Metrology and Characterization Requirements and Challenges for the Nano-World of Integrated CircuitsAnd Its Overlap with Nano Technology and Science

Alain C. Diebold

AGENDAThe ITRS ChallengeLitho MetrologyFEP & Interconnect MetrologyMaterials Characterization

ITRS:International Technology Roadmap for Semiconductors The ITRS includes the roadmap for emerging NanoTechnology and Electronics.

The ITRS is sponsored by the Semiconductor Industry Association (SIA), the European Electronic Component Association (EECA), the Japan Electronics & Information Technology Industries Association (JEITA), the Korean Semiconductor Industry Association (KSIA), and Taiwan Semiconductor Industry Association (TSIA)

International SEMATECH is the global communication center for this activity. The ITRS team also coordinates the USA region events.

ITRS Challenge for Metrology In-Time Metrology and CharacterizationLeading Edge ToolSpecifications set

ITRS ChallengeNew Materials and Structures

If Distribution is CenteredCP = CPKProcess control Is based on Statistical Significance

Chart3

0.74789948240.74170226470.73170731710.70224688320.66404842710.6

0.99503719020.98058067570.95782628520.8944271910.81923192050.7071067812

1.24034734591.21267812521.1704114721.059997880.94072086840.7808688094

1.48340452931.43673942781.36788225781.21.03448275860.8320502943

1.72380331751.65175212361.549446331.31700921571.10665885730.8682431421

1.96116135141.85695338181.71498585141.41421356241.16247638740.894427191

2.19512195122.05182338661.86490951671.49481863741.20601830750.9138115486

2.42535625042.236067977521.56173761891.24034734590.9284766909

&LJ.E.SCHLESINGER&R&D

P/T=0.1

P/T=0.2

P/T=0.3

P/T=0.5

P/T=0.7

P/T=1.0

ACTUAL Cp

MEASURED Cp

EFFECT OF MEASUREMENT PRECISION (P/T RATIO) ON Cp AS MEASURED

Chart2

0.74789948240.74170226470.73170731710.71836971390.70224688320.68394112890.66404842710.64311969430.62163650560.6

0.99503719020.98058067570.95782628520.92847669090.8944271910.85749292570.81923192050.78086880940.74329414620.7071067812

1.24034734591.21267812521.1704114721.11803398871.0599978810.94072086840.88388347650.83045479850.7808688094

1.48340452931.43673942781.36788225781.28623938861.21.11494121941.03448275860.96027659950.89284132590.8320502943

1.72380331751.65175212361.549446331.43365586091.31700921571.20689655171.10665885731.0171668390.93801423920.8682431421

1.96116135141.85695338181.71498585141.56173761891.41421356241.28036879931.16247638741.059997880.97128586240.894427191

2.19512195122.05182338661.86490951671.67241182911.49481863741.33926198891.20601830751.09269659520.9962557030.9138115486

2.42535625042.236067977521.7677669531.56173761891.38675049061.24034734591.11803398871.01534616510.9284766909

&LJ.E.SCHLESINGER

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ACTUAL Cp

MEASURED Cp

EFFECT OF P/T RATIO ON Cp

Chart1

0.74789948240.99503719021.24034734591.48340452931.72380331751.96116135142.19512195122.4253562504

0.74170226470.98058067571.21267812521.43673942781.65175212361.85695338182.05182338662.2360679775

0.73170731710.95782628521.1704114721.36788225781.549446331.71498585141.86490951672

0.71836971390.92847669091.11803398871.28623938861.43365586091.56173761891.67241182911.767766953

0.70224688320.8944271911.059997881.21.31700921571.41421356241.49481863741.5617376189

0.68394112890.857492925711.11494121941.20689655171.28036879931.33926198891.3867504906

0.66404842710.81923192050.94072086841.03448275861.10665885731.16247638741.20601830751.2403473459

0.64311969430.78086880940.88388347650.96027659951.0171668391.059997881.09269659521.1180339887

