micro-bulk gas purifiers -...
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www.arminc.com 719-538-5959 [email protected] Advanced Research Manufacturing Colorado Springs, CO USA
Specialty Gas
Industrial Gas
Micro-Bulk Gas Purifiers Solutions that meet your needs Service that exceeds your expectations
www.arminc.com 719-538-5959 [email protected] Advanced Research Manufacturing Colorado Springs, CO USA
Dimensions Flow slpm
Model Units A B Nominal Max FP Max CR
975 mm 202.0 76.0
7.0 60 100 inch 7.94 3.00
977 mm 254.0 76.0
10 120 200 inch 10.00 3.00
05K mm 462.0 76.0
43 200 400 inch 18.20 3.00
07K mm 440.0 102.0
135 500 700 inch 17.30 4.00
08K mm 864.0 102.0
170 650 850 inch 34.00 4.00
50K mm 701.0 152.0
225 1000 1500 inch 27.60 6.00
Nominal flow rates are based on 1 yr service life Max flow rates are at 150 psig gas pressure
Weights range from 1 to 10 lbs based on size and fill material Dimensions
VCRTM
B
A
Vessels Only Many gas/impurity combinations can be effectively purified with an ambient temperature purifier. In these applications it can be very
cost effective to simply have an ambient temperature purifier upstream of the use point. Suitable vessel size is based on the anticipated flow rate of the gas being purified, input impurity load and desired lifetime between regeneration or re-placement. In some cases it is desirable to oversize the vessel to enhance purity or lifetime performance. The chart at right lists nominal flow rates at 150 psi line pressures to achieve specified impurity removal to <1ppb for a nominal 1 year service life. Max flow rates listed are based on filtration option spec-ified, FP=0.003µm, CR=0.1µm.
Vessel Size Nominal flow for 1 year life
Maximum flow FP
Maximum flow CR
975 7 slpm 60 slpm 100 slpm
977 10 slpm 120 slpm 200 slpm
05K 43 slpm 200 slpm 400 slpm
07K 135 slpm 500 slpm 700 slpm
08K 170 slpm 650 slpm 850 slpm
50K 225 slpm 1000 slpm 1500 slpm
Class Gases Purified Impurities removed Removal Efficiency
Regen Capable
C Ar, He, Kr, Ne, Xe, N2, & H2 CO, CO2, H2, H2O, NMHC, O2 <1 ppb Yes
CA Ar, He, Kr, Ne, Xe, N2, & H2 CO, CO2, H2, H2O, NMHC, O2 <1 ppb Yes
F C2F6, C3F8, C4F8, CClF3, CCl2F2, CCl4, CF4, CHClF2, CHF3, & CH3F CO, CO2, H2, H2O, NMHC, O2 <1 ppb No
OX CDA & O2 CO2, H2O, NMHC, Amines, NOx <1 ppb Yes
T BCl3, BF3, CL2, ClF3, F2, HBr, HCl, HF, NF3, SF4, WF6 H2O <1 ppb No
W Ar, He, Kr, Ne, Xe, H2, & N2 H2O <1 ppb Yes
Y AsH3, B2H6, CH4, D.C.S.(SiH2Cl2), Ge2H6, GeH4, H2Se, NH3, PH3, SF6,
SiH2, SiH4, Si2H6, DMHZ, & Hydride/Carrier Gas mix CO2, H2O, O2 <1 ppb Yes
Fill Class Designations for the fill material required to remove specific impurities from specific gas streams are listed in the chart below. This is not a
comprehensive list of every possible impurity that can be removed from every possible gas. If the gas to be purified, or impurities are not listed, contact ARM, Inc. for assistance.
Micro-Bulk Purifiers
Micro-Bulk purifiers typically offer a moderate flow rate serving a lab or production work cell through high purity, permanently installed plumbing to each point-of-use. This brochure outlines the features/benefits/performance of ARM’s Micro-Bulk purifiers.
ARM Inc. purifiers are categorized into 3 groups. The primary distinction is based on flow rate of the gas being purified. The following is offered as a general rule: Category Flow Rate Point-of-Use 0.1-100 slpm Micro-Bulk 100-1200 slpm Bulk 60-5000 nm3/hr Point-of-Use and Bulk Purifiers are described in their own brochures.
www.arminc.com 719-538-5959 [email protected] Advanced Research Manufacturing Colorado Springs, CO USA
Open Frames
With NEMA Enclosures
1. Applicable to heated vessels in Nova and Pro-Panel Series only 2. Dependent on vessel size.
3. Only applicable with air operated valve option. 4. 50 ppm maximum
Specification Common to All
Max Operating Pressure 200 PSIG (17.24 BAR)
Max Operating Temperature1 400°C
Nominal Flow Rate2 0.3 slpm to 20.0 slpm
Maximum Flow Rate2 4.5 slpm to 300 slpm
Pressure Drop2 <1 ATM typical
Filtration 0.1 µm standard, optional 0.003 µm
Wetted Surfaces Electro-polished, <10Ra, 316L stainless steel
Typical Inlet Gas Purity 99.999%4
Outlet Purity <1 ppb
Input Power 100VAC, 120VAC, 230VAC, 50/60Hz, 600W (max)
Inlet/Outlet Fittings VCRTM standard, optional SwagelokTM or tube stub
Operating Air Supply3 60-90 psig CDA
Features Vessel Only Advantage
Series
Heated operation No Yes
Optional inlet/outlet/bypass valves Yes Yes
Optional pneumatic inlet/outlet valves N/A Yes
Power status indication N/A Yes
Ready (for operation) indication N/A Yes
Thermocouple fault indication N/A Yes
Process indication N/A Yes
Alarm indication N/A Yes
Valves open indication No Yes
Inlet/Outlet Connections
The standard inlet/outlet connections are 1/2” VCRTM face seal fittings. Other connection types are optional, contact ARM for quote.
