MEMS: The New Dimension of the Advanced Analog World

Moderator: Benedetto Vigna, Group Vice President & General Manager of MEMS & Sensors, Transceivers & Healthcare DivisionJune 3, 13:45

MEMS: The New Dimension of the Advanced Analog World

ModeratorBenedetto Vigna, Group Vice President & G l M f MEMS & S T i &General Manager of MEMS & Sensors Transceivers &Healthcare Division, STMicroelectronics

PanelVolker Herbig, Manager Strategic Marketing,

X-FAB Semiconductor Foundries AGD id R ffi E t RF & A l IC D i Mi l t i CSEM (S i David Ruffieux, Expert RF & Analog IC Design, Microelectronics, CSEM (Swiss Center for Electronics & Microtechnology)Dr. Massimo Sivilotti, Chief Scientist, Tanner EDASteve Wainwright, General Manager EMEA, Vice President Sales & Marketing, g , g , g,Freescale Semiconductor

OUTLINE

Introduction (20’)

Discussion (40’)

Q & A (10’)

MEMS is no longer an Emerging Technology

MobilePhones

PMP

GameControllers

PMPDSC

PC/HDDPND

RemoteRemoteControllers

Almost $5B by 15 MEMS suppliers

900

1,000Open Captive Foundry

600

700

800

Dol

lars

300

400

500

Mill

ions

of

0

100

200

ARD

NTSSCH

NICS

ON RK

SON

ALE SO IESCES

nor) OR

TA NIC

HEWLE

TT PACKAR

TEXAS INSTRUMENT

ROBERT BOSC

STMICROELE

CTRONICANON

LEXMARK

SEIKO EPSOFREESCAL

DENSO

VAGO TECHNOLOGIE

ANALOG D

EVICE

FINEON (in

cl.Sen

sono

FORMFACTOSENSATA

PANASONIC

T ST

AVA

INFIN

Source: MEMS Competitive Landscape Tool, 2009, iSupply

Potentially high-volume, high-growth industry with a large customer base

9,000Other Emerging MEMS

Micro Fuel Cells

7,000

8,000

s

Flow Sensors

Thermopiles

Optical MEMS for Telecom

Microfluidic Chips

4,000

5,000

6,000

ions

of D

olla

rs

RF MEMS Oscillators

MEMS Sw itches

BAW Filters

Microbolometers

2,000

3,000

4,000

Mill

Microbolometers

MEMS Microphones

Optical MEMS for Displays

MEMS Wafer Probes

Gyroscopes

0

1,000

2006 2007 2008 2009 2010 2011 2012 2013

Gyroscopes

Pressure Sensors

Inkjet Print heads

Accelerometers

Source: Q1 2009 MEMS market tracker, iSupply

Sensors grow faster than Actuators

MEMS Accelerometers and Gyroscopes

MEMS Motion Sensors* Market2008-2013

1,80010.1% CAGR

MEMS Motion Sensors* Market for CE and Mobile Phones

1200 1600

US$M US$M

1 000

1,200

1,400

1,600

,

1%CAGR 9.8% CAGR 800

1000

1000

1200

1400

f uni

ts

400

600

800

1,000

19%CAGR

7%CAGR

16% 200

400

600

400

600

800

Mill

ions

o

0

200

2008 2013 2008 2013Accelerometers Gyroscopes

16%CAGR

0

200

2006 2007 2008 2009 2010 2011 2012 20130

200

Accelero revenue Gyro revenueCell phones and CE Automotive Others

Accelero revenue Gyro revenue

Accelero Units Gyro Units

* MEMS Accelerometers & Gyroscopes

Source – iSuppli, Q1 2009

Automotive Market is larger than Consumer Market butConsumer Market has higher CAGR

Very soon 1 BUnits will be in the consumer market

Accelerometers and Gyroscopes

35 mm2

25 mm2 20 mm2 15 mm2 < 9 mm2

Moore? Who is he?

