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Brooks InstrumentFlow Measurement and Control Product Selection Guide

2

Cont

ents The Brooks® Advantage:

Integrated Flow TechnologiesFor Precision Applications

Every day, flow customers all over the world turn

to Brooks products for solutions to their gas and

liquid low-flow applications. Brooks provides an

array of flow measurement and control products

for dozens of industries from biopharmaceuticals,

oil and gas, fuel cell research and chemicals, to

medical devices, analytical instrumentation,

semiconductor manufacturing, and more. In fact,

numerous brand preference studies rate Brooks variable area and thermal mass

instruments at the top of their category for accuracy, reliability, repeatability,

and flexibility.

But Brooks products are only half the story. In every corner of the globe, our

customers are backed by unsurpassed technical support. Your local Brooks sales

representatives possess years of experience solving application challenges like

yours. They’re trained to help you select the optimal solution for your flow

measurement and control needs.

Brooks combines superior products and technology with industry-specific

engineering, consulting, project management and maintenance services. Our

products are approved by internationally recognized standards such as CE, ATEX, UL,

cUL, and CSA. Consult current product data sheets at www.BrooksInstrument.com

for specific information on all applicable codes and certifications.

If you’re serious about improving your process yields and product quality,

choose Brooks.

3Technologies

4-5Coriolis Mass

6-9Thermal Mass

10-11Pressure Products

12-14Variable Area

15OEM Products

16Specialized

Products

17Software &

Electronics

18-19Services

3

Brooks TechnologiesCoriolis The Brooks family of Coriolis products uses a proven direct

mass measurement technology to provide precise flow measurement

and control of liquids and gases. These stand-alone devices include an

integrally mounted control valve function in a compact miniaturized

configuration. They can simultaneously measure mass flow, fluid density

and temperature. Brooks Coriolis meters, controllers, and sensors

provide unsurpassed performance, solving specific challenges in demanding low-flow applications.

Thermal Mass Flow Thermal Mass Flow (TMF) technology uses

thermodynamic principles to derive actual mass flow. A TMF sensor can

be combined with an integral valve and PID controller in one compact,

efficient instrument that can accurately control the flow of gases and

liquids over a wide range of flowrates. A pressure sensor can be mounted

in place of a flow sensor for applications requiring pressure control. TMF

products exhibit high repeatability and accuracy, providing an effective way to

ensure a reliable and stable process.

Variable Area Variable Area (VA) meters, commonly called

rotameters, are a cost-effective solution used for flow indication of

liquids and gases. The Brooks line of VA meters ensures measurement

repeatability, which provides process stability and consistency. External

power is not required for operation; therefore, they provide a fail-safe

flow rate under any circumstance. VA meters are widely used in a

diverse range of applications, from simple to sophisticated. Brooks VA meters can be provided with a

variety of wetted materials for high pressure, high temperature conditions and hazardous locations.

Technology

TO POWER SUPPLY

T2 Downstream Temp. Sensor

Power Supply 0-5 Vdc

Flow

Bridge For ∆T Detection Amplifier

Heater

BypassSensorTube

T1 UpstreamTemp. Sensor

Inlet Side

Twist AxisInlet

Outlet

SupportAxis

OutletSide

4

Coriolis Meters & Controllers

The Brooks QUANTIM® Coriolis mass flow meter/

controller offers unsurpassed accuracy and zero stability

in critical low flow liquid and gas applications.

• QUANTIM Coriolis controllers combine the sensor,

transmitter, control valve and PID control

electronics into one compact, integrated package,

reducing space requirements, and simplifying

purchase, installation, and start up

• Coriolis mass measurement, which is immune to

fluid property variations, provides greater application

flexibility and reduces spares requirements

• QUANTIM provides repeatable mass flow

measurement and control even under changing

conditions

• Multivariable output for mass flow or volumetric

flow and density or temperature adds diagnostics

capabilities and reduces the need for additional

instrumentation

• Available in NEMA 1/IP40, NEMA 4X/IP65,

explosion proof and ANSI/ISA-76 downport

configurations

• Available with stainless steel or Hastelloy sensor

tube material

• Globally approved for a variety of service areas

Model QMBC IP40

Model QMBC IP65

QUANTIM Mass Flow Measurement & Control

Nominal Flow1 Min. Flow Liquid Gas Liquid Max. Pressure Max Temp Input/

Type Model Tube Size (kg/hr) (lpm) (kg/hr) Accuracy bar psig ˚C ˚F Output

Precision Mass QMBC 2 0.15 1.0553 0.001 ±0.2%, 0.5%, or 1.0% 100 1500 65 150 0-5 Vdc,Flow Controller 3 0.78 2.96.430 0.01 Rate 4-20 mA orGas and Liquid 4 9.32 9.1430 0.1 HART

