mos transistor model and layout issuesmos transistor model and layout issues one of the most...

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Chapter II MOS Transistor Modelling for MMW Circuits 15 Chapter Chapter Chapter Chapter II II II II MOS transistor model and layout issues One of the most important design issues in millimeter wave circuit design in modern MOS technologies is active devices and related parasitic elements modeling. The MOS transistor model that can be used in such high frequency must accurately comprise all of the unwanted parasitic effects that arise in high frequencies, as well as DC and low frequency characteristics. Professional circuit simulators and foundry design kits provide a complete environment for design, optimization and validation of different circuits, as well as layout tools. However due to many high frequency effects that arises in millimeter wave frequencies and have not been included in available RF design kits, millimeter wave circuit designers need to develop an individual simple design tool. This tools are used in pre-design analysis, design procedure and after-design diagnosis. Then the foundry design kit is used for final design evaluation and probably optimization, after some special considerations by the designer. In our work the problem is more sever, since the foundry design kit we are working with, is for 90 nm digital CMOS technology and does not provides any RF design facilities. Consequently we are obligated to develop our design and optimization tools, using the foundry design kit data and the foundry confidential Design Rule Manual (DRM). Then we should use the design kit with some special considerations for post-layout simulation and to evaluate the final design. Off course the parasitic extraction tools of the design kit are not useful for our work. An accurate model for MOS transistor is one the most important requirement of our design and optimization tool. In the STMicroelectronics 90nm global purpose CMOS foundry design kit, BSIM3v3 has been used with some modifications, specially to capture the stress effect [1], [2], [3]. The modifications have been mainly made as pre-calculation of some BSIM3v3 standard parameters. However this model is not sufficient for millimeter wave design and hence we obligatory should develop an accurate model based on the design kit model and the used technology data, given in the foundry Design Rule Manual (DRM). The parts of our model that have been covered by the ST foundry design kit, have been calibrate using the design kit. The other parts have been obtained analytically, using the foundry design rule manual. In this chapter we will give a brief overview of available models. Then we will describe our model that we have used in our design and optimization tool. Our model consists of some new equations for I-V characteristics, gate resistance, substrate and layout-dependent effects. We also will propose an analytic method for layout optimization. Our model consists of the following main sections: Transistor core model, consisting of single equation I-V model, capacitance model, small signal and noise models Layout-dependent parasitic elements, consisting of gate resistance model, substrate model, interconnect model and other parasitic elements. Y parameter model for small signal and noise analysis II.1 MOS Modeling Overview In recent years the MOS technology has been scaled down to nanometer regime and various MOS transistor models have been proposed to best capture the transistor behavior. MOS modeling is always a compromise between two factors: Accuracy and complexity. In a glance, all of the available models can be divided in to two main categories. First category is

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Chapter II MOS Transistor Modelling for MMW Circuits

15

Chapter Chapter Chapter Chapter IIIIIIII

MOS transistor model and layout issues

One of the most important design issues in millimeter wave circuit design in modern MOS

technologies is active devices and related parasitic elements modeling. The MOS transistor

model that can be used in such high frequency must accurately comprise all of the unwanted

parasitic effects that arise in high frequencies, as well as DC and low frequency

characteristics.

Professional circuit simulators and foundry design kits provide a complete environment for

design, optimization and validation of different circuits, as well as layout tools. However due

to many high frequency effects that arises in millimeter wave frequencies and have not been

included in available RF design kits, millimeter wave circuit designers need to develop an

individual simple design tool. This tools are used in pre-design analysis, design procedure and

after-design diagnosis. Then the foundry design kit is used for final design evaluation and

probably optimization, after some special considerations by the designer.

In our work the problem is more sever, since the foundry design kit we are working with,

is for 90 nm digital CMOS technology and does not provides any RF design facilities.

Consequently we are obligated to develop our design and optimization tools, using the

foundry design kit data and the foundry confidential Design Rule Manual (DRM). Then we

should use the design kit with some special considerations for post-layout simulation and to

evaluate the final design. Off course the parasitic extraction tools of the design kit are not

useful for our work. An accurate model for MOS transistor is one the most important

requirement of our design and optimization tool.

In the STMicroelectronics 90nm global purpose CMOS foundry design kit, BSIM3v3 has

been used with some modifications, specially to capture the stress effect [1], [2], [3]. The

modifications have been mainly made as pre-calculation of some BSIM3v3 standard

parameters. However this model is not sufficient for millimeter wave design and hence we

obligatory should develop an accurate model based on the design kit model and the used

technology data, given in the foundry Design Rule Manual (DRM). The parts of our model

that have been covered by the ST foundry design kit, have been calibrate using the design kit.

The other parts have been obtained analytically, using the foundry design rule manual.

In this chapter we will give a brief overview of available models. Then we will describe

our model that we have used in our design and optimization tool. Our model consists of some

new equations for I-V characteristics, gate resistance, substrate and layout-dependent effects.

We also will propose an analytic method for layout optimization. Our model consists of the

following main sections:

� Transistor core model, consisting of single equation I-V model, capacitance model, small

signal and noise models

� Layout-dependent parasitic elements, consisting of gate resistance model, substrate model,

interconnect model and other parasitic elements.

� Y parameter model for small signal and noise analysis

II.1 MOS Modeling Overview In recent years the MOS technology has been scaled down to nanometer regime and various

MOS transistor models have been proposed to best capture the transistor behavior. MOS

modeling is always a compromise between two factors: Accuracy and complexity. In a

glance, all of the available models can be divided in to two main categories. First category is

Chapter II MOS Transistor Modelling for MMW Circuits

16

the table-based or table-look-up models, directly obtained from measurement results. Second

category is the mathematical model that is fully or partially obtained from the study of the

physics of the transistor. In other glance, all of the models can be divided in to simple or

complicated models. Simple models are used in small primary design tools and are useful in

pre-design analysis and after-design diagnosis. These models can give an insight of the

behavior of the device, as well as the effect of the device parameters on the final design.

These models are also useful for education purposes. Complicated models are used in

professional circuit simulators for design evaluation and optimization.

Here we divide all of the models in to three categories:

� Professional physical models

� Professional table-based models

� Simple physical models

II.1.1 Professional Physical Models

These models have been developed based on the accurate study of the related physical

phenomena’s. In nanometer scale MOS technologies, these phenomena’s, specially short

channel and quantum effects, are very complicated and hence such models are very

complicated. Three main groups of these models have been developed for modern MOS

technologies [4], [5]. First and more extended group is based on the threshold voltage. Spice

models, Bsim3, BSIM4 and MM9 are examples of this group [6], [7], [8]. Second group is

based on the inversion charge approach. EKV [5], ACM1 [9] and BSIM5 [10] are based on

the inversion charge or charge sheet layer methods. Third group are surface-potential-based

models. SP [11], PSP [12] and MM11 [13] are the examples of these models. Two last groups

are more adapted to the nanometer regime MOS technologies, since threshold voltage based

models use many mathematical smoothing functions and fitting parameters, and hence less

physical insight to device operation [7].

Extraction of model parameters from measurement results is very essential for professional

models [13]. Specially the parameters related to capacitance and trans-capacitance has been a

challenge from past to present [14], [15].

II.1.2 Table-Based Models

As the MOS technology goes to nanometer regime, capturing the new physical phenomena’s

makes the professional physical based models more and more complicated. Such complicated

models are computationally expensive and a greatly influence the simulation run time, so that

up to 80% of the run time is consumed to model evaluations [16]. On the other hand simple

physical models have not enough accuracy for final design evaluation and optimization. So

the table-based models have been presented to comprise both of the accuracy and simplicity.

Table based models have been developed since the 1970s, in the digital and mixed mode

circuit simulators like MOTIS [17]. Then 3D models was born in 1982 [18] and professional

circuit simulators based on these models was developed in 1983 [19]. Table base models were

applied to RF simulators by Root et al. for GaAs FET devices [20].

The accuracy of table-based models is influenced by a large number of factors, such as

extrapolation accuracy, data interpolation accuracy and the accuracy of the parameters

derived from the table data (such as ac model parameters). Data interpolation from the table

data has been discussed in [21]. In [16] different table structures have been considered to

obtain the required accuracy with minimum table size.

1 Advanced Compact MOS Model

Chapter II MOS Transistor Modelling for MMW Circuits

17

II.1.3 Simple Physical Models

Due to their complexity, professional MOS models can not be used in the simple individual

design tools. For example, MM11 has approximately 80 parameters [22]. BSIM3v3 has more

up to 80 parameters for I-V equation, 22 parameters for capacitances and 12 parameters for

thermal effects and 4 control parameters. BSIM4.3.0 has about 136 parameters for I-V model,

20 parameters for RF and layout dependent effects, 18 parameters for thermal effects and 20

control parameters, as well as some parameters for comprise the stress effect [23], [24].

Development of individual design tools need to have a simple, but accurate MOS device

model. Such model can give the designer insight of what happens physically in the device and

this helps the designer to perform the pre-design analysis and after-design diagnosis [25].

II.2 Our Model for Intrinsic MOS Transistor In this section we present a simple, but accurate model that can capture the MOS transistor

core characteristics in 90nm MOS technology. Our model consists of large signal nonlinear I-

V characteristics and capacitance models, a small signal linear model and a simple noise

model. I-V characteristic is a set of mathematical equations that describes the drain voltage as

a function of four transistor nodes, i.e. gate, drain, source and bulk. Capacitances model are

mathematical equations that describe the nodal capacitance and trans-capacitance of the

transistor nodes. I-V and capacitance models are directly used in DC or large signal analysis,

as well as in the small signal analysis to calculate the small signal model parameters.

Continuity of the large signal equations and their derivatives are very important in simulation

convergence [26]. So in our model all of large signal equations are unique for both of linear

and saturation regions.