0.62163650560.74329414620.83045479850.89284132590.93801423920.97128586240.9962557031.0153461651

0.60.70710678120.78086880940.83205029430.86824314210.8944271910.91381154860.9284766909

&LJ.E.SCHLESINGER

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P/T RATIO

MEASURED Cp

ACTUAL Cp

EFFECT OF P/T RATIO ON Cp

Chart4

0.99719930990.98893635290.97560975610.93632917760.88539790280.85749292570.8

0.99503719020.98058067570.95782628520.8944271910.81923192050.78086880940.7071067812

0.99227787670.97014250010.93632917760.8479983040.75257669470.70710678120.6246950476

0.98893635290.95782628520.91192150520.80.68965517240.64018439970.5547001962

0.98503046720.94385835640.88539790280.75257669470.63237648990.58123819370.4961389384

0.98058067570.92847669090.85749292570.70710678120.58123819370.529998940.4472135955

0.97560975610.91192150520.82884867410.66436383880.53600813670.48564293120.4061384661

0.97014250010.8944271910.80.62469504760.49613893840.44721359550.3713906764

P/T=0.1

P/T=0.2

P/T=0.3

P/T=0.5

P/T=0.7

P/T=0.8

P/T=1.0

ACTUAL Cp

MEASURED Cp/ACTUAL Cp

EFFECT OF P/T ON MEASURED Cp

Sheet1

ACTUAL Cp

P/T RATIO0.7511.251.51.7522.252.5

0.10.74789948240.99503719021.24034734591.48340452931.72380331751.96116135142.19512195122.4253562504

0.20.74170226470.98058067571.21267812521.43673942781.65175212361.85695338182.05182338662.2360679775

0.30.73170731710.95782628521.1704114721.36788225781.549446331.71498585141.86490951672

0.40.71836971390.92847669091.11803398871.28623938861.43365586091.56173761891.67241182911.767766953

0.50.70224688320.8944271911.059997881.21.31700921571.41421356241.49481863741.5617376189

0.60.68394112890.857492925711.11494121941.20689655171.28036879931.33926198891.3867504906

0.70.66404842710.81923192050.94072086841.03448275861.10665885731.16247638741.20601830751.2403473459

0.80.64311969430.78086880940.88388347650.96027659951.0171668391.059997881.09269659521.1180339887

0.90.62163650560.74329414620.83045479850.89284132590.93801423920.97128586240.9962557031.0153461651

10.60.70710678120.78086880940.83205029430.86824314210.8944271910.91381154860.9284766909

Cp meas/Cp Actual

ACTUAL Cp

P/T RATIO0.7511.251.51.7522.252.5

0.10.99719930990.99503719020.99227787670.98893635290.98503046720.98058067570.97560975610.9701425001

0.20.98893635290.98058067570.97014250010.95782628520.94385835640.92847669090.91192150520.894427191

0.30.97560975610.95782628520.93632917760.91192150520.88539790280.85749292570.82884867410.8

0.40.95782628520.92847669090.8944271910.85749292570.81923192050.78086880940.74329414620.7071067812

0.50.93632917760.8944271910.8479983040.80.75257669470.70710678120.66436383880.6246950476

0.60.91192150520.85749292570.80.74329414620.68965517240.64018439970.59522755060.5547001962

0.70.88539790280.81923192050.75257669470.68965517240.63237648990.58123819370.53600813670.4961389384

0.80.85749292570.78086880940.70710678120.64018439970.58123819370.529998940.48564293120.4472135955

0.90.82884867410.74329414620.66436383880.59522755060.53600813670.48564293120.44278031250.4061384661

10.80.70710678120.62469504760.55470019620.49613893840.44721359550.40613846610.3713906764

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test structure inside a dieDistribution of linewidths inside test structureaveragesingle value from distribution of > 500 MillionWhat are you Measuring?