Precision Mass QMBM 2 0.19 2.430 0.001 ±0.2%, 0.5%, or 1.0% 300 4500 65 150 0-5 Vdc, Flow Meter 3 1.00 26030 0.01 Rate 4-20 mA orGas and Liquid 4 13.5 20.430 0.1 HART

Corio

lis M

ass F

low

1 Higher flows may be possible depending on the fluid and process conditions.

1.052.9629.1

1.435.6050.4

5

Coriolis Sensors & Transmitters

The Brooks QUANTIM Coriolis mass flow sensor offers

unsurpassed accuracy and flexibility in low flow liquid

and gas measurement applications.

• The QUANTIM sensor provides superb communication

flexibility. This sensor, combined with Brooks’ newest

transmitter, lets you access more data in your plant’s

process language (Modbus®, HART®, FOUNDATIONTM

Fieldbus, PROFIBUS® PA)

• Coriolis mass measurement, which is immune to fluid

property variations, provides greater application

flexibility and reduces spares requirements

• Repeatable mass flow measurement is ideal for

variable process conditions

• Multivariable output for mass flow or volumetric

flow and density or temperature adds diagnostics

capabilities and reduces the need for additional

instrumentation

• Perfect solution for rapid fill batch applications

• ANSI/ISA-76 downport configurations

• Available with stainless steel or Hastelloy sensor

tube material


Model QMBS Sensor

Model QTA5 Model QTA7

QUANTIM Flow TransmittersAvailable

Transmitter Type2 Model Display Number of Outputs Process Variables Output Type

Remote Mount QTA1 Optional

DIN Rail QTA2 NA

Remote Mount QTA3 OptionalQTA4

DIN Rail QTA5 NA

Remote Mount QTA6 FOUNDATION Fieldbus

QTA7 PROFIBUS-PA2 Transmitters for use with Sensor Model QMBS.

1 process variable

Up to 3 process variables

Up to 3 process variablesOptional

Mass or volume flow,

density, temperature, drive gain

Mass or volume flow,

density, temperature, drive gain

4-20 mA, Frequency, HART or Modbus

Mass or volume flow 4-20 mA, Frequency, HART or Modbus

Coriolis Mass Flow

QUANTIM Mass Flow Sensors

Nominal Flow1 Min. Flow Liquid Gas Liquid Max. Pressure Max Temp Input/

Type Model Tube Size (kg/hr) (lpm) (kg/hr) Accuracy bar psig ˚C ˚F Output

Precision Mass QMBS 2 0.19 1.43 0.001 ±0.2%, 0.5% or 1.0% 300 4500 65 150 ModbusFlow Sensor 3 1.00 5.60 0.01 RateGas and Liquid 4 13.5 50.4 0.11 Higher flows may be possible depending on the fluid and process conditions.

Compact Digital Mass Flow Meters & Controllers

The 7000 series mass flow instruments are the newest

addition to the Brooks suite of digital thermal mass flow

controllers. The advanced design and compact footprint

make these devices ideal for demanding applications.

• New coplanar valve offers improved performance

to deliver fast, accurate and reliable response

across a wide and varying range of differential

pressures

• 11⁄8” wide body offers users an efficient, space

saving footprint

• Proprietary valve control algorithm enhances

response time

• Ultra-high purity (UHP) and metal seal options

ensure clean flow paths for contamination sensitive

processes

• Available with traditional analog or digital I/O


Model SLA7950D

Model SLA7950S Downport

Ther

mal

Mas

s Flo

w

Compact Digital Thermal Mass Flow

Full Scale Max Pressure Max Temp Input/ PowerType Model Capacity Accuracy bar psig ˚C ˚F Output Supply

UHP Metal Seal SL7900 3 ccm - 50 lpm 1% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series DeviceNet, RS485 24 Vdc

Metal Seal SL7800 3 ccm - 50 lpm 1% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series DeviceNet, RS485 24 Vdc

6

The Brooks line of digital thermal mass flow instruments

offers faster response, better accuracy and improved

control over traditional analog devices.

