mems & sensors - stech.cz sensors – applications . mems ... 6 degrees of freedom for movement...
TRANSCRIPT
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MEMS & Sensors
Vladimir Janousek
November 2011
STMicroelectronics
www.st.com/mems
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ST: the one-stop MEMS supplier
ST MEMS
technology is at
the heart of a fast
growing family of
sensors
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• MEMS is Micro Electro Mechanical Systems
• MEMS contain movable 3-D structure
• Structure move accordingly to external displacement
• In MEMS not only electrons are moving!
What is MEMS?
SEM* pictures of a capacitive micro-
machined structure manufactured with
THELMA process
*SEM: scanning electron microscope
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MEMS
Sensors Mobile, PDAs,
MP4/MP3
Image stabilization, Menu
Navigation, Portrait /
landscape, Shock
monitoring, HDD protection,
Noise cancellation
Robotics
Roll over detection,
Motion & position
sensing, IMU
Consumer
Image scrolling, Shock
detection, Power
Management, Pointing
Automotive
Navigator system, Alarm,
Active/passive safety,
Headlight control, E-call,
Hand-free kit
Gaming
& Sport
Gesture
recognition, Motion,
Position sensing,
Pedometer
Industrial
& Medical
Tilt & Vibration
Measurement, Alarm,
People Monitoring
MEMS Sensors – Applications
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MEMS Market by Products
MEMS market share
All segments (extract)
Source: IHS iSuppli Corp. | Jan 2011
4B$ (+11%)
* Magnetometer data source from Yole May 2011
ST Presence:
Microphone: Since end of 2010
Magnetometer: Since 2010
Gyroscope: Since 2009
Pressure Sensor: New in 2012
Accelerometer: Since 2006
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ST Investing heavily in MEMS
Sensors (8” MEMS dedicated line)
ASIC Front-end
Assembly & Testing
Calamba
(Philippines)
Agrate (Italy)
Catania (Italy)
Kirkop
(Malta)
Rousset
(France)
Crolles (France)
Global & Outstanding Manufacturing Capability
Increase manufacturing
capacity toward…
3Mpcs/day (by the end of 2011)
Agrate
Catania
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MEMS FAB: Dedicated FE + BE
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GOOD & COST
EFFICIENT PRODUCT
Testing Manufacturing
Manufacturing Flow
Mech
Testing
Interface
Testing
Packaging Final Test
Final
Testing
&
Calibrat.
ST MANAGES THE COMPLETE SUPPLY CHAIN
CUSTOMER
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MEMS Accelerometers
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Some ‘g’ references
Passenger car acceleration
Earth’s gravity
Emergency braking (Formula 1)
Running
Bobsleigh rider in corner
Human unconsciousness
Walking down/up stairs
Running
Vibrations
Car Frontal choc high speed
Car Frontal choc high speed
Car Frontal choc high speed
Tennis ball
0.2 / 0.3g 1g (by definition) 1g <5g (shock at low back level) 5g 7g 7.4/8g (shock at ankle level) 8/12g (shock at ankle level) 10/15g 35g (shock at head level, with Airbag) 40g (for the vehicle) 65g (shock at head level, without Airbag) 500/700g
Managed by ST Accelerometers
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Group of
inter-
digitized
fingers to
measure the
linear
acceleration
on X-axis
Group of inter-digitized fingers to
measure linear acceleration on Y-
axis
x
y
MEMS - Accelerometer
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MEMS sensor
Z-axis linear accelerometer
acceleration
applied to the
sensing
element
torsional axis of
the springs
Z
X
Y
Stator2 Stator1 Selftest
Rotor
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MEMS sensor
XYZ -axis linear accelerometer
Z-axis
X-Y axis
Glass frit ring
Pads region
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Accelerometer Product Focus – LIS3DH
