Nitrogen Trifluoride

Natalie Law

F.3D (16)

Physical Properties

Melting point −207.15 °C, 66 K, -341 °

F

Boiling point −129.1 °C, 144 K, -200 °

F

Solubility in water 0.021 vol/vol (20 °C, 1 ba

r)

Density 3.003 kg/m3 (1 atom, 15 °C) 1.885 g/cm3 (liquid at b.p.)

Colour Colourless

Physical state at room temperature

Gas

Laboratory preparation

• Wear safety glasses, leather work gloves, and safety shoes when handling cylinders with NF3.

• Cylinders may contain pressure as high as 1500 psig. Secure the cylinder at all times while in use and always open valve slowly.

• Do not heat NF3 cylinders with any source of heat.

• Avoid areas where salt or other corrosive materials are present. Valve protection caps and valve outlet seals should remain on cylinders not connected for use. Separate full from empty cylinders. Avoid excessive inventory and storage time.

Laboratory preparation

Storage• Store in tightly-closed container.• Storage area temperatures should not exceed 52°C (1

25°F) and should be free of combustible materials, or may cause fire.

• Storage should be away from heavily traveled areas and emergency exits.

• Cylinders should be secured in an upright position and stored in a well-ventilated area protected from the weather. Cylinder connections should be protected from straining and movement.

Uses• It is used as an etchant in microelectronics.

• It is also used as an oxidizer for high-energy fuels. 

• It is even used each year in the production of flat screen TVs and monitors. 

Microelectronics

Potential hazard

• It is a toxic, oxidizing gas.

• May cause damage to the following organs: blood, kidneys, liver, upper respiratory tract, skin, eyes, based on animal data.

Special features• Nitrogen trifluoride can be called the missing greenho

use gas.Has found that levels of nitrogen trifluoride (NF3), an

extremely potent greenhouse gas (almost 17,000 times more potent than an equivalent mass of carbon dioxide on a 100-year time horizon), are at least four times higher than previously thought.

4,000 tons of nitrogen triflouride is used each year in the production of flat screen TVs and monitors. 

It has a larger potential greenhouse impact.