197.1225.12

    3.175229.9229.88196.6625.13

    3.2229.07229.05196.2125.14

    3.225228.24228.22195.7625.14

    3.25227.42227.4195.3125.15

    3.275226.61226.6194.8725.16

    3.3225.82225.8194.4325.18

    3.325225.03225.01193.9925.19

    3.35224.25224.23193.5525.2

    3.375223.48223.46193.1225.21

    3.4222.72222.7192.6925.22

    3.425221.96221.95192.2625.24

    3.45221.22221.2191.8425.25

    3.475220.48220.47191.4125.26

    3.5219.75219.7419125.28

    3.525219.03219.02190.5825.29

    3.55218.32218.31190.1625.31

    3.575217.62217.6189.7525.32

    3.6216.92216.91189.3425.34

    3.625216.23216.22188.9425.36

    3.65215.55215.54188.5325.38

    3.675214.88214.86188.1325.39

    3.7214.21214.2187.7325.41

    3.725213.55213.53187.3425.43

    3.75212.9212.88186.9425.45

    3.775212.25212.24186.5525.47

    3.8211.61211.6186.1625.49

    3.825210.98210.96185.7825.51

    3.85210.35210.33185.3925.54

    3.875209.73209.71185.0125.56

    3.9209.11209.1184.6325.58

    3.925208.5208.49184.2625.61

    3.95207.9207.89183.8825.63

    3.975207.3207.29183.5125.66

    4206.71206.7183.1425.68

    4.025206.13206.11182.7725.71

    4.05205.55205.54182.4125.73

    4.075204.97204.96182.0525.76

    4.1204.41204.39181.6925.79

    4.125203.84203.83181.3325.82

    4.15203.28203.27180.9725.85

    4.175202.73202.72180.6225.88

    4.2202.18202.17180.2725.91

    4.225201.64201.63179.9225.94

    4.25201.1201.09179.5725.97

    4.275200.57200.56179.2226.01

    4.3200.04200.03178.8826.04

    4.325199.52199.51178.5426.07

    4.35199198.99178.226.11

    4.375198.48198.47177.8626.14

    4.4197.97197.96177.5326.18

    4.425197.47197.46177.226.21

    4.45196.97196.96176.8626.25

    4.475196.47196.46176.5426.29

    4.5195.98195.97176.2126.33

    4.525195.49195.48175.8826.37

    4.55195.01195175.5626.41

    4.575194.53194.52175.2426.45

    4.6194.05194.04174.9226.49

    4.625193.58193.57174.626.53

    4.65193.11193.1174.2926.57

    4.675192.65192.64173.9726.61

    4.7192.19192.18173.6626.66

    4.725191.73191.72173.3526.7

    4.75191.28191.27173.0426.75

    4.775190.83190.82172.7426.79

    4.8190.38190.37172.4326.84

    4.825189.94189.93172.1326.89

    4.85189.5189.49171.8326.93

    4.875189.07189.06171.5326.98

    4.9188.63188.63171.2327.03

    4.925188.21188.2170.9327.08

    4.95187.78187.77170.6427.13

    4.975187.36187.35170.3527.18

    5186.94186.93170.0527.23

    5.025186.53186.52169.7727.28

    5.05186.11186.11169.4827.34

    5.075185.71185.7169.1927.39

    5.1185.3185.29168.9127.44

    5.125184.9184.89168.6227.5

    5.15184.5184.49168.3427.55

    5.175184.1184.09168.0627.61

    5.2183.71183.7167.7827.66

    5.225183.32183.31167.5127.72

    5.25182.93182.92167.2327.78

    5.275182.54182.53166.9627.83

    5.3182.16182.15166.6827.89

    5.325181.78181.77166.4127.95

    5.35181.4181.39166.1428.01

    5.375181.03181.02165.8828.07

    5.4180.66180.65165.6128.13

    5.425180.29180.28165.3428.19

    5.45179.92179.91165.0828.26

    5.475179.56179.55164.8228.32

    5.5179.2179.19164.5628.38

    5.525178.84178.83164.328.45

    5.55178.48178.47164.0428.51

    5.575178.13178.12163.7828.57

    5.6177.78177.77163.5328.64

    5.625177.43177.42163.2728.71

    5.65177.08177.07163.0228.77

    5.675176.74176.73162.7728.84

    5.7176.4176.39162.5228.91

    5.725176.06176.05162.2728.97

    5.75175.72175.71162.0229.04

    5.775175.38175.38161.7829.11

    5.8175.05175.04161.5329.18

    5.825174.72174.71161.2929.25

    5.85174.39174.38161.0529.32

    5.875174.06174.06160.8129.39

    5.9173.74173.73160.5729.46

    5.925173.42173.41160.3329.54

    5.95173.1173.09160.0929.61

    5.975172.78172.77159.8529.68

    6172.46172.46159.6229.75

    6.025172.15172.14159.3829.83