• Industry leading repeatability ensures a stable

process even under changing conditions

• Self diagnostics and alarms eliminate downtime

• Multiple communication protocols allow easy

integration into many control systems

• Elastomer seal option provides exceptional leak

integrity and maximizes control valve shutoff

dependability


ensure clean flow paths for contamination

sensitive processes

• Available with traditional analog or digital I/O


Model SLA5850D

Model SLA5863D

Model SLA5850S with ANSI/ISA-76 Downport

Digital Thermal Mass Flow


Elastomer Seal SL5800 3 ccm - 0.7% Rate 300 4500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series 2500 lpm and 0.2% FS DeviceNet, PROFIBUS,RS485 24 Vdc

UHP Metal Seal SL6900 3 ccm - 100 lpm 1% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series DeviceNet 24 Vdc

Metal Seal SL6800 3 ccm - 100 lpm 1% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 Vdc Meter/Controller Series DeviceNet 24 Vdc

Digital Mass Flow Meters & ControllersTherm

al Mass Flow

7

8

Analog Mass Flow Meters & Controllers

The Brooks line of analog thermal mass flow

instruments is designed to meet the rigorous

demands of our customers’ established and newly

developing process applications. These devices

continue to add to their expansive installed base due

to their fast response, excellent accuracy, and simple

integration.

• Years of field-proven reliability

• Analog I/O allows for quick and easy system

integration

• Elastomer seal option provides exceptional leak

integrity and maximizes control valve shutoff

dependability


ensure clean flow paths for contamination

sensitive processes


Model 5850EM

Model 5853i

Ther

mal

Mas

s Flo

w

Analog Thermal Mass Flow


Metal Seal 5850EM 3 ccm - 30 lpm 1% FS 100 1500 65 150 0-5 Vdc +/- 15 VdcController 5851EM 10 - 100 lpm (200 lpm H2)

UHP Metal Seal 5964 3 ccm - 30 lpm 1% FS 100 1500 65 150 0-5 Vdc +/- 15 VdcController 5965 0 - 100 lpm (200 lpm H2)

Elastomer Seal 5860E/5850E 3 ccm - 30 lpm 1% FS 100 1500 65 150 0-5 Vdc +/- 15 VdcMeter/Controller 5861E/5851E 10 - 100 lpm

5863E/5853E 100 - 1000 lpm

Elastomer Seal 5860i/5850i 3 ccm - 30 lpm 1% FS 100 1500 65 150 0-5 Vdc 15-24 VdcMeter/Controller 5861i/5851i 10 - 100 lpm 4-20 mA

5863i/5853i 100 - 1000 lpm

9

NEMA 4X/IP65 Thermal Mass Flow

The Brooks MfTM Series mass flow instrument line is

designed specifically for use in harsh environments.

These devices’ unique enclosures provide protection

from dust and water making them ideal for indoor or

outdoor use.

• NEMA 4X/IP65 ratings affords washdown

protection eliminating the need for secondary

enclosures

• Industry leading repeatability ensures a stable

process even under changing conditions

• Self diagnostics and alarms eliminate downtime

• Analog and digital versions allow simple

integration into any control system

• Flow rates up to 36,000 lpm (meter) available to

meet high flow industrial process requirements

• EX-Series products feature remote electronics and

are certified for Zone 1 hazardous areas


Model SLAMf50S

Model Mf53i

NEMA 4X/IP65 Thermal Mass Flow


Digital SLMf Series 3 ccm - 0.7% Rate 100 1500 65 150 0-5 Vdc, 4-20 mA 15-24 VdcMeter/Controller 2500 lpm and 0.2 % FS DeviceNet, PROFIBUS, RS485 24 Vdc,

Analog Mfi Series 3 ccm - 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA 24 VdcMeter/Controller 1000 lpm

Analog MfX Series 3 ccm - 1% FS 100 1500 65 150 0-5 Vdc, 4-20 mA 24 VdcMeter/Controller 1000 lpm

Analog EX Series 10 ccm - 1% FS Model 65 150 0-5 Vdc, 4-20 mA 24 VdcMeter/Controller 1000 lpm Dependent

