NEW: capaNCDT 6350High speed capacitive displacement sensors

More Precision.

22

- Extreme fast - 50 kHz - bandwidth

- True non contact measurement

- Unmatched temperature stability

- Any conductive target

The operating principle of non-contact capa-

citive displacement measurement used by the

capaNCDT system (capacitive Non-Contact

Displacement Transducer) is based on the ideal

parallel plate capacitor. The two plate electro-

des are formed by the sensor and the opposing

target. If an AC current with constant frequency

flows through the sensor capacitor, the amp-

litude of the AC voltage on the sensor is pro-

portional to the distance between the capacitor

electrodes; an adjustable compensating volta-

ge is simultaneously generated in the amplifier

electronics. After demodulation of both AC vol-

tages, the difference is amplified and output as

an analogue signal.

Active guard triaxial cable & three-electrode technologyThe Micro-Epsilon capacitive system uses an

unique active driven and hermetically sealed

triaxial RF cable in conjunction with an active

guarded three-electrode sensor. Therefore the

system is electron leakage proof and creates

a protected homogeneous measurement field

enabling an absolute unmatched stable, interfe-

rence free precision measurement.

Any parasitic capacitance which would compro-

mise the accuracy is eliminated!

The high linearity is in the measuring principleThe capaNCDT system evaluates the reactance

Xc of the capacitor which changes strictly in pro-

portion to the distance:

This theoretical relationship is put into practice

by constructing the sensors as guard ring ca-

pacitors.

capaNCDT 6350: High speed capacitive displacement measurement

Measuring principle

Housing

Guard ring

Capacitor

Field lines

Measuring spot

Xc =

Capacitance C = er · e0 ·

Xc = constant · distance

j · w · C1

areadistance

2 33capaNCDT 6350: Applications and system structure

Application fields:capaNCDT 6350 is designed for industrial use in production plants and for measuring and testing du-

ring in-process quality assurance. Illustrated here are just a few examples of many different potential

applications for the sensors.

1 - vibration, amplitude, clearance, run-out

2 - displacement, distance, position, elongation

3 - deflection, deformation, waviness, tilt

4 - dimensions, measuring of tolerances, sorting, part recognition

5 - stroke, deformation, axial shaft oscillation

6 - in-process quality control, dimensional inspection

System structureThe capaNCDT 6350 is a compact, single-channel system that comprises a capacitive displacement

sensor, a sensor-connecting cable and signal-conditioning electronics.

The high precision DSP (Digital Signal Processor) achieves up to 50 kHz (-3dB) bandwidth on ana-

logue output.

Measuring channel consists of:1 - a capacitive displacement sensor

2 - a sensor cable

3 - signal conditioning electronics

Block diagram

1 2 3

4 5 6

Oscillator

Signal

8-pinsocket

24 VDC

Demodulator

fosc. 250 kHz

Sensorcable

DSP

Controller: DT 6350Power supply: 24 VDCOutput: 0-10 V

2

3

Sensor

1

44

Standard distance measurementThe inherent linearity is based on the measuring principle for distance mode. The capaNCDT system

evaluates the reactance Xc of the capacitor which changes strictly proportionally with the distance:

The linear characteristic of the measurement signal is achieved without extra electronic linearisation.

When measuring against flat targets made of electrically-conductive materials (metals), changes in

the conductivity do not affect sensitivity or linearity. Any conductive or even semi-conductive targets

are measured with the same measurement performance.

Thickness measurementThe system can also measure linear the thickness of insulator material. The capaNCDT system eva-

luates the reactance Xc change based on the dielectric volume of the material inside the constant

sensor gap.

Instant sensor swap without recalibrationThe unique Micro-Epsilon capacitive technology allows changing any capaNCDT sensor within seconds!

Replacing sensors with different measuring ranges and any capaNCDT controller is possible without

recalibration. A sensor swap with capaNCDT needs no more than 5 seconds, while other capacitive

systems are not designed for replacing components without the need of individual calibration and

linearization via DIP switch settings.