II.2.1 I-V Characteristic

The fist ideas in modeling of I-V characteristics of a MOS transistor stems from Shockley

studies [27]. Then the basic quadratic equation derived in early 1960 [28]. This equation is as

follows:

( )

( )

−−=

regionsaturationVVL

WC

regionlinearVVVVL

WC

cutoff

I

thgoxn

ddthgoxnd

2

0

µ

µ (II-1)

where Vth is the threshold voltage. For many years, this basic model has been recognized as

inadequate and various modifications have been made to fit the basic equation on the modern

MOS technologies. Mobility reduction, velocity saturation and channel length modulation are

examples of the performed modifications. In the saturation region channel length modulation

can be considered simply as:

( )( )effdsodox

ds VVVL

WCI −+= λ

µ12 (II-2)

Where Vod is the over drive voltage, defined as:

thgsod VVV −= (II-3)

Mobility degradation and velocity saturation have been considered in many literatures and

text books [29], [30], [31]. Mobility degradation is due to the lateral filed due to drain-source

voltage, as well as the vertical field due to gate voltage. In most of these literatures the

mobility has been considered as a average effect in the channel and hence a multiplicative

modifier has been used. The most common way is express the mobility as in [4]:

Chapter II MOS Transistor Modelling for MMW Circuits

18

( )

+++

=

LE

VVV

c

dodod 112

21

0

θθ

µµ (II-4)

Multiplicative correction of mobility value has been considered in the physical alpha-power

law model and some other physical models [32], [33]. However the field components are not

uniform in all of the channel length. The vertical field dominates in part of the channel near to

the source and reduces the mobility. However in the drain end of the channel lateral field is

dominant and causes the velocity saturation. Consequently considering a average effect can

not lead to an accurate model [4].

The nonlinear behavior of drain current has been investigated in many presented models.

Although Shockley model predicts quadratic variation of the drain current in saturation

region, this diminished in short channel MOS transistors. Alpha-power law model, presented

in 1990, was a fully empirical model that proposed a new equation as follows [34]:

( )αthgsds VVBI −= (II-5)

In [34] value of alpha was found 1.2, 1.2 and 1 for 1.2 um, 0.8 um and 0.5um technologies,

respectively. Other alpha-power low models have been developed with physical insight in to

the transistor behavior. In [32] and [35] with physical analysis of the drain current equations

have been derived to calculate the exact value of alpha, as a function of gate voltage. In [35]

has been shown that the value of alpha goes toward 2 in long channel case and goes toward 1

in short channel case.

Unfortunately none of the above models have adequate accuracy in today’s nanometer

scale MOS transistors. Consequently in recent years beside new professional complicated

models, some new simple models have been developed for design, analysis and simple

simulation tools. Hauser has proposed a physical model, based on the well known sheet

charge layer model [4]. Based on this model the drain current and the voltage along the

channel obey a simple differential equation:

( )x

VVVVWCI thgsoxds

∂−−= µ (II-6)

He has used a new approach to calculate the mobility as a function of gate and drain voltages.

The obtained result is a single-equation model, well fitted to I-V characteristics of a transistor

with 90nm gate length. In [29] a compact model has been developed to calculate the trans-

conductance of a deep submicron transistor. This model predicts quadratic relation of the

drain current and gate-source voltage for small gate-source voltages and linear relation for

large gate-source voltages. Measurement results in [1] show that the drain current is linear

function of gate voltage for 0.13 um MOS technology. Simple model of Gray also shows such

behavior [31]:

12

2

0

+

=

sat

od

odoxds

LE

V

V

L

WCI

µ (II-7)

For large L drain current is quadratic function of gate voltage, and for small values of L the

function is linear.

A simple model have been developed in [1] for RF applications. This model is single-

equation for both of linear and saturation regions. The basis is Shockley model, but velocity

saturation has been included as an empirical correcting term and also channel length

modulation and vertical field effect have been considered as conventional multiplicative

terms. Another simple model has been addressed in [25], in which channel length modulation

has been considered as a function of gate voltage. In [25] has been noted that for small gate

voltages, neither their model, nor other available models are not accurate.

Chapter II MOS Transistor Modelling for MMW Circuits

19

A new theory of operation of nanometer scale MOS transistors, i.e. quasi-ballistic transport

model has been proposed in [36], instead of conventional velocity saturation theory, and a

model has been developed, based on this theory. Measurement results in [1] for sub-0.1 um

scale shows that both of velocity saturation and transport models are good for large gate

voltage, i.e. in well saturated condition. However for small gate voltages velocity saturation

model is not accurate, but the transport model is well fitted to measurement results.

Overview of available I-V models show that various models have been presented for short

channel MOS transistors. However each of available models for sub-0.1um MOS

technologies is suitable for special measurement results and there is not any conventionally

accepted model. In our knowledge, the model presented by Hauser in [4] is the most

theoretically acceptable model. However this model has some shortages, as noted in [1]. In

addition Hauser model does not capture the stress effect. Consequently we have developed

our model based on our requirements.

II.2.1.1 Our I-V model

Our single-equation model is based on the linear dependency of drain current to gate voltage

in saturation region in sub-0.1 um MOS technologies. The equation is as follows:

( )dsod

effox

ds VVL

WCI λη

µ+= 0

(II-8)

Vod is the over-drive voltage, defined in (II-3). Vth is the threshold voltage. Although complete

formulas are available in most text books, it can be calculated as a linear function of the

voltage between source and bulk nodes, Vsb [37]. We have used a second order polynomial to

calculate the threshold voltage: 2

210 sbsbthth VVVV γγ ++= (II-9)

In which 1γ and 2γ are constants. Vth0 is the threshold voltage when source-bulk voltage is

zero. The coefficient η is for capturing the mobility reduction and velocity saturation effects,

and is defined as:

dsat

ds

dsat

od V

V

V

V

2

2

1+

=η (II-10)

Vdsat is the drain-source saturation voltage. Different equations have been derived for Vdsat

[38], [39], [40]. We have used the equation of [38] has been rewritten in [39] as:

x

oddsat

VV

α= (II-11)

Where xα is a function of gate-source and gate-bulk voltages. However we found an

empirical equation to calculate xα :

0

22

0

th

odx

V

V+=

φα (II-12)

In which Vth0 is the threshold voltage when Vsb is zero, 0φ is a constant voltage, that in our

case is equal to the junction built in potential. The role ofη is soft transition from linear

region to saturation region, as well as modeling the electron mobility degradation and velocity

saturation. Regarding (II-8) and comparing it with Shockley model we can define:

Chapter II MOS Transistor Modelling for MMW Circuits

20

0 5 10 15 20

0.6

0.7

0.8

0.9

1

1.1

Number of gate fingures

dra

in c

urr

en

t (m

A)

W=10 um

0 10 20 30 40 50 60

1.8

2

2.2

2.4

2.6

2.8

3

3.2

Number of gate fingures

dra

in c

urr

en

t (m

A)

W=10 um

Fig. II-1. Ids for two value of W=10 um and W=30 um, and different finger sizes

<+

=

>

+

=

dsatds

dsatds

dsateff

dsatds

ds

dsatod

dsateff

VVVV

V

VV

V

VV

V

22

2

0

2

20

1

µµ

µµ

(II-13)

The coefficient λ denotes the channel length modulation effect. In [25] λ has been

calculated as a function of Vgs and in [37] it has been calculated as a function of Vsb.

However we found empirically that λ is function of both of Vgs and Vsb. We have adapted the

empirical equation as in below to calculate λ :

22

0

0

od

od

VV

V

+=

λλ (II-14)

V0 and0λ both are constant coefficient.

0λ is equal to the value of λ for large gate voltages.

Weff is the effective gate width and is different from the drown W, to include the effect of

fabrication process on W and to compensate the probable errors due to the stress effects and

quasi-two-dimensional assumption in BSIM3v3. To give a view of how much these effects

are important, Ids has been shown in Fig. II-1 for two value of W=10 um and W=30 um, and

different gate finger sizes These results have been obtained from the foundry design kit. We

have calculated Weff as follows:

WqN

NqW

f

f

eff

2

1

+= (II-15)

In which q1 and q2 are constants and Nf is the number of gate fingers.

To evaluate our I-V model, we have compared it with the STMicroelectronics foundry

design kit for 90nm CMOS technology. The results have been shown in Fig. II-2. This figure

clearly shows the accuracy of our model. The effect of number of gate fingers on the drain

current has been shown in Fig. II-3, for in our model in comparison with the foundry design

kit.

II.2.2 Capacitances Model

First capacitance models were derived as a function of transistor nodes voltage [41]. Then in

consequence of charge conservation and continuity problems in voltage-based models,

charge-based models were introduced [42]. Various developments of charge-based models

were presented as threshold voltage based, surface potential based, quasi static and non-quasi

Chapter II MOS Transistor Modelling for MMW Circuits

21

static models [43]-[49]. In recent years CMOS technology has scaled down to the nanometer

feature sizes. Accurate analysis of such devices should be performed considering quantum

mechanical effects [50]. Many works has been reported on the modeling of C-V characteristic

of modern CMOS transistors, based on the quantum mechanical effects [51], [52], [53].

However almost all of the available simple and professional models use charge-based

modeling [43], [12], [13], [5]. So we present a review of charge based capacitance models.

Threshold voltage based charge/capacitance models, like in BSIM3 and BSIM4 models are

very complicated and have many fitting parameters [44], [5], [6]. Surface potential based

charge/capacitance models needs to calculate the surface potential by solving the Poisson’s

equation, that needs to iterative numerical calculations [14]. Some methods have been

presented for this model in which charge-density approximation has been used, instead of

direct solving Po equations [39], [45]. Charge-sheet model is another charge-based model in

which the channel assumed as a very thin charge layer [4].

One important issue on the capacitance modeling is Non-Quasi-Static (NQS) effects. Early

charge based models were derived by Quasi-Static (QS) approach. In QS approach the time

dependent behavior of the channel charge build-up is neglected, assuming zero time for

charges to reach their steady state condition. In principle this approach is a succession of

steady state situations. However in high frequency applications the QS assumption is not valid

and the channel charge becomes an explicit function of time. A first order estimate of the

0.4 0.5 0.6 0.7 0.80

2

4

6

8

10

12

14

gate-source voltage

dra

in c

urr

en

t (m

A)

Vds=0.9

Vds=0.7

Vds=0.5

Vds=0.3

Vds=0.1

0 0.2 0.4 0.6 0.8 1

0

2

4

6

8

10

12

drain-source voltage

dra

in c

urr

en

t (m

A)

Vgs=0.35

Vgs=0.45

Vgs=0.55

Vgs=0.65

Vgs=0.75

Fig. II-2 The I-V characteristics of our model in comparison with the foundry design kit, Circle data are from

design kit.

0 5 10 15 20

0.6

0.7

0.8

0.9

1

1.1

Number of gate fingures

dra

in c

urr

en

t (m

A)

Our Model

Design Kit

W=10 um

0 10 20 30 40 50 601.6

1.8

2

2.2

2.4

2.6

2.8

3

3.2

Number of gate fingures

dra

in c

urr

en

t (m

A)

Our Model

Design Kit

W=30 um

Fig. II-3 The effect of number of gate fingers on the drain current, for in our model in comparison with the

foundry design kit, Circle data are from design kit.

