photo-thermal chemical vapour deposition growth of graphene

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1 Photo-thermal chemical vapour deposition growth of graphene Y. Y. Tan, K. D. G. I. Jayawardena, A. A. D. T. Adikaari, L. W. Tan, J. V. Anguita, S. J. Henley, V. Stolojan, J. D. Carey and S. R. P. Silva 1 Nano-Electronics Centre, Advanced Technology Institute, University of Surrey, Guildford GU2 7XH, United Kingdom The growth of graphene on Ni using a photo-thermal chemical vapour deposition (PT-CVD) technique is reported. The non-thermal equilibrium nature of the PT-CVD process resulted in a much shorter duration of the overall growth time for graphene in both the heating up and cooling down stages, thus allowing for the reduction. Despite the reduced time for synthesis compared to standard thermal chemical vapour deposition (T-CVD), there was no decrease in the quality of the graphene film produced. Furthermore, the graphene formation under PT-CVD is much less sensitive to cooling rate than that observed for T-CVD. Growth of graphene on Ni also allows for the alleviation of hydrogen blister damage that is commonly encountered on Cu substrates and a lower processing temperature. To characterize the film’s electrical and optical properties, we further report the use of pristine PT-CVD grown graphene as the transparent electrode material in an organic photovoltaic device (OPV) with poly(3-hexyl)thiophene (P3HT) / phenyl-C61-butyric acid methyl ester (PCBM) as the active layer, where the power conversion efficiency of the cell is found to be comparable to that reported using pristine graphene prepared by conventional CVD. 1 Corresponding author. [email protected]

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Page 1: Photo-thermal chemical vapour deposition growth of graphene

1

Photo-thermal chemical vapour deposition growth of graphene

Y. Y. Tan, K. D. G. I. Jayawardena, A. A. D. T. Adikaari, L. W. Tan,

J. V. Anguita, S. J. Henley, V. Stolojan, J. D. Carey and S. R. P. Silva1

Nano-Electronics Centre, Advanced Technology Institute,

University of Surrey, Guildford GU2 7XH, United Kingdom

The growth of graphene on Ni using a photo-thermal chemical vapour deposition (PT-CVD)

technique is reported. The non-thermal equilibrium nature of the PT-CVD process resulted in a

much shorter duration of the overall growth time for graphene in both the heating up and cooling

down stages, thus allowing for the reduction. Despite the reduced time for synthesis compared to

standard thermal chemical vapour deposition (T-CVD), there was no decrease in the quality of the

graphene film produced. Furthermore, the graphene formation under PT-CVD is much less

sensitive to cooling rate than that observed for T-CVD. Growth of graphene on Ni also allows for

the alleviation of hydrogen blister damage that is commonly encountered on Cu substrates and a

lower processing temperature. To characterize the film’s electrical and optical properties, we

further report the use of pristine PT-CVD grown graphene as the transparent electrode material in

an organic photovoltaic device (OPV) with poly(3-hexyl)thiophene (P3HT) / phenyl-C61-butyric

acid methyl ester (PCBM) as the active layer, where the power conversion efficiency of the cell is

found to be comparable to that reported using pristine graphene prepared by conventional CVD.

1Corresponding author.

[email protected]

Page 2: Photo-thermal chemical vapour deposition growth of graphene

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Introduction

Graphene is a two dimensional material with an in-plane sp2 hybridization of carbon atoms

that leads to a robust lattice structure and a p orbital perpendicular to the graphene plane that

results in a delocalized π electron system. The linear energy dispersion relation associated with

massless electrons (Dirac fermions) results in a zero bandgap material with a linear density of

states at low energies [1]. Recently, graphene has been utilized for a wide variety of applications,

including as the transparent electrode for organic solar cells [2] and fuel cells [3], amongst others.

While the popular fabrication technique is to produce single layer graphene by mechanical

exfoliation, this method is not amenable to large scale production of a large area film. Chemical

routes, such as those based on Hummers’s oxidation method, [4] have also been explored as a

method for large scale graphene production the quality of the resultant film is low that found in

using exfoliation due to the presence of residual oxygen moieties on the surface. Graphene

synthesis by sublimation of single crystal 4H-SiC [5] is another popular alternative which has

been demonstrated to produce high quality single layered graphene. However, the cost of this

process is very high due to the use of single crystalline SiC and the size is limited. By contrast

chemical vapour deposition (CVD) has emerged as the leading growth method that is inherently

scalable for large area film production. A second key advantage of using CVD based methods is

the ability to dissolve the underlying metal for transferring graphene to an arbitrary substrate is a

further advantage [6]. To date Ni [6] and Cu [7] are two common choices, among other metals,

used in CVD growth of graphene.

