mirrorcle technologies, inc. hardware guide

© 2018 Mirrorcle Technologies, Inc. Proprietary and Confidential. All rights reserved.

Mirrorcle Technologies, Inc.

Richmond, CA

October, 2018

Mirrorcle Technologies, Inc.

Hardware Guide

© 2018 Mirrorcle Technologies, Inc. Proprietary and Confidential. All rights reserved. 2

MTI Hardware Categories

Development Kits

MEMS Controllers

USB MEMS Controller “USB-SL MZ”

◼ Standard, boxed version

◼ OEM Version

USB MEMS Controller “OCCIE 1.x”

◼ OEM Version only (includes min. qty.)

MEMS Drivers

Digital Input – “PicoAmp”

Analog Input – “BDQ PicoAmp”


Layers of Abstraction in MEMS Mirror Control

Convert low voltage waveforms to

conditioned high-voltage waveforms

for MEMS driving

Receive (USB) commands and data,

buffer and output waveforms to

MEMS driver and peripherals

Prepare waveforms from user inputs

(interpolations, conditioning,

software filtering, etc), communicate

with firmware (Controller).

Deve

lop

ment

Kit

MEM

S C

ont

rolle

rM

SS


Development Kits


Mirrorcle Standard Development Kit


Standard Development Kit - Contents

Three Gimbal-less Dual-Axis MEMS Mirrors

1.2mm, 2mm, 3.6mm diameter, Aluminum coated

USB MEMS Controller

Includes all necessary cables and connectors

Mirrorcle Software Suite, with comprehensive documentation + support hours

Laser and Optical Breadboarding

Red Laser module – with TTL modulation input

90° optical mount for the laser module on a ½”-diameter post

4.5” x 4.5” optical plate and two post holders

MEMS Mount “Horseshoe” (anodized aluminum) mounted on a kinematic

mount (2-axis) and a ½”-diameter post. Includes screws and L-key.

OPTIONAL Add-ons listed on Development Kit Optional Add-Ons page

MEMS Mirrors in the Standard Development Kit(TINY20.4 connectorized packages)


Standard Kit - MEMS Mirror Devices

Standard Development Kit - Includes the following MEMS mirror devices in TinyPCB

LCC20 3.x connectorized packaging

A3I12.2-1200AL-TINY20.4-A/TP – Integrated 1.2mm diameter, Aluminum mirror

A7M20.1-2000AL-TINY20.4-A/TP – Integrated 2.0mm diameter, Aluminum mirror

A7B2.1-3600AL-TINY20.4-A/TP – Bonded 3.6mm diameter, Aluminum mirror

Semi-custom Development Kit - Mirror sizes from 0.8mm to 5.0mm in diameter are

available. Integrated mirrors up to 2.4mm and bonded mirrors for larger diameters.

Multiple packaging and mounting options.

Packages are covered with a broadband anti-reflection (AR) coated window. Three

different AR coatings are available:

Coating Type A: 400nm - 675nm

Coating Type B: 675nm - 1040nm

Coating Type C: 1040nm - 1600nm

MEMS Mirrors in the Standard Development Kit


Semi-Custom Development Kit - Contents

Three Gimbal-less Dual-Axis MEMS Mirrors

User chooses types, sizes, coatings, packages

USB MEMS Controller

Includes all necessary cables and connectors

Mirrorcle Software Suite, with comprehensive documentation + support hours


Red Laser module – with TTL modulation input

90° optical mount for the laser module on a ½”-diameter post

4.5” x 4.5” optical plate and two post holders

MEMS Mount “Horseshoe” (anodized aluminum) mounted on a kinematic

mount (2-axis) and a ½”-diameter post. Includes screws and L-key.

OPTIONAL Add-ons listed on Development Kit Optional Add-Ons page

Example of MEMS Mirrors in a Semi-Custom DevKit


Development Kit – Optional Add-ons

Wireless Option – Custom designed and built afocal lens with 3 lens elements that

will magnify the optical scan-angles of the system by approximately 3X.

PSD Bundle – Includes PSD Module (with 20mm x 20mm duo-lateral Position Sensing

Device) and add-ons to the Matlab SDK for creating Look-Up-Tables, characterizing

MEMS devices, etc.