e.g.150 nm lines300 nm pitchOne Aspect of the Solution:Average over large area &Amplify Signal from Microscopic ChangesOptical CD using Overlay SystemRapid Sampling of test structures

SENSOR based Integrated MetrologyAdvanced Process Control - Advanced Equipment ControlComponents of SolutionAPC, including Run-to-run controlFDC: Fault Detection and ClassificationIntegrated Metrology

Metrology & New StructuresLogicMemory

STORAGE MECHANISM

BASELINE 2002 TECHNOLOGIES

MAGNETIC RAM

PHASE CHANGE MEMORY

NANO FLOATING GATE MEMORY

SINGLE/FEW ELECTRON MEMORIES

MOLECULAR MEMORIES

DEVICE TYPES

DRAM

NOR FLASH

PSEUDO- SPIN- VALVE

MAGNETIC TUNNEL JUNCTION

OUM

-ENGINEERED TUNNEL BARRIER -NANOCRYSTAL

SET

-BISTABLE SWITCH -MOLECULAR NEMS -SPIN BASED MOLECULAR DEVICES

Messages from IC IndustryIn-Line Metrology must be linked to the Manufacturing ProcessAdvanced Process Control and Advanced Equipment Control will be Necessary for NanoManufacturing Process ProductivityMetrology for NanoElectronics will also be more than Dimensional and Mechanical Measurements Electrical Properties of materials and Electrical Parametrics of devices must be considered

AGENDAHow to control microscopic featuresLitho MetrologyExample of Interaction between Manufacturing Process and MetrologyFEP & Interconnect MetrologyMaterials Characterization

Litho Metrology for Volume Manufacturing CD Control Starts at the MaskOverlay and CD Control after ExposureCD Control after Etch

Investigate High Voltage CD-SEMComparison of conventional SE (left) and Low Loss (right) images of copper interconnects. Note the greatly enhanced surface detail and lack of edge brightness in the Low Loss image.Micrograph courtesy of O C WellsFigures from David JoyHigh Voltage CD-SEM100 200 keVe-Low loss detector

Scatterometry for CD MeasurementsWhat are the LimitsReal Time Calculation of line width & shapeEliminates Libraries

Average vs IndividualCD-SEM measures one line at a timeScatterometry gives an average over many linesReports indicate a large number (80 different lines) CD-SEM measurements in test area required to match scatterometry averageLose individual line information

CD Metrology: Status of scatterometryScatterometry works well for gate controlRing Oscillators still (always will be?) key way to access CD control.Closed Loop APC + scatterometry have resulted in a tightening of range of Idsat for microprocessors.

Tight Idsat gives tight distribution of Transistor Delay t t ~ C Vdd/(Ion*W) Ion units: A/mC = Cs/d + CL

Thanks to Peter Zeitzoff and Larry Larson

David Joy, Univ. of TNOpportunities for the distant futureElectron Holography & Low Energy Electron Microscopy (LEEM)New normal incidencePoint Projection MicroscopeSi(111)LEEMTromp and Reuter IBM

AGENDAHow to control microscopic featuresLitho MetrologyFEP & Interconnect MetrologyMaterials Characterization

Front End Process & Interconnect MetrologyNew Materials & StructuresCMOS and non-Classical CMOSMetal GateHigh & interfacesStrained Si & SOIor locally strained channels

Interconnect MetrologyVOID Detection in Copper linesKiller Pore Detection in Low kBarrier / Seed Cu on sidewallsControl of each new Low k

Extra reflection from SOI Wafers Impacts Optical Measurements and Light ScatteringQuantum confinement for sub 20 nm siliconNeed SOI Optical Constants

bulkSOIQuantum confinement effect on optical properties of very thin SOI

Double-Gate MOSFETBeyond Classical CMOSMetrology on SidewallsNew Optical paths???