Previously, we reported carbon nanotube synthesis by a photo-thermal chemical vapour

deposition (PT-CVD) method [9, 10]. PT-CVD can offer several technological advantages over

conventional CVD compared to conventional thermal CVD methods. The experience gained using

rapid thermal processing in Si fabrication has shown that unlike conventional resistive heating, the

use of a rapid optical heating under vacuum ensures the growth process is a non-thermal

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equilibrium process with a large thermal gradient between the sample and surrounding processing

chamber [11]. Since this surface radiant energy deposition can be affected by a variety of factors

like wavelength dependent absorption of the thermal energy, reflections of thermal energy from

the enclosing vacuum chamber among others, the mechanism is still not well understood [11]. The

PT-CVD design uses a rapid optical infrared (IR) heating source to deliver the energy from above

the substrate with a thermal barrier layer on the substrate which helps to absorb and reflect the IR

radiation back to the metal sample resulting in more efficient energy usage for the growth process

[9]. While most reported graphene CVD growth uses a hot-wall system, there is an advantage of

using cold-wall CVD instead as deposition on side-walls leading to sample contamination can be

minimized [11]. Furthermore, we observe that photo-induced rapid thermal processing reduces the

overall process time due to a very much shorter duration for both the heating up and cooling down

stages, and that the graphene formation under PT-CVD is much less affected by the much faster

cooling rates. In the present work, we use the PT-CVD to demonstrate grow of graphene on a

polycrystalline Ni substrate using acetylene as the hydrocarbon source gas with an overall much

faster turnaround process time than standard thermal CVD. Ni rather than Cu has been used in this

work since the combination of Ni with acetylene has been reported to result in a lower growth

temperature for graphene [12], and furthermore growth on Ni also allows for the alleviation of

hydrogen blister damage that is commonly encountered during growth on non-oxygen free Cu

substrates.

Experiment

The schematic of the PT-CVD system (Surrey Nanosystem SNS NanoGrowth 1000) is

shown in figure 1. The thermal barrier on the substrate support is made from a bilayer of Ti/TiN

which helps to enhance the surface temperature [9]. Ni foil (Alfa Aesar, product 10254) was first

cleaned by acetone, IPA and methanol and placed on the substrate holder. At a base pressure of

better than 10-2

Torr, a mixture of Ar /H2 (total of 100sccm) was introduced. The IR lamp is

Page 4: Photo-thermal chemical vapour deposition growth of graphene

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switched on simultaneously for duration of 5 min to anneal the Ni foil to reduce any oxide on the

surface. Maintaining the temperature at 700OC, the Ar/H2 mixture was switched off and C2H2 (2

sccm) was introduced for 5 sec. We note that increasing the duration of C2H2 tends to result in

multi-layer graphene growth dominating the surface of Ni. After the growth period, both the IR

lamp and the C2H2 flow were switched off and Ar/H2 mix was re-introduced in order to cool the

sample down to room temperature at a rate of approximately ~ 100OC/min. The effect of dilution

of C2H2 with H2 was also carried out but no observable difference in the film quality or surface

coverage was detected by subsequent Raman spectroscopy. The as-grown graphene sample on Ni

foil was examined first both optically and using Raman spectroscopy (Renishaw microRaman,

514 nm Ar+

laser). Afterwards, the graphene layer was transferred onto SiO2 (100 nm)/Si substrate

using either the PMMA based transfer technique [6] or through direct lift off from a Ni etchant

solution (Alfa Aesar commercial Ni etchant). Further Raman spectroscopic analyses were carried

out on the graphene upon transferred to SiO2. Graphene was also transferred onto a TEM holey

carbon grid (Agar) for examination using a Hitachi HD2300 Scanning Transmission electron

microscope (STEM). Optical transmission properties of the film were investigated using a Cary

5000 UV-Vis spectrometer and electrical characterization was performed using a Kiethley 4200

semiconductor characterization system. Finally, the graphene film prepared by PT-CVD was used

as the transparent electrode in an organic photovoltaic (OPV) device fabrication. The OPV device

is fabricated using our previously reported process [8]. In brief, first graphene is transferred onto a

glass substrate, followed by using the ‘spin and drop’ technique to coat the graphene’s surface

with a PEDOT:PSS. After this, a P3HT:PCBM layer is spin-coated on to act as the active layer.