3-Axis Accelerometer
Digital SPI/I2C output
Able to measure accelerations with 4 selectable Full
Scale: ±2, 4, 8 and 16g
High Resolution (up to12 bit)
Very low power consumption: 2µA in Low power
mode (1Hz), 11µA in Normal mode (50Hz) and .5µA
in Power down mode
High Flexibility:
8 ODR user selectable: 1/10/25/50/100/400/1600/5000 Hz
Bandwidth up to 2.5KHz
32-level FIFO (for16-bit data)
3 ADC Inputs
Wide Power supply range 1.71 to 3.6V
Self test function
Small size package 3x3x1 (in mm)
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LIS33DE
6/8-bit
±2 / ±8g
3 x 3 x 0.9
Cost
effective LIS331DL
8-bit
±2 / ±8g
3 x 3 x 0.9
LIS331DLM
8-bit
±2 / ±4 / ±8g
3 x 3 x 0.9
LIS331DLH
12-bit
±2 / ±4 / ±8g
3 x 3 x 0.9
Hig
h
perf
orm
ance
LIS35DE
6/8-bit
±2 / ±8g
3 x 5 x 0.9
Cost
effective
LIS302DL
8-bit
±2 / ±8g
3 x 5 x 0.9
LIS3LV02DL
12-bit
±2 / ±6g
4.4 x 7.5 x 0.9
LIS344ALH
50µg/Hz
±2 / ±6g
4 x 4 x 1.5
Hig
h
perf
orm
ance
LIS352AX/AR
100µg/Hz
±2g
3 x 5 x 0.9
LIS332AX/AR
100µg/Hz
±2g
3 x 3 x 0.9
Digital interface I2C/SPI Analog interface
Higher resolution / Embedded Features Lower noise / higher performances
Sm
alle
r siz
e
Hig
h r
unner
Accelerometers - Portfolio
3 x 3 x 0.9
Hig
h
perf
orm
ance
Hig
h r
unner
LIS3DH
12-bit
±2, 4, 8, 16g
Hig
h
perf
orm
ance
AIS328DQ
12-bit
±2 / ±4g / ±8g
4 x 4 x 1.8
AE
CQ
-100
LIS331HH
12-bit
±6 / ±12 / ±24g
3 x 3 x 0.9
Hig
h
perf
orm
ance
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MEMS Gyroscopes
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Gyro product focus - L3G4200D 3-Axis Gyroscope, Digital SPI/I2C output
High precision, 16 bit resolution
Able to measure rotations with 3 selectable
Full Scale: ±250°/s, ±500°/s and
±2000°/s
Power down and Sleep modes
Interruption and Data Ready output lines
High performances:
High Sensitivity: 8.75m°/s @ 250°/s FS
High Resolution: 0.03°/s/Hz @ 40Hz
High Thermal Stability (0.08°/s/°C)
Programmable Low and High pass filters
High Shock Survivability: 10000g for 0.1ms
High number of embedded Features:
4 Output Data Rates:100, 200, 400, 800Hz
Wide power supply range: 2.4 to 3.6V
8-bit temperature output
32-level FIFO
Self test function
Small package 4x4 LGA
Drive
Yaw sense
Pitch sense
Roll sense
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MEMS Gyroscopes – Key Products
Single axis Dual axis
4x5x1
LPR430AL
±300dps
±1200dps
4x5x1
LPY430AL
±300dps
±1200dps
4x5x1
LPR410AL
±100dps
±400dps
4x5x1
LPY410AL
±100dps
±400dps
4x5x1
LPR403AL
±30dps
±120dps
4x5x1
LPY403AL
±30dps
±120dps
4x5x1
LPR450AL
±500dps
±2000dps
4x5x1
LPY450AL
±500dps
±2000dps
4x5x1
LPR4150AL
±1500dps
±6000dps
4x5x1
LPY4150AL
±1500dps
±6000dps Gaming
Pointing devices
Gesture recognition
Signature
Robotics
Image Stabilization
People Monitoring
Car Navigation
IMU
3x5x1
LY330ALH
±300dps
Yaw Pitch & Roll Pitch & Yaw
3x5x1
LY3100ALH
±1000dps
Yaw, Pitch & Roll
Tri axis
4x4x1
L3G4200D
L3GD20
±2000dps
±500dps
±250dps
3x5x1
LY3200ALH
±2000dps
3x3.5x1
L3G3250A
±2500dps
±625dps
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MEMS E-compass
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MEMS Module (SIP System in Package)
LSM303DLM & LSM303DLHC* MEMS Compass
Targeted applications Compensated compass
Location based services (LBS)
Map rotation and Position detection
Magnetic Signature recognition
6 Degrees of Freedom for Movement reconstruction, recognition and intelligent power saving
E-compass – LSM303DLx:
MEMS Accelerometer + Magnetic sensor
3-axis accelerometer
3-axis magnetic sensor
I²C digital interface
Power-down mode
Interrupt line
* Available in Q4 2011 for MM
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MEMS Microphones
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Transduction principle is the
coupled capacity change between
a fixed plate and a movable plate.
