new wl 150 & wl 200 wafer handler for microscopy · 2016. 12. 11. · 9601 variel ave.,...
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WL 150 & WL 200Wafer Handler for Microscopy
The WL Series Wafer Handler is a safe, semiautomatic wafer loader designed for use with virtually all major microscopes,optics and inspection devices.
It is a portable, economically priced tool which serves as a direct replacement for Irvine Optical Ultrastation systems.
The WL Wafer Handler comes in two configurations to handle 3" - 6" wafers (WL 150) or 4" - 8" (WL 200) wafer sizes.
The series is designed for easy operation,seamless integration, and consistent, reliable handling for labsand automated
workstations.SPECIFICATIONS
Throughput 750 WPH (Load + Unload)
Reliability >2,500 hours (MTBF) 150 hours (MTBA) 50,000 wafers (MWBD)
Wafer SSize WL150 system (4"- 6") / WL200 system (4"-8")
Power 120 or 240VAC / 50/60 Hz, single phase500 watts / 4.6 amps
Vacuum Minimum 23 in/hg
Footprint WL150: 77 cm x 51.25 cm x per customer scopeWL 200: 79.5 cm x 61.5 cm x per customer scope
Weight 21 lbs (9.25 kg)
FEATURES
Loads 3", 4", 5" and 6" wafers (model WL 150)or 4”, 5", 6" and 8" wafers (model WL 200)High throughput > 750 WPHUses "smart" stepper motors for drive axis Stall and fault detectionLinear stages provide smooth,repeatable motionSpring loaded counterbalance supports load to protect Z-axis mechanismUser-defined inspection positionsVacuum touch end effector with sensingMultiple programsIntuitive touch screen interfaceSystem provided with HMI (Human Machine Interface) and numeric keypadRemote pendant controller included HMI housed in mountable enclosure with standard VESA interface
www.mcbaininstruments.com9601 Variel Ave., Chatsworth, CA 91311 818-998-2702 [email protected]