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Lecture 2

Introduction to MEMSWelcome to the fascinating and wide

world of MEMS

ECE/ME/IE 485

University of Illinois

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Physical vs. Biological

Micr

oworld

0.1 nm

1 nanometer (nm)

0.01 mm10 nm

0.1 mm100 nm

1 micrometer (mm)

0.01 mm

10 mm

0.1 mm

100 mm

1 millimeter (mm)10-3 m

10-4 m

10-5 m

10-6 m

10-7 m

10-8 m

10-9 m

10-10 m

Visible

Nanoworld

1,000 nanometers =

Infrared

Ultraviolet

Microwave

S

oftx-ray

1,000,000 nanometers =

Red blood cells(~7-8 mm)

Fly ash~ 10-20 mm

Human hair

~ 60-120 mm wide

Dust mite

200 mm

ATP synthase

~10 nm diameter

Atoms of siliconspacing 0.078 nm

DNA~2-1/2 nm diameter

Life Systems

Quantum corral of 48 iron atoms on copper surfacepositioned one at a time with an STM tip

Corral diameter 14 nm

Nanotube electrode

Carbon nanotube~1.3 nm diameter

Zone plate x-ray lensOuter ring spacing ~35 nm

Courtesy ofOffice of Basic

Energy SciencesOffice of Science,

U.S. DOE

MicroElectroMechanical(MEMS) devices10 -100 mm wide

Red blood cellsPollen grain

Carbonbuckyball

~1 nmdiameter

Self-assembled,Nature-inspired structure

Many 10s of nm

Physical Systems

Micro / Nano

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The size scale: Microns

1 mm = 1/1000 mm 1 nm = 1/1000 mm = 1/1,000,000 mm

Characteristic length scale of MEMS

1 micrometer to 1 mm

Special case: large distributed array.

15 mm

Large array Small nodes

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Today

Why are small things important?

Where did MEMS come from?

What is the future of MEMS?

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How big is MEMS?

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The size scale: Microns

What is a micrometer?

Lets take a journey through diminishing

scales

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10 meters

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1 meter

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0.1 m

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0.01 meter, or 10 mm

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0.001 meter, or 1 mm

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0.1 mm, or 100 mm

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10 mm

Human hair

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1 mm

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0.1 mm or 100 nm

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0.01 mm or 10 nm

The realm of molecules, DNA, proteins, and atoms

Nanotechnology

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Small

Small does not lead to nothing ordiminishing importance.

Instead, Small leads to

Fundamental building blocks of life Nanotechnology, the underlying theme of

science and engineering

Microfabrication and micromachiningcapabilities

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Inspiration for MEMS &Nanotechnology:

There is Plenty of Room at theBottom (1959)

Prof. Richard Feynman (1918-1988)

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What Has Feynman Predicted?

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Feynmans Grand Challenge Foresight Institute offers a $250,000 prize for the first persons to design

and build two nanotechnology devices - a nano-scale robotic arm and acomputing device that demonstrates the feasibility of building ananotechnology computer. Fund raising is continuing in an effort toincrease the prize to $1 million.

design, construct, and demonstrate the performance of a robotic armthat initially fits into a cube no larger than 100 nanometers in anydimension, meeting certain performance specifications including meansof input. The intent of this prize requirement is a device demonstratingthe controlled motions needed to manipulate and assemble individual

atoms or molecules into larger structures, with atomic precision; and

design, construct, and demonstrate the performance of a computingdevice that fits into a cube no larger than 50 nanometers in anydimension. It must be capable of correctly adding any pair of 8-bitbinary numbers, discarding overflow. The device must meet specified

input and output requirements.

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Dentists drill (1 mm)

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Artery (1 mm)

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Velcro (1 mm)

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Muscle Fiber (1 mm)

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Man made compound eye inspired by fly eyes

Luke Lee, Berkeley

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Bioinspiration of Repellant

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What is MEMS?

MEMS is a class of device

As well as a means of fabrication and

manufacturing.

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Interdisciplinary Traditional

Above mm: traditional mechanicsmm to mm: microelectronics and electricalengineering

Nanometer to mm: chemists

Now Micro

Nano

Engineering Chemistry

Feeds each other and form a coherent platform ofknowledge and innovation.

Wh did MEMS f ?

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Where did MEMS come from? Microelectronics and MEMS

Stories from the early days MEMS in the 1990s

A Macro Electromechanical systemA Microelectronics Circuit

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Where did MEMS comes from?