Wide-Angle-Lens – Multi-element afocal lens to magnify optical angles ~3X

Laser Tracking Bundle – Includes a photo sensor with multistage amplifier, reflective

tape, software upgrade, code examples and documentation

Android Development Kit – Includes the ‘Wireless Option’ Add-on, an Android

Tablet with preloaded sample Apps, and an Android SDK with documentation

Linux Development Kit – Includes a Raspberry Pi with MicroSD card preloaded with

Linux based OS, sample applications and a C++ SDK with documentation

Python Software Development Kit – Additional SDK for development using Python

language with the same functionality and capability of the Windows-based C++

SDK. Includes a library of functions and multiple example scripts.


Development Kits - MEMS Mirror Packages and Mounts

See detailed MEMS Packages and Mounts Guide:http://mirrorcletech.com/pdf/Mirrorcle_MEMS_Packages_and_Mounts_Guide.pdf

http://mirrorcletech.com/pdf/Mirrorcle_MEMS_Packages_and_Mounts_Guide.pdf


Development Kits – USB MEMS Controller “USB-SL MZ”

Mirrorcle-designed MEMS Controller with a fast Microchip PIC32MZ MCU

Its main function is to interface with user software, store prepared waveforms in a

buffer, and run/output those waveforms in open loop to drive the MEMS mirror and

peripherals

Compatible with latest Software Suite 10.2 or newer

Powered and controlled by USB

Available as OEM Controller (provided as PCBs with no boxes or cables and

require minimum order quantities)

See features on the following page

Dimensions: Approx. 80mm x 115mm x 30mm

Weight: Approx. 140g


USB-SL MZ - Controller Features

4x (16-bit) (0V-200V) Analog Outputs for X and Y axis control of MEMS mirrors

Programmable hardware-based low-pass filters and protection circuitry to reduce the

chances of device damage

Output bandwidth from 50Hz to 25kHz (governed by programmable filters)

8x Correlated Digital Outputs (3.3V) for controlling other components or systems

Sample Rates up to 120,000 samples per second (120 kSPS)

500kB of Onboard RAM allows up to 100,000 samples to be stored

2x (12-bit) Analog Inputs with +/- 10V input range

Flash Memory allows storage of settings and data for stand-alone operation (no PC)

Sync Port for synchronization with additional Controllers or driving of laser peripherals

<850mW Power Consumption in all modes

USB Plug and Play support

Separate analog input port for tracking photosensor (Laser Tracking Bundle Add-On)

Wireless Option Add-On allows battery-run wireless operation over Bluetooth


USB-SL MZ - Multi-Platform Compatibility

Several ways of communicating with the USB-SL MZ Controller are available,

whether by USB interface or by Bluetooth interface with a PC or an Android or

Linux device.


USB-SL MZ - Various Ways to Control

APIs in several languages

Comprehensive APIs for generation of content (MEMS positions and correlated

digital outputs), for control and streaming of the content, reading of analog inputs,

synchronization with additional Controllers or peripherals, tracking, etc.

C++ SDK (Windows and Linux)

LabVIEW and Matlab SDKs

Python SDK (with Add-On purchase)

Java (Android) SDK (with Add-On purchase)

Easy-to-use GUI and Console Applications such as MirrorcleDraw,

MirrorcleLinearRaster, MirrorcleTrack, for various platforms (previous slide)

Serial Terminal Commands

Serial port terminal commands are available for more basic MEMS mirror control

without the use of the Windows, Android, Linux APIs.


Development Kits - Mirrorcle Software Suite

The Mirrorcle Software Suite (“MSS”) comes with Windows

Applications and software development kits (SDK)

Applications:

MirrorcleDraw – Windows Application

MirrorcleLinearRaster – Windows Application

MirrorcleListDevices – Windows Application

MTIDevice-Demo – Windows Application (made from SDK example)

Development:

C++ SDK

Matlab SDK

LabView SDK


Mirrorcle Software Suite - Applications

MirrorcleDraw

Powerful Windows application to fully control the MEMS Mirror. (E.g. freehand and

polyline sketches, parameterized mathematical curves, import of data files, text or clock

output modes, raster patterns with various settings and a function generator with various

settings)

MirrorcleLinearRaster

Creates uniform velocity linear raster scans and controls the number of lines, points per

line, line scan times, rotation etc. Possible to export raster scan data files (.kpt and .smp).