Chapter II MOS Transistor Modelling for MMW Circuits

22

scale in which the NQS effect becomes noticeable is the average transit time of the carriers in

channel [48]. Many NQS models have been published, in which NQS effects for large signal

and small signal analysis have been considered [46], [47], [48], [49]. Most of these models are

very complicated and increases the simulation time up to 4 or 5 times [23]. So some

approximated and simple models, such as distributed element treating of the transistor have

been proposed [54]. In BSIM3v3 a simple physical NQS transient model has been used, based

on the Elmore equivalent circuit [55]. This simple circuit introduces the charges build-up

time, equal to the time constant of the Elmore equivalent resistance and the gate capacitance

[23]. Although bsim3v3 has been used in many professional simulators and foundry design

kits, analysis and simulation results in [48] show that this model can not accurately model the

NQS effects in high frequencies. Capacitance modeling in BSIM4.3.0 is similar to BSIM3v3.

However BSIM4 used two first order modeling for NQS effects for large signal analysis and

introduces NQS effect in small signal capacitances and trans-conductance [24]. In [26] a very

simple model has been presented. This model is fully empirical and hence is suitable for

special cases.

II.2.2.1 Our Capacitance Model

The capacitance equations in our model have been simply derived using some basic analysis

and fitting to the design kit. For zero drain-source voltage and neglecting bulk charges in

strong inversion (SI) regime [43], we have:

( )thgsoxeffeff

SI

c VVCLWQ −=0 (II-16)

And in sub-threshold (ST) region we have :

−−=

t

offthgsST

cn

VVVQQ

νexp00 (II-17)

In which Q0 is determined from technology parameters [4]. Voff is small offset voltage to

correct the threshold voltage to best fit the measurement results. n is constant between 1 and 2

and vt is the thermal voltage. These equations are not continued and hence cause problem in

calculating the capacitances. One solution is correction of equations (II-16) and (II-17) to

obtain the continuity of charge and its first derivative at Vgs=Vth. For this purpose we should

correct the first equation as:

( )

−+−=

t

off

thgsoxeffeff

SI

cn

VQVVCLWQ

νexp00 (II-18)

And to obtain the continuity of the derivative of charge at Vgs=Vth ,we should have:

=

oxeffefft

toffCLWn

QnV

νν 0ln (II-19)

The normalized charge and its derivatives, calculated from above equations have been

depicted in Fig. II-4, in comparison with the derivative of the channel charge, obtained from

the foundry design kit. From this figure, the second derivative of the charge is not continuous

and this cause large error in calculation of capacitors. So we perform another improvement,

with defining Vgs in the strong-inversion region as follows:

p p

th

p

gsgs VVV +=′ (II-20)

And the channel charge in the strong-inversion region is calculated as:

( )

−+−′=

t

off

th

p

gsoxeffeff

SI

cn

VQVVCLWQ

νexp2 00 (II-21)

to obtain the continuity of the derivative of charge at Vgs=Vth ,we should have:

Chapter II MOS Transistor Modelling for MMW Circuits

23

=

p

oxeffefft

toffCLWn

QnV

11

0 2lnν

ν (II-22)

the normalized charge and its derivatives, calculated from above equations have been depicted

in Fig. II-4. In this figure the charges and the derivatives have been normalized to oxeffeff CLW

andoxC , respectively. Now the second derivative is continuous. Note that the difference

between the modified equation and the design kit result is due to the bulk charge that has not

been included in our equations.

The other approach is to use a unifying function to unify the equations (II-16) and (II-17)

into a single equation. In [39] a unifying function has been presented for soft transition from

sub-threshold to strong inversion. This unifying function has been widely used in reported

models [56], [23], [39]. Here we rewrite after introducing the small offset voltage:

−−+=

t

offthgs

toxeffeffcn

VVVnCLWQ

νν exp1ln0 (II-23)

This function goes to (II-16) for large Vgs and has semi-exponential increase for small Vgs.

Fig. II-5 shows this function and its first derivative, normalized to oxeffeff CLW and oxC ,

respectively, in comparison with the exponential equation of (II-17). The effect of Voff has

been shown in this figure. From this figure unified equation (II-23) has very good agreement

with both of equations (II-16) and (II-17). Due to its accuracy, as well as single equation

property, we use it in our model.

A) Vds Effect on the Channel Charge

Now the effect of Vds in the channel charge should be included. For this purpose we use

proper approximations separately in linear and saturation regions, and then we will unify the

obtained equations to obtain our single-equation channel charge model.

In the linear region we assume that the channel charge density linearly reduces from source to

drain, due to drain voltage. So we have:

==

==

dsatdsc

linc

dsclinc

VVQ

Q

VQQ

2

0

0_

0_

(II-24)

To express this in a single equation we use:

dsat

dsdsatclinc

V

VVQQ

2

20_

−= (II-25)

However this equation is valid in the linear region, so we should restrict Vds to this region. To

do so, we define the voltages:

dsdsds

dsat

q q

dsat

q

dsds

VVV

VVVV

′−=′′

−+=′ (II-26)

where q is a fix parameter and Vdsat is drain-source saturation voltage and was calculated in

(II-11), however here we use other equation for it, that is consistent with (II-11), but is more

soft function.

( )

−+= ∞

offgsdsat VVkV

V tanh12

(II-27)

Chapter II MOS Transistor Modelling for MMW Circuits

24

0 0.2 0.4 0.6 0.8 10

0.5

1

1.5

2

2.5

3

3.5

x 10-14

Vgs

ChargeAfter firstmodification

ChargeAfter secondmodification

DerivativeAfter firstmodification

DerivativeAfter secondmodification

DerivativeDesign Kit

Fig. II-4. Channel charge and its derivative calculated from (II-16) and (II-17), after our first and second

modifications. Charges and derivatives have been normalized to oxeffeff CLW and

oxC , respectively.

0 0.2 0.4 0.6 0.8 10

0.5

1

1.5

Vgs

Unified Model

Exponential Model

Derivative ofExponentialModel

Derivative ofUnified Model

Voff=0

Voff=-0.1

Voff=0.1

Voff=0

Fig. II-5. The unified function of (II-23) and its first derivative, in comparison with the exponential equation of

(II-17). Charges and derivatives have been normalized to oxeffeff CLW and

oxC , respectively.

0 0.2 0.4 0.6 0.8 10

0.2

0.4

0.6

0.8

1

Vds

V'ds

V"ds

Fig. II-6. dsV ′ and

dsV ′′ defined in (II-26) for q=2 and Vdsat=0.2

Chapter II MOS Transistor Modelling for MMW Circuits

25

∞V is the saturation voltage for very large gate voltages and k is constant and Voff is constant

offset voltage. dsV ′ and dsV ′′ have been shown in Fig. II-6 for q=2. So to restrict Vds in (II-25) to

linear region we rewrite (II-25) as:

dsat

dsdsatclinc

V

VVQQ

2

20_

′′−= (II-28)

In saturation, for long channel devices Vds has no considerable effect on the channel charge.

However in the case of short channel devices the effect must be considered. For this purpose

we have used very simple model. Neglecting the charge density of pinched off part of the

channel, in comparison with the channel charge density in strong inversion we deduce:

−=

L

xLQQ lincsatc __ (II-29)

In which x is the length of pinched off part of the channel, that clearly shows the channel

length modulation effect. L is the channel length. x is a function of nodes voltages is a

function of channel charge, drain-source voltage and saturation voltage, Vdsat [40]. We have

calculated it as:

( )

0c

dsatds

Q

VVfx

−= (II-30)

Qc0 in the denominator steams intuitively from decreasing the channel length modulation with

increasing the channel charge. We found the approximation of the function f as below, off

adequate accuracy:

( ) ( )

>−+−

=

<=

dsatds

c

dsatdsdsatds

dsatds

VVQ

VVVVx

VVx

0

2

11

0

λλ (II-31)

Vdsat is the drain saturation voltage, defined in (II-27), λ1 and λ2 are constant parameters and

Qc0 is calculated from(II-23). With using dsV ′ defined in (II-26) instead of Vds, we can unify

(II_31) as:

( )

0

2

21

c

dsds

Q

VVx

′+′=

λλ (II-32)

Finally our single equation channel charge model obtained as follows:

−=

L

xLQQ lincc _ (II-33)

In which Qc_lin and x are calculated from (II-28) and (II-32), respectively.

B) Bulk Charge and Junction Capacitance Models

In the case of NMOS transistor for large negative gate voltages, the bulk charge increases

linearly with decreasing the gate voltage (being more negative). This is the accumulation

phase and starts from a special threshold that we denote it as accumulation threshold, Vac. On

the other hand for large positive gate voltages (strong inversion region) the bulk charge is

constant, at its minimum value. For the voltages between Vth and Vac the depleted region is

increased with increasing the gate voltage and hence the bulk charge decreases. However in

this phase the charge reduction rate is smaller than that of accumulation phase. These three

phases have been shown in the measurement and simulation data in different works [57], [45],

[44], [39], [15].

Based on the above three phases we have used the empirical equation as below to calculate

the bulk charge:

Chapter II MOS Transistor Modelling for MMW Circuits

26

-2 -1 0 1-0.5

0

0.5

1

1.5

2

Vgs

DerivativeCharge

Fig. II-7. Normalized bulk charge and its derivative calculated from (II-34), for n=3, Vth=0.27 and Vac=-0.5

bSIb QVCVCQ ++= 2211 (II-34)

In which C1 represents the gate-bulk capacitance for strong accumulation region, C2 is the

gate-bulk capacitance in vicinity of zero gate voltage and QbSI is the bulk charge in the strong

inversion region and approximately is zero. V1 and V2 are calculated as follows:

+−+=

+−+=

t

thgs

t

t

acgs

t

nv

VVnvV

nv

VVnvV

exp1ln

exp1ln

2

1

(II-35)

n is a constant parameter and vt is thermal voltage. Bulk charge and its derivative obtained

from (II-34) has been depicted in Fig. II-7.

The source and drain junction capacitors are calculated traditionally as in [31]: mjx

xbjxjx

VCC

+=

0

0 1φ

(II-36)

Where x denotes the drain or source nodes. mjx is a technology dependent parameter, near to

0.5. mjx can also be interpreted as )1/( +nn [58]. This equation has also been used in

BSIM4.3.0 models with slight difference.