Non-contact target groundingTarget grounding sometimes can be very difficult or even impossible. Unlike conventional systems,

due to the unique synchronisation of two capaNCDT systems, the target does not require any elec-

trical grounding.

The principle on the right shows two synchronised capaNCDT sensors measuring roller run-out. The

target does not need to be grounded because of the unique synchronised-non-contact-grounding

technology.

Two DT6350 controllers can be synchronised with the ESC30 synchronisation cable.

Linearisation and CalibrationcapaNCDT 6350 systems are calibrated for metallic targets Micro-Epsilon prior to shipment (output

0-10 V). It is possible to measure on difficult targets with the DSP calibration.

capaNCDT 6350: Characteristics and features

Electrical conductor

Controller

Instant sensor swap within 5 seconds!Replace any capaNCDT controller and any capaNCDT sensor within seconds without recalibration!

sync.ControllerSensor

Sensor

Controller

No target grounding requiredwith two capaNCDT sensors!

10 V

1/1 Measuring range

2/1 Measuring range

1/2 Measuring range

Outp

ut

1/2 measuring range (0...10V)increase of resolution

1/1 measuring range ( 0...10V) standard

2/1 (0...10V) decrease of resolution measuring range

Sens

or

Targ

et

Targ

et

Targ

et

0

>1/2 Measuring range≤1/2 Measuring range

Electrical conductorIsolator

4 55capaNCDT 6350: Technical specifications

Model CS02 CS05 CS1 CS1HP CS2 CS3 CS5 CS10

Measuring range el. cond. (metal) mm 0.2 0.5 1 1 2 3 5 10

Extended range1 el. cond. (metal) mm 0.4 1 2 2 4 6 10 20

Linearity2 ≤0.3% FSO µm 0.6 1.5 3 3 6 9 15 30

Resolution

20Hz µm 0.01 0.03 0.06 0.06 0.1 0.2 0.3 0.6

5000Hz µm 0.05 0.1 0.2 0.2 0.5 0.7 1.2 2.4

20000Hz µm 0.1 0.2 0.5 0.5 1 1.5 2.4 4.9

50000Hz µm 0.2 0.5 1 1 2 2.9 4.9 9.8

Sensor outer diameter mm 6 8 10 10 20 30 40 60

Sensor weight g 2 3.5 7.1 7.1 61 95 120 230

Active measuring area (diameter) ø mm 2.3 3.9 5.5 5.5 7.9 9.8 12.6 17.8

Guard ring width mm 1 1.4 1.5 1.5 4 8.1 11.8 18.1

Min. diameter of target

el. cond. (metal) mm 5 7 9 9 17 27 37 57

insulator mm 7 10 12 12 24 36 48 72

Temperature stability (sensor)

zero µm/°C 0.06 0.06 0.17 0.06 0.17 0.17 0.17 0.17

sensitivity ppm/°C 11 11 30 11 30 30 30 30

Temperature stability (electronics) ≤0.01% FSO/°C

Long term stability3 ≤0.02% FSO/month

Sensitivity V/mm 50 20 10 10 5 3.33 2 1

Output voltage 0 - 10VDC (max. 10mA short circuit proof)

Power supply 24VDC (9…30V) / 5.5W

Bandwidth 20Hz / 5kHz / 20kHz / 50kHz (-3dB) selectable via button

Temperature range

sensors -50 to +200°C

sensor cable -50 to +150°C

electronics +10 to +50°C

Air humidity sensors 5 to 95% (non condensing)

Electromagnetic compatibility (EMC)DIN EN 55011 Spurious emission

DIN EN 61000-6-2 Immunity to interference

Protection class electronics & sensors IP 54

FSO = Full Scale Output1) field programmalbe2) at factory calibration 100 % measuring range, 1 m cable3) long term stability at 20 °C steady state

66 capaNCDT 6350: Sensor cables

Sensor cablesThe sensors are designed as three-electrode guard ring capacitors and are connected to the con-

troller with a triaxial cable. The sensor cables are equipped with high quality triaxial RF connectors.

All standard sensors can be used within any capaNCDT series electronic without recalibration (max.