Filtration
All purifiers include an integral filter. Two standard options are available CR-0.1 micron and a FP-0.003 micron, these filter particles down to the size specified to less than 1 particle per cubic foot of gas.
www.arminc.com 719-538-5959 [email protected] Advanced Research Manufacturing Colorado Springs, CO USA
Gases Purified Impurities Removed to <1.0 ppb
O2, CDA CH4, CO, CO2, H2, H2O, THC
N2 CH4, CO, CO2, H2, H2O, O2, THC
X
Purifier Cabinet Optional Components
Heated Getter Vessel
MFM
PX
Relief
MOV AOV
Inlet
Particle Filter
Outlet
AOV
AOV
AOV
AOV
Adsorber Vessels (heated regen)
AOV AOV
AOV AOV
Regen Outlet Inlet
PX AOV MOV
MOV Outlet Sample MOV
AOV MOV
Inlet Sample
MOV
Heated Getter Vessel Hydrogen
Removal Vessel
Particle Filter
MOV
MFM
PX PX
Relief
AOV MOV
AOV MOV
MOV
Inlet Sample
Outlet Sample
Inlet Outlet
MOV AOV
MOV MOV
MFM
Relief
MOV AOV
Inlet
Particle Filter
Outlet
AOV
AOV
AOV
AOV
Adsorber Vessels
(heated regen)
AOV AOV
AOV AOV
Regen Outlet Inlet
PX AOV MOV
MOV
MOV
Outlet Sample MOV
PX
AOV MOV
MOV
Inlet Sample
Purifier Cabinet Optional Components
Purifier Cabinet Optional Components
Gases Purified Impurities Removed to <1.0 ppb
N2, N2/Noble gas mix CH4, CO, CO2, H2, H2O, O2
H2 CO, CO2, H2O, N2, O2
Hydrides CO2 , H2O, O2
Gases Purified Impurities Removed to <1.0 ppb
Ar, He, Kr, Ne, Xe, N2, H2, CO, CO2, H2, H2O, NMHC, O2
CDA, CO2, N2O, O2 CO2, H2O, NMHC, Amines, NOx
Ar, CO, H2, He, Kr, N2, Ne, Xe H2O
www.arminc.com 719-538-5959 [email protected] Advanced Research Manufacturing Colorado Springs, CO USA
Standard Features/Options Hardware Standard Optional
316L stainless steel tubing, fittings, components √
Wetted surfaces electro-polished √
Steel and aluminum enclosures, powder coated √
Manually operated bypass valves √
Pneumatic/electric operated valves √
Industry standard inlet/outlet connections √
Gas-to-gas heat exchangers (as required) √
Air cooled heat exchangers (as required) √
Water cooled heat exchanges √
Flow meter/flow totalizer √
Overpressure relief protection √
Particle filtration √
Instrumentation & Controls Standard Optional
Inlet pressure transducer √
Outlet pressure transducer √
Captured overpressure exhaust √
Emergency shutdown √
PLC control of automatic functions √
Microprocessor control of automatic functions √
Remote Internet access for control, upgrades √
Touchscreen HMI √
Remote Internet access for troubleshooting √
Control & Instrumentation
Specifications Common to All
Specification Range Specification Range
Maximum allowable working pressure 150 to 250 PSI Pressure drop 1 ATM or less
Inlet/outlet tube diameters 1/2” to 1” Outlet purity Down to < 1PPB
Flow rate 100 to 1200 slpm Input power 100 to 240 VAC 50/60 Hz
www.arminc.com 719-538-5959 [email protected] Advanced Research Manufacturing Colorado Springs, CO USA
Enclosures
SF Enclosure
MF Enclosure
LF Enclosure
NEMA Enclosures
www.arminc.com 719-538-5959 [email protected] Advanced Research Manufacturing Colorado Springs, CO USA
Advantage Series, A Different Approach….
….. from initial inquiry to commissioning
www.arminc.com 719-538-5959 [email protected] Advanced Research Manufacturing Colorado Springs, CO USA
For assistance with other gases, customization or
other high purity requirements contact ARM, Inc., or your local rep/distributor.
and note that the gases and impurities, hard-ware descriptions, and options identified in this brochure are only the most common configurations. If you don’t find your gas/impurities or other specifications it does not mean we won’t have a solution. We have the knowledge, experience and willingness to pursue the technology that will work for your application.
Phone: 719-538-5959 E-mail: [email protected]
How to begin….. Its as easy as a phone call. We will discuss your specifics, gas, flow, pressure, duty cycle, etc. Below is a document located on our
website that will assist you in collecting the information we will ask about in order to define the type of technology, level of automation, and any rec-ommended options to meet your particular gas purification requirements.
Each Advantage Series purifier built is assigned a model number identifying the basics about the purifier. As an example, working with the customer, it is determined that the system will be purifying Hydrogen gas at an 85 Nm3/hr. When quoted, the model number would be A-50KC-30-Ar. A indi-cates an Advantage Series purifier, 50KC indicates the vessel size and media used, 30 indicates the rated flow, and Ar indicates Argon gas is being purified. This is not the only way we identify a particular purifier, each system is serialized with documentation tying that particular unit back to engineering drawings, test records, control software, anything that may be unique to that particular purifier, which will assists us in after sales support need it be required.
Purifier Parameters PDF Form
(http://www.arminc.com/assets/arm_psg_form07.pdf)