X-ray Reflectivity

AGENDAHow to control microscopic featuresLitho MetrologyFEP & Interconnect MetrologyMaterials Characterization

Materials Characterization NEEDSAtomic Resolution including Interface AnalysisRapid Sample Preparation and AnalysisMove new Materials Characterization into Manufacturing as soon as possibleLocation of NanoFeatures to allow Characterization e.g. Dual Column FIBOptical Metrology is part of total picture of Off-line Characterization Trace Analysis Improvements

The future : Aberration Correction Lens for TEM/STEMThe next step in improving spatial resolution for HR-TEM and ADF-STEMPhil Batsons demonstration of sub Angstrom resolution for STEMCommercial TEMs with aberration correction lens now available.Next generation TEM - TEAM project is critical to NanotechnologyTEAM = transmission electron aberration corrected microscope

Aberration Correction LENS for TEMAlso Improves Spatial Resolution for ELS

Professor John Sinclair Cornell

SEM with Aberration Correction LENsCommercial SEM with aberration corrections now availableWhat are pros and cons of use in SEM?

xyzVexVpulsebLocal Electrode Atom ProbeAtom Distribution

: < 100% detection Tom Kelly - Imago

LEAP Next StepsDevelop Infrastructure in Universities and National LabsDevelop Applications Improve Detection to ~100%What to do about insulators??

ConclusionsSemiconductor Industry is already Roadmapping the 15 year horizon for NanoElectronics.NanoElectronic Research already requires characterization with atomic resolutionEconomically feasible NanoElectronic Manufacturing requires rapid, statistically significant MetrologyUS centric TEM [TEAM] project is critical to NanoTechnology

Extra Overheads

p-Si core/i-Ge/SiOx/p-Ge GL = 1500 nm EOT ~ 0.4nmObserved range of 1 to 5 A @ 1V

Diameter without metal connection to Ge gate is 50 nm1 milli-amp of current/ m needed to meet performance requirements

1 x 10-3 amps = 200 nanowire transistors x 5000 nano Amps/transistor

This would require 200 nanowires in 1 micron width = 50 nm / nanowire with Idsat = ~ 5 A/m of each nanowire transistor @ 1VddOr 1000 nano Amps/transistor x 1000 nanowire transistors with 10 nm spaceWith Idsat = ~ 1 A/m -------- an impossible pitch

SEM for CD Measurements

Ultra-Low Voltage CD-SEM- Line Edge Determination (Still) requires a modelFigure courtesy Neil Sullivan

Metal IlluminationBorden, Smith, Diebold, Chism, IEEE Transactions on Semiconductor Manufacturing16, August 2003

Metal Illumination:Detection of open viasBorden, Smith, Diebold, Chism, IEEE Transactions on Semiconductor Manufacturing16, August 2003

Capacitance TestResistance TestR-C test structures of new low Prior to manufacture

Pores are Difficult to see!!!Bryan Tracy AMDLow k Cross-section Image from most advanced Lab SEM

XRR for low process control

Optical Models for Each New Low

p(r)Pore Size DistributionDiffuse (small angle) x-ray scattering

p(r)dV/dRabPores Size Distribution via : a Diffuse X-ray Scattering b Ellipsometric Porosimetry

Cu 270 MHzAcoustic Wavelength2 - Form grating and excite acoustic wave 3 - Probe beam diffracted as wave travels parallel to surfaceImpulsively Stimulated Thermal Scattering

