motion control system catalog - polaris motion · 5/17/2018 · semiconductor manufacturing ......

Motion Control SystemCatalog

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Committed toAdvanced Motion Control

May 2018

At Polaris Motion we are a team of highly skilled engineers. scientists and technologists committed to helping our customers achieve their goals.

Our engineering professionals have decades of combined experience in motion control, software development, digital signal processing, power electronics, analog and digital electronics, firmware and process development. We are eager to employ these skills to solve customer problems.

Polaris is our advanced off-the-shelf motion control platform. Motion control applications can be realized by using Polaris software and hardware components which include motion controllers, drives, interfaces to 3rd party servo and stepper motor systems, Galvoscanners and fast tool servos. Extensive motion control software includes CAD/CAM, operator interfaces, function libraries, executables, HMIs and applications.

Custom processes may requiremodifications to our hardware,firmware or software. Often,completely new features are needed.Our company excels in workingclosely with customers tounderstand requirements anddeliver the customization needed.Our excellent project managementguarantees timely delivery of results.

A Team Committed to Customers

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TM

©Precision MicroDynamics, Inc., Tel. 250-382-7249, Toll Free 866-548-5639, [email protected], www.pmdi.com

LASER MICRO MACHININGFast, high order servo algorithms enable wide bandwidth actuators to reach full potential. Ultra precise timing synchronization of servo and Galvo motion with lasers is achieved using fast digital logic.

SINGLE POINT DIAMOND TOOL MACHINING AND GRINDINGSuperior sub-nanometer form and finish are achieved using intelligent G-Code processing, superior limited jerk and PVT profiles. Custom servo loops for air bearings, hydrostatic bearings and spindle bearings are easily implemented.

AEROSPACE & AUTOMOTIVEDouble precision computations enable higher resolution and accuracy. Mercury Gbit/s motion network substantially increases data collection and hardware in-the-loop performance.

SEMICONDUCTOR MANUFACTURINGAdvanced control algorithms provide quick settling time and on-the-fly retargeting for higher chip processing throughput. Ultra fast position and force control for die and wire bonding.

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Our motion control systems are used in some of the most advanced applications in the world, from aerospace,

device manufacturing, automotive, medical, military, optics, semiconductor, to laser material processing, and

robotics. Within each industry, we provide advanced features, enabling our customers to be leaders. With easy

to use software systems are integrated in days or weeks as opposed to months.

Industries Served

Medical Positioning Robot: Courtesy Johns Hopkins University


WAFER STEPPING AND SCANNINGAccurate laser scale interpolation, advanced multi-axis feedback controllers and nanosecond timing synchronization make it possible to control the most demanding nanometer capable wafer stepper and scanning equipment.

ROBOTICSEasily implement inverse and forward kinematics in the Polaris controller which uses an Intel processor and Linux operating system. Custom robotics path planning algorithms are easily computed.

The Polaris Motion Control System

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EMPOWERING NEW MACHINE TOOL IDEASAt Polaris Motion we aim to deliver an empowering motion control system to our customers. If you have a new machine idea with advanced features, we are motivated to help.

LEADER IN LASER BASED MANUFACTURINGWe provide technologies for laser based manufacturing. A laser CNC machine may be configured in days or weeks rather than months. Our technologies include operator interface software, controls, drives and Galvoscanners. Standard part files such as DXF or STL are the interface. G-Code files may be imported from third party CAD. Part files are converted to instructions that move the machine's stage and Galvoscanner. Applications are boundless, from 3D printing to laser cutting, drilling, ablating to laser patterning. All laser types are supported including continuous wave to pulsed, nanosecond to femtosecond, CO2, infrared to ultraviolet. Coordination of stage and Galvoscanner motion is an integrated capability with advanced features such as stitching and infinite field of view (IFOV).

LEADER IN DIAMOND TOOL MACHININGFor nearly two decades, Polaris Motion has been a leader in control technologies for diamond turning, grinding and diamond tool machining. Our 9 axes CNC technology is used to deliver the finest optics in the world. Sub-nanometer form and finish capabilities are easily achieved. Low-bandwidth long-stroke and wide-bandwidth short-stroke (FTS) axes are seamlessly coordinated with advanced trajectory generation.

EVENT BASED MOTIONPolaris offers event based motion for up to 32 motion axes. Motions run serially or in parallel. Customers may program their own event based processes to optimize machine throughput.

ROBOTICSPolaris Motion supports robotics with forward and inverse kinematics and the management of all Cartesian and joint robot variables. Customers may develop and implement their own kinematics and create software particular to their robot configuration.

FAST ACTUATORSPolaris Motion has optimized its drive technologies for the fastest actuators, including Galvomotors for laser based manufacturing and fast tool servo (FTS) motors for wide-bandwidth ultra-precise material removal. Feedback rates as high as 100kHz are supported.

SPINDLE MOTORSPolaris offers superior performance for spindle motors. The highest quality air bearing spindle motors and rate tables are controlled with cycle to cycle repeatability as good as 1 part per million.

HIGH SPEED, HIGH RESOLUTION DATASetpoints are computed as double floating point and PID rates as high as 100kHz may be set.

SOFTWARE TOOLSSoftware is easy to use allowing OEMs to integrate and deliver their machines to market faster. Software includes:

• CAD/CAM and Operator Interface Software• Setup and Tuning Software• Libraries and Development Tools

Polaris CAD/CAM is a design, part file management and operator interface software. It's a comprehensive out-of-the box user interface for laser based manufacturing.

Polaris MotionTools is our machine setup and tuning software. It's an easy-to-use interface for setting up a machine's encoders, phasing motors, digital I/O definitions and more. It has tools for PID tuning and signal analysis including real time digital oscilloscope, fast Fourier transforms (FFT), frequency response functions (FRF), tuning windows and more.

Software libraries and development environments are available for Linux and Windows and include support for Microsoft Visual Studio, Borland and QT.

Galvoscanner package with F-Theta lens. Machine vision for calibration, inspection and quality control.

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MOTION CONTROL COMPUTER USING INTEL AND LINUXA Polaris controller is a complete embedded computer. It provides for real time motion control and uses an Intel multi-core processor. The Polaris controller communicates to a client PC via Ethernet. A solid state drive (SSD) is used for non-volatile data storage. Four real-time Mercury network ports provide connections to the drives and other Polaris modules. Linux is the operating system (OS). The combination of Linux and Intel provides a clear upgrade path into the future. Since the initial release of Polaris, performance and capability improvements have been achieved with the availability of new Intel processors and improved Linux OS versions.