Thermal M

ass Flow

Pressure Controllers


Pressure Controllers:Metal Seal, 11⁄8” SL7810/20 0-20 bar/290 psi 0.5% FS 20 290 65 150 0-5 Vdc 11 Vdc

DeviceNet 25 Vdc

UHP Metal Seal SL6910/20 0-20 bar/290 psi 0.5% FS 20 290 65 150 0-5 Vdc 11 Vdc Metal Seal SL6810/20 DeviceNet 25 Vdc

Elastomer Seal SL5810/20 0-100 bar/1500 psi 0.5% FS 100 1500 65 150 0-5 Vdc 11 Vdc DeviceNet 25 Vdc

Elastomer Seal 5866E 0-300 bar/4500 psi 0.5% FS 300 4500 65 150 0-5 Vdc, +/-15 Vdc4-20 mA

Remote Transducer/Pressure Controllers/Flow Meters:

Metal Seal, 11⁄8” SL7840 3 ccm-30 lpm 1% Rate 100 1500 65 150 0-5 Vdc 11 VdcDeviceNet 25 Vdc

UHP Metal Seal SL6940 3 ccm-30 lpm 1% Rate 100 1500 65 150 0-5 Vdc 11 Vdc Metal Seal SL6840 DeviceNet 25 Vdc

Elastomer Seal SL5840 3 ccm-30 lpm 1% Rate 100 1500 65 150 0-5 Vdc 11 VdcDeviceNet 25 Vdc

Elastomer Seal 5866RT 3 ccm-30 lpm 1% FS 100 1500 65 150 0-5 Vdc +/- 15 Vdc

10

Analog & Digital Pressure Controllers

The Brooks line of electronic pressure controllers

utilizes Brooks’ superior mass flow designs and applies

them to process pressure. With a wide variety of

control and configuration options, Brooks is certain to

have the right pressure instrument for your application.

• Pressure controllers have options that accurately

control upstream or downstream pressure

• Remote transducer products control pressure

based on input from an external pressure device

while simultaneously measuring mass flow

• 11⁄8” and 11⁄2” footprint models

• Ultra high purity (UHP), metal seal or elastomer

seal options

• Available with analog or digital I/O


Model 5866E

Model SLA7840D

Pres

sure

Pro

duct

s

1500

11

Precision Pressure Regulators & UHP Pressure Transmitters

Brooks precision mechanical pressure regulators feature a direct-acting, non-relieving design for outstanding resolution and control. They are ideal for critical pressurecontrol applications, such as medical devices and analyticalinstrumentation. Brooks assembles, cleans and tests thesedevices in clean-room conditions, ensuring precise, reliableoperation.

• Bubble-tight shut off to 100 psi• Non-bleeding• Exceptionally precise control• Compact design• Suitable for at-line or panel mounting• UL listed

The unique Brooks Seal Free Pressure (SFP) transmitterprovides excellent pressure measurement on high purityfluids. Unlike other high purity pressure transmitters, theSFP is constructed using a single piece perfluoroalkoxy(PFA) sensing chamber that does not use any seals.Because the only fluid-wetted surface is PFA, the possibilityof fluid contamination is eliminated.

• No-seal design eliminates fluid contamination sources• All PFA flow path• Extremely strong sensor/PFA bond• Versions available for UHP water, chemicals, acids,

and bases• Single-ended and flow-through versions available• Integrated vapor leak indicator• Not damaged by sub-atmospheric process conditions• Temperature compensated output

Pressure Products

Model 8601 Pressure Regulator

Model SFP33

Precision Pressure Regulator

Capacity Maximum Temperature ConstructionModel Air Pressure ˚C ˚F

8601 3 to 1000 ccm 17 bar, 250 psig 1 to 60 33 to 140 Aluminum or 316 SS

UHP Pressure Transmitters

Full Scale Maximum PowerType Model Capacity Accuracy Temperature Output Supply

Flow Through – Ultra Pure Water SFP33WA 0-15 psig +/-1% 15-40 ˚C 4-20 mA, 24 VdcFlow Through – Chemicals, Acids, Bases SFP33CA up to Full Scale 59-104 ˚F 0-5 V, current,Single Ended – Ultra Pure Water SFP32WA 0-150 psig 1-5 V, 12-24 VdcSingle Ended – Chemicals, Acids, Bases SFP32CA 0-10V voltage