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149.9306876033

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39.6571761731

39.7700075191

38.6229428367

36.3390362823

33.1596366637

29.4176450431

25.5014419107

21.8133860087

18.7273137818

16.5495232722

15.4873086433

15.6282707383

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19.2380219519

22.2796297409

25.7175657093

29.1743235696

32.2747620997

34.6855552213

36.1497934546

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31.2219906397

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18.0937699459

15.9252222086

14.0730153452

12.7212789049

11.9994199338

11.9691267463

12.6186466236

13.8648569586

15.5628233331

17.521753624

19.5255965593

21.3560642984

22.8156287573

23.7480720036

24.0544559377

23.7028827742

22.7310897588

21.2416864979

19.3906196973

17.3701561606

15.3882370888

13.646417524

12.3187285152

11.5336759159

11.3612344929

11.8061492287

12.808177072

14.2491648257

15.966140665

17.7689732879

19.4606884703

20.8582748551

21.811783961

22.219733844

22.0392374407

21.2898497048

20.0508000668

18.4519766203

16.6596817973

14.85871792

13.2327295264

11.9448909133

11.1209672824

10.8365050426

11.1094523508

11.8989247451

13.1101759393

14.6051801719

16.2176487327

17.770850044

19.0963261777

20.051526027

20.534511852

20.4942248415

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18.9168471271

17.5458052753

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14.3375692222

12.8300063752

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15.8400140995

14.6320323209

13.3250433869

12.0532175953

10.945522685

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13.9978201318

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10.3493791536

9.5682464526

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10.0106319352

10.8521599288

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12.6831659796

13.4721753583

14.0587682019

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13.5688424757

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10.0667974114

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5.9794582214

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5.950368152

5.8455339721

5.7507560756

5.6754059549

5.6267066003

1

2

3

1 / Acoustic Frequency

Signal

Time (ns)

Signal (mV)

Sheet1

Parameters

TThTacFSthSacBaseline

4035260.00120805

(ns)(ns)(MHz)(mV)(mV)(mV)