MEMS microphone structure
22
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MEMS Microphone – MP45DT02 Top Digital microphone, Pulse Density Modulation
single bit output with stereo support
Omni-directional sensitivity
High level performance for :
Signal to noise ratio: 58dB (@1KHz)
Acoustic overload point: 120 dBSPL
Power supply rejection: -70 dBFS
10ms wake-up time
High Frequency response :
Voice / Hearing range 20Hz to 10 kHz
23
STM32
Low power consumption
(normal / low power):
650µA / 20µA
Small Package, 4x5x1.5
HLGA package
Single supply voltage
from 1.64 to 3.6V
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MEMS Microphone – MP34DT01*
Top-port Digital microphone, Pulse Density
Modulation single bit output with stereo support
Omni-directional sensitivity
High level performance for :
Signal to noise ratio: 62dB (@1KHz)
Acoustic overload point: 120 dBSPL
Sensitivity of -26dBFS
Power supply rejection: -70 dBFS
10ms wake-up time
High Frequency response :
Voice / Hearing range 20Hz to 20kHz
Low power consumption
(normal / low power):
650µA / 20µA
Small Package, 3x4x1
HLGA package
Single supply voltage from
1.64 to 3.6V
* Available in H1 2012 for MM
NEW
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MEMS Pressure Sensors
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26
Pressure sensor: LPS331AP*
260 – 1260mbar Absolute digital output
Barometer
From 0.45 to 0.02 mbar resolution
Embedded temperature sensor
Embedded Offset and Span temp
compensation
Supply voltage 1.71 to 3.6 V
Low power consumption (@1Hz)
45µA @ 0.02mbar resolution
6µA @ 0.16mbar resolution
1µA power down
ODR from 1 to 25Hz, one shot possible
SPI / I2C, 2x Interrupt lines
Operating range: -20° to 105°C
* Available in Q4 2011 for MM
NEW
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Tools, SW & Evaluation Kits
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MEMS support tools Possible Daughter boards:
STEVAL-MKI109V1
STM32-based
MEMS motherboard
compatible with ST
MEMS adapters
LIS3DH
MKI105V1
L3G4200D
MKI107V1
LSM303DLM
MKI113V1
High
Runner
LSM303DLHC
+
L3G4200D
MKI108V1
AIS328DQ
MKI110V1
And
many
others…
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10-DegreesOfFreedom platform:
3-Axis Accelerometer
3-Axis Gyroscopes
3-Axis Magnetometer
1 Dimension of pressure information
STLM75: temperature sensor with –55 to +125°C
range and I2C
MCU - STM32F103RE
STEVAL-MKI062V2 – iNEMO – 10-DOF
http://www.st.com/internet/evalboard/product/250367.jsp
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STM32 F4 Discovery kit
• Develop your applications
easily with everything required
for beginners and experienced
users to get started quickly with
CortexTM-M4
• Based on STM32F407 in
LQFP100 package
• Includes on-board ST-LINK/V2
http://www.st.com/stm32f4discovery
LIS302DL - Accelerometer
MP45DT02 – Microphone
… on the board
300,-
CZK
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Key Messages & Conclusion
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Products focus for 2011
3-axis Digital Accelerometer: LIS3DH (LIS331DLH)
3-axis Digital Gyroscope: L3G4200D
6-axis Digital e-Compass: LSM303DLM (LSM303DLHC*)
Absolute Pressure Sensor: LPS331AP*
Digital Microphone: MP45DT02 (MP34DB01)
* Available in Q4 2011 for MM
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>1.5 billion motion sensors already sold in
the market by ST
Continuous challenges
MEMS Mechanical structure design:
Die shrink with superior or equal Mechanical properties
ASIC electronic design:
Reduce power consumption
Increase available features
Technology & Packaging
Increase Manufacturing and Test equipments capacity
Develop new products and Modules (System in Package)
Many applications & domains are still to investigate for
MEMS
ST is the company to provide you a complete set of sensors