MEMS means Micro Electro Mechanical Systems … taking advantage of themechanical AND electrical properties of silicon

Two key elements:Micron-sized Transducer realized through a specific process called Micro-Machining

An Advanced Analog Chip with embedded smart functionalities and a lot of libraries and dedicated IPs

+ =

No common technology platform across the industry

STMicroelectronics point of view

MEMS is a long term committment

Some MEMS product families are foundamental to excel in Advanced Analog World

Reason of ST Leadership in MEMS Consumer Market as per Reason of ST Leadership in MEMS Consumer Market as per iSupply Dec 2008:

Management of entire supply chainCloseness of technology and Designgy gLeading products (look at latest born LIS331DLH)Blend of State of the art 8” Manufacturing and Product InnovationQ lit f S iQuality of ServiceNimble team….Trust of the customers

V lk @ XF bVolker @ XFab

MEMS Market for Foundries

MEMS devices are ubiquitous Automotive

TPMS ESP Navigation- TPMS, ESP, NavigationConsumer

- MEMS Microphones, Game Controllers, … - Inkjet (captive)- DLP (captive)

High-volume consumer applications g ppin addition to Inkjet are starting to drive MEMS market growth

The MEMS market is significant 6B USD in 2009 but small in comparison to the SC market

The MEMS market is and will be served by foundries

Challenges for MEMS foundries

MEMS technology enables new sensors and actuators beyond CMOS MEMS technologies are the logical extension of the current MEMS technologies are the logical extension of the current CMOS-based analog/mixed-signal processes

MEMS technology enables sensors to transform analog pressure and inertial signals in electrical signalspressure and inertial signals in electrical signals

Current ChallengesTechnology

N t d d (1 d t 1 )- No standards (1 product = 1 process)- CMOS compatibility issues

Business Model- Many small volume apps - Silicon content- SOC vs. SIPSOC vs. SIP

Trends in the MEMS foundries space

Fabless analog-mixed/signal companies are entering the MEMS market to compete with the analog-mixed/signal IDMs in high-volume applications such as TPMS, gyro or MEMS microphone

Emphasis on CMOS compatibility to achieve synergies with high-volume CMOS production

Integration of 0.35 µm CMOS with MEMS

6” to 8” transition for high-volume production to ensure 6 to 8 transition for high volume production to ensure cost competiveness

MEMS FOR NEW VERSATILE TIMING AND SHORT RANGE WIRELESS CONNECTIVITY SOLUTIONS

D id @ CSEMDavid @ CSEM

Quartz XTALs vs Silicon MEMS

Silicon MEMS

Large thermal drift !

Quartz XTALs

Null 1st 2nd order TCFs Large thermal drift !Electro-static actuation or piezo thin film

Null 1st, 2nd order TCFs by proper rotationPiezoelectric material p

Synergies with ICsSimilar processesL b t t

Low cost process butSmall substrates (1.5’’)Old t h l i ( t) Large substrates

Wafer scale packagingSingle device for any

Old technologies (wet)

Expensive packagingMetal cans or ceramic Single device for any

frequency by electronic Miniature & lower cost

1 frequency, 1 deviceIndividual trimming

Low power SiRes compensation scheme

No PLL butl d

Thermal Comp.State Machine

TemperatureSensor

Calibration Data

Fractional div.Freq. Interp.3µA @ 1V

32768Hz

32Hz÷1024

÷M,M+1 modulator

3µA @ 1VDC=S/1024

Qi>S÷1024 

df/dT≈‐30ppm/°C∆f

uency

÷N-1

pp∆fHL

dc=100% dc=0%

fCOMP

Freq

u

÷N÷N+1

Temperature

Low-Cost Packaging with Sn-Au

MEMS chip stacked above IC die

CAP plated with Sn-Au above IC diewith Sn-Au (dummy or IC wafer)

Assembly cross-sect. ft flafter reflow

AlN-driven resonator resonator with back cap & UBM

Generation of Any Clock Frequency and High Performance Transceiver with MEMS

LNA

BAW

BBCOMBINE

RF BAWs ULP RTC PA

SiR÷N

RX DATA& CLKCHANNEL

LF SiResRF CMOS

Mode

Ultra fast

AD÷Q

SiRes÷P RTC

PROG SYSCLOCK

CSELECTTX DATA

Ultra fast wake-up

ADPLL

TEMPSENS

COMPALGO

CLOCK

BAWDCO

Above-IC BAWs or Ultra-Miniature SIPUltra Miniature SIP

M i @ T Massimo @ Tanner EDAEDA

Characteristics of MEMS Designs

Innovative technologyDifferentiatorMay involve process / product codesignOften involves novel / custom packaging

Multi-disciplinary designMulti disciplinary designUniqueCulture shift

Switching Electrodes for Heart Implants

Chip on a Pill Drug Monitoring and Telemetry

Proteus Raisin - Ingestible IC

Networked Lead Enabled by ChipSkin Technology

MEMS “Market” is Highly Fragmented

Rapid Growth butRapid Growth, but…Broad technology range, e.g.:

- Bulk SiS f Si- Surface Si

- CMOS-compatible MEMS- Non-Si MEMS- µfluidics- optics - Nanomaterials & quantumNanomaterials & quantum

Process innovation is ongoing at a rapid pace

MEMSIC Souvenir Olympic Torch

MEMS CAD Tool Requirements

FlexibleFlexibleProgrammable(User) ConfigurableD h / I biliData exchange / InteroperabilityEmerging: “DFM”

Verification (DRC, “LVS”)Capture of physical process variability data

Where are we Going?