DETERMINISTIC REAL TIME MOTION CONTROLThe Intel processor connects directly to Polaris' proprietary logic to make real time motion control and networking possible. The proprietary controller logic makes sure that position, velocity and acceleration setpoints are delivered in real time to the Gbps Mercury network and subsequently to the servo drives. Simultaneously, streaming data acquisition from the drives are communicated back to the controller where actual positions, velocities and drive currents may be stored and analyzed.

SET-POINT GENERATION AND PATH PLANNINGThe Polaris path planner is responsible for generating single axis asynchronous and multi axis synchronous moves. The path planner uses limited jerk path profiles, line, arc and spline primitives for smooth motion. The set-points generated by the set-point generator and path planner are sent to the set-point buffer for further distribution to the Polaris servo drives.

PolarisMotion

Controller


G-CODE PATH ENGINEThe path engine is responsible for parsing G-Code lines and files and for executing G-Code paramacro programs. Custom G-Codes and M-Codes may be implemented using C-language call-outs. The path engine manages the MCI library for additional motion control functionality. Other custom path profiles are available, including trigonometric functions which are used for device testing. The path engine supports up to up to 32 axes of motion, nine of which may be G-Code axes.

MOTION PROGRAMS / PROCESSES“C” motion programs or processes can be created by calling Polaris’ motion control interface library (MCI) and G-Code interface library (GCI) functions and applying logic. The programs are written in C or C++. Motion programs can be used for custom homing routines and other motion processes. For high speed data acquisition and system status reporting, Polaris Server Utility (PSU) library functions are used. By using the MCI, GCI and PSU libraries and by writing C/C++ programs, the full potential of a Polaris motion controller can be realized.

FORWARD AND INVERSE KINEMATICSMachines whose axes are all normal to one another use a Cartesian coordinate system and coordinate transformations are not needed. The path planner can be used directly. Many machines and robots, however, have wrists and other non-Cartesian kinematic geometries. For these machines, Polaris provides a framework where Cartesian and joint variables may be managed and kinematic transformations may be applied.

Manufacture of complex aspheric optics made possible with advanced path planning.

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MRBOT radio translucent pneumatic medical robot. Courtesy Johns Hopkins University.


CPU • Quad Core Intel Processor

Operating System • Optimized Debian Linux

Solid State Drive • 8 GB

Dynamic Memory • 4 GB

Ethernet • 10/100/1000 Mbits

Mercury™ Network • Four RJ45 connectors• Patented Real Time Communication

Technology

Auxiliary Hardware Inputs

• Handwheel• RS-232• Digital Inputs and Outputs• Encoder Input for Camming

Setpoint Rate • System setpoint transfer rate 400,000 per second

• One Setpoint defined as double position, float velocity, & float acceleration

• Example 8 axes at 50,000 setpoints/s

• Example 32 axes at 12,500 setpoints/s

Embedded Software Environment

• QT Creator IDE, C++ and C

Motion Software • Polaris Server• Pathplanner• Setpoint modification• Asynchronous and synchronous

multi-axis motion• 32 total motion axes, 9 of which are

coordinated G-Code axes• Robot kinematics• Infinite field of view• Multi-axis calibration for accuracy• Custom processes

Libraries • Polaris Communication Library• Motion Control Interface Library• G-code Interface Library• Polaris Server Utility

Controller Firmware • Upgrade over Ethernet

File System • Accessible through IDE

Polaris Controller Features

COORDINATING STAGES AND GALVOSCANNERSStages and Galvoscanners may be coordinated in several ways to optimize laser manufacturing processes. A Galvoscanner may be attached to the end effector of a stage and moved in a stepwise manner where Galvoscanner work is accomplished. In many processes effectiveness may be enhanced by automatically coordinating the action of a stage and Galvoscanner, as to avoid stopping and improve on stitching errors. This is often referred to as Infinite Field of View as the Galvoscanner's effective field of view becomes the size of the stage.

CREATING AN HMI ON THE CLIENT PCThe Polaris controller can run standalone. On power up the controller boots and the motion programs start executing. However, most applications use a PC client that runs an HMI. For these applications, we have Polaris communication. Polaris communication supports Microsoft Visual Studio and C++ Builder under Windows, QT Creator for Linux and a web-based communication interface is also supported. Polaris communication is used for managing remote network connections, transferring files, monitoring remote values and for calling remote motion programs located on the Polaris controller. UI developers use Polaris communication library to develop their own human machine interfaces (HMI)

HARDWARE INTERFACESA Polaris Controller comes with auxiliary hardware interfaces. These include a comprehensive handwheel input for use with CNC machines, an additional encoder input for camming applications, RS-232 for communication with third party systems and several digital inputs and outputs for miscellaneous use.

At Polaris Motion we supply drives for a variety of high performance actuators. Our drives are optimized for

• High performance 3 Phase linear and rotary BLDC motors• High performance spindle motors from very slow to 100krpm• High precision constant velocity motors better than 1ppm• Fast Tool Servo (FTS) motors• Voice coil focus motors• Galvoscanner motors

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Polaris Drives


120VAC and 240VACPower Supply

400VDC PWM Drive

High Speed Galvoscanner Motor, Courtesy Canon Inc.

Ultraprecision Air Bearing SpindleCourtesy Levicron GmbH

Fast Direct DriveRotary Motor

Polaris drives are available in 200VDC PWM, 400VDC PWM, ±48VDC linear and ±75VDC linear models. Voltage, current and power ranges are set in usage. The drives may be used for single and three phase dc motors. Contact factory for unpublished power capabilities.

In support of our drives, Polaris provides AC/DC power converters for 120VAC and 240VAC line power.

FEEDBACK CONTROLPolaris drives receive set-points from a Polaris controller over the Mercury™ motion control network. The drives can consume set-points at a rate as high as 100kHz, and the servo loop may run as high as 100kHz. Each drive has a Servo Processing Unit (SPU) that is responsible for computing its servo loop and executes in double floating point math. A standard PIDVAFF loop is provided, which includes the ability to insert additional lowpass and notch filters in the feedback path, and the output.

ENCODER AND TORQUE COMPENSATIONFor high and ultra high precision applications, encoder and torque compensation firmware is available. Experimental methods are provided to compensate for variation in the encoder wobble and printing errors. Methods are provided to detect torque variations which are reduced by the application of torque compensation arrays.

ENCODER SUPPORTAll major encoder manufacturers are supported including: Renishaw, Heidenhain, Sony, Tamagawa and more.

LASER AND MACHINE VISION TRIGGERINGIn some applications such as CNC laser material processing on the fly triggering of lasers is required. For these applications Polaris drives support position based triggering of a high speed digital output based on position along a path. Other laser

control strategies are also made available. All drives have high speed digital outputs that are ideal for triggering high speed machine vision systems.