C) Nodal Charges, Capacitances and trans-capacitances

Now we should calculate the nodes charge. Gate charge is equal to the channel charge and

depletion layer charge. However in strong inversion the depletion layer charge is negligible

and hence the gate charge is simply calculated as:

cg QQ = (II-37)

To calculate the source and drain charges, we use the charge partitioning approaches,

developed by Ward and Dutton [42]. Based on the Wards second approach, we have:

( ) cs

cd

QbQ

bQQ

−=

=

1 (II-38)

b is a function of drain source voltage. In the linear region we use b=0.5 that means 50/50

charge partitioning. In the saturation region Ward’s accurate numerical approach leads to

b=2/5 or well-known 40/60 charge partitioning. This approach has been widely used in

BSIM3, BSIM4 and many other developed models [47], [39]. Smooth transition of change

partitioning from linear to saturation has been obtained in [14] with complicated analysis.

However to uniformly change of b from 50/50 to 40/60 regimes, we calculate b as follows:

Chapter II MOS Transistor Modelling for MMW Circuits

27

0 0.2 0.4 0.6 0.8 10.8

1

1.2

1.4

1.6x 10

-14

Vd

Cgd-Model

Cgd-Des. Kit

0 0.2 0.4 0.6 0.8 10

1

2

3

4x 10

-14

Vg

Cgg-Model

Cgg-Des. Kit

Fig. II-8. Cgd and Cgg of the transistor capacitances, calculated form our model, in comparison with the foundry

design kit data

′−=

cp

ds

V

Vb tanh

10

1

2

1 (II-39)

Vcp is a constant voltage that controls the transition slope.

Having the gate, source and drain charges one can simply calculate the small signal

capacitance and trans-capacitances as follows:

j

iij

V

QC

∂= (II-40)

In which i and j stand for gate, source and drain nodes. Different capacitances have been

calculated in Appendix A. Here to evaluate our model, some of the calculated capacitances

have been shown in Fig. II-8, in comparison with the foundry design kit data.

II.2.3 Small Signal Model

The commonly used small signal model for intrinsic MOS transistor for RF applications has

been shown in Fig. II-9 [59], [60]. In this model Rg represents the small resistance due to the

distributed resistance of gate interconnects. Rg will be discussed in detail in next sections and

we will propose our new model for it. Rgs accounts for non-quasi-static nature of the channel

and will be discussed in this section. Capacitances in the model were calculated in the

previous section. gm and gds is calculated in this section using our I-V model in the previous

section. Please note that this model is only for transistor core and is too simple to be used as a

complete small signal model in MMW frequencies. In future we will describe our small signal

and Y parameter model for a complete transistor.

Before small signal analysis, the transistor’s bias condition should be calculated with DC

analysis, using the large signal model of transistor. Then the bias condition is used for

Fig. II-9. Commonly used small signal model for MOS transistor core

Chapter II MOS Transistor Modelling for MMW Circuits

28

calculating gm, gmb and gds using mathematical equations, derived from I-V model as well as

for calculating small signal capacitors.

Using (II-8) the small signal conductance and trans-conductance of the small signal model

is calculated. The small signal trans-conductance is obtained as:

∂+

∂+=

∂= ds

odod

od

eff

effox

gs

dsm V

VVV

L

WC

V

Ig

ληη

µ0 (II-41)

where η and λ have been defined in (II-10) and (II-14), respectively. Using (II-14) we have:

∂+=

od

dsat

dsatodod V

V

VVV3

2

2

1 ηηη (II-42)

Vod is the gate over-drive voltage, defined in (II-3) and Vdsat is the drain-source saturation

voltage, calculated in (II-11). Using the equation for Vdsat we obtain:

( )222

0

22

00

od

odth

od

dsat

V

VV

V

V

+

−=

φ

φ (II-43)

And using the equation for λ in (II-14) we deduce:

32

0

2

0

3

odod V

V

V λ

λλ=

∂ (II-44)

gm calculated from (II-41), has been shown in Fig. II-10 as a function of Vds for some values

of Vgs.

The small signal drain-source conductance is calculated as:

+

∂=

∂= λ

ηµ

ds

od

effox

ds

dsds

VV

L

WC

V

Ig

0 (II-45)

using the equation for η in (II-10) we obtain:

3

3

dsodds VVV

ηη=

∂ (II-46)

Consequently the small signal drain-source conductance at zero drain-source voltage is

obtained as:

( )λµ

+= 2/30

0 od

effox

ds VL

WCg (II-47)

0 0.2 0.4 0.6 0.8 1

5

10

15

20

25

30

35

40

45

50

Vds

Gm

(mS

)

DK, Vgs=0.35

DK, Vgs=0.45

DK, Vgs=0.55

DK, Vgs=0.65

MODEL,Vgs=0.35

MODEL,Vgs=0.45

MODEL,Vgs=0.55

MODEL,Vgs=0.65

Fig. II-10. gm versus Vds for various Vgs, obtained from our model, in comparison with the 90nm CMOS foundry

design kit. (On the figure, DK: Design Kit, MODEL: Our model in II-41))

Chapter II MOS Transistor Modelling for MMW Circuits

29

0 0.2 0.4 0.6 0.8 10

10

20

30

40

50

60

Vds

Gds(m

S)

DK, Vgs=0.35

DK, Vgs=0.45

DK, Vgs=0.55

DK, Vgs=0.65

DK, Vgs=0.75

MODEL,Vgs=0.35

MODEL,Vgs=0.55

MODEL,Vgs=0.65

MODEL,Vgs=0.75

0.5 10

2

4

6

0 0.2 0.4 0.6 0.8 10

1

2

3

4

5

Vds

Gm

b(m

S)

DK, Vgs=0.35

DK, Vgs=0.45

DK, Vgs=0.55

MODEL,Vgs=0.35

MODEL,Vgs=0.45

MODEL,Vgs=0.55

(a) (b)

Fig. II-11. gds (a) and gmb versus Vds for various Vgs, obtained from our model, in comparison with the 90nm

CMOS foundry design kit. (On the figure, DK: Design Kit, MODEL: Our model in II-41))

And finally the small signal source-bulk trans-conductance is calculated as:

bs

thm

bs

dsmb

V

Vg

V

Ig

∂−=

∂= (II-48)

Using the threshold voltage equation in (II-9) we obtain:

( )sbmmb Vgg 21 2γγ +−= (II-49)

Vsb is the source-bulk voltage, γ1 and γ2 are constant body effect parameters, defined in (II-

9). gds and gmb, calculated from (II-45) and (II-49), has been shown in Fig. II-11 as a function

of Vds for some values of Vgs.

II.2.3.1 Non-Quasi-Static Effect

NQS effect is considered as a consequence of the required transport time of the charges along

the channel length, from source to drain [38]. As we mentioned earlier, many complicated

models have been proposed to deal with NQS effect. However most of practical transistor

models use approximated approaches for this effect. In [61] and [40] analytic equations have

been developed to express the NQS effects on small signal model. Based on this analysis, the

small signal trans-conductance and gate capacitance is scaled as:

mbmnqsmb

mmnqsm

gg

gg

ζ

ζ

=

=

_

_ (II-50)

mζ is NQS scaling function, defined as:

( )ν

νζ

sinh=m (II-51)

In which:

( ) nqsj ωτν 31+= (II-52)

nqsτ is the NQS time constant and in the strong inversion region is calculated as:

( )sthgeff

eff

nqsnVVV

nL

−−=

0

2

µτ (II-53)

Where n is a constant parameter. For gate capacitance, the NQS scaling function has been

obtained as:

( )( )νν

νζ

sinh

1cosh −=c (II-54)

Chapter II MOS Transistor Modelling for MMW Circuits

30

Assuming 1<nqsωτ the first approximation of (II-51) and (II-54) is obtained as:

21

1

1

1

nqsc

nqs

m

j

j

ωτζ

ωτζ

+

=

+=

(II-55)

These first order approximations can be introduced in the transistor small signal model,

simply by adding a resistance in series with gate-source capacitance, as in Fig. II-9. Doing

this, from Fig. II-9 we have:

gs

nqsgs

nqsgs

m

nqsgs

nqsm

CRCj

C

gRCj

g

ω

ω

+=

+=

1

1

1

1

_

_

(II-56)

This approximation has been used in BSIM3v3 and BSIM4.3.0 models, as well as in other

models [60], [38]. Rnqs in BSIM3v3 and BSIM4.3.0 has been noted as RElmore and Rii

(Intrinsic Input Resistance), respectively and is calculated as:

cheff

eff

nqsQ

LR

εµ

2

= (II-57)

Where ε is the Elmore constant, theoretically equal to 5, µeff is the effective mobility and Qch

is the equivalent channel charge, calculated in (II-13) and (II-33), respectively. In our case

Leff is (L-x), x calculated in (II-32). It must be noted that (II-57) and (II-53) have the same

origin. This can be shown simply by substituting Qch with Cgs(Vgs-Vth), as in [4] and defining

τnqs as RnqsCgs. Equation (II-57) shows the quadratic decrease of NQS effect with decreasing

channel length. So in practical measurement of NQS effects, transistors with very large gate

length are fabricated, e.g. 300um in 0.5 um technology [60], so that the NQS effect is evident.

To give a sense about the NQS static effects in the technology used in our work, i.e. 90nm

CMOS, We have calculated ζm from (II-55), using the foundry DRM data. Fig. II-12 shows

the amplitude and phase of ζm, with respect to frequency. This figure shows that at our design

frequency, i.e. 30 GHz, NQS effects are not negligible.

108

109

1010

1011

0.9

0.95

1

1.05

Frequency (Hz)

Ma

gn

itu

de

ζ

108

109

1010

1011

-60

-50

-40

-30

-20

-10

0

Frequency (Hz)

Ph

ase

ζ (

de

gre

e)

Fig. II-12. Magnitude and phase of ζm, calculated using (II-55) and for 90nm CMOS technology

Chapter II MOS Transistor Modelling for MMW Circuits

31

II.2.4 Noise Model

As CMOS technology expands into the RF band, high frequency noise performance of MOS

transistor becomes more important and having a good noise model is an essential need. In this

context, first modeling was proposed by Van Der Ziel in 1963 in suggestion of noise in FET

transistors [62]. Then V.Z. model was proven and accepted as a successful noise model for

old CMOS technologies [63], [64], [65], [66]. Based on V. Ziel noise model, the main noise

contribution is due to the channel thermal noise, modeled as a current source between drain

and source and calculated as:

0

2

4 dnd gkTf

i⋅=

∆γ (II-58)

In which k is the Boltzmann’s constant, T is the ambient temperature. γ is a function of

device parameters and bias and its value is between 2/3 for saturation region and 1 for Vds=0.

gd0 is the channel conductance in zero drain-source voltage

The other noise mechanism in V. Ziel model is the induced gate noise, modeled as a shunt

current source parallel, calculated as:

g

nggkT

f

i⋅=

∆δ4

2

(II-59)

δ is a bias-dependent parameter and gg is the noise equivalent conductance in the gate node.