TimeSignal

-255

-24.85

-24.65

-24.45

-24.25

-245

-23.85

-23.65

-23.45

-23.25

-235

-22.85

-22.65

-22.45

-22.25

-225

-21.85

-21.65

-21.45

-21.25

-215260

-20.85

-20.65

-20.45

-20.25

-205

-19.85

-19.65

-19.45

-19.25

-195

-18.85

-18.65

-18.45

-18.25

-185

-17.85

-17.65

-17.45

-17.25

-175

-16.85

-16.65

-16.45

-16.25

-165

-15.85

-15.65

-15.45

-15.25

-155

-14.85

-14.65

-14.45

-14.25

-145

-13.85

-13.65

-13.45

-13.25

-135

-12.85

-12.65

-12.45

-12.25

-125

-11.85

-11.65

-11.45

-11.25

-115

-10.85

-10.65

-10.45

-10.25

-105

-9.85

-9.65

-9.45

-9.25

-95

-8.85

-8.65

-8.45

-8.25

-85

-7.85

-7.65

-7.45

-7.25

-75

-6.85

-6.65

-6.45

-6.25

-65

-5.85

-5.65

-5.45

-5.25

-55

-4.85

-4.65

-4.45

-4.25

-45

-3.85

-3.65

-3.45

-3.25

-35

-2.85

-2.65

-2.45

-2.25

-25

-1.85

-1.65

-1.45

-1.25

-15

-0.85

-0.65

-0.45

-0.25

-05

0.2149.9306876033

0.4171.8877459396

0.6188.5317099256

0.8198.1091242909

1199.6304042313

1.2192.9652905735

1.4178.8467908371

1.6158.7842313827

1.8134.8956032486

2109.6777615314

2.285.7393671176

2.465.525097487

2.651.0602479204

2.843.7423677866

344.2013241598

3.252.2417411163

3.466.8729359199

3.686.4222075478

3.8108.7186086924

4131.3270614206

4.2151.8076077204

4.4167.9722276021

4.6178.1122266596

4.8181.1725988529

5176.8556183413

5.2165.643563298

5.4148.739099353

5.6127.9305319709

5.8105.3969614109

683.474527313

6.264.4087838498

6.450.1194213534

6.642.0019531647

6.840.786816735

746.4700637666

7.258.3221195714

7.474.9728027343

7.694.5627916225

7.8114.944843398

8133.9130252907

8.2149.4355171224

8.4159.8664459947

8.6164.1146994095

8.8161.7524409909

9153.0525945632

9.2138.9521591935

9.4120.9460584866

9.6100.9234840636

9.880.9646087577

1063.1195123444

10.249.1927862409

10.440.5564193327

10.638.0103341393

10.841.7047080395

1151.1315518303

11.265.1856448273

11.482.2876259886

11.6100.5555815047

11.8118.0065210892

12132.7662013772

12.2143.2651212336

12.4148.4002209376

12.6147.6456588756

12.8141.1015870411

13129.4764970996

13.2114.0057496674

13.496.3155853939

13.678.2475478873

13.861.6622448443

1448.2433329768

14.239.3223514458

14.435.7426001915

14.637.7759439625

14.845.1006955827

1556.8422117922

15.271.6712170041

15.487.948852083

15.6103.9026532674

15.8117.8145909733

16128.2012435505

16.2133.9672351429

16.4134.516094741

16.6129.8073542431

16.8120.3544878386

17107.164581808

17.291.6267456148

17.475.3615896031

17.660.0480516324

17.847.2460535962

1838.2336975971

18.233.8759688898

18.434.5384043461

18.640.0543004015

18.849.7483028924

1962.5132556586

19.276.9316156958

19.491.4281515465

19.6104.4375005326

19.8114.5687834332

20120.7499871499

20.2122.3371514475

20.4119.1772696709

20.6111.6188101808

20.8100.4693465182

2186.9053560324

21.272.3442226677

21.458.2923429309

21.646.1855908557

21.837.2390171412

2232.3214941395

22.231.8682147057

22.435.8398227618

22.643.7319464896

22.854.6335581944

2367.3274646142

23.280.4218740282

23.492.4988418234

23.6102.2637813496

23.8108.6802944827

24111.0763000929

24.2109.2106183581

24.4103.293453417

24.693.9591427871

24.882.1945836263

2569.2313714223

25.256.4134140321

25.445.05423113

25.636.2990730784

25.831.0063140989

2629.6603820737

26.232.3250292643

26.438.6414029982

26.647.8706102633

26.858.9757914056

2770.7346171049

27.281.8700245225

27.491.1852276023

27.697.688745418

27.8100.6964048917

2899.8998454818

28.295.3946975452

28.487.665927327

28.677.5323775068

28.866.0568031485

2954.4312623304

29.243.850202203

29.435.3847358287

29.629.8713264973

29.827.8264298801

3029.3957815113

30.234.3432725339

30.442.0801344874

30.651.7309038825

30.862.2288069645

3172.4301927269

31.281.2357555891

31.487.7057139625

31.691.156892798

31.891.2316994672

3287.9320538247

32.281.6151001378

32.472.9515864182

32.662.8517152559

32.852.3666387294

3342.5762401475

33.234.4751675151

33.428.869131628

33.626.2922650178

33.826.9539989846

3430.7207135794

34.237.1336964182

34.445.4611078745

34.654.7780977635

34.864.0663227021

3572.3221711728

35.278.6622084966

35.482.4147770157

35.683.18826945

35.880.9091558932

3675.8261064587

36.268.4801610091

36.459.6444709228

36.650.2402998202

36.841.2383925258

3733.5562577734

37.227.9622203368

37.424.9962625428

37.624.9157944648

37.827.6717762832

3832.9173606218

38.240.04777586

38.448.2668983724

38.656.6732048209

38.864.3558392573

3970.4905706667

39.274.4255442986

39.475.7479188953

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1955.6267066003

Sheet1

1

2

3

1 / Acoustic Frequency

Signal

Time (ns)

Signal (mV)

Sheet2

Sheet3

SampleRG-FilterPolarizersTi:SapphireLaserl=700-920nm,tp=100fs,Pav=400mWLensesPrismIrisPMTw2w@3eVUG-FilterRotationTableI(2w)(t)c(2)+c(3)E(t)2I(w)2SHG Experimental SetupNorm Tolk - Vanderbilt University Mike Downer University of Texas

