mems ultrasonic sensors - people @ eecs at uc berkeley · 2019-04-25 · 1 swarm lab university of...
TRANSCRIPT
![Page 1: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/1.jpg)
1 SWARM Lab University of California Berkeley Sensor & Actuator Center
MEMSUltrasonic Sensors
Richard Przybyla, Hao-Yen Tang, Stefon Shelton†,Prof. David Horsley†, and Prof. Bernhard Boser
University of California, Berkeley & †Davis
![Page 2: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/2.jpg)
2 SWARM Lab University of California Berkeley Sensor & Actuator Center
[D.R. Griffin, J. Animal Behaviour, 1960]
Uses ultrasound to navigateIdentifies insects from wing velocityTargets mosquitoes from 80 cm away
![Page 3: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/3.jpg)
3 SWARM Lab University of California Berkeley Sensor & Actuator Center
Range Resolution
Voltage
Time
∆𝒓
∆𝒓≅ 25mm
![Page 4: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/4.jpg)
4 SWARM Lab University of California Berkeley Sensor & Actuator Center
fo ≈ 190kHzBW ≈ 6.3kHz
–
AlN pMUT Operation
Si
Al
450μm250μm
+
AlN
AlNMo
AlNAl
1μm
2μm
![Page 5: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/5.jpg)
5 SWARM Lab University of California Berkeley Sensor & Actuator Center
Angle Measurement
-60 -40 -20 0 20 40 60
0.25
0.3
0.35
0.4
0.45
0.5
0.55
0.6
0.65
0.7
0.75
-60 -40 -20 0 20 40 60
0.25
0.3
0.35
0.4
0.45
0.5
0.55
0.6
0.65
0.7
0.75Range
Angle
θ
![Page 6: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/6.jpg)
6 SWARM Lab University of California Berkeley Sensor & Actuator Center
Medical Ultrasonography
Good resolution possible because of large transducer
![Page 7: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/7.jpg)
7 SWARM Lab University of California Berkeley Sensor & Actuator Center
Custom Readout ASIC
Amplitude Tracking
![Page 8: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/8.jpg)
8 SWARM Lab University of California Berkeley Sensor & Actuator Center
2.5mm2mm x 1mmactive area
CMOS ASIC
MEMS ultrasound chip
![Page 9: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/9.jpg)
9 SWARM Lab University of California Berkeley Sensor & Actuator Center
www.chirpmicro.com
![Page 10: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/10.jpg)
10 SWARM Lab University of California Berkeley Sensor & Actuator Center
![Page 11: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/11.jpg)
11 SWARM Lab University of California Berkeley Sensor & Actuator Center
Capacitive Fingerprint SensorHumidity Spoofing
Ref: FPC1011F3 Area Fingerprint Sensor, http://www.fingerprints.com/wp-content/uploads/2014/01/FPC1011F3_product-sheet_.pdf
Dry Finger
Wet Finger
“Paper” fake fingerprint
Captured Image
![Page 12: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/12.jpg)
12 SWARM Lab University of California Berkeley Sensor & Actuator Center
Operating Principle
ZPDMS = 1.5 MRayl
PDMSPin
Ultrasonic wave
Pin
Transmission line Characteristic ImpedanceèAcoustic Impedance
Z = ρv(Density × Speed of Sound)
PDMS
Dermis
Epidermis
![Page 13: MEMS Ultrasonic Sensors - People @ EECS at UC Berkeley · 2019-04-25 · 1 SWARM Lab University of California Berkeley Sensor & Actuator Center MEMS Ultrasonic Sensors Richard Przybyla,](https://reader034.vdocuments.us/reader034/viewer/2022050223/5f68e69ff901de718709457c/html5/thumbnails/13.jpg)
13 SWARM Lab University of California Berkeley Sensor & Actuator Center
System Integration
CMOS(0.18µm, 24V)
MEMS
Anchor
CMOS
MEMS
Eutectic Bonding