MirrorcleListDevices

Scans the COM ports of the computer and provides a table of connected MTI devices with

their properties.

MTIDevice-Demo

Use the arrow keys on the keyboard or enter coordinates to direct the MEMS to a desired

location. Import Keypoint or Sample files to be scanned.

Executable made from C++ SDK example code by the use of MTIDevice and

MTIDataGenerator function calls.


MSS – Examples of use of Applications

MirrorcleDraw:

Vector content such as

text, or drawings

sketched by users

MirrorcleDraw:

RQ Explorer® for

generation of raster

scans (resonant scans on

X-axis, and a sawtooth

or triangle on Y-Axis)

MTIDevice-Demo:

Imaging Function where

the MEMS mirror

performs a raster scan

over a field of view, and

measures the reflection

using the tracking sensor.

Requires Laser Tracking

Bundle Add-On

MirrorcleDraw:

Import ILDA / Sample

files / Key point

function for users to

import custom

waveforms or vector

content


Mirrorcle Software Suite - SDKs

C++ based Software Development Kit

The Software Development Kit (SDK) of the Mirrorcle Software Suite allows users

to develop their own applications.

C++ API - The interface provides classes and functions for analog output, control

of laser output, sample rate, filter settings, amplitude, device communication, etc.

An example Visual C++ project is provided to illustrate the use of the API and

several ways of driving devices in point-to-point, rastering, and other modes.

Matlab-based Software Development Kit

Similar to the C++ version, this is a Matlab-based software development kit

(SDK) allows the user the fastest and easiest route to development of

micromirror applications. Multiple examples included.

LabView-based Software Development Kit

Includes multiple examples of content generation (and content importing) and

driving of MEMS mirror devices from National Instruments LabView software.



5mW Optical Power TTL Red laser

module, modulatable up to 40kHz

Example of assembled development kit

optical breadboard with post holder for

MiniPCB and a laser module.

The optical breadboarding also includes a

swivel and post holder if the wide-angle

lens is purchased with the kit

TINY20.4 and TINY48.4 packages on

MEMS mount with kinematic mount


Optional Add-on - Wide Angle Lens

Custom designed and built afocal lens with 3

lens elements that will magnify the optical

scan-angles of the system by approximately

3X. This magnification is substantially linear,

resulting in overall development kit scan

capability of over 45° optical FoV. Includes

1/2" and 1" diameter lens elements and

comes mounted on a 1/2" optical post.


Optional Add-on – Laser Tracking Bundle - 1

Connectorized Photosensor with a Lens and Cable

Silicon Photodiode with an optical (daylight) filter and 60° FoV Lens

Multistage amplifier with a bandpass filter for noise reduction

Retro-reflective tape samples

Laser Tracking Software Examples in C++ Visual Studio and Matlab

Upgraded MEMS Mirror Mount for mounting and connecting of Photosensor PCB


Optional Add-on – Laser Tracking Bundle - 2

The tracking bundle can perform multiple functions with the photosensor:

Laser based imaging, with photosensor acting as a single pixel camera

Laser based tracking using Lissajous patterns – Singe point tracking

Laser based tracking using raster imaging – Multi-point tracking


Optional Add-on - Android Development

Includes the ‘Wireless Option’ - Mirrorcle USB-SL MEMS Controller with Bluetooth

Android SDK: Application example Eclipse Project using Mirrorcle Android API 10.x

Android SDK Guide

Android Tablet or Smartphone device with preloaded application examples

Controller powered by USB connection (possible by rechargeable USB battery)


Optional Add-on – Linux Development

Raspberry Pi with preloaded application examples and sample code

Linux C++ SDK: Application example project using Mirrorcle C++ API 10.x from

Raspberry Pi Controller

C++ SDK Guide

Controller powered by USB connection (possible by rechargeable USB battery)


Optional Add-on – PSD Bundle

The PSD Bundle consists of a PSD Module, a focusable

Red Laser, and a set of Matlab scripts for use with

Mirrorcle Software Suite’s Matlab SDK for creating Look-

Up-Tables, characterizing MEMS devices Angle vs.

Vdifference responses, etc.

