mems final techfest
TRANSCRIPT
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MEMS
Towards smart community…
AKHIL GARG
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• Micro - Small size, micro fabricated structures
• Electro - Electrical signal /control ( In / Out )
• Mechanical - Mechanical functionality ( In / Out )
• Systems - Structures, Devices, Systems Control
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Accelerometer & Gyro Sensors
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iMEMS ADXRS Angular Rate-Sensing Gyro
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Hard Drive Magnetic Read/Write Heads
By incorporating MEMS actuation, the head can be positioned more quickly and to finer tolerances, this results in higher density data capability.
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MEMS Fabrication
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Surface Micro Machined Motor
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HARMEMS
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LIGA Fabrication Process
microstructures up to 1000 μm high.
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Mass Storage - IBM
IBM’s “Millipede”100 Tera Bit per square inch!
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CONCLUSIONMEMS would completely transform our lives and improve our comfort level tremendously
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Thank You
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QUERIES