CUSTOMIZATIONCustomers may implement their own servo loops by using the Polaris SPU assembler. MIMO servo loops can be implemented since Mercury supports peer-to-peer register sharing. A standard dual axis servo is provided that eliminates cross coupled dynamics for gantries. Customers can design

their own MIMO servo loops for more complex mechanical configurations.

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Mercury™ Real-Time NetworkMercury™ is Precision MicroDynamics’ real time motion control network. The register space of Mercury™ supports up to 8,188 network devices and each network chain has a 1 Gbit/s capacity. Mercury has some powerful features, that together, create a scalable high performance motion control system capable of any motion control application.

SYNCHRONIZATIONMercury synchronizes data acquisition and control among all drives in the network. A sync signal is generated at a configurable period, a typical value being 20 microseconds. The downstream and upstream timing of the sync signal is measured at each device and the clock in each device is adjusted to guarantee synchronization within 8ns among the devices. Pre-defined network device registers are shared automatically without controller intervention. The shared registers are defined by the Polaris controller at startup. Subsequently, the devices share their specified registers with each other on each network sync. This method of device synchronization is useful for MIMO applications such as dual motor gantry control.

ASYNCHRONOUS ACCESSThe asynchronous data access is used to read and write data from network devices at arbitrary times. Typical asynchronous data includes digital input or output states, position compare state, or an analog input value.

HIGH THROUGHPUTIn the current controller configuration, at least 400,000 set-points/s can be sent from the controller to the drives. Simultaneously, an equal quantity of measured data such as actual positions and motor currents can be sent from the drives to the controller. Mercury is able to facilitate data transfer of 50,000 set-points per second per axis for eight axes; 12,500 set-points/s for 32 axes and so forth.

STREAMING SUPPORTData streaming is supported and is used to stream files across the network. Drive firmware can be sent from the controller to each drive in the network that needs updating.


Mercury Motion Control Network

HMI ComputerPolaris

Controller

Polaris Drives

Mercury™ Gbit/s Motion Network

Polaris 3rd Party Interface ModulesPolaris' interface modules are available for connection to a wide variety of 3rd party devices, such as XY2-100 and SL2-100 Galvoscanners, AC servomotors, ±10V and pulse-direction controlled servo drives. General purpose digital I/O and analog I/O modules are also available.

XY2-100 and SL2-100 ModulesPolaris' XY2-100 and SL2-100 modules provide integration with third party Galvoscanners. Three Galvomotor axes are supported, covering the operation of a 2 axis Galvoscanner plus a focus motor. With XY2-100, 16-bit scan field resolution is supported and with SL2-100, 20-bit scan field resolution is supported. Data rates are settable and can be as high as 100kHz. The following is a sample of 3rd party Galvoscanners that can be controlled with Polaris XY2-100 and SL2-100 modules.

3rd Party Galvoscanners• Cambridge Technology• Canon• Hans• Lincoln laser• Nutfield technologies• Raylase• Scanlab• Sino Galvo• Sunny Technology• Thorlabs

Polaris Analog Servo ModulePolaris' analog servo module is used to control 3rd party analog servo motor systems. The main components of the analog servo module are +/-10V output, quadrature encoder input and a servo feedback regulator loop. The Polaris controller generates smooth 64-bit jerk-limited setpoints, which are communicated to the PSM-4A module via the real-time Mercury network. The servo module controls the drive/servomotor using traditional +/-10V standard and a PIDVAFF loop. Four servomotor axes may be controlled using a single PSM-4A module. Optional high speed digital outputs may trigger machine vision cameras or lasers, and an optional analog input is available for reading auxiliary analog sensors. The

following is sample list of3rd party servo motor systemsthat can be controlled usinga Polaris analog servo module.

3rd Party ± 10V Servo Systems• Advanced Motion Controls• Copley• Elmo Motion• Kollmorgen• Parker• Trust Automation

Polaris Pulse ModulePolaris' pulse module is used to control 3rd party ac servo motors or stepper motors. The path planner in the Polaris controller generates position setpoints according to trapezoidal or smooth jerk limited profiles. The setpoints are sent via the Mercury network to the PPM-4A where they are converted to pulse and direction control signals. The outputs of the PPM-4A connect to pulse direction drives. Four pulse direction axesmay be controlled using asingle PPM-4A module.Optional high speed digitaloutputs may be used totrigger machine visioncameras or lasers. Thefollowing is a sample of3rd party pulse-directionsystems that can becontrolled using a Polarispulse direction module.

3rd Party Pulse-Direction Servo Systems• Applied Motion Products• Mitsubishi• Panasonic• Sanyo Denki• Servotronix

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XY2-100, SL2-100Module: 3 Axes

Analog Servo Module4 Axes

Pulse Direction Module4 Axes


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Polaris CNC Operator InterfaceThe Polaris CNC Operator Interface (CNC Oi) provides a common experience for operating a CNC machine. It runs industry standard G-Code.

Support is offered for mills, lathes, grinders, flat bed cutting machines, and laser CNC machines with and without Galvoscanners. Some of the standard features of Polaris CNC Oi include:

• 9 Axes of CNC Control: XYZABCUVW• G-Code File Management• Cutting and Simulation Modes• Manual Data Input (MDI)• Cycle Start, Stop and Feedhold• Feedrate Override• Spindle Speed Override• Handwheel Interface• Multi-Axis Jogging Interface

• Infinite Field of View (IFOV) for Laser Manufacturing

• Multi Axis Position Readout• Axes Velocity Readout• Spindle Velocity Readout• Current Line Number Display• Modal Status Display

• Homing and Overtravel Limits• Automatic Tool Changing• Automatic Tool Length Calibration• Analog and Laser Probes• Material Height Sensing

• Interface Designed for Touch Centric Operation• Interface to Hardware or Touch Screen Buttons• Interface Easily Modified, Customized and Extended• Wide Variety of Graphical Widgets Available

Polaris CNC Operator Interface


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Polaris MotionToolsMotionTools™ is a Windows application that connects to a Polaris controller over Ethernet. It is used to set up and tune a machine. MotionTools can also be used to run motion programs and G-Code files.