However in short channel MOS transistors this model underestimates the noise

performance and hence in many works higher values of γ have been addressed [65], [67],

[68], [69]. Chen et al. developed a scenario for measurement and extraction of MOS transistor

noise parameters, specially the gate induced noise and compared the results with V. Ziel

model. They addressed noticeable discrepancy of the V. Ziel model with the measurement

results [70].

In recent years many researches have been focused on the noise modeling in MOS

transistors. Unfortunately the obtained results are not consistent with each other. The common

note accepted by all reports is that the main noise contribution is due to the channel thermal

noise, as claimed by V. Ziel [71], [72]. Also it was accepted that the gate induced noise is not

important for frequencies below much lower than the transistor cutoff frequency, fT (fT/f > 10)

[72], [73]. Many complicated models have been derived from physical analysis of the channel

charge and current. Some of these models express the excess noise (in comparison with V.

Ziel model) is due to the velocity saturation and hot electron effects in deep submicron

devices [74], [75]. In contrast, some other works declaimed this theory and presented different

ideas. Scholten et al. found that the experimental data can be explained with considering the

noise only in the Gradual Channel Region (GCR) (see Fig. II-13) and hence it not necessary

to deal with the high-filed effects at high Vds [76]. Goo et al. presented a simulation based

technique and showed that the main noise contribution comes from GCR and hence has the

ohmic nature [77]. Some other works considered both of GCR and VS (velocity saturation)

region, as well as channel length modulation [77]. In [71] a physical based compact noise

model was developed with treating the channel as a serious of infinitesimal resistors. Chen et

al. In [78] claimed that the excess noise is due to CLM, not the velocity saturation, because

electrons in VS region has not the ability of random moving.

Induced gate noise has not been considered in BSIM models, prior to BSIM4. The noise

model used in BSIM4 is based on the model in [77]. BISM4 noise model was studied in [79]

and it is shown that this model may leads to erroneous results, in the case of induced gate

noise. In [80] has been shown experimentally that BSIM4 noise model is not accurate in for

90nm CMOS technology, in 1.0GHz to 18GHz, but good agreement was achieved after

Chapter II MOS Transistor Modelling for MMW Circuits

32

adding a frequency-dependent noise source in the gate, as in V. Ziel model. PSP model uses

the improved Klassman Prins equation in modeling the channel thermal noise. This model has

specially developed for sub-0.1um technologies and has been accepted by CMC2 as standard

MOS transistor model [81]. PSP noise model comprises the induced gate noise and velocity

saturation effects. Experimental results in [82] show significant increase of the noise with

increasing the drain voltage, in the case of 70nm CMOS technology. The authors explained

that this is due to the CLM and increasing the short channel effect. Other noise sources such

as the shot-noise due to the impact ionization have been considered in noise modeling [72].

In contrast to the complicate models, presented in recent years, V. Ziel model, although

underestimates the noise parameters, but have very good prediction of the noise behavior of

sub-0.1um technologies [71]. This can be deduced from the measurement results in [70] for

0.18um technology, in [80] for 90nm technology and in [82] for 70nm technology. The

measurement results in [70] shows that the frequency-dependent behavior of the channel

thermal noise, the induced gate noise and their correlation coefficient is very near to that of V.

Ziel model. The measurement results in [80] shows that adding V. Ziel idea to the BSIM4

model leads to an accurate noise model. The results in [82] reveal significant discrepancy

between V. Ziel model and the measured data, however they have used fixed value for γ in

V. Ziel model and instead have corrected the error with an extra voltage-dependent resistor.

This is exactly equal to defining γ as a function of drain-source bias voltage. Using proper

bias-dependent value for γ , very good agreement with the experimental results has been

obtained, in the case of 0.18um technology [83].

Beside this, due to its simplicity, V. Ziel model has been widely used in getting insight to

the noise behavior of different circuits via mathematical analysis [40], [84], [85].

Consequently we have used V. Ziel model, with defining proper equations to express the

bias dependency of noise parameters to capture short channel effects, and using our I-V model

to calculate the channel conductance. In summary the noise model is as follows:

The drain current noise is calculated as:

0

2

4 dnd gkTf

i⋅=

∆γ (II-60)

Where gd0 is the drain-source conductance at zero Vds and is calculated from (II-47). γ is

bias dependent noise parameter. The original bias dependency of γ has been derived by V.

Ziel for long channel devices and has been used in [83] for 0.18um technology. However

based on the measurement results in [70] we have defined an empirical function as below:

Fig. II-13. Dividing the saturated channel to Gradual Channel Region (GCR) and Velocity Saturation region

(VSR) [72].

2 Compact Model Concile

Chapter II MOS Transistor Modelling for MMW Circuits

33

dsat

dsatds

V

VV22 +

= κγ (II-61)

where κ is a constant parameter and Vdsat is the saturation voltage, calculated in (II-27). Based

on this representation the channel noise increases linearly with Vds for Vds >>Vdsat and this

corresponds to the measurement results in [82] for 70nm technology. Finally the induced gate

noise is calculated as:

3/44

2

=⋅=∆

δδ g

nggkT

f

i (II-62)

in which:

0

22

5 d

gs

gg

Cg

ω= (II-63)

Drain noise and induced gate noises have physically same origin and hence are correlated. As

calculated by V. Ziel in the case of long channel device, and proven with measurement results

in [70] for short channel devices, the correlation coefficient is pure imaginary and frequency

independent:

395.0

22

*

j

II

IIc

ndng

ndng

=

=

(II-64)

II.3 Distributed Analysis When the frequency increases up to a certain limit, distributed model of transistor should be

considered. The limit of frequency depends on the length of different conducting objects in

the MOS transistor structure, in comparison with the wavelength in that object. It is

emphasized that different objects of the MOS structure have different wave propagation

characteristics and hence the related wavelength in different.

The most susceptible part of a MOS transistor to the distributed effects is its gate, due to

high resistance and high capacitance. Channel resistance and gate capacitance causes a delay

on propagating the charges along the gate length. This is the well known non-quasi static

effect that has been modeled in earlier studies as a distributed RC network [86], [87]. On the

other hand high resistance of the gate finger, coupled with the high gate capacitance reveals

slow wave along the gate width and hence the distributed modeling should be used to

accurately calculate the gate admittance, as well as the transistor trans-conductance and noise

performance, leading to the distributed transistor model.

Distributed nature of a MOS transistor has been considered in many works. In [88] the

effect of gate resistance noise was analyzed, considering RC distribution along the gate width.

In this work a ladder network obtained by treating the single transistor as a cascade of some

small transistors via gate resistances. Razavi et al. investigated the effect of distributed gate

resistance on fT and fmax of MOS transistor [59]. They used the same approach, as in the

previous work and showed that the effective gate resistance is about 1/3 of the actual gate

finger resistance. In [89] transmission-line treatment and analysis has been used in

development of a high frequency small signal and noise model. In our knowledge this model

is the most accurate distributed model for MOS transistors. However this model is useful for a

single finger transistor and is not sufficient for modeling of multi-finger transistors. On the

other hand we will show that such complicated model is not necessary for a very small single

finger transistor.

Chapter II MOS Transistor Modelling for MMW Circuits

34

In this section we analyze and discus the distributed effect in the gate resistance, aiming to

find:

� Maximum frequency up to which, conventional lumped model can be used.

� Beyond this frequency, can the lumped model be corrected to capture the distributed

effects?

We will show that for optimum gate fingers in sub-0.1um technologies, conventional

lumped element model can be used beyond the possible frequencies for MOS transistors. In

addition, for some special applications the lumped element model can be used with modified

element values, obtained from our analysis.

II.3.1 Distributed Model

The distributed model concept has been demonstrated by Fig. II-14. In this figure whole

transistor has been broken down to infinitive number of infinitesimal transistors, denoted by

δM. Each infinitesimal transistor corresponds to the infinitesimal width of gate, denoted by

δx. Using this distributed representation, we deduce the distributed small signal model, shown

in Fig. II-15. Ygd is composed of the intrinsic Cgd and all of resistive-capacitive parasitics

between the gate and drain fingers. Ygs is a RC network composed of the gate-source intrinsic

capacitance, as well as the overlap and parasitic capacitances and the Elmore resistance,

representing the non-quasi-static effect, calculated in (II-57). Yds is composed of the total

capacitance between drain and source fingers (intrinsic and parasitics) and the drain-source

conductance. As a simple approximation one may use:

gsgs

gdgd

nqsgs

gs

gs

gY

CjY

RCj

CjY

=

=

+=

ω

ω

ω

1

(II-65)

Assuming that the transistor has been distributed homogeneously along the gate, the elements

in distributed model are calculated as follows:

xW

YY

xL

xW

RRx

W

YY

xW

YYx

W

gg

gs

gs

pge

geds

ds

gd

gdm

m

δδ

δρ

δδδδ

δδδδ

=

===

==

(II-66)

Fig. II-14. Demonstration of the distributed effect in a MOS transistor

Chapter II MOS Transistor Modelling for MMW Circuits

35

Fig. II-15. Equivalent small signal representation for distributed model of MOS transistor

Rge is the gate electrode resistance, calculated as:

L

WR

p

ge

ρ= (II-67)

where W is the gate width, L is the gate length and ρp is the gate poly silicon sheet resistance.

Note that Rge is different from Rg that is used in the small signal lumped model, as will be

described later.

The circuit of Fig. II-15 is described by a second order differential equation (See Appendix

B). Solving this equation we obtain the voltage and current along the gate as:

( ) ( )sgsdgd

pxxVYVY

WLeVeVxV +++= −−+

2

..

κ

ρκκ (II-68)

( ) ( )xx

p

eVeVL

xI .. κκ

ρ

κ −−+ −=

In which:

( )gsgd

pYY

WL+=

ρκ (II-69)

ρp is the gate poly silicon sheet resistance. V+ and V- are found from the boundary conditions

for the differential equation. To find the boundary conditions, we consider two possible ways

of gate finger connection, i.e. connection to single end of the gate finger (single connection),

or connection to the both ends (double connection). For single connection gate finger the

required boundary conditions are:

( )

( ) 0

0

=

=

=

=

Wx

gx

xI

VxV (II-70)

And the required boundary conditions for double connection case are:

gWx

gx

VV

VV

=

=

=

=0 (II-71)

Using these boundary conditions one can solve (II-68) to obtain V(x) and then the currents

into the transistor nodes are calculated. Consequently Y parameters are calculated.