The PSD Module consists of a 20mm x 20mm duo-lateral

PSD (Position Sensing Device) and conditioning circuits for

powering the PSD and converting its output currents to X

and Y positions, and a CW red laser module with focusing

capability.

The entire PSD + PCB stack is enclosed in a mechanical

mount with a ½ inch diameter post for easy integration

into an optical breadboard setup.

The laser module ties into the PCB stack on the PSD for

power Mounted PSD Module


OEM MEMS Controllers


USB-SL MZ (OEM)

This product is an open box / OEM version of the Development Kit controller USB-SL

MZ, described in detail earlier in this Guide.

Provided without box and cables in production quantities.

Includes option for customer-specific device naming / ID



OCCIE1.x

The OCCIE 1.1 controller interfaces with Windows Applications for Scan Control and

software command that results in MEMS mirror scans and repeatable patterns.

This product is available with 1k/month volumes, with a 3 month lead time, and is

production line ready

Features and Specifications:

USB Powered MEMS Controller: OCCIE 1.1

<800mW Power Consumption

Host Connector with 2 Analog Inputs

Host Connector with 4 Digital Synchronization Outputs

Digital Output connector with 8 Digital Outputs

Minimum order quantity, Provided without box and

cables in production quantities



OEM MEMS Drivers


OEM MEMS Drivers

Digital Input MEMS Driver - PicoAmp 5.X

4 unipolar analog outputs ~0V-200V (“Xtreme200” Drive Mode)

8 pin input for: SPI, MEMS Driver Enable, FCLK, VDD and GND

User controls 4 channels (X+, X-, Y-, Y+) via SPI commands to 16-bit DAC

◼ Update rates of up to 250k samples per second are possible for all 4 channels

User provides a clock for setting hardware filter cut-off (required)

Analog Input MEMS Driver - BDQ PicoAmp 5.X

4 unipolar analog outputs ~0V-160V (Boost160 Mode)

8 pin input connector for: XIN and YIN Analog Inputs, MEMS Driver Enable, Low-pass

Filter Control (FCLK), VDD and GND

User controls 4 channels (X+, X-, Y-, Y+) via 2 analog input signals for X and Y axis

(with -10V to +10V input range)

User provides a clock for setting hardware filter cut-off (required)

30

Digital Input Analog Input


MEMS Driver 5.x Features

Low voltage supply and low power consumption (<100mW)

Four high voltage output channels (two biased differential pairs) (~0V up to 200V)

Embedded regulated DC/DC converter creates high voltage supply from the +5VDC

supply (VDD)

Four embedded Bessel low pass filters. User-provided clock sets cut-off frequency for

all four LPFs with separate control for X and Y axis.

(Optional for larger quantities) Four continuous time low pass filters.

Small form factor, approximately ½ of a credit card size: 35mm x 40mm x 9mm

Power supply monitoring with auto-shutdown

Bandwidth up to 25kHz (governed by the user-set LPFs)

Analog Input – Two analog inputs for X and Y axis drive (+/- 10V)

Digital Input – SPI digital inputs for X and Y axis drive (3VTTL)


Electrical Specifications - Inputs

Parameter Sym. Min. Typ. Max. Units ConditionsPower Supply

Supply Voltage VDD 4.75 5 5.x V

Supply Current IDD6 7 8 mA MEMS Driver Disabled

16 18 20 mA MEMS Driver Enabled

Logic Inputs – Digital Pins

Input Low Voltage VINL - 0.2 0.4 V

Input High Voltage VINH 2.7 3 - V See Max voltage for each pin below

MEMS Driver Enable EN 0 0,3 5 V

Digital SPI SDI, SCK, SYN 0 0,3 3.3 VRefer to AD5664RBRMZ-3 datasheet and Appendix A for more information.

Filter Clock VoltageFCLK_X, FLCK_Y

0 0,3 3.6 V See Note*

Filter Clock FrequencyFCLK_X, FLCK_Y

3 - 3000 kHzFilter Clock input frequency based on MEMS datasheet recommendation.

Analog Inputs

X and Y analog inputs XIN, YIN -10 0 10 V Refer to Appendix B

*Note: Filter Clock for X axis and Y axis are independent, and therefore both clocks need to be provided by the user to drive both axes.