Status DisplayThe status tab describes the devices attached to the Mercury™ network. Devices supported are drives, analog I/O, digital I/O and pulse & direction modules.• Lists all connected or configured devices• Mercury™ Location & Device Number• Device Features Available

Operator InterfaceThe Operator tab allows the user to perform tasks related to operating the machine.• Auto-phasing actuators • Hall table generator• Homing actuators • Running G-Code files • Configuring and using Buffered Compare

Tuning InterfaceThe Tuning tab allows a user to tune the Polaris system, typically to minimize the position error.• Graphical interface for PIDVAFF tuning • List interface for custom SPU feedback filters • Ability to backup and store servo parameters

Oscilloscope and Frequency AnalysisThe scope and frequency tools provide graphical feedback which are used with the tuning tab to configure and tune high performance actuators. • Fully featured scope • Real-time FFT and FRF• Data rates up to 50kHz per channel • Ability to save data to file • Triggering

Digital I/O Interface• Activate digital outputs • Display state of digital inputs File Management Interface for Copying Files to Polaris Server

MotionTools™ Window showing Tuning Interface and Real Time Oscilloscope

Operator Tab Showing Device Status, Phasing, Home, Jog, G-code and Buffered Compare Functions


Polaris Server, Libraries and Development Tools

Polaris Server is the software running on the controller. It communicates with the Polaris controller hardware and remotely located Mercury devices, runs the path planning, and interfaces with the G-Code Library, Motion Control Interface Library, and Polaris Server Utility Interface Library.

Polaris Server runs under Linux. It is robust, reliable and feature rich. A number of common processes run automatically while allowing full control over the system through C and C++ user programs. A vast amount of system information is collected and made available as feedback to the user, and automatic responses to events on the Mercury network may be programmed.

Polaris Server may run in several useful auxiliary modes. In simulation mode, the pathplanner generates path points and set-points without servoing actual servomotors and moving a machine. This is a fast mode to test whether trajectories are as expected. There is also Polaris Virtual Machine. Here a programmer may develop an entire application, including HMI, without any hardware. Polaris Virtual Machine is useful if a developer wishes to increase productivity and continue development when hardware is unavailable.

MOTION CONTROL INTERFACE (MCI) LIBRARY

The Motion Control Interface Library is a comprehensive collection of C and C++ functions used to develop the motion control behavior of a machine.

MCI provides functions for single axis asynchronous moves, multi-axis synchronous moves, position-velocty-time (PVT) path definitions, changing destination position and velocities on the fly, automatic focus, handwheel control, joystick control, multi-axis encoder compensation, axis homing routines, setting PID filter gains, configuring sinusoidal commutation, detecting software and hardware limits of a machine and much more. MCI makes development for a high performance machine easy.

Motion Control Interface Library• Asynchronous motion• Coordinated motion • Trigonometric trajectories• Cubic splines• Excitation signals for plant identification• Digital IO• Error and event handling• Homing• Phasing and servo• Buffered compare• Encoder compensation• Planar position accuracy compensation• Gantry control• Autofocus, handwheel, joystick• F-Theta lens distortion correction

Wafer Inspection Machine. Courtesy View Micro Metrology

POLARIS SERVER UTILITY (PSU) LIBRARY

The Polaris Server Utilities Library provides the interface to interact with internal Polaris system components. This includes updating firmware, reading registers from the Mercury network and high speed data streaming. It also provides information on startup status and current status that can be used to control the flow of user scripts.

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POLARIS INTEGRATED DEVELOPMENT ENVIRONMENTQT Creator is a free open source Integrated Development Environment (IDE) for C/C++ program development under Linux. PMDi provides a QT distribution that has the plug-ins needed to access the Polaris controller. QT runs on a development PC. Motion control user script source files located on a Polaris controller are accessed remotely. QT Creator provides access to all user C and C++ scripts located on the controller and it provides the ability to create, edit and compile scripts. Motion control projects consisting of dozens of C/C++ source code files can be built using QT Creator.

QT Integrated Development Environment

POLARIS COMMUNICATION LIBRARY

Polaris Communication is a rich library used for connecting customer HMIs and user interfaces to a Polaris controller's software over Ethernet. A customer uses Polaris Communication to create Windows and Linux based machine HMI. MotionTools is for setting up and tuning a machine, uses Polaris Communication components. A number of interfaces are provided, including classes for connecting to Polaris Server, transferring files, calling remote scripts and monitoring remote values.

• Detects any Polaris controller on the network • Allows transfer of files to and from Polaris controller • Creates a “keep-alive” mechanism that reports status of

Polaris Server • Creates a client for calling remote functions inside Polaris

Server • Creates a client for monitoring remote values • Values can be registers on Polaris devices or variables in

Polaris Server

Polaris Server Utility Library Modules• Device register access• Firmware update• High speed data acquisition• System status• Watchdog timer• Worker thread management

Polaris server utility functions have useful system features. The watchdog timer can be set, the connection status of Mercury™ devices can be determined, Mercury™ communication failures can be identified, the physical location of a Mercury™ device can be determined, load percentage of the Mercury™ network communication can be computed, percent servo load can be obtained for individual drives. Operating system parameters such as RAM and CPU usage as well as CPU temperature can be obtained. There are PSU functions that provide version numbers for the Polaris Image, Linux Kernel and PCIe driver.

G-CODE INTERFACE (GCI) LIBRARY

The Polaris G-Code interface library and associated run time processes help a CNC machine achieve its full potential. A variety of machine types can take advantage of GCI, including single point diamond turning machines, multi-axis ultra-precision grinding machines, drum lathes, CNC laser material processing machines, waterjet machines, precision milling machines, fly cutters, multi-head routers, plasma cutters and more. The Polaris G-Code parser has a large throughput exceeding 5,000 G-Code blocks per second.

G-Code Interface Library Modules• Initialize, pause, shutdown• Linear and circular interpolation• Error handling• Tool length compensation• Cutter compensation• Line number• Feedrate• Paramacro• File handling• Manual data input• Feedrate override

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• Velocity look ahead• Merging small lines with arc segments• Infinite field of view (IFOV)

Polaris G-Code is not only fast but also delivers the precision and accuracy required by the world’s best machines. Sub-nanometer form and finish has been achieved using Polaris G-Code combined with advanced Polaris drive control technology. Polaris G-Code has some features of note.

PAUSE AND RESUME MOTIONMotion can be paused during a move. Motion stops as soon as possible at the commanded acceleration rate. If the acceleration is not sufficient to stop during the current path segment, the pause happens over the following segments, taking as many as required to stop. Then it is possible to resume the motion.

MERGING SHORT LINESMany CAD programs approximate curves with short line segments. Polaris’ control process analyzes these line segments and joins them with curves for smoother motion.

CutterCompensation

Tool Path

Cutter Tool

Part Surface

PVT Splines

Pulsed LaserTriggering

CUTTER COMPENSATIONCutter compensation adjusts the path described in the G-Code file by the radius of the cutting tool. It is also used to make path adjustments due to tool change or tool wear.

POSITION VELOCITY TIME (PVT) SPLINESFor the smoothest part finish possible, Polaris CNC Library provides functions for Position-Velocity-Time spline curve generation. All computations are performed using double precision math.