Laser Stimulated Electron InjectionExample of leakage current measurements : Effect of X-Ray Induced Traps Before Irradiation After IrradiationTraps have two functions: to trap electrons to provide hopping centers for electron tunnelingNorm Tolk - Vanderbilt University

Coherent spin transport across GaAs/GaSb/InAs heterostructureSpin-polarized electrons are excited in GaAs by 150-fs circularly polarized lightDue to coherent spin transport, magnetization appears itself in InAs epilayerThe thermalization and cooling of electrons and holes within ~ 1 ps result in a charge separation, thus creating interfacial electric fields

The resulting electric fields bend the initial band alignment and confine spins at the interfaces, thus creating interfacial magnetic fieldsNorm Tolk - Vanderbilt University

Band offsets are crucial parameters in spin-carrier dynamics and spin-polarized carrier transport across semiconductor heterostructures. For many semiconductor interfaces under investigation for spintronics application these band offsets are experimentally not well characterized.

The external magnetic field, the surface and bulk states of the insulator, electrical and structural stress and externally introduced damage all affect the tunneling of spin carriers

Band offsets studies help us understand the photon- energy dependent measurements of optically excited spin carrier tunneling (Spin Leakage Currents) through thin insulators through the band bending due to charge redistribution. Band Offset Measurement : MotivationNorm Tolk - Vanderbilt University

At Vanderbilt, we have successfully measured band offsets at semiconductor interfaces using both IPE and SHG. We are now in the process of applying these techniques to spin interesting materials.Band Offset Measurement ApproachesNorm Tolk - Vanderbilt University

Objective lensGeneration laserProbe laserVision systemDetectorDetail in waferNew Methods

Infrastructure for Ion Beam analysisUS National Labs have great InfrastructureDont forget to use ion beam analysis for nano-technologyNumerous methods classified as Ion Beam RBSNRAHIBSMEISPIXIEEtc.

Scanned Probe Microscopy

Advanced Optical MethodsOptical Second Harmonic Generation (SHG)Spectroscopic determination of surface / interface dielectric functionUltra-fast Optical MeasurementsSHG using ultra-fast pump probe allows determination of carrier transport propertiesSpin transport characterizationBand Offset DeterminationFaraday Measurements for Spin Transport

Metrology & New StructuresLogicMemory

STORAGE MECHANISM

BASELINE 2002 TECHNOLOGIES

MAGNETIC RAM

PHASE CHANGE MEMORY

NANO FLOATING GATE MEMORY

SINGLE/FEW ELECTRON MEMORIES

MOLECULAR MEMORIES

DEVICE TYPES

DRAM

NOR FLASH

PSEUDO- SPIN- VALVE

MAGNETIC TUNNEL JUNCTION

OUM

-ENGINEERED TUNNEL BARRIER -NANOCRYSTAL

SET

-BISTABLE SWITCH -MOLECULAR NEMS -SPIN BASED MOLECULAR DEVICES

ABCMetrology & Molecular ElectronicsPaul Weisss Group STM of Conductance Switching

Nanowire Transistors and InterconnectL.J.LAUHON, M.S.GUDIKSEN, D.WANG & CHARLESM.LIEBERNature 420, 57 - 61 (2002)500 nm10 nm p-Si core diameter & 10 nm i- Ge layer5 nm layer of Ge on top of 4 nm SiOx

Describe what each line means. Technology Nodes defined by DRAM pitchLogic gate length (isolated feature easier to pattern than dense feature) smaller than DRAM pitch

DRAM at 65 nm node is 1 Gig 8 Gig at 22 nm node

Remember to state that tool suppliers, IC manufacturers, and development organizations (for example universities) need to work together. IC manufacturers need to provide ~20 nm features to these organizations. This needs encouragement. Describe what each line means. Technology Nodes defined by DRAM pitchLogic gate length (isolated feature easier to pattern than dense feature) smaller than DRAM pitch

DRAM at 65 nm node is 1 Gig 8 Gig at 22 nm node

Remember to state that tool suppliers, IC manufacturers, and development organizations (for example universities) need to work together. IC manufacturers need to provide ~20 nm features to these organizations. This needs encouragement. The monopole RGA sold by Ferran is also a MEMS sensor. MEMS is more than silicon based miniaturization

Mini-SEMs have are in the demonstration of feasibility stage.

