MST-11 Class 100/10,000 Cleanroom User Facility

Catherine Mombourquette

606-1990

cmombo@lanl.gov

Brian Crone

667-0344

bcrone@lanl.gov

http://iiswww.mst.lanl.gov/cleanroom/index.asp

(LANL internal site, external site in progress)

Capabilities

• Deposition (RF Sputtering, E-Beam, Oxidation)• Wet Processing • Patterning ( Karl Suss MJB3 Mask Aligner)• Dry Etching (Oxford RIE)• Thermal Processing (RTP, Tube Furnace)• Characterization / Analytical (Ellipsometer,

Profilometer, Probe Station, XRD*, XRF*, SEM*)• Assembly / Packaging (Wire Bonder, Spot Welder)• Sample Preparation (Dicing Saw, Ultrasonic Cleaner,

Plasma Asher)* additional fee ( contact Fernando Garzon)

Cost Structure*• Option #1

Individual user pass Full Facility Single Tool (Ellips/Dektak)

Day pass        $500Week pass     $1000Month pass    $2000 $500

Year pass       $5000 $1000Option #2

Group pass – $50K for the entire group for a year.

* Costs are for LDRD codes, other codes will incur appropriate taxes