OM 100High PurityOpaque Quartz Glass

Heraeus Quarzglas

General Product Description

OM 100 was developed by HeraeusQuarzglas through a desire for an opaquequartz glass with properties superior tothose of standard available materials. Theinnovative manufacturing process resultsin not only enhanced opacity but also in amuch smoother surface finish, high purityand greatly improved cosmetic appear-ance. What makes all of these very desir-able attributes simultaneously possible isthe presence of extremely fine microporo-sity uniformly distributed throughout thematerial.

Porosity is what lends opacity to all opaque quartz glass but the size, totalvolume and distribution of it is the key todetermining performance and appear-ance. The porosity present in standardopaque materials consists of round bub-bles roughly 100 microns in diameter.The OM 100 manufacturing processdoes not produce round bubbles butrather very fine irregularly shaped micor-pores (see figure 1 and 2).

Even though the total volume of the poro-sity is much less than in conventionalmaterials, the micropores scatter lightmuch more efficiently. This is partly dueto their shape but is mainly because theirsize is much closer to that of the lightwavelength. The net result is a brilliantwhite, glossy appearance that is obvi-ously superior to that of standard materials.

Since the total porosity volume is verylow (only 1 vol. %), OM 100 has physicaland thermal properties much closer tothose of clear fused quartz. Flame weld-ing can be accomplished without shrink-age resulting in a well-defined and smoothtransition between the joined materials.

When flame polished, the microporesnear the surface do not swell and burstresulting in the "orange peel" texturecommonly seen with standard opaquematerials. Instead, the micropores tend toclose thus allowing a clear surface layerto form. Besides improving the cosmeticappearance, this enhances the ability to

make tight vacuum seals. Furthermore,the lower porosity volume increases OM100's resistance to HF acid attack. Thesurface will remain much smoother thanthat of standard materials even after prolonged HF exposure (see Figure 3).This increases the useful life of thequartzware.

These very desirable attributes and capa-bilities make OM 100 the material ofchoice for semiconductor processingtechnology as well as all general applica-tions where demanding thermal require-ments coincide with the need for excep-tional purity and chemical resistance. Forfields like optics and lighting technology,OM 100 also provides an opportunity forinnovative problem solutions.

Available Dimensions

The OM 100 manufacturing process isideally suited to produce near-net, com-plex shapes like flanges with dimensionsup to 650 mm (OD). Thick plates andthin discs can also be readily made.

Technical DataOptical and Infrared Properties

OM 100 is an ideal opaque quartz glassmaterial with excellent light diffusion andthermal shielding capabilities. Due to itsspecial material structure with well con-trolled micropores, incident radiation isscattered in a highly efficient way.

Mechanical Properties

OM 100High Purity Opaque Quartz Glass

Diameter Thickness(up to) (up to)

Plates 500 mm 60 mm

Flanges 650 mm 200 mm

Density 2.15 - 2.18 g / cm3

Rel. approx. 99% Density (relative to transparent

quartz glass)Porosity < 1% Vol.

(the SEM picture showsclosed micropores witha typical size < 10 µm)

4-Point σ4B = 115.3 N / mm2

Bending (ref. DIN 51110, Part 1Strength and 3 / Test Report,

V.2/13417)

Figure 2: Typical Material Density: 2.05 - 2.10 g / cm3

Bubble size: 50 - 150 µmFused quartz matrix with spherical closed bubbles formed during the melt-ing process. The large bubbles scatter light inefficiently.

Elements Al Ca Cr Cu Fe K Li Mg Mn Na Ti Zr

Content 15 1.2 < 0.01 < 0.05 0.2 0.4 0.6 0.05 < 0.03 0.2 1.2 0.8

Thickness 1 mm 3 mm 4 mm

λ (200 - 500 nm) 1 - 4 % < 1 % < 1 %

Chemical Properties - Typical Trace Elements (ppm by weight oxide)

Direct Spectral Transmittance

Scanning Electron Microscope (SEM) Views

Figure 1: OM 100 Opaque Quartz GlassDensity: 2.15 - 2.18 g / cm3

Micropores: less than 10 µmFused quartz matrix with nonspherical, closed micropores. The reason forthe opaque appearance is the scattering of light at the micropores.

Figure 4:Comparison of the transmission of OM 100 opaque quartz glass with thatof a typical material for thicknesses from 1 - 10 mm. The advantage of OM 100 material is obvious for sample thicknesses below 6 mm.

Figure 3:Surface roughness versus etching time in 5 % HF.The higher density of OM 100 results in a very smooth surface finish thatdoes not roughen significantly even after long exposure. This makes OM 100 a perfect material for all opaque quartz applications.

EUROPEHeraeus Quarzglas GmbH & Co. KGBusiness Unit Basic MaterialsReinhard-Heraeus-Ring 29D-63801 KleinostheimPhone +49 (6181) 35-7444Fax +49 (6181) 35-7210E-Mail GBM-sales@

heraeus-quarzglas.com

http://www.heraeus-quarzglas.com

USAHeraeus Quartz Inc.17 Madison RoadFairfield, NJ 07004-2385Phone +1 (973) 227-6010Fax +1 (973) 227-4868E-Mail sales@heraeus-quartz.com

Heraeus Quartz Inc.4555 Atwater Court Buford, GA 30518Phone +1 (678) 802-2450Fax +1 (678) 802-2478E-Mail sales@heraeus-quartz.com

ASIAShin-Etsu Quartz Prod. Co., Ltd.Shinjuku San-Ei Bldg., 12th Floor22-2, 1-Chome, Nishi ShinjukuShinjuku-KuTokyo 160Phone +81 (333) 48 19 11Fax +81 (333) 48 49 19E-Mail d3sales@sqp.co.jp

OM 100High Purity Opaque Quartz Glass

Printed in Germany - Technical data and pictures given in this brochure are subject to change OM

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