new sensing devices for improving the quality of life interest in fp 6 call: 'nanotechnologies...

NEW SENSING DEVICES FOR IMPROVING THE QUALITY OF LIFE

Interest in FP 6 call: 'Nanotechnologies and nanosciences, knowledge-based multifunctional materials and new production

processes and devices ‘ - FP6-2004-NMP-TI-4

Thematic area: NMP-2004- 3.4.1.1Towards “converging” technologies

- new solutions to improve the quality of life e.g. by helping to alleviate the effect of disabilities or creating new types of nanotransducers

- research at the frontiers of knowledge addressing nanoscience approaches together with biotechnologies and information technologies jointly with social, cognitive and/or neurosciences.

Laboratory of microsystems for bio-medical and Laboratory of microsystems for bio-medical and environmental applicationsenvironmental applications

National Institute for R&D in Microtechnologies - IMT BucharestNational Institute for R&D in Microtechnologies - IMT Bucharesthttp://www.imt.rohttp://www.imt.ro

Expertise in:Expertise in:

Microsystems fabrication – design, simulation, technology, testing for chemo and biosensors: Pressure sensors; Concentration vapour sensors; Biosensors; Microelectrodes for recording neural activity; Bulk and surface micromachining; Polymeric sensitive layers for chemical and biological sensors

Process development: Wet and Electrochemical Anisotropic Etching of Silicon; Silicon Wafer Bonding; Double side alignment; Thin layers deposition (Si3N4, SiON, Polysilicon, PSG, BPSG, CVD); Spin deposition of thin film sensitive polymers



Projects examples:Projects examples:

• Microprobe for recording/stimulation of the electrical activity of cells and tissues:

- Stimulating probes for many prosthetic applications should be able to deliver constant current pulses into the tissue through multiple sites precisely spaced on a substrate. - The extracellular potential recording permits the investigation of the central nervous activity - The compatibility between the materials used in the semiconductor fabrication and the human body was analysed.

Microprobe photo with the optical microscope

SEM Microprobe photo



• Calorimetric Microsensor for Methane detection based on Alumina thin Film:

- Ceramics: Alumina - Incorporated materials in Alumina: Platinum, palladium; - Deposition methods for thin films: spinning, sol-gel; - Characterisation methods: X-ray, AFM, SEM - Applications: thin layers alumina used for the fabrication of integrated sensors polymer layers with controlled film characteristics for Chemo sensors; Detection of flammable gases (e.g. methane) - domestic applications, mining industry, chemical industry and many more.

Design and technological steps presentation for the

calorimetric sensor



• Gas sensor SnO2 based, on alumina substrate:

- The rounded shape of the heating resistor gives an uniform temperature distribution, with the maximum temperature in the center of the circle.

- By applying voltages on the pads, the resistor heats up to 400 degrees Celsius

Full layout 3D Model


Contact person for the Laboratory of microsystems for bio-Laboratory of microsystems for bio-medical and environmental applicationsmedical and environmental applications:

Dr. Carmen Moldovan

E-mail: [email protected]

Tel: 021 490 82 12

Fax: 021 490 82 38

http://www.imt.ro

new sensing devices for improving the quality of life interest in fp 6 call: 'nanotechnologies...

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