12

Armored Variable Area Meters

Armored Variable Area

Capacity – Water Capacity – Air Max Pressure TemperatureModel lph gpm m3n/hr scfm Accuracy bar psig ˚C ˚F Output

MT3809 25 to 100,000 0.11 to 440 0.78 to 1404 0.49 to 888 2% FS 103 1500 -29 to 325 -20 to 617 Alarm and/or 4-20 mA, HART(IS or X-Proof)

MT3819 110 to 15,000 0.48 to 66 3.2 to 435 2 to 275 2% FS 19 275 -29 to 150 -20 to 300 Alarm and/or 4-20 mA, HART(IS or X-Proof)

MT3810 25 to 20,000 0.11 to 88 0.78 to 620 0.49 to 392 5% FS 103 1500 -29 to 215 -20 to 420 Alarm and/or 4-20 mA, HART(IS or X-Proof)

3750 0.8 to 100 .003 to 44 .04 to 3.1 .02 to 2 5% FS 275 4000 -29 to 204 -20 to 400 Alarm and/or4-20 mA(IS or X-Proof)

3600 Series 18 to 11,355 .08 to 50 0.65 to 43 0.38 to 28 10% FS 103 1500 -29 to 204 -20 to 400 Alarm(IS or X-Proof)

The Brooks line of rugged metal tube variable area

meters (rotameters) is ideal for high pressure, high

temperature and other demanding flow applications

where safety is a concern.

• Globally approved for use in hazardous

environments

• Needle valves for flow control

• Multiple connection options to match your existing

system and provide easy installation

• Many corrosion resistant material options for the

metering of aggressive fluids

• HART and 4-20mA outputs provide for remote

flow monitoring

• Excellent meter repeatability provides consistent

batch and/or process production

• No power required which reduces installation cost

and provides flow measurement in hazardous area

• Low-pressure drop allows for economical pump

selection

Model MT3809

Model MT3809 with X-proof Housing

Model 3750C Ar-Mite™with Transmitter

Varia

ble

Are

a

13

Glass Tube Variable Area Meters

The Brooks line of reliable glass tube variable area

meters (rotameters) is ideal for many gas and liquid

flow measuring applications where viewing the

process is important.

• Rugged, vented polycarbonate tube enclosure

available on most models

• Tube and float can be re-ranged in line therefore

minimizing process down time

• Rotatable connections for easy installation at

any angle

• Packing gland or O-ring sealing to meet piping

requirements or customer preference

• Globally approved for use in hazardous

environments

• Reliable – only one moving part

• No power required which reduces installation

cost and provides flow measurement in

hazardous areas

• Low-pressure drop allows for economical pump

selection

Model GT1000 Model 1110 Full-View®

Model 1305

Glass Tube Variable Area

Capacity – Water Capacity – Air Max Pressure TemperatureModel lph gpm m3n/hr scfm Accuracy bar psig ˚C ˚F Output

GT1000 0.024 0.0001 0.002 0.001 2% FS 34 500 1 to 121 33 to 250 Alarm (IS)to 22392 to 98 to 431 to 273

1100 0.032 0.0001 0.002 0.001 2% FS 34 500 1 to 121 33 to 250 Local Series to 29300 to 129 to 342 to 217 Indication

1307 39 0.17 1.5 0.9 2% FS 24 350 1 to 121 33 to 250 Local to 20900 to 92 to 342 to 217 Indication

1306 31 0.14 1.2 to 66 0.8 to 42 3% FS 24 350 1 to 121 33 to 250 Localto 2205 to 9.7 Indication

1305 182 0.8 to 50 4.7 to 79 3 to 50 10% FS 14 200 1 to 121 33 to 250 Alarm to 11355

Variable Area

14

Purgemeters

The Brooks Model 1350 and 1355 Sho-RateTM variable

area meters deliver industry-leading performance for

gas or liquid flows. Their robust, proven engineering

ensures reliable indication and unsurpassed service

life. Sho-Rate meters pioneered the concept of field-

replaceable tube and float kits. If necessary, the tube

and float can be replaced in-line in a matter of minutes.