LASER TRIGGERINGMaterial processing using pulsed lasers has become more important in recent years. Polaris G-Code software now offers synchronization of output pulses with motion along a path.

FAST TOOL SERVO Fast tool servo functions that run as high as 100,000 set-points per second are tightly integrated both in software and hardware with the slower axes for synchronization and total system integration.

PARAMACRO OPTICS SURFACE DESIGNOperators are free to design any optics surface they can imagine using inline math paramacros. See the table below for a list of math functions supported

Ultra Precision Grinding Machine: Courtesy Ametek Precitech

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[ ] Grouping - ( ) is supported via .ini file switch

* / Multiply Divide

+ - Add Subtract

& | ^ Bitwise And, Or, Xor

AND Logical And

OR Logical Or

XOR Logical Xor

SIN Sine, in degrees

COS Cosine, in degrees

TAN Tangent, in degrees

ASIN Arc Sine, returns degrees

ACOS Arc Cosine, returns degrees

ATAN Arc Tangent, returns degrees

LN Natural Logarithm

EXP Exponential, e^x

SQRT Square Root

ABS Absolute Value

INT Integer Part, rounds to integer floor

ROUND Integer Part, rounds to integer ceiling

FIX Rounds to next lower integer

FUP Rounds to next higher integer

G00 Rapid Traverse Positioning

G01 Linear Interpolation

G02 / G03 Arc Clockwise / Arc Counter Clockwise

G04 Dwell

G05 Position Velocity Time Spline

G17 / G18 / G19 Plane Selection

G20 / G21 Inch / Metric Programming

G28 / G30 Return to Preset Positions

G33 Threading

G40 / G41 / G42 Cutter Compensation

G49 Clear Tool Length Offset

G53 to G59 Work Coordinate Systems

G70 / G71 Inch / Metric Programming

G90 / G91 Absolute / Relative Dimension Input

G92 Preset Position

G90 Absolute Dimension Input

G91 Relative Dimension Input

G92 Preset Position

G108 Enable Path Merging

M00 Pause

M02 End Program

M03 Primary Spindle Clockwise

M04 Primary Spindle Counter Clockwise

M05 Primary Spindle Stop

M07 Coolant On (Mist)

M08 Coolant On (Flood)

M09 Coolant Off

M20 to M25 Synchronous Triggering

M26 Primary spindle to velocity mode

M27 Primary spindle to position mode

M30 End of Data

M33 Secondary Spindle Clockwise

M34 Secondary Spindle Counter Clockwise

M35 Secondary Spindle Stop

M60 Pulse On Demand Triggering or Fixed Pitch Triggering

M61 End Pulse On Demand Triggering or Fixed Pitch Triggering

M62/M63 CO2 Laser Triggering

M64/M65 Fixed Pitch Triggering Around a Cylinder

M110 Infinite Field of View Mode On

M111 Infinite Field of View Mode Off

M605 to M612 Laser and Camera Trigger Settings

SAMPLE OF G AND M CODES

Lens Array Created by Fast Tool Servo Process:Courtesy Ametek Precitech

PARAMACRO COMMANDS

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Polaris for Laser Based Manufacturing

A COMPLETE SOLUTION FOR LASER MACHINE OEMSPolaris provides end-to-end solutions for OEMs in laser micromachining and 3D printing. We provide operator interface software, CAD/CAM, motion control software, hardware, power electronics, actuator drives, and Galvoscanners.

Our customers are able to bring their machine to market quickly. Installations are measured in days or weeks as opposed to months.

CAD/CAM SOFTWAREThe interface to the operator is Polaris CAD/CAM. It is feature rich, reliable and provides an easy to use interface for laser machine operation. Operators may import 2D and 3D CAD files, draw objects, create complex recipes, and control stages and Galvoscanners.

Polaris CAD/CAM supports many laser processes including: 3D printing, semiconductor wafer drilling, engraving, and cutting. One of its core advantages is its ability to manipulate exceptionally large CAD files both reliably and quickly.

COORDINATION OF STAGE AND GALVOSCANNERPolaris CAD/CAM generates G-Code the command language for machine motion. G-Code files are sent to and interpreted by the Polaris motion controller. The stage and Galvoscanner are coordinated automatically to provide optimal, hassle-free motion. There is no need to program the stage and the Galvoscanner separately. This is handled by Polaris and is transparent to the end user.

Polaris drives provide power for the motors. Drives are available for

long-stroke BLDC motors and for high-bandwidth Galvoscanner motors.

Some laser manufacturing capabilities include: constant frequency laser trigger, pulse-on-demand laser trigger (POD), nanosecond synchronization of stage, Galvoscanner and laser source, and accurate F-Theta lens calibration,

INFINITE FIELD OF VIEW (IFOV)Polaris' Infinite field of view (IFOV) technology makes it easy to make large parts with great amounts of detail.

Galvoscanners are extremely fast devices, deflecting and focusing a laser source. However, their field of view (FOV) is limited. In many applications the work piece is larger than the Galvoscanner FOV. A solution is to move the Galvoscanner assembly with a stage to a number of stationary locations until the entire part is machined.

But, this is a slow process and each processed area must be "stitched" together, leading to "stitching errors" where the borders from one area to another are misaligned.

Polaris employs advanced infinite field of view (IFOV) algorithms to move the Galvoscanner continuously and smoothly together with the stage. The stage and Galvoscanner motions are accurately synchronized, thus eliminating stitching errors. Throughput in parts per hour increases because stop-start motion sequences are eliminated.

Precise on/off control of a laser source coordinated with motion trajectories is a must to create accurate laser micro machined parts. Polaris solves this with detailed laser trigger timing executed in high speed digital logic with timing control in the nanoseconds.

Many different triggering and timing schemes are offered to handle a wide range of lasers.

F-THETA LENS CALIBRATIONThe optical path from laser source to the work piece may be distorted due to limitations in the lens optics. Polaris provides software to compensate for these distortions. The laser and Galvoscanner create a grid of fiducial marks whose centroids are measured with a machine vision system. The experimental data is passed to a calibration algorithm that generates the correction matrix, thereby producing a square grid.

Motion Control Architecture for a Laser CNC Machine

Laser

Gx, Gy

Z

YX1, X2

3Ø PWMDrives forBLDC Motors

1Ø LinearDrives for GalvoMotors

PWM Drivefor BLDC Motor&Linear Drive forVoice Coil

Mercury GbpsReal-TimeNetwork

PolarisController

Polaris CAD/CAM

PolarisDigital

Galvoscanner

LaserTriggerSignal


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GALVOSCANNER ARRAYSTo increase productivity multiple Galvo scanners can be controlled and synchronized with a variety of XYZ stage configurations. A single Polaris controller is used. Simply add more Polaris Galvo motor drives and actuators on the Mercury network. You can attach a line or an array of Galvo scanners to your platforms and gantries to increase your productivity. This is ideal for high-yield, mass-manufacturing in the flat panel display (FPD), flexible printed circuit board (FPCB) and other high volume markets.