Microelectronics

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MicroelectronicsThe IT Backbone

Microelectronics and optoelectronics Infrastructure of todays information technology

communication, computation, control

Model, design, fabrication technology, and deviceimplementation for microprocessors, data storage,and communications

Fiber for fast internet 1TB Hard Drive Low lost, photo-

Quality Ink JetCartridge

Personal communication Digital photography

1947

2011

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In turn Microelectronics fabrication process gives

High density hard drive disks, which in turn leads to Digital music -> Ipods TiVo -> fundamental transformation of advertising industry Surplus storage ability

Display Plasma TV, large screen home entertainment

High performance CPU gives Low cost laptop computers Bioinformatics: deciphering personal human genome Engineering designs and simulation -> airplanes, ships, etc Internet

Low cost / high performance controllers Automobiles with lighter weight and better fuel efficiency

Integrated analog electronics Small sized electronics and machines

cell phones

Semiconductor laser: portable CD player

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History of MEMS Technology

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http://www.youtube.com/watch?v=n3YMjgbhvTA
http://www.youtube.com/watch?v=n3YMjgbhvTAhttp://www.youtube.com/watch?v=n3YMjgbhvTA

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Micro Electro Mechanical

Systems

Accelerometer(Analog Devices)

Digital Light Processors (DLP)(Texas Instruments)

Ink Jet Nozzle(HP)

Miniaturization& Resolution(1 mm-1mm)

Mechanics/ElectronicsIntegration

ParallelFabrication

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Market Size Examples

Ink jet HP: $650M/yr

Epson and Xerox: $350M/yr

TI DLP

$600M/yr

Accelerometer ADI: $120M/yr

Freescale Semiconductor: $100M/yr

Po er Elec

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1980 1990 2000

BioMEMS

Microfluid

RFMEMS

AeroMEMS

SensorNet

NEMS

Display

SoftLitho

mRoboticsPowerGen

Foundry

Data store

Inertial Sen.Security

Biometrics

Env. Monit.

Dist. MEMS

Power Elec.

Materials

ProcessesEquipment

micromotor

Petersen paper

bioMEMS and microfluid

1st transistor

(1947)

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The Silicon Material Family

Single crystalline silicon: Bulk silicon by melt/crystallization

Thin film silicon by epitaxy

Polycrystalline silicon: CVD

Amorphous silicon: CVD

Silicon nitride

Silicon dioxide

Illinois Strong Laboratory Support

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Illinois - Strong Laboratory Supportand Rich Tradition

Microelectronics Clean room

8000 ft2 clean room facility, top notch in the country

Equipment capable of writing 10 nm (0.00000001 m) fine lines

ECE Department clean room (education)

Materials research laboratory (MRL)

Materials characterization; microfabrication facility Beckman Institute

Microscopy suite, computing and simulation

Bardeen and co-workers

invented the semiconductortransistor

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SEM of modern transistor

circuitry

3D Features

Outline

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Outline Stories from the early days

MEMS in the 1990s

Stories from the early days Micro resonant gate transistor (Westinghouse Research, 1967)

Micromachined gas chromatograph (Stanford, 1975)

Micromachined pressure sensors (Petersen at IBM, 1970s) Micromachined ink jet nozzles (HP and others, 1985)

Micro infra-red detector (Honeywell)

Miniature chip coolers (Stanford 1978)

Gate

Drain Source

Gate

Drain Source

Regular FET Resonant gate FET

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I k J t P i t1984 1987 1991 1993 1995

180 145 130 90 40

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Ink Jet Printer

ink ink

Ink jet printer

0

50

100

150

200

1980 1985 1990 1995 2000

Year

Dropweight(ng)

1984 1987 1991 1993 1995

10 50 55 100 300

0

50

100

150

200

250

300

350

1980 1985 1990 1995 2000

Year

NumberofN

ozzlesperpen

Hewlett-Packard Photo

O tli

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Outline Stories from the early days

MEMS in the 1990s

Micro Inertial Sensors (accelerometers and gyro)

Data storage

RF communications

Optical switching and multiplexing for fiber networks

Micro fluidics

Biomedical applications (micro medical instruments)

Displays

Energy storage and generation

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Micromachined Gyro Chip

Range: +/- 50-1000o/sec

Stability 0.002 o/sec short term

0.2 o/sec long term

Comparison with conventionalLarge scale gyro

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Accelerometers

Analog Devices Accelerometer

Full range: 0-5gsensitivity: 200 mV/g

resolution: 5 mg at 100 Hz

noise floor: 0.5 mg/(Hz)1/2BT Smart Quill

Also, 10 million sold on 5/15/1998 by

Motorola

British Communications

Motorcycle

security sensor

www ti com/dlp TI Photos

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ECE/ME/IE 485

Lecture 2

55

Digital Micro Mirrorswww.ti.com/dlp

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Butterfly Wing Inspiration for display Butterfly and moth derives their vibrant color partially

from structural optical interference and diffraction.

