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P- sub OD NW Po ly contac t PP

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P-sub. NW. PP. OD. contact. Poly. P-sub. NW. PP. OD. matel. contact. Poly. N-well. P-sub. NW. N-well. PP. OD. contact. Poly. N-well. As. PR. N-well. P-sub. Field Oxide. P-sub. NW. PP. OD. Field Oxide. contact. Poly. Field Oxide. CF4. CF4. PR. SiNx. - PowerPoint PPT Presentation

TRANSCRIPT

P-sub

OD

NW

Polycontact

PP

P-sub

OD

NW

Polycontact

PP

matel

N-well P-sub

OD

NW

Polycontact

PPN-well

N-well

P-sub

PR

As

N-well

P-sub

OD

NW

Polycontact

PP

Field Oxide

Field Oxide

P-sub

N-well

Field Oxide

SiO2SiNxPR

CF4CF4

P-sub

OD

NW

Polycontact

PP

Poly Poly

PRPolySiO2

P-sub

N-well

Poly

CF4CF4

P-sub

OD

NW

Polycontact

PP

P Pluse

P Pluse

PolySiO2

P-sub

N-well

b

P Pluse

P+P+

bB+

P-sub

OD

NW

Polycontact

PPcontact

Contact

BPSG

P-sub

N-wellP+P+

Contact

PR

CF4

W W

Matel 1 P-sub

OD

NW

Polycontact

PP

matel

Matel 1

BPSG

P-sub

N-wellP+P+

W W

Matel 1

Matel

PR

CF4 CF4CF4

ILD

BPSG

P-sub

N-wellP+P+

W W

Matel

Vial PR

CF4 CF4

W W

P-sub

OD

NW

Polycontact

PP

Matel 2

Matel 2

PSG

ILD

BPSG

P-sub

N-wellP+P+

W W

Matel

W W

Matel 2

MatelPR

ILD

CF4

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