near-field optical microscope with an integrated nanometer-sized light emitting diode john x.j....
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![Page 1: Near-Field Optical Microscope with an Integrated Nanometer-Sized Light Emitting Diode John X.J. Zhang (P.I.) & Kazunori Hoshino Department of Biomedical](https://reader035.vdocuments.us/reader035/viewer/2022062516/56649d925503460f94a791e8/html5/thumbnails/1.jpg)
Near-Field Optical Microscope with an Integrated Nanometer-
Sized Light Emitting Diode
John X.J. Zhang (P.I.) & Kazunori HoshinoDepartment of Biomedical Engineering
The University of Texas at Austin
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SPM up close
Scanning probe microscopy (SPM)• Atomic force (AFM) “feels” surfaces
• Near-field scanning optical (NSOM) “sees” surfaces
• Molecular-scale sensitivity Polymers, cell surface components, DNAs
• Topology, mechanics, optical properties, biochemistry
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Sharpening the “senses”
Combine “touch” and “vision” Better acuity Seeing in multiple colors
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Applications and markets
Applications• Research
• Engineering
• QC metrology
Markets• Semiconductors
• Data storage
• Biological research
• Drug discovery
• Thin films
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Problem
Near-field scanning optical microscope (NSOM) belongs to scanning microscopes.• NSOM collects light -
different from STM/AFM• Measures nanoscopic
optical properties Probe is still made by hand! Difficult to fabricate a
densely integrated array of a fiber scanning probe.• The scanning array will be
bulky.• Each probe will require an
external light source.
Photo: Typical NSOM probe
http://physics.nist.gov/Divisions/Div844/facilities/nsom/nsom.htm
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Solution
Integration of nanoscale light source on scanning probe • A nanoscale light emitting diode (LED) on tip of a MEMS
probe
• The probe tip itself emits light
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Benefits
Enhanced sub-diffraction-limit resolution• Aperture dimensions: ~ 5 nm
• Self-illuminating probe
All made by silicon fabrication process• Mass production at low cost
• Ready to integrate other silicon/MEMS functional elements Thin film (piezoresistive/piezoelectric) force sensors,
MEMS actuators and transistor circuitry
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MEMS probe fabrication
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Probe tip features
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Tip gap for nano LED
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Nano LED trapping
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Nano LED formation
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Nano LED light source
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Availability
Prototype devices ready to be tested on a NSOM or AFM set-up.
Customization on device specifications to fit the applications
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Next steps
Current status• Development stage
• Industry partners needed
Next steps to commercialization• Characterization and design optimization
• Investment and manufacturing