BCP and Al were then thermally evaporated sequentially to form a hole blocking layer and as the

electrode respectively. The OPV device was characterized with a solar simulator operating under

AM 1.5G illumination, calibrated with a Newport reference cell. A Kiethley 2400 sourcemeter

was used as the electronic load.

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Results and discussions

Figure 2a and 2b show the optical image (Leica microscope) of graphene on the Ni foil

upon PT-CVD growth and its corresponding Raman spectra (respectively). Dark boundaries are

observed on the surface of the Ni foil that were previously absent in the pristine Ni foil as received

from the supplier (inset of figure 2a). The straight lines running across the pristine Ni foil is

believed to be due to the cold-rolling process used for the production of the metallic foil. We

observed ‘boundaries’ in the foil after the growth process. While the origins of these await further

investigations, these boundaries may potentially lead to a discontinuous graphene film upon

cooling after the growth process [6, 13]. The Raman spectrum at the boundary line as indicated in

the optical image (Fig 2 (b)) shows a higher I(G)/I(2D) ratio. Furthermore, the FWHM of the 2D

peak is wider (some of these sites’ FWHM approximated to ~ 90 cm-1

) compared to a region away

from the boundary. This may be indicative of a higher graphene layer count at the boundaries than

at sites away from the boundaries as is often observed in CVD growth of graphene using Ni as

catalyst [13].

The as-grown graphene was transferred onto SiO2 (100 nm thickness)/Si for further

examination. Optical image of the film and Raman spectra at selected sites on the film are shown

in Figure 3. A FWHM of 38 cm-1

(by fitting with a single Lorentzian) for the 2D peak (2695 cm-1

)

of the Raman spectrum indicates the presence of single layered graphene [14], while some sites on

the film also indicated a higher defect (more pronounced D) peak which may be due to the

exposure to acid etchants used to remove the underlying metal catalyst [15]. While there remains a

possibility that the graphene may be damaged during the transfer process, the observation of a low

I(D)/I(G) ratio of graphene on Ni foil compared to the D peak of the same graphene film upon

transferring to SiO2/Si provides some support for the hypothesis of acid induced damage.

However, in comparing our film to graphene films formed by chemical routes, the Raman the

I(D)/I(G) is still lower [16] and is comparable to graphene grown by the more commonly reported

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hot wall CVD method [6, 13]. The position of the Raman 2D peak is also higher compared to

exfoliated graphene from HOPG (~ 2640 cm-1

) but is still consistent with other reported CVD

grown graphene [6, 7]. One reason for the difference in the thermal expansion between graphene

and Ni during the cooling stage causes a strain in the graphene lattice, resulting in a shift in

Raman 2D’s peak position [17]. There have been other reports that cite the doping of graphene by

HNO3 (a component in our commercial Ni etchant solution) [18] and the substrate effect [19] as

additional causes contributing to this shift. It is also observed that our graphene film also exhibits

Raman spectra characteristic of a few layered graphene at other sites, indicating that the film is not

a single layer at all sites. It is also observed that in some of these sites, the Raman 2D peak

exhibits a single Lorentzian peak but with a wider FWHM (up to ~ 70 cm-1

). It has been argued

that CVD grown few-layers graphene may exhibit characteristics similar to turbostratic graphene

resulting from the absence of long term order in the c axis as compared to HOPG’s ordered AB

stacking [20 - 22].

It was reported that alternative methods like I(G)’s Raman intensity, ratios of I(G) /I(2D)

and AFM can help in the estimation of the number of graphene layers [6, 25]. Using the same

methodologies, we approximated that at some of these sites, the layer of graphene may be

approximately 3 ~ 4 layers thick. Figure 4 shows selected area electron diffraction (SAED)

patterns of our graphene film on a TEM holey carbon grid. This confirms the earlier observations

that the PT-CVD grown film has the hexagonal symmetry that is characteristic of graphitic

material as there is in general, a lack of ring-like diffraction patterns which are associated with

random stacking in either amorphous polycrystalline or thick graphitic carbons. The existence of

faint secondary diffraction spots (as indicated by the arrow) may be attributed to mis-orientation

between adjacent layers providing further support to the turbostratic nature of our PT-CVD grown

few layered graphene [6]. However, the possibility that this may also be a result of the electron

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beam damage during electron microscopic analysis cannot be dismissed, as the electron beam

incidence is not perpendicular to the sample.