A COMPLETE SOLUTIONThe combination of stage, Galvo and laser synchronization combined with optical calibration and easy to use software gives what is needed in a control system to create a high precision laser material processing platform. This off-the-shelf system may be ideal for OEMs who need to deliver their solutions to market quickly.

Many applications are supported using materials such as glass, metals, polymers, crystals, and carbon fiber reinforced polymers (CFRP).

Polaris provides a comprehensive list of technologies to help

deliver desired laser manufacturing outcomes.

APPLICATION AREAS• 3D printing• Flat panel display patterning• Solar cell scribing• Micro-optics• Inkjet nozzle drilling• Fuel injection nozzle drilling• Micro laser sintering• Pulsed laser ablation direct write• PCB marking• Surface texturing• Ceramic and diamond cutting• 2D and 3D hermetic welding• Laser micromachining• Semiconductor trimming and repair

3D Printing Metal Insert

Spline Surface Fitting for F-Theta Lens Distortion Calibration

Fixed Pitch Laser Triggering: M60

Pulse on Demand Laser Triggering: M60

Polaris CAD/CAMPolaris CAD/CAM is easy-to-use, off-the-shelf software that enables immediate control of your laser machine.

You may design your own 2D and 3D parts, import designs from other programs, control a laser source, Galvoscanners, positioning stages, inspection cameras and other devices.

IMPORT 2D AND 3D CAD FILESDXF, DWG, STL, Gerber and NC Drill files may be imported to Polaris CAD/CAM and used for laser machining. STL files can be sliced and hatched and used for 3D laser printing and 3D laser engraving. DXF, DWG and Gerber files can be hatched and offsets added for beam spot compensation.

Use imported CAD files to prepare complex laser machining recipes.

DRAW OBJECTSLines, circles, arcs and rectangles are easy to draw in Polaris CAD/CAM. You can draw them by hand and/or add precise parameters for size and position. You can draw polylines and polygon shapes with a special easy to use tool. All closed shapes can be hatched with one of the hatching types (lines, cross-hatching, dots, contours). Select motion speed and laser parameters for each shape, groups of shapes or the whole recipe.

Polaris CAD/CAM Application


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CREATE COMPLEX RECIPES WITH FLOW TOOLSAll the parameters in the recipe such as size, position, motion and laser parameters can be entered as variables. It is an easy way to change and control parameters for the entire recipe. In addition, logical commands may be used to create complex, yet flexible and easy-to-control laser machining recipes. Use mathematical expressions, constants and formulas to create complex geometries.

CONTROL POSITIONING STAGES AND GALVOSCANNERSPolaris CAD/CAM may be used to control stages and Galvoscanners separately or in a coordinated fashion. Infinite Field of View (IFOV) may be used to combine slow large-stroke stage motion with fast short-stroke Galvoscanner motion.

CONTROL DEVICES VIA I/Os AND SERIAL PORTHardware in the laser machine can be controlled via digital and analog I/O and serial port commands. Commands can be included in the recipes or added as buttons in the user interface. Custom support for specific devices, such as laser sources, power meters may be requested. JOYSTICK CONTROLPolaris CAD/CAM has a virtual Joystick tool that allows manual control of the positioning stage on your laser machine. There are preset positions e.g. load-unload, automatic motion between camera and laser positions, and laser firing control.

MACHINE VISIONMachined results in the camera window may be superimposed precisely with the fabrication trajectories. If an off-axis camera is used, the camera may be shuttled between laser and camera axes with a single mouse click. The camera may be used for manual and automatic alignment and for finding focus distances. Autofocus is available. Several cameras may be supported simultaneously, one camera for a wide view and another for high resolution view of small features.

2.5D Engraving

3D Printing

Inspection using Machine Vision

Machine Vision & Inspection Tools


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Polaris CAD/CAM OptionsPCC-PRO PCC-PRO-NOGUI PCC-LITE PCC-LITE-NOGUI

MOTION CONTROLGalvoscanner control

Positioning stage control

Up to 3 axes machining

Up to 9 axes machining

Galvo plus stage stitching

XY infinite field of view (IFOV)

Virtual Joystick

FILE IMPORTDXF, DWG

TXT, CSV

STL 3D Module 3D ModuleSTP, IGES

Gerber, NC Drill/Excellon PCB Module PCB Module

TOOLS/ COMMANDSExecute presets and recipes

Drawing tools

Hatching (lines, cross-hatching)

Advanced hatching (stripes, chess pattern)

Measuring

Variables

Math functions

Logging, data export

sample surface height mapping

3D printing tool 3D Module3D model repair 3D ModuleSupport generation of 3D models

TCP/IP remote control from 3rd party application

DEVICE CONTROLI/O

Serial port

Wait for trigger I/O

SECURITY FEATUREProcess parameter locking

CAMERAS AND VISIONWebcam support MV LITE MV LITEIndustrial camera support MV LITE MV LITECamera view calibration and positioning MV LITE MV LITEAutofocus to laser focus position MV LITE MV LITEManual alignment MV LITE MV LITEPerspective distortion correction MV PRO MV PROAutomatic feature recognition MV PRO MV PRO


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Polaris Galvoscanners

Polaris Galvoscanner heads integrate seamlessly with Polaris motion systems. Add a Polaris Galvoscanner with Polaris control system to your stage, laser source and machine vision system for a complete machine. Complete integration enables the elimination of stage servo errors for infinite field of view (IFOV) applications.

Polaris Galvoscanners provide balanced performance and cost to address a vast segment of the high end laser manufacturing market.

Polaris Galvoscanners employ digital encoder technology for consistency, repeatability and accuracy. Powerful tuning optimizes both dynamic and stationary performance for high quality ablating, marking, cutting, drilling and patterning.

All of the advantages of Polaris control are brought forward including powerful path-planning, comprehensive and

full-featured laser trigger logic, remote system diagnostics, and data acquisition. Data is easily analysed using digital oscilloscope and frequency based real-time graphing tools.

A wide range of Galvoscanner mirrors and F-Theta lenses are available for integration with the many laser source technologies.

Advanced features include F-Theta lens barrel-pincushion distortion correction, infinite field of view (IFOV) and pulse-on-demand (POD) laser triggering.