NIST has done some work in the area of MEMS test structures for interconnect stress (these structures would be placed in scribe areas of the wafer)Metrology starts with understanding of the process tools

Transistor gate length must fall with in a range of values. If the CDs are within this range, the gate delay will be the same for all the transistors provided other processes such as implant dose are identical. This is a part of keeping the circuit operating at the highest clock speed.Rigorous coupled wave theory (RCWT) is simply a mathematical mechanism that allows for the direct solution of the electromagnetic fields diffracted by a grating

WHY HOLOGRAPHY?

Why low beam energies?

To minimize artifacts due to beam penetration, to minimize energy deposition and hence radiation damage in buried oxide layers, to reduce chargingBut........ The performance of low energy SEMs is limited by chromatic aberration, and diffraction effects, in the probe forming lens to a spatial resolution that is not adequate to achieve the performance required for 0. 10 micron design rule devices.

A solutionUse a nanotip field emitter, operating at 100 volts or so. This emits a highly coherent electron beam which is scattered and reflected from a patch 20 30 micrometers in size on the surface of the device. The unscattered and scattered waves interfere to produce a hologram in the region downstream of the tip. A step and repeat technique is used to observe the complete specimen area.

AdvantagesThis instrument uses no lenses so it has neither aberration nor diffraction limitations. The resolution is limited by the electron wavelength. The electron beam is divergent so the beam dose rate is low, minimizing charging, contamination, and radiation damage.

Special benefitsAll features in the illuminated patch contribute to the hologram, so the repeat spacings (in both the horizontal and vertical planes) that are determined from the hologram yield a statistical analysis of the entire area simultaneously. The hologram is self calibrating because the fringe spacing is only a function of the electron energy. No high speed scanning is required so the bandwidth and slew rate limiting artifacts characteristic of conventional e beam tools are absent.

Historical NoteThis idea was first conceptualized by Russ Young (the guy who really invented the scanning tunneling microscope) at NBS in the 1970s. It was re discovered and demonstrated by Fink (IBK Zurich) in the 1980s and by Spence (ASU).Other Uses?(1) The hologram could be compared with a standard test hologram to yield an interferogram. which identified all regions not identical with the standard. It might thus be suitable for defect review.(2) By placing "electron mirrors in the ray path interference patterns of arbitrary form can be produced at the sample. This spatial modulation of the beam intensity can be used for example for resistless lithography. No mask is required, and the low beam energy ensures a high rate of exposure at the surface.David JoyFigure 5 Coaxially-gated nanowire transistors. a, Device schematic showing transistor structure. The inset shows the cross-section of the as-grown nanowire, starting with a p-doped Si core (blue, 10nm) with subsequent layers of i-Ge (red, 10nm), SiOx (green, 4nm), and p-Ge (5nm). The source (S) and drain (D) electrodes are contacted to the inner i-Ge core, while the gate electrode (G) is in contact with the outer p-Ge shell and electrically isolated from the core by the SiOx layer. b, Scanning electron micrograph (SEM) of a coaxial transistor. Source and drain electrodes were deposited after etching the Ge (30% H2O2, 20s) and SiOx layers (buffered HF, 10s) to expose the core layers. The etching of these outer layers is shown clearly in the inset and is indicated by the arrow. The gate electrodes were defined in a second step without any etching before contact deposition. Scale bar is 500nm. c, Gate response of the coaxial transistor at VSD = 1V, showing a maximum transconductance of 1,500nAV-1. Charge transfer from the p-Si core to the i-Ge shell produces a highly conductive and gateable channel.