mems technologies
TRANSCRIPT
-
8/8/2019 MEMS Technologies
1/2
AccesstoSandias
SUMMiTTMVProcessMEMSprototypingonMulti
ProjectWafersutilizingour
5LayerSUMMiTVTMPolysiliconProcess
AvailablethroughSANDIAs
SAMPLESProgram;customershave
accesstoMEMSprototyping,design
tools&services,education
NovelFabricationTechnologies
SUMMITVTMTechnology
ReliabilityScience
DesignandAnalysis
SAMPLESProgram
UniversityAllianceMultiProjectWafers
Informationabouttheseand
othercapabilitiescanbefoundat
mems.sandia.gov
MicrosystemsScience,TechnologyandComponents
www.sandia.gov/mstcexceptionalserviceinthenationalinterest.
SandiaisamultiprogramlaboratoryoperatedbySandia
Corporation,aLockheedMartinCompany,fortheUnited
StatesDepartmentofEnergysNationalNuclearSecurityAdministrationundercontractDEAC0494AL85000.
SandiaNationalLaboratories
MEMSTechnologies
Conductingresearchand
developmentactivitiesfor
advancedmicroelectromechanical
systemsthatpushthetechnology
envelopefornationalsecurity
applications.
Developingandmaintaininga
coresetofMEMSfabrication
processesandtechnologies.
5layersoflowstresspolysilicon StandardProcesses CMPplanarization BatchFabrication Modulearea2,820umx6,340um AlCuMetallizationLayer0.70um 100unreleasedparts Releaseavailableonrequest SharedCosts
mems.sandia.gov/samples
SAND#2008-4871C 2008 Sandia National Laboratories
-
8/8/2019 MEMS Technologies
2/2
ProcessTechnologiesOurMEMSfabricationprocessingtechnologiesinclude
ourbaselinepolysiliconsurfacemicromachining
process,SUMMiTV(SandiaUltraplanarMultilevel
MEMSTechnologywithfivelevelsofpolysilicon),and
variationsonSUMMiTVthatincorporate,forexample,
siliconnitridelayers,thickpoly4,AlCumetallization
layer,deepreactiveionetching(DRIE),siliconon
insulator(SOI)wafers,and/ordopingtocreatefield
effecttransistors(SFET).AdditionalMEMSfabricationtechnologiesincludepostCMOScompatibleprocesses
formoldedtungstenandaluminumnitride.
MEMSatSandiaNationalLaboratoriesOurprogramsinadvancedMEMSincludeactuators,pressuresensors,inertialsensors,fluidic
components,electricalswitches,RFswitchesandfilters,mirrors,planarlightwavecircuits
(PLC),solarcells,andradiationdetectors.Wespecializeinhighperformanceandhigh
securityapplications,wherelowcostisnottheprinciplemotivationforusingMEMS.Weuseadvancedtechniquestoachieveuniquedevices,suchasopticaltransductionof
displacement.Noveldesignsandapplicationsarecloselycoupledtoourprocessing
technologies,pushingthedesignprocessingenvelopetoenablespecialcapabilities
fornationalsecurityneeds.
ServicesSandiascoreMEMSservicesincludedesignand
layout,analysis,devicecharacterizationandtest,
technologydevelopmentandreliabilityscience
coupledwithfailureanalysis.
Ourfabricationprocessesandothercore
technologiesareavailableoutsideofSandiato
supportnationalsecurityinterests,suchas
prototypedevelopmentand/orlimitedproduction
ofhighvaluedevices.
Wehavestrongtiestouniversitiesthougha
comprehensiveUniversityAllianceProgramand
withindustrythroughourSAMPLESprogram,which
offersaccesstoSUMMiTV.WorkingwithSandiaIndustry,smallbusiness,universities,andgovernmentagenciescangainaccesstotheseadvancedMEMS
technologiesandservicesbydevelopingnewpartnershipswithSandiaviaavarietyofagreementmechanisms.
SandiaprovidestechnicalresourcesandfacilitiestoavarietyofotherfederalagenciesthroughourDOE
sponsored"WorkforOthers"program.
FormoreinformationaboutpartneringwithSandia,seesandia.gov/busops/partnerships/ways/index.html