Polaris Galvoscanners may be mounted to any type of stage from simple XYZ stages to robots including tripods, hexapods, and industrial robot arms. Polaris has native robot support with native management of joint and Cartesian coordinate systems.

All Polaris Galvoscanners are subjected to an eight hour burn in and calibration process for optimal performance, consistency and reliability.

Polaris Galvoscanner PGS-10

Beam Diameter 10mm

Scan Angle ±20deg

Interface Polaris Linear Drive

Operating Temperature 15C to 35C

Air Requirements Clean Filtered Air

Weight 2.6kg without F-Theta lens

Dimensions (mm) 147 x 118 x 175

Repeatability (RMS) 3 microRad

Positioning Resolution 800 nanoRad

8H Drift 5 microRad

Nonlinearity .02%

Spectral Ranges Supported CO2, infrared, visible, ultravialoet, broadband,

dualband

Polaris Galvoscanner Model PGS-10 Specifications

120VAC Power SupplyPS-120

240VAC Power SupplyPS-240

Nominal AC Input Voltage (VAC) 120 240

Phase Type Single Single or Three

Maximum AC Input Voltage (VAC) 131 276

Continuous Output Power (W) 4250 8500

Peak Output Power (W) 8500 17000

Nominal DC Bus Output (V) 170 340

Polaris Drive Compatibility 200VDC PWM Drive 400VDC PWM Drive

Shunt Regulator Activation (V) 185 390

Shunt Power (W) 6845 7605

Shunt Duty Cycle Limiter 4%

Peak DC Output Current (A) 50

Continuous DC Output Current (A) 25

Dimensions (mm) 247x152x61

Weight (Kg) 1.7

Operating Temperature (degC) 0 to 55

Storage Temperature (degC) -10 to 80

Power Supplies Specifications

120VAC and 240VACPower Supply

Polaris Motion ControllerCNT

Supply Power +24V, 600mA

PC Communication 10/100/1000 Ethernet One Port

Embedded CPU Intel Atom Quad Core 1.91GHzor

Intel Core i7 Quad Core 2.8GHz

Solid State Memory (GB) 8

Dynamic Memory (GB) 4

Digital I/O 2 Inputs/ 2 Outputs, Opto-Isolated

Auxiliary I/O Handwheel, Camming Input, RS-232

Watch Dog 1 Digital Output

Operating System Optimized Debian Linux

Motion Control Software Polaris Server

Total Maximum Setpoint Rate (1/s) 400,000

Mercury Real Time Motion Network 4 Ports

Maximum Number of Mercury Devices 124


Weight (Kg) 1.1


Storage Temperature -10 to 80

Polaris Motion Controller Specifications


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PolarisMotion Controller

XYZ4 HandwheelX1, X10, X100

25


Polaris Drives Specifications200VDC

PWM Drive400VDC

PWM Drive±48VDC

Linear Drive±75VDC

Linear Drive

Type PWM PWM Linear Linear

PWM Frequencies (kHz) 20, 40, 80 20, 40, 80 NA

Current Output, Continuous (A) 13.5 (15)* 6 (15)* See SOA See SOA

Current Output, Peak (A) 30 (3 sec) 30 (3sec) See SOA See SOA

Power, Peak (W) NA NA 96 900 (See SOA)

Power, Continuous (W) NA NA 96 400

Phases 3 or 1 3 or 1 1 3 or 1

Motor Bus Voltage (VDC) 24 - to -180 24 - to - 380 ±24, ±36, ±48 ±75

Halls A, B, C NA A, B, C

Minimum Load Inductance 2mH* 2mH* NA

Dimensions (mm) 248x57x152 248x61x152 248x57x152 248x101x152

Weight (Kg) 1.4 1.4 1.4 2.4

Communication Mercury

Control Supply +24V

Synchronization 8ns Among all Mercury Devices

Gen Purpose Digital I/O 2 Opto-isolated Digital Inputs, 2 opto-Isolated Digital Outputs

High Speed Digital I/O 2 TTL Digital Inputs, 2 TTL Digital Outputs

Dedicated Digital I/O Limit +, Limit -, Home, Emergency

Optional Analog Input One 16-bit Analog input, 0-10V Single-Ended or +/-10V Differential

Optional Analog Output One 16-bit Analog Output, 0-10V or +/-10V Single-Ended

Incremental Encoder Options TTL, Sin/Cos, TTL plus Sin/Cos, Scanlab Digital Encoder

Absolute Encoder Options ENDAT2.1, ENDAT2.2, BiSS, Tamagawa, Absolute Current Encoder

Motor Thermal Input TTL

Motor Brake Output One 24V, 1.8 Amp Output (3Amps)

Feedback Loop, including current, velocity and position

Settable 2-to-100 kHz

Variable Number Format Double Precision Floating Point IEEE754

Emission Enable and laser Trigger Output

High Speed Digital Outputs are Used

High Speed Encoder Capture Standard Encoder Index Pulse is Used

Simulated Encoder Output Optional

TTL Encoder Input Frequency 60MHz

Sin/Cos Encoder Input Frequency 1 MHz

Sin/Cos Multiplier Factor Up to 16,384X



Shunt See Power Supplies

* Maximum current output is dependent on minimum load inductance and heat sinking. Maximum continuous current output up to 15Amps is possible with custom heat sinking.

200VDC PWM Drive±48VDC Linear Drive

400VDC PWM Drive

±75VDC Linear Drive

26

32 In / 32 OutDigital I/O Module

GP-03

Power Supply +24V, 120mA


Digital Inputs 32

Digital Outputs 32

Digital Input Logic High (V) 8 to 30

Digital Input Logic Low (V) -0.7 to 5

Digital Input Propagation Delay (µs) 10

Opto Isolated Yes

Digital Output Supply (V) 3 to 48

Digital Output Current / Contact (mA) 32

Digital Output Propagation Delay (ms) 1

Opto Isolated Yes


Weight (Kg) 0.5



Digital I/O Specifications

4 In / 4 OutAnalog I/O Module

GP-02



Analog Inputs 4

Input Ranges (V) ±10, ±5, 0 to 10

Resolution (Bits) 16

Input Current / Channel (mA) 1.2

Analog Outputs 4

Output Ranges (V) ±10, ±5, 0 to 10

Resolution (Bits) 16

Output Current / Channel (mA) 23


Weight (Kg) 0.6



Analog I/O Specifications

32 In / 32 OutDigital I/O Module

4 In / 4 OutAnalog I/O Module


27


XY2-100 ModulePXY2-100-3A

XY2-100 ModulePXY-100-6A

SL2-100 ModulePSL2-100-3A

SL2-100 ModulePSL2-100-6A

Number of Axes 3 6 3 6

Position Command Type Absolute Absolute Absolute Absolute

Position Command Bits 16 16 20 20

Position Setpoint Rate (Hz) 100,000 100,000 100,000 100,000

Position Feedback Rate (Hz) None None 100,000 100,000


Weight (Kg) 0.5



SL2-100, XY2-100 Specifications

PXY2-100-3AModule

PXY2-100-6AModule

PSL2-100-3AModule

PSL2-100-6AModule

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4 Channel Polaris Pulse ModulePPM-4A