    6.05171.84171.83159.1529.9

    6.075171.53171.52158.9229.98

    6.1171.22171.21158.6930.05

    6.125170.91170.91158.4630.13

    6.15170.61170.6158.2330.2

    6.175170.31170.315830.28

    6.2170.01170157.7830.36

    6.225169.71169.7157.5530.43

    6.25169.41169.4157.3330.51

    6.275169.12169.11157.1130.59

    6.3168.82168.82156.8830.67

    6.325168.53168.52156.6630.75

    6.35168.24168.23156.4430.83

    6.375167.95167.95156.2330.91

    6.4167.67167.66156.0130.99

    6.425167.38167.38155.7931.07

    6.45167.1167.09155.5831.15

    6.475166.82166.81155.3631.23

    6.5166.54166.53155.1531.31

    6.525166.26166.26154.9431.39

    6.55165.98165.98154.7331.48

    6.575165.71165.7154.5231.56

    6.6165.44165.43154.3131.64

    6.625165.17165.16154.131.73

    6.65164.9164.89153.8931.81

    6.675164.63164.62153.6831.89

    6.7164.36164.35153.4831.98

    6.725164.1164.09153.2732.06

    6.75163.83163.83153.0732.15

    6.775163.57163.56152.8732.23

    6.8163.31163.3152.6732.32

    6.825163.05163.04152.4732.41

    6.85162.79162.79152.2732.49

    6.875162.53162.53152.0732.58

    6.9162.28162.27151.8732.67

    6.925162.03162.02151.6732.75

    6.95161.77161.77151.4832.84

    6.975161.52161.52151.2832.93

    7161.27161.27151.0933.02

    7.025161.03161.02150.8933.11

    7.05160.78160.77150.733.19

    7.075160.53160.53150.5133.28

    7.1160.29160.28150.3233.37

    7.125160.05160.04150.1333.46

    7.15159.8159.8149.9433.55

    7.175159.56159.56149.7533.64

    7.2159.32159.32149.5633.73

    7.225159.09159.08149.3733.82

    7.25158.85158.85149.1933.91

    7.275158.62158.6114934

    7.3158.38158.38148.8234.1

    7.325158.15158.14148.6434.19

    7.35157.92157.91148.4534.28

    7.375157.69157.68148.2734.37

    7.4157.46157.45148.0934.46

    7.425157.23157.22147.9134.56

    7.45157157147.7334.65

    7.475156.78156.77147.5534.74

    7.5156.55156.55147.3734.83

    7.525156.33156.32147.234.93

    7.55156.11156.1147.0235.02

    7.575155.89155.88146.8435.11

    7.6155.67155.66146.6735.21

    7.625155.45155.44146.4935.3

    7.65155.23155.22146.3235.39

    7.675155.01155.01146.1535.49

    7.7154.8154.79145.9735.58

    7.725154.58154.58145.835.68

    7.75154.37154.36145.6335.77

    7.775154.16154.15145.4635.87

    7.8153.94153.94145.2935.96

    7.825153.73153.73145.1236.06

    7.85153.52153.52144.9636.15

    7.875153.32153.31144.7936.25

    7.9153.11153.1144.6236.34

    7.925152.9152.9144.4636.44

    7.95152.7152.69144.2936.53

    7.975152.49152.49144.1336.63

    8152.29152.28143.9636.73

    8.025152.09152.08143.836.82

    8.05151.89151.88143.6436.92

    8.075151.68151.68143.4737.01

    8.1151.49151.48143.3137.11

    8.125151.29151.28143.1537.21

    8.15151.09151.08142.9937.3

    8.175150.89150.89142.8337.4

    8.2150.7150.69142.6737.5

    8.225150.5150.5142.5237.6

    8.25150.31150.3142.3637.69

    8.275150.11150.11142.237.79

    8.3149.92149.92142.0537.89

    8.325149.73149.73141.8937.98

    8.35149.54149.54141.7438.08

    8.375149.35149.35141.5838.18

    8.4149.16149.16141.4338.28

    8.425148.97148.97141.2738.37

    8.45148.79148.78141.1238.47

    8.475148.6148.6140.9738.57

    8.5148.41148.41140.8238.67

    8.525148.23148.23140.6738.76

    8.55148.05148.04140.5238.86

    8.575147.86147.86140.3738.96

    8.6147.68147.68140.2239.06

    8.625147.5147.5140.0739.16

    8.65147.32147.32139.9239.25

    8.675147.14147.14139.7739.35

    8.7146.96146.96139.6339.45

    8.725146.78146.78139.4839.55

    8.75146.6146.6139.3439.65

    8.775146.43146.42139.1939.74

    8.8146.25146.25139.0539.84

    8.825146.08146.07138.939.94

    8.85145.9145.9138.7640.04

    8.875145.73145.73138.6240.14

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