It has been previously noted that using hot wall CVD for graphene growth, the cooling rate

was deemed to be critical in controlling the number of graphene layers formed on the Ni surface.

Our PT-CVD system exhibits a nominal cooling rate of ~100oC/min under the flow of H2 and Ar.

While this cooling rate is an order of magnitude faster than the more commonly reported rate of ~

10oC/min for standard thermal CVD [13], we did not observe similar increases in the Raman D

peak which have been partially attributed to a rapid cooling (> 20oC/min) that did not allow

sufficient time for the segregated carbon to diffuse and achieve better crystallinity [13]. We do

note that since our growth process is essentially in non-thermal equilibrium unlike standard

thermal CVD, a direct comparison between the two different processes is inaccurate.

To further characterize the graphene film’s electrical and optical properties, we also

fabricated an organic solar cell (OPVs) using the pristine (non-chemically modified) graphene.

Previous works [3, 26] have indicated that the hydrophobic nature of pristine graphene and its

inherently higher sheet resistance [29] can hinder the performance of graphene based OPV cells

unless additional methods like chemical modification of graphene with PBASE [2], AgCl3 [26]

and HCL/HNO3 compounds [18] are used. Since our aim was to establish if our pristine graphene

can have comparable performance to graphene grown using standard thermal CVD, no process

optimizations were taken to maximize the OPV’s performance.

We first investigated the optical transmission of the graphene film by transferring the as

grown film onto a glass substrate using the PMMA technique as before and then examined using

UV-VIS absorption/transmission studies. We observed that the optical transmission of the

graphene film is above 90% within the range 300 to 800 nm which is a significant improvement

over ITO [23]. The sheet resistance of the graphene film was also measured to be ~ 790 /sq

(Kulicke and Soffa four point measurement system). This falls within the range of the previously

Page 8: Photo-thermal chemical vapour deposition growth of graphene

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reported sheet resistance values [7, 23]. Investigations into using CVD grown graphene as OPV’s

transparent electrode have been reported earlier using both bulk hetero-junction and bilayer OPV

structures [26]. In both cases, PEDOT:PSS has been utilized as a hole transport /planarising layer

[24]. As mentioned, one common issue is that graphene surface tends to be hydrophobic thus spin-

coating of PEDOT-PSS on the surface faces considerable difficulty. We attempted to minimize

this issue by utilizing an ethanol/PEDOT:PSS (1:3) solution for the spin coating process instead of

just spin-coating with the original water based PEDOT:PSS solution. Apart from acting as a hole

transport layer, in the case of transferred graphene electrodes, PEDOT:PSS act as a reasonable

planarising material.

Figure 5 shows the J-V characteristics of the graphene electrode based OPV, with the inset

showing the PEDOT:PSS reference. The performance parameters are summarized in Table 1. The

graphene electrode based device shows 0.2% efficiency, which is comparable to other reported

result that uses CVD grown pristine graphene on a similar OPV device structure [2]. It has been

previously reported that PEDOT:PSS has been experimented as an transparent electrode in solar

cell [27]. To ensure that the photovoltaic effect observed in our graphene OPV cell is not due to

the PEDOT:PSS layer acting as the transparent electrode in place of graphene, we also fabricated

another OPV cell structure: PEDOT:PSS/P3HT:PCBM/BCP/Al on glass substrates. As seen in

figure 5 inset, there is no observable difference in the I-V characteristics under both dark and light

illumination, thus indicating the role of graphene as the transparent electrode for the OPV. This is

purely to demonstrate the versatility of the graphene layers we are able to deposit on this system

rather than to show state of the art OPV performance.