Brooks also offers low cost meters in glass, acrylic and

polycarbonate tube configurations for less critical

applications.

• Integral needle valves on inlet or outlet

• Integral flow controller that compensates for

varying inlet or outlet pressures

• 316 stainless, brass or aluminum construction

• Compact, space saving size

Model 1350E Sho-Rate™

Model 1510 Model 2001

Purgemeters

Capacity – Water Capacity – Air Max Pressure TemperatureModel lph gph m3n/hr scfm Accuracy bar psig ˚C ˚F Construction

1350/ 0.032 0.006 0.002 0.001 10% (1350) FS 14 200 1 to 121 33 to 250 Glass Tube w/ Aluminum,1355 to 114 to 30 to 3.7 to 2.33 5% (1355) FS Brass or 316 SS

1358 182 to 1136 48 to 300 5.4 to 23.6 3.4 to 15 10% FS 14 200 1 to 121 33 to 250 Glass Tube w/ Brass or 316 SS

1510 0.032 0.006 0.002 0.001 10% FS 14 200 1 to 121 33 to 250 Glass Tube w/ to 114 to 30 to 3.7 to 2.33 316 SS

2001 1 to 72 0.25 NA 0.03 to 15 10% FS 7 100 1 to 71 33 to 160 Acrylic Tube w/ Brass to 270 or 316 SS

2700 1.5 to 80 0.4 to 20 0.5 to 18.5 0.05 to 1.7 10% FS 7 100 1 to 54 33 to 130 Polycarbonate Tubew/ Brass or 316 SS

Varia

ble

Are

a

15

OEM Products

Brooks OEM products provide high-performing, cost

effective solutions for OEM applications. Some of the

OEM customers that we serve include medical device

manufacturers, analyzer manufacturers, suppliers of

gas blending equipment, vacuum pump makers and

industrial processing equipment suppliers. In addition

to the products shown here, Brooks can customize

any standard product to meet OEM requirements.

• Compact thermal mass flow meters and

controllers

• Needle valves for precise flow control

• Compact pressure regulators

• Flow controllers for variable upstream or

downstream pressures

• Customized variable area, thermal mass, and

Coriolis flow controllers and pressure products

• Private labeling available

Model 8504 Valve Model 5850TR Mass Flow Controller

Model 8601Pressure Regulator

Model 5700 Mass Flow Meter

Valves, Flow Controllers & Pressure Regulators

Capacity – Water Capacity – Air Max Pressure TemperatureModel lph gph ln/hr scfh bar psig ˚C ˚F Construction

FC8800/8900 0.025 0.025 0.52 to 0.02 to 68 1000 1 to 149 33 to 300 Brass or 316 SSSeries to 1820 to 480 56000 2130

8601 Pressure Regulator 3 to 1000 ccm 17 250 1 to 60 33 to 140 Aluminum or 316 SS

8500 0.24 0.02 8 to 0.3 68 1000 1 to 121 33 to 250 Brass or 316 SSSeries to 39 to 10 1500 to 57

OEM

Products

Thermal Mass Flow Products

Full Scale Max Pressure Max Temp Input/ PowerModel Type Capacity Accuracy bar psig ˚C ˚F Output Supply

5700 Mass Flow Meter 10 ccm - 50 lpm 5% FS 10 150 65 150 0-5 Vdc 11.5 - 15.5 Vdc

5850TR Mass Flow Controller 10 ccm - 20 lpm 1% FS 300 4500 65 150 0-5 Vdc 15/24 Vdc4-20 mA

Model 1350E Sho-Rate™ withFC8900 Flow Controller

16

Specialized Flow Products

Positive Displacement, Sight Flow Indicators

Capacity - Water Max Pressure TemperatureModel lph gpm Accuracy bar psig ˚C ˚F Output Construction Connection

BM01/ 2 to 5000 008 to 2.2 1% Rate 10 150 -29 to 66 -20 to 150 Pulse 316 SS or PPS ThreadedBM02

BM04 60 to 21000 0.3 to 92.5 0.5% Rate 55 800 -29 to 120 -20 to 248 Pulse or Aluminum, Threaded BM50 4-20 mA 316 SS or PPS or Flanged