Number of Axes 4

Pulse Output (Pulse, Dir) or (CW, CCW)

Drive Enable Drive Enable Output

Axis Limits Lim+, Lim-, Home Inputs

Alarm Drive Alarm Input

In Position Servo In Position Input

Encoder A, B, Z Quadrature Encoder Input

General Purpose I/O

Opto-Isolated Digital Safety Input (24V) 1

High Speed Digital Outputs (TTL) 2

High Speed Digital Input (TTL) 1

Maximum Pulse Rate (MHz) 4

Pulse Width Range (ns) 50 to 31925

Maximum Encoder Pulse rate (MHz) 60

Encoder Dynamic Range (Bits) 64

Dimensions (mm) 248x152.4x51

Weight (Kg) 0.7



4-Axis Polaris Pulse Module Specifications

4 Axis Polaris Pulse Module

29


4 Channel Polaris Servo ModulePSM-4A



Number of Axes 4

Drive Enable Drive Enable Output

Axis Limits Lim+, Lim-, Home Inputs

Alarm Drive Alarm Input

Alarm Clear Alarm Clear Output

Axis Digital IO 2 inputs, 2 outputs

Encoder A, B, Z Quadrature Encoder Input

General Purpose I/O

Opto-Isolated Digital Inputs (24V) 1

High Speed Digital Outputs (TTL) 2

High Speed Digital Input (TTL) 1

Analog Output Per Axis 16-bit Analog Output, +/-10V Differential

Analog Output Bandwidth (kHz) 20

Maximum Encoder Pulse rate (MHz) 60

Encoder Dynamic Range (Bits) 64

Analog Input One 16-bit Analog input, 0-10V Single-Ended or +/-10V Differential


Weight (Kg) 0.7



4-Axis Polaris Servo Module Specifications

4 Axis Polaris Servo Module

Product Ordering CodesPolaris Drives

Ordering Code

PWM-D08 400V / 15A

PWM-D09 200V / 2.5A

PWM-D10 200V / 15A

LIN-D00 1Phase-96W

LIN-D01 3Phase-400W

E00 ABZ Quadrature TTL Feedback

E01 Sin/Cos Feedback 1Vpp

E02 ENDAT 2.2 Feedback

E03 Resolute BiSS Feedback

E04 ENDAT 2.1 Feedback

E05 Polaris Galvoscanner Sin/Cos, Thermal Sensor

E06 Position Feedback Circuit Not Included

E07 1Vpp Sin/Cos plus ABZ Quadrature TTL Feedback

E08 Dual: BiSS + KVH Gyro

E09 Absolute Current Feedback

E10 Dual: Absolute Current plus 1Vpp Sin/Cos Feedback

E11 Tamagawa Encoder

E12 Scanlabs Digital Encoder

E13 BiSS + ABZ Quadrature TTL Feedback

E14 Ultrasonic plus Sin/Cos Feedback

F0 Analog Option Not Included

F1 Analog Option Included

J0 Standard Fixed PIDVAFF SPU

J1 Customizable SPU

J2 Fast Servo SPU

J3 Fast Servo and Customizable SPU

LIN-D□□-E□□-F□-J□ PWM-D□□-E□□-F□-J□

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Polaris Drive AccessoryOrdering Code

PSC-01 Single Ended to Differential Converter with Gain / Offset Adjustment

Polaris Motion ControllerOrdering Code

A4 Intel Atom Quad Core

A5 Intel i7 Quad Core

B0 Polaris Server / MotionTools/ Development Tools

B1 B0 plus 3 Axis CNC Support



C0 Robotics Framework

C1 Robotics Framework plus Galvoscanner Support

DNN Support for NN Galvo Scanners

PSW-LMS Polaris Software: License, Maintenance and Support

CNT-A□-B□-C□-D□□

Polaris Controller AccessoryOrdering Code

CNT-A4-HANDWHEEL Polaris XYZ4 Handwheel, Speeds X1, X10, X100

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PCC-□□□□-□□□-□□□-□□□-□□□

Polaris CAD/CAMOrdering Code

PRO All features for machines up to 9 axes except machine vision

LITE Many features for for machines up to 3 axes except machine vision

NOGUI Version of PCC that runs in the background and does not have the graphical user interface

3DM Adds handling of 3D CAD files. Used with LITE version of PCC to enable 3D capabilities

PCB Adds handling of printed circuit board CAD files. Used with LITE version of PCC to enable handling of files such as gerber files

EXAMPLE PCC-LITE-NOGUI-3DM-PCBThis is an example of Polaris CAD/CAM Lite with no graphical user interface, 3D CAD and printed circuit board CAD file capabilities.

Polaris GalvoscannerOrdering Code

Aperture

A01 10mm

A02 15mm

Mirror Options

B01 1064nm

B02 532nm

B03 1064/532nm

PGS-A□□-B□□


Polaris Multi Axis ModulesOrdering Code

PSM-4A Polaris servo module providing interface for four servo axes. Each axis supports one A quad B encoder input and one ±10V analog drive signal output.

PPM-4A Polaris pulse module providing interface for four pulse/direction actuators, such as stepper motors and Japanese style AC servo motors.

Polaris XY2-100 and SL2-100 ModulesOrdering Code

PXY2-100-3A Three Channel XY2-100 Module

PSL2-100-3A Three Channel SL2-100 Module

PXY2-100-6A Six Channel XY2-100 Module

PSL2-100-6A Six Channel SL2-100 Module

Digital I/O, Analog I/O and Power SuppliesOrdering Code

GP-02 Analog IO, 4 Analog Inputs / 4 Analog Outputs

GP-03 Digital IO, 32 Digital Inputs / 32 Digital Outputs

PS-120 AC/DC Power Supply 120VAC

PS-240 AC/DC Power Supply 240VAC

Precision MicroDynamics Inc. (PMDi)3 – 512 Frances Avenue Victoria, BC V8Z 1A1Canada

250 382 7249 TEL250 382 1830 FAX866 548 5639 [email protected]@PolarisMotion

www.pmdi.com

Local Distributor:

TM

Committed to Advanced Motion Control

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motion control system catalog - polaris motion · 5/17/2018 · semiconductor manufacturing ......

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