For single connection gate Y parameters are as follows (See Appendix B for details):

Chapter II MOS Transistor Modelling for MMW Circuits

36

( ) ( )W

WYYY gsgd

κ

κtanh11 +=

( ) ( )W

WYgY gdm

κ

κtanh21 −= (II-72)

( ) ( )W

WgYY mgs

κ

κtanh31 +−=

( )W

WYY gd

κ

κtanh12 −=

( ) ( ) ( )dsgdgdm

gsgd

gdYY

W

WYg

YY

YY ++

−−

+=

κ

κtanh122

( ) ( )dsgsm

gsgd

gdY

W

WYg

YY

YY −

−+

+−=

κ

κtanh132

( )gsgs Y

W

WYY −

−=

κ

κtanh113

( ) ( )mds

gsgd

gdm

gs gYW

W

YY

YgYY +−

+

−=

κ

κtanh123

( ) ( )mdsgs

gsgd

gsm

gs gYYW

W

YY

YgYY +++

+

+−=

κ

κtanh133

The equations for Y11, Y12, Y21 and Y22 are similar to that of [89].

For double connection gate Y parameters are as follows (See Appendix B for details):

( ) ( )( )

−+=

WW

WYYY gsgd

κκ

κ

sinh

1cosh211

( ) ( )( )

−−=

WW

WYgY gdm

κκ

κ

sinh

1cosh221 (II-73)

( ) ( )( )

−+−=

WW

WgYY mgs

κκ

κ

sinh

1cosh231

( )( )

−−−= 1

sinh

1cosh212

WW

WYYY gdgd

κκ

κ

( )( )

( )dsgd

gsgd

gdm

gd YYWW

W

YY

YgYY ++

+

−−= 1

sinh

1cosh222

κκ

κ

( )( ) ds

gsgd

gsm

gd YWW

W

YY

YgYY −

+

+= 1

sinh

1cosh232

κκ

κ

( )( ) gsgs Y

WW

WYY −

−−= 1

sinh

1cosh213

κκ

κ

( )( )

( )mds

gsgd

gdm

gs gYWW

W

YY

YgYY +−

+

−−= 1

sinh

1cosh223

κκ

κ

Chapter II MOS Transistor Modelling for MMW Circuits

37

( )( )

( )mdsgs

gsgd

gsm

gs gYYWW

W

YY

YgYY +++

+

+= 1

sinh

1cosh233

κκ

κ

To validate the accuracy of results, we have simulated the distributed model of Fig. II-15

in ADS, using the foundry design kit data for 90nm CMOS technology. A single transistor

with W=15um has broken to 100 sections, as in Fig. II-15. The resulted Y parameters have

been compared with the Y parameters obtained from our analysis and that of the lumped

model, described in the next section. Y11, Y12 and Y21 have been shown in Fig. II-16 and Fig.

II-17 shows Y13, Y23 and Y33.

II.3.2 Comparison With Lumped Model

The lumped small signal counterpart of the distributed model in Fig. II-15 has been shown in

Fig. II-18. In this figure Rg is the effective gate resistance, calculated as [90]:

LN

WR

f

fp

g3

ρα= (II-74)

0 20 40 60 80 1000

0.5

1

1.5

2

Ima

g P

art

of Y

11

(m

S)

0 20 40 60 80 1000

0.5

1

1.5

2

Re

al P

art

of Y

11 (

mS

)

0 20 40 60 80 100-0.5

-0.4

-0.3

-0.2

-0.1

0

Frequency (GHz)

Ima

g P

art

of Y

12

(m

S)

0 20 40 60 80 100-0.5

-0.4

-0.3

-0.2

-0.1

0

Frequency (GHz)

Rea

l P

art

of Y

12

(m

S)

0 20 40 60 80 100-10

-8

-6

-4

-2

0

Ima

g P

art

of Y

21

(m

S)

0 20 40 60 80 1000

5

10

15

20

Rea

l P

art

of Y

21

(m

S)

Lumped Model

ADS Simulation

Distributed Model

Lumped Model

ADS Simulation

Distributed Model

Lumped Model

ADS Simulation

Distributed Model

Lumped Model

ADS Simulation

Distributed Model

Lumped Model

ADS Simulation

Distributed Model

Lumped Model

ADS Simulation

Distributed Model

Fig. II-16. Y11, Y12 and Y21 obtained from lumped model and distributed model, in comparison with the

simulation in ADS for 90nm CMOS technology

Chapter II MOS Transistor Modelling for MMW Circuits

38

0 20 40 60 80 100-1.5

-1

-0.5

0

Re

al P

art

of Y

13

(m

S)

0 20 40 60 80 100-1.5

-1

-0.5

0

Ima

g P

art

of Y

13

(m

S)

0 20 40 60 80 100-20

-15

-10

-5

Rea

l P

art

of Y

23

(m

S)

0 20 40 60 80 1000

2

4

6

Ima

g P

art

of Y

23

(m

S)

0 20 40 60 80 1005

10

15

20

Frequency (GHz)

Re

al P

art

of Y

33

(m

S)

0 20 40 60 80 100-6

-4

-2

0

2

Frequency (GHz)

Ima

g P

art

of Y

33

(m

S)

Lumped Model

Distributed Model

ADS Simulation

Lumped Model

Distributed Model

ADS Simulation

Lumped Model

Distributed Model

ADS Simulation

Lumped Model

Distributed Model

ADS Simulation

Lumped Model

Distributed Model

ADS Simulation

Lumped Model

Distributed Model

ADS Simulation

Fig. II-17. Y13, Y23 and Y33 obtained from lumped model and distributed model, in comparison with the

simulation in ADS for 90nm CMOS technology

Fig. II-18. The lumped small signal model, counterpart of the distributed model in Fig. II-15

In which ρp is the gate poly-silicon sheet resistance, Wf and L are the gate finger width and

length, respectively, Nf is the number of fingers. α is a coefficient equal to 1 for single

connection gate finger and 4 for double connection. This equation has been used in many

reported works and in BSIM4.3.0 model with small modifications [40], [91]. Divide by 3 in

(II-74) is due the distributed effect of the gate finger resistance, in conjunction with gate

capacitance, in low frequencies. This has been derived in Appendix C.

To compare the distributed model of Fig. II-15 with its lumped counterpart in Fig. II-18, we

have defined an error measure, named Distributive Effect Error (DEE) as:

Chapter II MOS Transistor Modelling for MMW Circuits

39

∑∑= =

−×=

3

1

3

1

100i j

D

ij

D

ij

L

ij

ijY

ijYijYDEE (II-75)

Where L

ijY and D

ijY are Y-parameters of the lumped and distributed models, respectively. This

measure has been calculated for some values of gate width, in our 90nm CMOS technology,

and has been depicted in Fig. II-19. This figure reveals two important notes:

� The distributive effect is reduced with double connecting the gate finger. For small values

of W, DEE for single connection with gate width of 2W is equal to that of double

connection with gate width of W. This is very important, since the designer can choose the

gate finger width for double connection case, twice of that of the single connection. These

halves the gate pad length (See the next section) and hence halves the pad parasitic

capacitance.

� For small widths of gate finger the distributive effect is negligible and hence the lumped

model can be used. For example, in Fig. II-19-b, for W=2um DEE is less than 0.02% at

30GHz. On the other hand, practically there is an optimum value of gate finger width that

minimizes the noise figure and the optimum Wf in 90nm technology is about 2um [92].

Consequently in our work distributed model is not required.

II.4 Layout Issues

In our knowledge even modern RF-CMOS design kits have been designed for the frequencies

well below the millimeter wave frequency band. So for the MMIC’s in such frequencies, the

designer should have the ability to develop own design tool, based on him or her knowledge

to integrate many high frequency effects together with the foundry design kit tools and data.

In the case of our work the problem is more sever, since the technology we have used, and the

related foundry design kit is digital process, it does not have any proposition for the high

frequency effects, as well as layout of MOS transistor for RF applications. So we should

design the transistor layout, as apart of our works.

The first issue in the MOS transistor layout is the gate structure. In contrast with digital

circuits, in which transistors are normally designed with the minimum size, in analog circuits

large W/L is required. Specially in RF applications large W/L is necessary to achieve the

required trans-conductance. A transistor with large W/L can not be laid out as simple gate,

due to performance reduction for long gate and some technological restrictions [40].

Consequently special layout issues must be considered. The most commonly used

configuration in the design of RF IC’s is the multi-finger layout [40], [92]. However other

gate structure, namely Waffle structure, has been presented and discussed [91], [93]. Two

types of Waffle (WF) structure, i.e. Manhattan Gate (MG) and Manhattan Interconnect (MI)

have been depicted in Fig. II-20. Two different implementation of Multi-Finger (MF) gate

structure have been shown in Fig. II-21. The detail of multi finger structures will be described

in the next section.

� Multi-finger structure offers low gate resistance and simple design and parasitic extraction.

The main problem of this structure is that increasing the number of fingers causes more

parasitic effects. The parasitic effect mainly arises from coupling between the gate pad (to

integrates the fingers outside the active area) and the substrate, as well as the drain-gate

and (or) source-gate overpasses [93], [92]. The main advantage of WF structure is its

compactness. In [93] better noise figure have been reported for this structure in below

10GHz, in comparison with MF structure. Nonetheless WF is not a known gate structure in

CMOS RF design. It may be useful in analog designs in which many transistors are used.

In our knowledge, the most important problem with this structure is its modeling issues

Chapter II MOS Transistor Modelling for MMW Circuits

40

100

101

102

10-10

10-5

100

105

Frequency (GHz)

Dis

trib

utiv

e E

ffe

ct E

rro

r (%

)

W=15um

W=10um

W=5um

W=1um

W=2um

100

101

102

10-10

10-5

100

105

Frequency (GHz)

Dis

trib

utiv

e E

ffe

ct E

rro

r (%

)

W=1umW=2um

W=5um

W=10um

W=15um

(a) (b)

Fig. II-19. Distributive effect error measure, defined in (II-75), for various values of gate width, W(a) for single

connection and (b) for double connection

and increased and complicated parasitic effects, specially in higher frequencies. Most of

available MOS transistor models like BSIM3 [23] and BSIM4 [24] uses Quasi-Two-

Dimensional (QTD) assumption, that is deviated in WF structure. Due to the following

reasons, we have chosen the multi-finger gate structure in our layout:

� The models available on the foundry design kit is for multi-finger gate structure

� Parasitic effects modeling is very complicate in WF gate structure

Accurate parasitic effects modeling is very important in our design

II.4.1 Proposed Layout

Four different approaches for laying out the MOS transistor with multi-finger gate structure,

has been depicted in Fig. II-22 to Fig. II-25. In Fig. II-22 and Fig. II-23 single connection gate

has been used and Fig. II-24 and Fig. II-25 single connection gate has been implemented.

