mems in mexico, thanks to frank

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Jose Mireles Jr., Systems Workshop on Adaptive & Networks, SWAN 06, 8-9 December 2006

Prepared by: Jose Mireles Jr.Jose Mireles Jr.

Univ. Autónoma de Ciudad Juárez

MEMS in Mexico, thanks to FrankMEMS in Mexico, thanks to Frank

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Outline

MEMS in Mexico MEMS packaging in Juarez (CICTA - UACJ) Projects at CICTA Conclusions

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MEMS Mexico Network, 2003MEMS Mexico Network, 2003

UPAEPUPAEPUPAEPUPAEP

ITESIITESIITESIITESI

ITESM-MTYITESM-MTYITESM-MTYITESM-MTY

UACJUACJUACJUACJ

CINVESTAV-CINVESTAV-GDLGDL


INAOEINAOEINAOEINAOE

IIEIIEIIEIIEUNAMUNAM

UNAMUNAM

U de GU de GU de GU de G

UVUVUVUV

IPNIPNIPNIPN

CaracterizationDesign Fabrication Packaging

MEMS NetworkUNAM INAOE UACJBioMEMS

TelecomunBioMEMS

BioMEMSAutomotriz

Innovation Laboratories in MEMSInnovation Laboratories in MEMS

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Elementos de la Red de MEMS en México

SECTORES DE OPORTUNIDAD

SECTORES DE OPORTUNIDADGRUPOS DE

COLABORACIÒN

GRUPOS DE COLABORACIÒN

Red de Centros de Diseño MEMS

Laboratorios de Innovación-MEMS

Automotriz: DELPHI Visteon

Industrial

Salud

Cementos

Clusters de MEMS: Puebla, Paso del Norte

USA

CANADÁ

Centro America

Suframa,Brasil

Argentina

CENATECCostaRica

U de los Andes,Colombia

European union

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MEMS Packaging at UACJ

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Research Center of Applied Science and Technology “Centro de Investigación de Ciencia y Tecnología Aplicada” (CICTA)

Universidad Autónoma de Ciudad Juárez

UACJ, Instituto de Ingeniería y Tecnología UACJ, Instituto de Ingeniería y Tecnología Septiembre 2006Septiembre 2006

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Current infrastructure

- Offices for researchers- Clean room 100, 1000, 10000- Assembly tools

- Micropositioners- Nanopositioners- Vision

- Equipo para pruebas y encapsulado

Current infrastructure

- Offices for researchers- Clean room 100, 1000, 10000- Assembly tools

- Micropositioners- Nanopositioners- Vision

- Equipo para pruebas y encapsulado

145 m2

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MEMS Packaging equipment at UACJ

Suss MicroTec

FC150 BA6 SB6e Flip chip bonder Aligner Wafer-wafer Bonder Die-wafer Bonder for 2” – 6” wafers Anodic Bonder Optoelectronic assy Eutectic Bonder Photonics assy Fusion Bonder Thermo compression

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Advanced characterization at UACJ

JEOL JSM-7000F Field Emission Analytical Scanning Electron Microscope

Thermal, 30KVMajor Specifications

Resolution

1.2nm (30kV) , 1.5 nm (15kV),

3.0 nm (1kV) imaging performance

3.0 nm (15 kV, 10 mm, 5nA) for high resolution analytical performance

Accelerating Voltage 0.5 to 30 kV

Electron Source Schottky Field Emission Gun

Probe Current <1 pA to >200nA

Magnification x10 to 500,000

Image Modes Secondary Electron Image

Backscattered Electron Image (Composition, Topography)

Forward Scatter detector (EBSD)

Cathodoluminesence

Accessory Ports 11 ports with optimized geometry for analytical detectors

Specimen Stage Eucentric goniometer (5 axis motorized)X=70mm, Y=50mm, Z=3 to 41 mm,R=360° (endless)T=-5 to 70°

Image Store Up to 2560 x 2048 pixels

Analytical Working Distance

10mm EDS

15mm WDS

Not only MEMS

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Disco Wafer Dicing Wire bonder K&S 4524AD

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MEMS Projects at UACJ

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Sandia National LabsTVI Community College

New Mexico Tech.

UT-El Paso

New Mexico State U.

El Paso Community College

U. Autonoma de Cd. Juarez, Mexico

White Sands Missile Range

Bi-National Sustainability Lab

CIMAV Advanced Materials Lab, Mexico

Delphi AutomotiveFUMEC

Tec de Monterey, Cd. Juarez

U. of New Mexico

UNM-Gallup Los Alamos National Labs

MEMS Packaging cluster Paso del Norte

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Team Technologies, new company in Juarez

NDA

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Development of Flow sensors using Optical Fibers

Patent pending

COMS-02

Capacitance vs Reynolds

y = 0.0157x + 2.48

R2 = 0.9832

2.5

2.55

2.6

2.65

2.7

2.75

2.8

2.85

2.9

0.00 5.00 10.00 15.00 20.00 25.00

Reynolds

Mic

rofa

rad

s

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Micromirrors

Assembly, alignment

Sandia National Laboratories, investigation project

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Shape Memory Alloys

Magnetic Shape Memory

Wobble micromotors

Electromagnetic minimotors

Visteon, micromotor prototype project

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Conclusions

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MEMS in Mexico

---> Thanks to Frank’s support / vision to collaborate with FUMEC and CONACyT

FUMEC and government have federal initiatives in high Technology on Mexico

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UPAEPUPAEPUPAEPUPAEP

ITESIITESIITESIITESI

ITESM-MTYITESM-MTYITESM-MTYITESM-MTY

UACJUACJUACJUACJ



INAOEINAOEINAOEINAOE

IIEIIEIIEIIEUNAMUNAM

UNAMUNAM

U de GU de GU de GU de G

UVUVUVUV

IPNIPNIPNIPN

Projects:Cluster, TTVisteonSandiaFlow SensorDelphi

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Controls laboratory at UACJ is next

Mechathronics Graduate program Joint PhD program w/ UTEP & NMSU UACJ Professors planning their PhDs Control’s meeting in Cancun?

mems in mexico, thanks to frank

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