micro to nano technologies by: brent hare lenox laser march 30, 2004
TRANSCRIPT
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Micro to Nano Technologies
By: Brent HareLenox laser
March 30, 2004
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Micro to Nano Technologies
Micro - Prefix meaning one millionth, 1/1,000,000
Nano – Prefix meaning one billionth, 1/1,000,000,000
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The Powers of 10
10+0 1 Meter
10-1 10 Centimeters
10-2 1 Centimeters
10-3 1 Millimeter
10-4 100 Microns
10-5 10 Microns
10-6 1 Micron
10-7 1,000 Angstroms
10-8 100 Angstroms
10-9 1 Nanometer
10-10 1 Angstrom
10-11 10 Pico meters
10-12 1 Pico meter
10-13 100 Fermis
10-14 10 Fermis
10-15 1 Fermi
10-16 0.1 Fermis
10-17 0.01 Fermis
10-18 0.001 Fermis
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Current Micro Technologies
Photonics - Optical Apertures and Flow Orifices
Electronics – Semiconductor chips, anodic bonding
MEMS – Micro Electro Mechanical Systems
Communication – Fiber optics, switching interconnects
Biotechnology - cell filtration, drug discovery
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Current Nano Technologies
Molecular manufacturing – Precision down to the atomic level
Nanotubes –Building advanced lightweight materials as well as advancements in LCD technologies
Medicine – Devices that will flow through the circulatory system
Nanocomposites – Assisting in vast improvements in material compositions
Electronics – Advanced CMOS and silicon transistor integration with lithography
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mms://stream.techtv.com/windows/bigthinkers/2002/bt020225b_165_0.asf
Micro scaling to Nano
Click Picture to watch Nanotechnology movie
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http://www.memsoptical.com/prodserv/products/microlensar.htm
Micro - Optics
Ability to drill to ½ micron for half the wavelength
Micromirrors for next generation telescope optics
Micromirrors
Microlens Arrays
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http://www.geek.com/procspec/intel/pic2p4-13.htm
Micro - Electro
Pentium 4- Top speed – 3.4ghz Built on a 0.13
micron die 168 million
transistors on 200mm2
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http://www.utnl.jp/~mada-lab/research.html
Micro - Chemical
Miniature fuel cells Micro channels Chemical reactors
50 Micron Chemical Reactor
Micro Chemical Channel
Micro Fuel Cell
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Photos from Pittcon
Micro Flow Devices
=
Swagelock hasbegun to minaturizeits flow components
3ft. X 4ft.
6in. x 18in.
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http://www.memx.com/image_gallery.htm
Micro - Engineering
Micro gears Micro embossing and
stamping Microactuators (Tiny
Motors) Micro-valves
Micro-valves
Micro embossing
Complex Ratchet
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http://us.st.com/stonline/prodpres/dedicate/mems/technolo/micro/photo.htm
Micro - Mechanical
Microactuators – tiny motors
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http://www.memx.com/image_gallery.htm
Micro Mechincal
World’s smallest steam engine, the pistons are 5 microns
and it actually works
Micro Clutch mechanism, gears are 50 microns
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http://www.sensorsmag.com/articles/0700/10/main.shtml
Microfluidics
Capillary uptake Piezoelectric
inkjets Flow sensing Drug dispensing Flow based
separation
Print Cartridges
Lab-On-Chip for DNADetection and Analysis
Micro Canals
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http://www.lucent.com
Micro Communications
Full optical switching technologies
Most fiber optic backbone in the United States ranges from 1.3 to 1.5 micrometers and can transmit over 5 GBps and can span 93 miles Fiber optic switching
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e-blox (Scaleable, Interfaceable, Stackable)
Micro to nano interfaces for simple solutions e-blox allows you to build backbones
connecting Gas, Liquid, Electro, Optical – Fiber/Micro, and nanotechnologies in order to build unique devices for MEMS and other technologies
Imagine devices built with the integration of all of these competing technologies on a Scaleable, Interfaceable, Stackable solution at the micro and nano level
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http://www.smalltimes.com/document_display.cfm?document_id=5340
MEMS (Powder Metal Die Casting for building small parts)
The ability to arrange particles and then compress them into a die to build ultra small parts that can be used in MEMS technologies i.e. e-blox
They have the ability to create miniature tools and dies to help build MEMS technologies
Micro Sensor 0.051mm
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http://www.solid-edge.com/
Rapid Prototyping
Use of 3D CAD modeling with SolidEdge
3D Scanning Technologies – Use of lasers and optics to scan surface objects
3D Holography Technologies – Holograms for real visualizations
3D CAD Model
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http://www.epner.com/electroforming_intro.ssi
Electroforming Technologies
Electroforming is the process of fabricating a part from the plating itself. A shaped mandrel is plated long enough to build up a "stand alone" thickness. The mandrel is then removed by melting, chemically etching or exploiting differences in thermal coefficients of expansion between the electroformed part and the mandrel.
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http://www.memsnet.org/mems/beginner/etch.html
Etching Technologies
Wet Etching – Dissolves materials with chemicals and the use of masks
Dry Etching - ion etching (RIE), sputter etching, and vapor phase etching are used by blasting the material surface with ion gases
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http://www.intel.com/research/silicon/lithography.htm
Lithography Technologies
Lithography is a printing process where image areas and non-image areas are separated chemically
Silicon semiconductor companies use extremely small masks to mark silicon wafers with 248 nm, 193nm, and now 13.4nm wavelengths of light
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Piezeo electronics (for micro to nano movement)
Pizeoelectronics are materials that produce an electrical response to a mechanical force.
Can be used in Vibration Monitoring, Imaging
Arrays, Doppler Probes, Biotech, Pharmaceutical, and Industrial & Process Control
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http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2
First NanoChips
Integrated circuits can be made down to 50nm
50nm chips are made using 193nm lithography (smaller than a wavelength so they use diffraction corrections)
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http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2
Next Generation Nano Lithography
To build chips smaller than 50nm, new lithography technologies must be created – The above technology can use 13nm ultraviolet wavelengths
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http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2
Nano Biotechnologies
Scientists have developed a way to use DNA for minuscule wires that can be used in nanoelectronics
Ability to have insulated wires sized at 25nm and 20 microns in length
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http://www.lbl.gov/Science-Articles/Archive/images4/nanotubes-model.jpg
Nanotubes Conductive and high-
strength composites Energy storage and
energy conversion devices
Sensors Medical drug delivery
and DNA research Nanometer-sized
semiconductor devices, probes, and interconnects
Nanotubes are built by arrangingseveral atoms in a closed pattern to form an unbelievably small tube