For equal finger width, the single connection strategies leads to higher gate resistance , but

decreases the other parasitic effects, in comparison with the double connection gate structure.

For example, in the case of single connection gate, the capacitive coupling between the gate

pad and substrate is half of that of the double connection gate. Also the gate-drain parasitic

capacitance in single connection gate is lower than double connection structure, in

consequence of overpass of drain fingers in case of double connection. Consequently for the

applications in which the gate resistance is not so important, the single connection is

preferred. However the above discussion is true for equal finger number. If the designer aim

to achieve a certain value of gate resistance for a given value of transistor gate width, W, then

based on (II-74) finger width (Wf) of double connection structure will be 4 times of single

connection structure. So we have: sc

f

dc

f WW 4= (II-76)

Super-scribes dc and sc denote for double and single connection respectively. Also we have: dc

f

sc

f NN 4= (II-77)

Then the length of gate pad is calculated as:

dc

fit

dc

gpad

sc

fit

sc

gpad

NLL

NLL

2=

= (II-78)

And simply we deduce: dc

gpad

sc

gpad LL 2= (II-79)

Chapter II MOS Transistor Modelling for MMW Circuits

41

Sou

rse

(Metal1)

Sourse

(Metal1)

Sourse

(Metal1)

Drain

(Metal1)

Drain

(Metal1)

Sours

e

(Meta

l1)

Sours

e

(Meta

l1)

Sours

e

(Meta

l1)

Dra

in

(Meta

l1)

Dra

in

(Meta

l1)

Gate (P

oly)

(a) (b)

Fig. II-20. Manhattan Gate (a) and Manhattan Interconnect (b) implementation for MOS transistor layout.

(Reproduced from [91])

Sours

e

(Meta

l1)

Sours

e

(Meta

l1)

Dra

in

(Meta

l1)

Dra

in

(Meta

l1)

Active A

rea

Sours

e

(Meta

l1)

Sours

e

(Meta

l1)

Dra

in

(Meta

l1)

Dra

in

(Meta

l1)

Active A

rea

Fig. II-21. Single connection (a) and double connection (b) gate layout for MOS transistor

Guard

Rin

g (M

eta

l1)

Fig. II-22. Single connection multi finger gate structure, with guard ring close to the transistor core

Chapter II MOS Transistor Modelling for MMW Circuits

42

Fig. II-23. Single connection multi finger gate structure, with guard ring far from transistor core

Fig. II-24. Double connection multi finger gate structure, with guard ring close to the transistor core

Fig. II-25. Double connection multi finger gate structure, with guard ring from transistor core

Chapter II MOS Transistor Modelling for MMW Circuits

43

In addition, reduced number of gate fingers, reduces the drain/source overpasses and this also

reduces the parasitic capacitances. The other important note is distributive effects. As we

analyzed in the previous section, the distributed effects in double connection structure are

significantly lower than that of single connection structure. Consequently we have chosen the

double connection structure in our design.

The difference between Fig. II-24 and Fig. II-25 is in their guard ring. In Fig. II-24 the

substrate resistance is less than that of Fig. II-25, but the parasitic capacitance of source pad

with the guard ring is high, due to the source fingers overpass. So choosing the proper one

depends on the importance of these effects. This is exactly similar in the case of Fig. II-22, in

comparison with Fig. II-23. Accurate comparison of different layouts needs complicated

analysis and simulation. However we found that the layout of Fig. II-25 is better than Fig. II-

24 for LNA in our work.

II.5 Our Comprehensive Model Our model basis is treatment of each gate finger as a separate transistor, and then connecting

them to form the complete model of the multi finger transistor, considering all off the layout

dependent parameters. The layout of the complete transistor is also broken to the layout of

partial transistors. Hereafter we denote the partial transistors as ∆M. Most of the layout

dependent parameters are included in the partial transistor model, and some of them are

comprised in the multi finger model. Partial transistor model is derived from our I-V model,

capacitance model, noise model, small signal model, as well as physical layout issues. Each

partial transistor is composed of an intrinsic transistor, parasitic elements and substrate model.

The intrinsic part, itself is composed of the small signal model of Fig. II-9, beside some

parasitic capacitors.

To form the complete transistor, either in layout or in model, partial transistors are

cascaded via resistances, capturing the gate pad resistance. Finally the interconnections model

is added.

II.5.1 Partial Transistor Model

The layout of a partial transistor and related small signal and noise model has been shown in

Fig. II-26. This layout is one section of the final layout of Fig. II-25. To be able to model the

double-end connection effect, we divide this transistor into two similar parallel transistors and

denote each half transistor with ∆M/2. Note that physically this is not possible, because drain

and source pads are not symmetrical with respect to the vertival symmetry line in Fig. II-26,

however this is possible as a hypothetic model.

As we noted earlier, the partial transistor model is composed of three sections: one intrinsic

MOS transistor model, a set of parasitic elements related to the intrinsic transistor and a set of

extrinsic layout dependent parasitic elements. The intrinsic transistor small signal model is as

Fig. II-9, except for the gate resistance. Here we will analyze partial transistor to develop a

small signal and noise model and derive proper equations to calculate the model elements.

One important note is that the modeling is a trade between accuracy and complexity. Many

complicated model can give high accuracy, but it will be inefficient in simulation. Also the

extractability of model elements should be considered in developing model.

Chapter II MOS Transistor Modelling for MMW Circuits

44

Guard Ring

Guard Ring

Gate Pad

Gate Pad

Source Pad

Drain Pad

WGR

WSP

WGP

WGP

WDP

WGR

WF

LF

SGRS

SGS

SGD

SGRD

LPT

Fig. II-26. the layout of the partial transistor

II.5.1.1 Drain/source resistance

Source and drain resistances are composed of two sections: one is bias independent contact

and diffusion resistance (drain/source sheet resistance) and the other is bias dependent

Source/Drain Extension (SDE) resistance. In BSIM3 these resistors have been considered as a

part of I-V characteristics, but in BSIM4 have been modeled as external asymmetric

resistances for source and drain. Since the foundry design kit we have used is based on

BSIM3 model, we does not need incorporate drain/source resistances in our model. In this

case the drain/source resistance is a hidden resistance and is not seen in AC simulation [94].

However this reduces the accuracy, since some of the parasitic capacitive couplings to the

internal drain/source node does not see this resistance and some others see it.

Drain and source resistances have been depicted in Fig. II-27. As in this figure, the

drain/source resistance is composed of contact resistance, salicide resistance, and SDE

resistance. The contact resistance is dominated by the salicide-SDE contact. In [40] simple

equation have been proposed for these resistances.

Fig. II-27. source/drain resistance representation for a short channel MOS device [40]

Chapter II MOS Transistor Modelling for MMW Circuits

45

II.5.1.2 Parasitic capacitances

Parasitic capacitances are divided into two main categories: parasitic capacitors in intrinsic

part and parasitic capacitors in extrinsic section. In the intrinsic part, parasitic capacitors are

among the gate, source and drain fingers. In the extrinsic section parasitic capacitors are

between gate pad and source/drain pad, as well as guard ring.

Parasitic capacitances in the intrinsic part, as depicted in Fig. II-28 [51], are three types:

One is the capacitance between the top of gate finger and the upper section of sidewall of

source/drain finger and related contacts (Ctop in Fig. II-28). The other is the capacitance

between the gate finger sidewall and lower section of sidewall of source/drain finger (Cside in

Fig. II-28). The third capacitor is due to the field fringing from gate sidewall to the

source/drain surface (Cf in Fig. II-28).

Conformal mapping is a powerful method, conventionally used for calculation of

capacitances in coplanar and parallel plate and strips, assuming quasi static condition [95].

Basis of this method is transformation of a complicated curve, representing the cross section

of a physical structure, into a simple shape in other plane, so that the new shape can be simply

analyzed to calculate the capacitance. This method has been used in calculation of gate

fringing capacitance and interconnection models in integrated circuits, with different

transforming function [51], [96], [97]. Base on conformal mapping from elliptical coordinate

system to a linear coordinate system, in [51] a closed form equation has been derived to

calculate the gate fringing capacitance:

( )2

11

2

2201

M

sp

fM

MM

WKC

−−=

π

εβ (II-80)

In which β1 is a fitting parameter, W is the gate width, ε0 is the free space permittivity and Ksp

is the relative permittivity of the material between gate and source/drain. M is defined as:

ox

sp

t

LM = (II-81)

tox is the oxide thickness and Lsp has been shown in Fig. II-28. However the gate fringing

capacitance is comprised in BSIM3v3 and hence we does not need to incorporate it separately

in our model. In BSIM3v3 this capacitance is modeled as [23]:

+=

ox

polyoxf

t

tC 1ln

2

π

ε (II-82)

Ctop in Fig. II-28 has been calculated in [51] as:

Gate

poly

P-well

Ctop L/2

tox

tp

Lsp

Cside

Cf

Source Drain

Csdf1

Csdf2

Source/drain

finger

contact

Drain/source

finger

contact

Tm

Lsdf

Fig. II-28. Parasitic capacitances in intrinsic part of the partial transistor [51]

Chapter II MOS Transistor Modelling for MMW Circuits

46

+=

sp

topeff

topL

LKWC

21ln

2 02

π

εβ (II-83)

Where β2 is a fitting parameter, Weff is the effective length of the source/drain finger,

considering the space between contacts, and Ktop is the relative permittivity of the dielectric

material on top of the gate finger. Cside in Fig. II-28 is simply calculated as:

−=

sp

pox

speffsideL

ttKWC 03 εβ (II-84)

where β3 is a fitting parameter and tp is the poly thickness. The capacitance Csdf1 in Fig. II-28

is calculated using the analysis in [96]:

+=

sdf

sdftop

sdfS

LWKC 1ln

0

21π

εβ (II-85)

Ktop is the relative permittivity of the dielectric material on top of the source/drain finger, β2 is

as in (II-83) and Lsdf and Ssdf have been shown in Fig. II-28. Finally the capacitance Csdf2 in

Fig. II-28 is calculated as:

=

sdf

mtopsdf

S

TWKC 032 εβ (II-86)

Extrinsic parasitic capacitances have been demonstrated in Fig. II-29, that is vertical cross

section of the partial transistor structure in Fig. II-26. These capacitances are due to the

coupling between gate pad, source/drain pad and guard ring. We will use the closed form

equation presented in [96] , after small modification, to calculate the capacitances. Note that

all of the calculated capacitances are per-unit-length values.