0.5% deviation). Micro-Epsilon offers and designs customized probes for your specific application.

Sensor connecting cable

The sensor and controller are connected by a special triaxial active guarded sensor cable.

Various cable length (0,5m, 1m, 2m) are selectable via DIP switch settings.

17.5 13.7

27 8.6

Ø5.4

Ø3.2

Ø7 Ø9.5

Ø6

x = cable length (standard 1m)

37

16

13.1

8

16.9 Ø6

Ø5.4

Ø4

20.5

30.5

25

Ø7

Ø10

SW12

34

9

2

Ø8.8

Ø14

M10x0.75

max. 17

Ø7

Ø9.5

37

27Ø3.2

x = cable length (standard 1m)

Sensor cable CCxC Sensor cable CCxC/90

x = cable length

x = cable length

Sensor cable CCxB/90

Vacuum feed through SWH

Sensor cable CCxB

Model for sensors Cable length2 straight

connectors1x straight +

1x 90°

CC0.5C

CS02CS05

0.5 m x

CC1C 1 m x

CC2C 2 m x

CC0.5C/90 0.5 m x

CC1C/90 1 m x

CC2C/90 2 m x

CC0.5BCS1

CS1HPCS2CS3CS5

CS10

0.5 m x

CC1B 1 m x

CC2B 2 m x

CC0.5B/90 0.5 m x

CC1B/90 1 m x

CC2B/90 2 m x (Dimensions in mm, not to scale)

IMPORTANT!

All Micro-Epsilon sensors are short circuit

proof. Unlike other systems the preampli-

fier will not get damaged, if the front face

of the sensor gets shorted by touching the

conductive target

6 77capaNCDT 6350: Dimensions

Sensor dimensions (Dimensions in mm, not to scale)

x = cable length

CS2

24

Ø20

h7ø4

0h7

ø20h

7

16.5

24

CS5

CS05

Ø8f

7

12

CS02

Ø6f

7

12

CS1

ø10f

7

-0.221

ø10f

7

-0.220

CS1HP

CS3ø3

0h7

ø20h

7

16.5

24

CS10

ø60h

7

ø20h

7

16.524

connector

Dimension Fit tolerance (µm)

6f7 -10 - 22

8f7 - 13 - 28

10f7 - 13 - 28

20h7 0 - 21

30h7 0 - 21

40h7 0 - 25

60h7 0 - 30

110

97

Controller dimensions

¯ 4.6

17544.7

155

Sync

IN

Sync

OUT

Pow

er /

Sign

al

(Dimensions in mm, not to scale)

88 capaNCDT 6350: Accessories

Accessories

PC3/8

Power- and output cable, 3m, 8-pin

ESC30

Synchronisation cable 0.3m, cable for

multi-channel operation

PS 2010

Power supply for DIN rail mounting

Input 230VAC (115VAC)

Output 24VDC / 2.5A

L/W/H 120 x 120 x 40mm

MC2.5

Micrometer for sensor calibration

Range 0 - 2.5mm

Resolution 0.1µm

For sensors CS02 through to CS2

MC25D

Micrometer for sensor calibration

with digital display

Range 0 - 25mm

Adjustable offset (zero), for all sensors

CSP 301

Digital signal processing unit with

display for synchronous processing

of two channels

High performance sensors made by Micro-Epsilon

Sensors and systems for displacement,

position and dimension

Eddy current sensors

Optical and laser sensors

Capacitive sensors

Inductive sensors

Draw-wire sensors

Optical micrometers

2D/3D profile sensors

Image processing

Sensors and measurement devices

for non-contact temperature sensors

Online instruments

Handheld devices

Measuring systems for quality control

for plastic and film

for tire and rubber

for web material

for automotive components

for glass

Mod

ifica

tions

rese

rved

/ Y9

7611

99-A

0200

58JK

R

info@micro-epsilon.comwww.micro-epsilon.com

info@micro-epsilon.co.uk www.micro-epsilon.co.uk

info@micro-epsilon.uswww.micro-epsilon.us