8000 Sight Flow Indicator 41 600 1 to 177 33 to 350 Local indication Steel, Bronze Threaded Series or 316 SS or Flanged

Liquid Mass Flow

Max Pressure Max Temp Input/ PowerModel Type Full Scale Capacity Accuracy bar psig ˚C ˚F Output Supply

5881/91 Liquid Mass Flow 30 - 100 grams/hr 0.5% FS 400 5800 65 150 0-5 Vdc, 15 or 24 VdcMeter/Controller 4-20 mA

5882/92 Liquid Mass Flow 200 - 1000 grams/hr 0.5% FS 400 5800 65 150 0-5 Vdc, 15 or 24 VdcMeter/Controller 4-20 mA

Model BM10Model 5881 FlomegaTM

Model 2800/2820 VaporizerTM

The Brooks portfolio of products includes additional

liquid metering and controlling devices. These products

are appropriate for numerous specialized applications.

• The Brooks®/MSP Turbo-VaporizerTM provides

on-demand high purity vapor generation and

minimizes precursor degradation. Suitable for

atomic layer depositin (ALD), metal oxide chemical

vapor deposition (MOCVD), catalyst production,

optical coatings, fuel cell humidification and other

industrial coatings.

• FlomegaTM liquid flow meters and controllers use

thermal mass flow technology to accurately

measure and control liquids and are weatherproof

and certified for use in hazardous areas

• Oval Gear positive displacement meters are ideal

for highly viscous liquids in applications where

accuracy and repeatability are critical

• Sight flow indicators provide quick visual process

indication and are available in many materials

compatible with a variety of fluid and process

conditions

Spec

ializ

ed F

low

Pro

duct

s

VaporizerModel

2800/2820 The Brooks®/MSP Turbo-VaporizerTM combines a proprietary technology developed by MSP Corporation with specialized flow control products from Brooks Instrument.

17

Software &

ElectronicsMass Flow Software Tools & Secondary Electronics

Brooks provides a variety of software and accessory

options to ensure mass flow controllers perform at

their best. Calibration and control software, as well as

certified calibration standards (see page 17), allow cus-

tomer to perform calibration checks to verify

accuracy and repeatability.

• Simple software programs give access to tuning,

alarms and other basic functions

• More rigorous programs available for

configuration, calibration and advanced service

• Secondary electronics units available for up to

four channels offer easy visual indication, control

of flow, and also provide external power

Model 0152/0154

Brooks Service Tool

Software Tools

Type Functionality (See data sheet for applicable models)

Brooks Service Suite, Provides access to I/O tuning, alarm indication/configuration, diagnostics, selectedBrooks Service Tool response tuning, control and monitor

Brooks Service Suite Pro, Provides access to I/O tuning, alarm indication/configuration, diagnostics, selected Brooks Service Tool Plus response tuning, control and monitor, plus calibration and accuracy reporting capabilities

Secondary Electronics

AdditionalModel Channels Functions Control I/O Power Input Power Output

0151 1 Totalizer & Blending 0-5 Vdc, 4-20 mA, 100-240 Vac, 50/60 Hz +/-15 Vdc, 24 VdcRS-232/485

0152/0154 2/4 Totalizer & Blending 0-5 Vdc, 4-20 mA, 100-240 Vac, 50/60 Hz +/-15 Vdc, 24 VdcRS-232

18

Technical Services

Full Service CapabilitiesBrooks Instrument’s Technical Services Group has theexpertise to provide a complete range of services worldwide for every Brooks product. Our staff includesservice engineers, instrument technicians, calibrators,coordinators, and training professionals dedicated toafter-sales support. Our engineers are experts in lowflow applications and fluid measurement and control,and can assist customers in all aspects of project implementation, including installation, tuning and communications.

• Phone support for all products, including emergencies

•Software and product training at Brooks or on-site• Field services for start-up and tuning to recognized

standards (NIST/NMI)•Calibration certifications•Firmware upgrades

Product ServicesProduct services from Brooks come with a 90-day warranty on materials and workmanship. Productsundergo rigorous processes, such as:

• Inspection• Disassembly and cleaning• Parts replacement as required• Pressure testing to 1.5 times design pressure,

as required• Helium leak testing, as appropriate• Complete refurbishment, if necessary• Native gas calibrations on Nitrogen, Argon,

Hydrogen, Helium and Carbon Dioxide• Calibration using high and low viscosity liquids• As-found, as-left calibrations• Serialized record of work performed

QUANTIM® Precision Mass Flow Meters & Controllers QUANTIM Mass Flow products are fully supported withservices such as cleaning, re-ranging and repair.Calibrations are possible through the complete range offlows offered, as low as 1 gram/hr.