The capacitance between top of the source/drain pad and top of the guard ring (Crsd1 in Fig.

II-29) is calculated as:

+=

prsd

avrsd

S

WKC 1ln01

11π

εγ (II-87)

γ1 is a fitting parameter, K1 is the dielectric constant of the dielectric above the pads, Sprsd is

the space between the guard ring and source/drain pad. Wav is the average width of the guard

ring and source/drain pad. The capacitance between top of the source/drain and gate pads

(Cgsd1 in Fig. II-29) is calculated as series of two capacitors, 1gdsC′ and 1gdsC ′′ that are calculated

as:

STI STIP+

P-well

guard

ringSource

/drain

Crsd1

Crsd2

Crsd3

Cgsd1

Cgsd2

Cgsd3

Crg

STISTI P+

Source

/drain

Wpr

Spgsd

gate

Tm

guard

ring

Wpsd

Wpg Sprsd

Hm

Tpol

Fig. II-29. Parasitic capacitances between gate, sorce/drain and guard ring pads (extrinsic part of the partial

transistor)

Chapter II MOS Transistor Modelling for MMW Circuits

47

mm

pg

eqrsd

pgsd

aveq

rsd

HT

WKC

S

WKC

+=′′

+=′

01

0

11 1ln

ε

π

εγ

(II-88)

Where Wav is the average width of the source/drain and gate pads, γ1 is as previous equation,

Keq is the effective dielectric constant of the dielectric material on top of gate pad. Wpg, Tm and

Hm have been shown in Fig. II-29. The capacitance between the sidewall of source/drain pad

and the top of gate pad (Cgsd2 in Fig. II-29) is calculated from [51] with small modification:

++=

pgsd

mpgeq

gsdS

TWKC

21ln

2 02

εβ (II-89)

β2 is the same as (II-83),Keq is the same as (II-88), Wpg, Tm and Spgsd have been shown in Fig.

II-29.

Cgsd3 in Fig. II-29 is calculated using (II-89), replacing Keq, Wpg and Tm with K3, Wpsd and Tpoly

, respectively. K3 is the dielectric constant of the dielectric material above gate and under

source/drain pads. Wpsd and Tpoly have been shown in Fig. II-29. Crsd3 in Fig. II-29 is calculated

using (II-89), replacing Keq, Wpg, Tm and Spgsd with K3, Wpsd, Hm+Tpoly and Sprsd, respectively.

K3 is the dielectric constant of the dielectric material above gate and under source/drain pads.

Wpsd and Tpoly , Hm and Sprsd have been shown in Fig. II-29. Crg in Fig. II-29 is very small and

we neglect it and finally Crsd2 is calculated simply:

prsd

mrsd

S

TKC 022 ε= (II-90)

Considering all of the calculated capacitances, we have the equivalent circuit of Fig. II-30 for

the parasitic capacitances. In this figure gi, di and si are gate, drain and source nodes of

intrinsic transistor, respectively. Cxy_pe and Cxy_pi denote the total parasitic capacitance

between nodes x and y (x and y stands for gate, source, drain and guard ring), in the extrinsic

and intrinsic parts, respectively. The capacitors in this model are calculated based on our

previous calculations, as follows:

pegspegd

gsdgsdgsdpegs

CC

CCCC

__

321_

=

++= (II-91)

Fig. II-30. Equivalent circuit model for parasitic capacitances of the partial transistor

Chapter II MOS Transistor Modelling for MMW Circuits

49

STIusw

usw

STIuaw

uaw

T

T

ρσ

ρσ

1

1

=

=

(II-94)

uawρ and uswρ are sheet resistance of the under active and under STI p-well, respectively.

Lateral resistances in Fig. II-32 are calculated as:

PT

GRGRSuawb

PT

SPGSGPuswb

PT

f

uawb

L

WSR

L

WSWR

L

WR

2/

2

2

2

1

+=

++=

=

ρ

ρ

ρ

(II-95)

The capacitances in Fig. II-32 are calculated as:

Fig. II-31. Various substrate modeling techniques: single resistor [99] (a), three-resistor [40] (b) and five-resistor

[24] (c)

Guard

Rin

g

Guard

Rin

g

Gate

Pad

Gate

Pad

Sourc

e P

ad

Dra

in P

ad

WG

R

WS

P

WG

P

WG

P

WD

P

WG

R

WF

LF

SG

RS

SG

S

SG

D

SG

RD

LP

T

Fig. II-32. Substrate electrical model for the partial transistor in Fig. II-26

Chapter II MOS Transistor Modelling for MMW Circuits

50

STI

PTSPSTI

m

PTSPd

bdpbsp

STI

PTGPSTIbgp

T

LWKC

H

LWKC

CC

CCCC

T

LWKC

02

01

21

21

0

ε

ε

ε

=

=

+==

=

(II-95)

In which KSTI and Kd are the dielectric constants of STI layer and the dielectric above STI,

respectively. ε0 is the free space permittivity.

The substrate model in Fig. II-32 can be represented as a RC network, as shown in Fig. II-

33. This circuit is very complicated to be analyzed and increases four extra nodes to the

transistor small signal model in Fig. II-18. Consequently it is not suitable for our simple

design tool. To simply the circuit, meanwhile preserving the accuracy, we have assumed that

extrinsic gate, source and drain nodes, (b, g and d in Fig. II-33), have approximately equal

voltage with the intrinsic ones (bi, gi and di in Fig. II-33). Using this approximation we obtain

the equivalent substrate Y model, as in Fig. II-34. As this figure shows with the simplified

model, there is not any extra node in the transistor model circuit, in comparison with Fig. II-

18.

Fig. II-33. Proposed substrate network as a RC circuit, derived from Fig. II-32.

Fig. II-34. Simplified Y-parameter model for substrate model circuit of Fig. II-33

Chapter II MOS Transistor Modelling for MMW Circuits

51

The Y parameters for this figure is calculated as follows. For detail see Appendix D.

( )( )

( )( )

( )

( )( )

( )( ) bi

g

dbi

bbbbbi

bgbpbibbg

b

bdbp

sgdg

bi

sdbi

b

sbpdbp

bbbbbi

sbpbbibbs

b

bdbp

ds

bi

g

gbidbi

b

bdbp

gbp

bbbbbi

bgbpbibbg

gbigbpg

bi

g

dbi

bbbbbi

bgbpbibbg

b

bdbp

dbidbpsd

yggyy

yyyg

y

gyyy

yy

yy

ggyy

ygyg

y

gyy

yyy

gyy

ggyy

yyygyyy

yggyy

yyyg

y

gyyyyy

λ

λ

λ

λλ

λ

λ

λ

λλ

λ

λ

λ

λλ

λ

λ

λ

λλ

−−

+−=′=′

−−−

+−=′

−+

+−

+++=′

+−

+++=′=′

2221

221

2

2

22221

221

2

2

2

2

2221

221

2221

221

2

2

22

(II-96)

In which:

sbibbsbibbsbpbbs

dbibbdbibbdbpbbd

gbibbgbibbgbpbbg

bbbbibbbibbbi

yggyyyygg

yggyyyygg

yggyyyyyg

gygyggyyy

222121

222121

222121

1212221

−+=

−+=

−+=

−−=

λ

λ

λ

λ

(II-97)

And:

xy

xyR

g1

= (II-98)

II.5.1.4 Final model for partial transistor

Final model of the partial transistor in Fig 2-35, is obtained combining parasitic

capacitances and substrate network with the intrinsic transistor model of Fig. II-9. In addition,

noise model of the intrinsic part, as discussed in section II.2.4, is added and the equivalent

noise of substrate is considered. Substrate noise is considered as resistive thermal noise [72],

due to the real part of each equivalent Y parameter in Fig. II-34. Final model has been shown

in Fig. II-35. Note that this model has only four nodes, as the simple model of Fig. II-9. This

simplifies all of the analysis and calculations, without need for time-consuming matrix

inversions.

Fig. II-35. Final partial transistor model, composed of intrinsic part, parasitic capacitances, substrate network and

noise model

Chapter II MOS Transistor Modelling for MMW Circuits

52

II.5.2 Complete Transistor Model

In section II.3.2 we deduced that the distributed model is not necessary for the single-finger

partial transistor model. However distributed nature affect the total transistor (composed of

some partial transistors), for which the layout has been shown in Fig. II-25. To capture the

distributed effects in our complete transistor model, we have used the model in Fig. II-36, that

is cascade of partial transistors via small resistances, showing the poly-silicon gate pad

resistance. As we noted earlier in the case of double connection gate fingers, each partial

transistor (∆M) with gate width WPT, is assumed as a parallel of two transistors, (∆M/2) with

gate width WPT/2. Considering the symmetry of the layout of Fig. II-25 and related model in

Fig. II-36, we can use the circuit in Fig. II-37 to analyze our model. Then Y-parameters of the

transistor will be 4-times of that of Fig. II-37. Note that in the case of odd number of fingers,

the width of the last partial transistor in Fig. II-37 will be half of the others. The analysis of

this circuit leads to a simple difference equation:

∆−=

∆+=

++

+

RIVV

YVII

nnn

innnn

11

1 (II-99)

The required initial condition is:

gVV =0

Fig. II-36. Distributed model of the transistor, corresponding to the layout of Fig. II-25

Fig. II-37. Distributed model of the transistor, used in analysis of the Fig. II-36

Chapter II MOS Transistor Modelling for MMW Circuits

53

II.5.2.1 Interconnect model

Since all of the interconnects in our design are implemented as Coplanar Transmission Line

(CPTL), we have designed special connections to the transistor pads to best match the CPTL

to the transistor inputs. The simplified layout has been shown in Fig. II-38-a. This structure

adds some extra parasitic effects to the transistor final model in Fig. II-36. We have used an

LC circuit to model these effects. The equivalent circuit for transistor interconnects has been

shown in Fig. II-38-b. More details will be given in chapter IV.

Gate Interconnect Drain Interconnect

GRing Intercon

nect

GRing Intercon

nect

GRing Interconnect

GRing Interconnect

(a) (b)

Fig. II-38. Interconnects to the transistor pads (a) and related equivalent LC model as a π section (b)

Chapter II MOS Transistor Modelling for MMW Circuits

54

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