Electrical Specifications - Outputs

MEMS driver output has a low current output capability, <0.05mA, intended to drive open-circuit electrostatic MEMS

Not intended for larger capacitive loads (<50pF/channel) or long cables

Parameter Sym. Min. Typ. Max. Units ConditionsDriver Outputs

MEMS Driver Output Range (B160)

X+, X-, Y-, Y+ 0.5 80 160 VRefer to MEMS datasheet for maximum driving voltages of the MEMS device. (<50pF load)

MEMS Driver Output Range (T180)


MEMS Driver Output Range (X200)


MEMS Driver Bandwidth 50 - 25000 HzBandwidth limited by Low-Pass Filters. If LPFs are bypassed, max. bandwidth is 25kHz


Driving the Mirrors - The BDQ Principle

Bias-Differential Quad-channel (BDQ) is the proper methodology for driving

Mirrorcle MEMS Mirrors.

All four channels are biased to 80V (Vbias). This is MEMS mirror origin/rest

position.

Pairs of channels apply (biased) differential voltages from ~0V to 160V. Mirror

rotates approximately proportionally to the applied Vdifference for each axis.

Vdifference (X-axis) = HV_A – HV_B

Vdifference (Y-axis) = HV_C – HV_D

All Mirrorcle control and driving hardware should be operated in this fashion

and all Mirrorcle software supports this mode.

In the Analog Input PicoAmp, it is inherently implemented by adding a bias to

the four output channels and forcing them as differential pairs.

In the Digital Input PicoAmp this methodology should be implemented by the

user by adding a bias value to the four output channels and forcing them as

differential pairs.

34


Bi-directional Driving with Unipolar Outputs

HV_B is high

HV_A is low

Vdifference(X) is

negative so mirror

rotates in X- direction

HV_A is high

HV_B is low

Vdifference(X) is

positive so mirror

rotates in X+ direction

Resulting X

movement

Bi-directional driving with unipolar voltages. Direction depends on which portion of the rotator

(X+ or X-) is driven with the higher voltage. As a result each axis can move from negative

angle to positive angle from rest/normal position.


The BDQ Principle – Vbias and Vdifference

Opposing actuator channels are given differential inputs operating at that

bias. E.g. X+ channel 110V and X- channel 50V means X axis is driven by

Vdifference of 60V at Vbias of 80V.

Each command for each axis of the MEMS mirror is therefore comprised of

Vbias and Vdifference setting where Vbias is constant (80V) and

Vdifference is such that a desired angle is obtained. In the example below

Vdifference of +100V can be applied to obtain +3.3° of rotation about the

X axis.


Y+ rotation

X+ rotation

Axes Orientation and Sign of Vdifference

X+ and Y+ mirror rotation is defined by the rule of

(right-hand) thumb, based on the x and y axes as shown.

X Axis:

Vdifference(X) >0 results in X+ rotation about the x-axis

Vdifference(X) <0 results in X- rotation about the x-axis

Y Axis:

Vdifference(Y) >0 results in Y- rotation about the y-axis

Vdifference(Y) <0 results in Y+ rotation about the y-axis

Typically, MirrorcleTech MEMS mirrors are mounted so

that X-axis driving provides laser beam sweep in the

horizontal plane.

x-axis

y-axis


Driver Connections Breakout: BRK-DRIVER 5.x

PCBA which breaks out the input connection side of both digital and analog-input MEMS

driver to easy to use terminals or test points / pins. Each pin of the 10-pin connector has

its own screw terminal, hook, and hole connection and easy to read label. Recommended

and prepared for first-time users of Mirrorcle's MEMS Drivers (Ver. 5.x). A new user

should consider purchasing this item with the first purchase of a MEMS Driver 5.x,

digital- or analog-input type.

INPUT: Screw terminals, test points, connect pins - multiple options for easy connections.

OUTPUT: 10-pin header connector (0.05", 2 rows, right angle) which can be directly

connected to MEMS Drivers (Analog and Digital) of 5.x generations.

This item is only offered with a purchase of a Mirrorcle MEMS Driver

38

Wire Terminal 5 Pin Wire Terminal 5 Pin

Wire Hooks 2 Pin Jumper and Header

10 Pin header

mirrorcle technologies, inc. hardware guide

Documents