Will MEMS design follow the maturity curve of Will MEMS design follow the maturity curve of microelectronics?Will MEMS design become commoditized?

St @ F lSteve @ Freescale

MEMS Market Drivers

MEMS: The 1st pillar of “Embedded System Control”

Sense – Compute - ActuateSense – Compute - Actuate

MEMS devices have proliferated in virtually every market segment

MEMS now part of almost every major semiconductor supplier

“Consumer” MEMS demand driven Consumer MEMS demand driven by a new way of interacting with object: Elimination of complex user interfaces

“Automotive” MEMS demand driven by stringent safety & emission legislation

S.Wainwright, Freescale

MEMS Market Size and TrendsThe exponential units demand

$7,500

$9,000

Oth

Historical revenues peaked in 2007

MEMS revenues ($M)

CAGR09-13: +10.2%

$

$3,000

$4,500

$6,000 Others

Industrial

Data processing

Automotive

Consumer & Wireless

2008/09 revenue decline impacted by global economic downturn

$0

$1,500

2007 2008 2009 2010 2011 2012 2013

economic downturn, especially automotive

MEMS units demand to double between 2009 and 7,000

MEMS unit shipment (Munits)double between 2009 and 2013 to more than 6 billion units

C i l d 4,000

5,000

6,000

7,000

Others

RF MEMS oscillators

Gyroscopes

Pressure sensors

MEMS i h

CAGR09-13: +20.7%

Consumer, wireless and automotive driving the demand1,000

2,000

3,000MEMS sw itches

Inkjet printheads

BAW filters

MEMS microphones

Accelerometers

02007 2008 2009 2010 2011 2012 2013

Source: iSupply MEMS Market Tracker H1-2009

S.Wainwright, Freescale

Conclusion

MEMS products evolving from standalone devices to “ubiquitous sensing solutions” – (SiP / SoC)

Proliferation of context awareness capabilities

MEMS technologies will enable:

User interface revolution, human body monitoring, energy saving,

Next generation of automotive safety applications

F sion of accele omete s ang la ate and othe Fusion of accelerometers, angular rate and other sensor technologies (radar, vision) for predictive safety applications.

Endless applications only limited by YOUR creativity

And by the way, Freescale passed the 1 billion MEMS units shipped!

S.Wainwright, Freescale

P l Panel Discussion

$4.5B – 5B concentrated in 15 MEMS suppliers

900

1,000Open Captive Foundry

8” t iti

600

700

800

Dol

lars

• 8” transition• Silicon Foundry or IDM• Automotive SC Evolution• Future below $100M

300

400

500

Mill

ions

of • Future below $100M

• Partnerships

0

100

200

ARD

NTSSCH

NICS

ON RK

SON

ALE SO IESCES

nor) OR

TA NIC

HEWLE

TT PACKAR

TEXAS INSTRUMENT

ROBERT BOSC

STMICROELE

CTRONICANON

LEXMARK

SEIKO EPSOFREESCAL

DENSO

VAGO TECHNOLOGIE

ANALOG D

EVICE

FINEON (in

cl.Sen

sono

FORMFACTOSENSATA

PANASONIC

T ST

AVA

INFIN

Source: MEMS Competitive Landscape Tool, 2009, iSupply

Is 8” silicon Wafer the only profitable path to future MEMS manufacturing?

STMicroelectronics, Freescale, Omron and Texas Instruments are all using 8” Fab.

MEMS shipments breakout by wafer size

4'' 6'' 8''

8”

%4 6 8

6”

2008 2013

8” MEMS Wafer from STMicroelectonics5YP 8” Wafer Evolution

Source: Q1 2009 MEMS market tracker, iSupply

Silicon Fundry or IDM?