Digital paper

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Digital paper Reflectivity 80%

Contrast ratio: 20:1

Viewing angle: +/- 60o

Operating voltage: 5 v

No power for holding image

1000 dpi resolution possible

Silicon Light Machines

Iridigm-Qualcomm iMOD

SLM Photos

Iridigm Displays Photos

www.iridigm.com

Micro Optical Systems

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Micro Optical Systems High-speed, low-loss,

electrically controlled optical

switches MxN switches

1xN switches

add/drop switches

Micro Air Vehicle and other DARPA

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c o e c e a d ot eFunded Efforts

Micro machined Ne ron Interfaces

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Micro-machined Neuron Interfaces

Caltech Neuron Well

Utah Implantable Neuron Probe

Illinois Neuron Probe Array

It is a wireless world

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It is a wireless world Wireless infrastructure Bluetooth, Wireless LAN

Applications: wireless internet, smart building, smart

highway, wireless sensor network, smart toys,

A low cost, high performance, small volume,powerefficient front end is key to hardware success.

MEMS for Information Technology

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MEMS for Information Technology

d2E1

E3 E2 E3

d1C

DC actuationVoltage V

Mechanical

Support

Wearable Embedded Systems

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Wearable Embedded Systems

Adidas 1 smart shoe

Where is MEMS Going?

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Where is MEMS Going?

Research becomes interdisciplinary; field rapidly expanding toincluding many different areas of expertise.

Small, low cost, smart devices finding unprecedentedapplications Military: sensor network for unattended battlefield monitoring

Biology: cell sorting and manipulation

Chemistry: micro chemical systems Medicine: micro surgical tools with smart sensors

Homeland defense: distributed environmental sensors with wireless

Aeronautics: smart skin for flow sensing

Gaming and toys: sensors

MEMS related to Biology and

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gyMedicine

Biofluidics

active drug delivery chips cell transport and sorting

assay storage andtransportation

fluidics monitoring optical (fluorescence)

magnetic micro chemical reactors

Personal gene sequencingmachines

Cell manipulation transport across cell wall

cell characteristics monitoring

neuron prosthesis

cell and tissue based sensors

Tissue engineering

whole organ engineering forcritical organ transplant

blood vessel, kidney,musculoskeletal

Medical applications blood vessel cleaning

total health monitoring micromachined surgical tools

cell cytometry

biochemical sensing total blood analysis

Genetic analysis

DNA amplification DNA transportation andmanipulation

Engineered Liver Tissue with

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Engineered Liver Tissue withMicrofluidic Vasculature

66

Vacanti, Harvard Medical School

Engineered Liver Tissue with

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Engineered Liver Tissue withMicrofluidic Vasculature

Vacanti, Harvard Medical School

Whole Blood Analysis at Home

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iSTAT System

Patient-side testing with

disposable cartridge for11 tests

electrochemical sensors

potentiometric (Na, K,Cl, urea, Ca, pH andCO2)

amperometric(glucose, creatinine,oxygen)

conductometric.

Coagulation detection

viscometricendpointdetection

N dl ith t P i

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Needle without Pain

Georgia Tech

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Implantable MEMS Drug Delivery

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Cima & Langer, MIT, 2004

Cell Handling and Cell Transport

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Cell Handling and Cell Transport

Transport individual embryos to stations

for monitoring and/or manipulation.

Portable Cell Sorters for Medical

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Diagnosis

Quake, Stanford

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Retina Prosthesis

C hl I l t f H i

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Cochlea Implant for Hearing

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Cooperating with Biology -

RoboRoach http://www.cae.wisc.

edu/~sonicmem/ U. Michigan

Isao Shimoyama,Tokyo University

MEMS for Nanotechnology and

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MEMS for Nanotechnology andNEMS

Prof. Michael Roukes,Caltech

Prof. Joe Lydings Group, UIUC

Applications: on-demand construction of materials; construction of

tailor-made DNA and protein sequence.

IBM Millipede Trillion Bits/in2

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IBM Millipede Trillion Bits/in Data Storage

77

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NanoInk

Conclusion

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Early MEMS: Industrial sensors, IC-derived devices

MEMS in 1990 Interdisciplinary applications covering many and growingnumber of areas rapidly

information storage, automotive, communications (wired andwireless), aeronautics, space astronomy, power generation,military weapon smartness and sensing, entertainment (display,

virtue reality), toy industry, computer periphery,building/architecture, neurological interfaces, chemistry andphysics research.

Successful formula high performance/price compared with conventional devices

new market/starving market (ink jet printer, communications,

bio analysis)

MEMS in next ten years Continue branching into new areas

biology, chemical engineering, nanoengineering

mems pdf

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