Thermal Mass Flow Meters and ControllersOur wide range of services for Thermal Mass Flow products includes valve adjustment and tuning for controllers. During refurbishment, critical seals, valvecomponents and fasteners are replaced along with anyworn or damaged components. Communications suchas DeviceNet, PROFIBUS and RS 485/232 are verified onall digital products. Brooks has the capacity to calibrateon select native gases at flows up to 2500 LPM and onair to 7000 LPM. These services can also be performedin high purity clean room environments.

Variable Area MetersComprehensive services for glass and metal tubeVariable Area flow meters include scale checks, realignments, and tube and float replacements.

Secondary ElectronicsOur service organization can provide circuit board repair,calibration and refurbishment of secondary electronics.

Educational ServicesBrooks encourages our customers to take advantage ofour excellent training programs. These include: thebasics of flow measurement, flow technologies, sizing,calibration, maintenance, and more. In addition to standard programs, we offer customized programs toprecisely fit your specific needs. Both factory and fieldtraining are available.

Serv

ices

19

How To Find The Right Brooks Product

There are several ways for you to select the

perfect Brooks flow meter, controller, or flow

accessories for your application.

• Contact the Brooks specialist in your area.

Brooks has representatives all over the globe

ready to assist you. If you need help finding

the rep closest to you, visit our web site.

• Call Brooks regional customer service for fast,

expert assistance by phone. See back cover.

• Find the technology solution you need at

www.BrooksInstrument.com. In the

conveniently organized “Products” section

you can search by flow technology or process

application. Or you can utilize our easy-to-use

MeterMatchTM search tool and find the Brooks

product that precisely fits your specifications

with just a few clicks.

• Check your needs against detailed Product

Data sheets on the web.

Brooks is prepared to assist you with your unique

flow measurement and control applications to

help you get the most value from our products.

Just contact us at the office location most

convenient to you. As the leading provider of

integrated low-flow technologies for precision

applications, we hope you’ll find that Brooks is

precisely what you need.

Custom Engineering for Special Applications

Can’t find the exact flow measurement or

control instrument for your application? Let us

make a custom solution for you. Our expertise in

custom-engineered flow products for demanding

or unique applications includes:

• Special ambient requirements

• Extremely high or low process temperature

operation

• Exotic materials

• Extremely high process pressure capability

• Difficult process streams

• Custom physical dimensions

• Special process connections

• Material traceability

• Special testing requirements, such as dye

penetrant, radiography, or positive material ID

If you have a unique application, contact Brooks

or your local sales representative.

Application Assistance & Custom Engineered SpecialsServices

www.BrooksInstrument.com

Publication SP-210-eng 1/08 ©2008, Brooks Instrument , LLC

The contents of this publication are presented for information purposes only, and while effort has been

made to ensure their accuracy, they are not to be construed as warranties or guarantees, express or implied,

regarding the products or services described herein or their use or applicability. All sales are governed by

our terms and conditions, which are available on request. We reserve the right to modify or improve the

designs or specifications of our products at any time without notice. For the latest Brooks product

specifications, view the “Products” section of our web site.

Brooks Instrument

407 West Vine St.

Hatfield, PA 19440

USA

Telephone 215-362-3700

Toll Free 888-554-FLOW

Fax 215-362-3745

E-Mail [email protected]

Brooks Instrument

Neonstraat

6718 WX Ede, Netherlands

Telephone 31-318-549-300

Fax 31-318-549-309


Brooks Instrument

1-4-4, Kitasuna, Koto-Ku

Tokyo, 136-0073

Japan

Telephone 81-3-5633-7105

Fax 81-3-5633-7124


ISO 9001QUALITY SYSTEMCertificate of Conformity

The Quality System at BrooksInstrument conforms to the quality

standards set forth in ISO 9001.

Represented By:

Ar-Mite, Brooks, Flomega, Mf, MeterMatch, QUANTIM, SMM Smart Meter Manager, and Sho-Rate are marks of Brooks

Instrument, LLC. All other marks are property of their respective owners.

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