We had previously reported a standard ITO based P3HT:PCBM bulk heterojunction solar

cell [8, 30] of 2.5% efficient with open circuit voltage mainly governed by the donor acceptor

energy levels ~0.6V, and short circuit current densities in excess of 6 mAcm-2

. From Table 1, it

can be seen that the short circuit current density is low for the device with the graphene electrode

Page 9: Photo-thermal chemical vapour deposition growth of graphene

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in comparison to our ITO based OPVs, leading to poorer efficiency. Beside the earlier stated

issues regarding the use of graphene as electrodes for OPVs, we further postulate that the low

conversion efficiency can be attributed to a number of other reasons. The work function of

graphene (4.5 eV) is lower compared with ITO (4.8 eV), thereby affecting the built in electric field

of the diode, resulting in lower charge collection as well as a slightly lower open circuit voltage.

From the J-V curves (figure 5a) it can be seen that the shunt resistance of the device is finite (slope

at Jsc), possibly due to sub optimal planarising of the layer after transfer, leaving abundant leakage

paths for charges. This fact along with poor sheet resistance lowers the fill factor, reducing the

device efficiency further.

In conclusion, the growth of graphene on Ni using a photo-thermal CVD system (PT-

CVD) has been demonstrated. By using PT-CVD system, the overall growth time has been greatly

reduced compared to the standard thermal CVD growth technique due to the non-thermal

equilibrium nature of the process, while still maintaining a comparable material quality. This is

demonstrated in similar performance in resistance and optical transmission as compared to those

reported in the literature, and a comparison made. Furthermore, investigations into applying our

pristine graphene film as a transparent electrode for OPV to further characterize the film’s optical

and electrical properties had found comparable performance to other reported pristine graphene

based devices. Through this work, we demonstrate an alternative CVD technology that can make

mass production of graphene more attractive. The speed of operation of the process coupled with

the optical energy coupling is ideally suited for mono and multiple layer material growth required

in graphene synthesis.

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Figure 1: Schematic of the PTCVD system.

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Figure 2: a) Optical image of the graphene as grown on Ni foil. Inset is the Ni foil before

undergoing the growth process. The film surface seems to exhibit ‘boundaries’ that maybe related

to the grain size of the underlying Ni foil. (b) Raman spectra at the corresponding points of the

optical image in (a). Points A and B on figure left (a) correspond to the Raman spectra of A and B

in figure right (b) respectively Note the wider FWHM in the Raman 2D peak measured on the

darker pattern on the sample which may be indicative of a few layer graphene. Bar scale 100

micron.

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Figure 3: a) Optical image of the graphene after transferred on a 300 nm SiO2 wafer, (b) Raman

spectra at the corresponding points on the graphene. Points A, B and C on figure left (a)

correspond to the Raman spectra of A, B and C in figure right (b) respectively. The Raman spectra

indicated that the film has few layer graphene on certain places, thus the film may not be

completely single layer. Furthermore, some places have a higher Raman D peak indicating defects

in the graphitic structure. It is not clear if the defects are inherent in the growth process or the

result of damages caused during the graphene transfer from Ni to SiO2. Bar scale 100 micron.

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Figure 4: The electron diffraction patterns (SAED) measured at three random points of a graphene

film on a TEM holey carbon grid, showed the hexagonal symmetry that is characteristic of

graphitic materials. Note the secondary diffraction spots (arrows in image c) may have been

resulted from mis-orientation of adjacent graphene layers indicating that the CVD growth few

layer graphene may be turbostratic.

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Figure 5 a) The J-V characteristics of OPV cell fabricated using graphene as transparent electrode

(graphene/PEDOT:PSS/P3HT:PCBM/BCP/Al) under dark and light 9AM 1.5G) conditions.

(Inset) shows the J-V characteristics of a ‘reference’ OPV cell of

PEDOT:PSS/P3HT:PCBM/BCP/Al. b) The proposed flat band diagram for the device

incorporating graphene as an electrode. c) The schematic of the graphene based OPV device.

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Table 1: Comparison of performance between graphene based OPV against a control device

without graphene. The area of the OPV is 0.032 cm2. Compared to a device consisting of PEDOT

and Al electrodes only, the device containing graphene electrode shows an improved performance.

Voc Jsc

(mA/cm2)

FF

(%)

η

(%)

Glass/Graphene/PEDOT:PSS/P3HT:PCBM/BCP/Al 0.52 1.16 31.5 0.2

Glass/PEDOT:PSS/P3HT:PCBM/BCP/Al 0.26 0.001 26.0 0.0