Some IDMs starts to externalize consumer MEMS to foundriesADI d hADI and others....CMOS foundries like bees around MEMS honey pot: TSMC, UMC, Tower/Jazz, Magnachip, Dongbu…

IDM to silicon Foundry is not straightforward:No Technology platform across the industryCloseness of Design and Technology team for yield improvementCloseness of Design and Technology team for yield improvementNeed to reinvent the technology platform for decent parginSilicon Foundry:Volumes appealIDM MEMS P IP t tiIDM: MEMS Process IP protection

When New Comer Silicon Foundry will pass $100M threshold? In which field?In which field?

Till when automotive MEMS Captive Model will be alive?

First bloodletting in automotiveS D A i lSystron Donner Automotive closesInfineon sells Sensonor

Efforts to leverage greater economies of scaleAutomotive MEMS suppliers expand in consumer: ADI, Bosch, FreescaleFreescale…Consumer MEMS suppliers to expand into automotive: STMicroelectronics, ...

The threshold of $100M and the Partnership Model

Economic crisis accelerates transformation of the MEMS industryindustry

Some companies with sales around $100M are failing, even being part of bigger corporationConsumer and mobile markets grow at 16 5% from 2008-2013 Consumer and mobile markets grow at 16.5% from 2008 2013 and overtake automotive in 2010Commoditization of the market in favour of consumer MEMS suppliers which will start supplying to automotive in next 2 yearsHigh volume MEMS foundry and CMOS foundriesHeadcount reduction at number of foundries and forced leave at number of IDMnumber of IDM

The threshold of $100M and the Partnership Model

How MEMS start-ups can survive in this market? Is there any chance for them to skyrocket like analog companies in any chance for them to skyrocket like analog companies in the past?

Which product family a start-up could address most Which product family a start up could address most probably?

Does an Analog Semiconductor Company need to have MEMS g p yin its portfolio to sustain its growth?

Do you see partnerships happening on the horizon? Is it a viable Model

Key Success Factors?

Skilled peopls with Industrial experience

Close Partnerships & Cooperation with Customerswith Customers

MEMS accelerometer become #1 market by 2013

1 400

1,600

1,800

rs

Military & CivilAerospace

Medical

Source: Q1 2009 MEMS market tracker, iSupply

800

1,000

1,200

1,400

s of

US

Dol

lar Medical

Electronics

Industrial

200

400

600

800

Mill

ions Automotive

Mobile handsetsand CE

Mobile and CE applications to overtake automotive in

Automotive market 2013 2007

02006 2007 2008 2009 2010 2011 2012 2013

to overtake automotive in 2009

$1B in 2013Cell phone = automotive

=2007Airbag market shrinksLow-g accelerometers growth with ESCCell phone = automotive

in 2013 growth with ESC

What’s the technology biggest technical challenge in Accelerometer field?

What’s next?

9,000Other Emerging MEMS

Micro Fuel Cells

7,000

8,000

s

Flow Sensors

Thermopiles

Optical MEMS for Telecom

Microfluidic Chips

4,000

5,000

6,000

ions

of D

olla

rs

RF MEMS Oscillators

MEMS Sw itches

BAW Filters

Microbolometers

2,000

3,000

4,000

Mill

Microbolometers

MEMS Microphones

Optical MEMS for Displays

MEMS Wafer Probes

Gyroscopes

0

1,000

2006 2007 2008 2009 2010 2011 2012 2013

Gyroscopes

Pressure Sensors

Inkjet Print heads

Accelerometers

Source: Q1 2009 MEMS market tracker, iSupply

Sensors grow faster than Actuators

Smart Sensors Provide New Business Opportunities?

RFMEMS

BUILDING

FACTORYHEALTHCARE

SPORT & WELLNESSLOGISTICSFACTORY 

AUTOMATION

The Smart Sensor Evolution

MEMS

Pr

Smart Sensor Challenges

MEMS ACCELEROMETER

MEMS GYROSCOPE

SMC

O

LOW

roprietaryB

luetoMAGNETOMETERMAGNETOMETER

MA

RT SIG

ON

DITIO

N

W PO

WER

y: Sub 1Gooth Low

TEMPERATURETEMPERATURE

MEMS MEMS PRESSURE PRESSURE

SENSORSENSOR

GN

AL

NIN

G

R R

AD

IOH

z –2.4 G

Energy

TEMPERATURE TEMPERATURE SENSORSENSOR

GH

z

POWER MANAGEMENTPOWER MANAGEMENT

Thank youThank you