MEMS APPLICATION IN INDUSTRIALAUTOMATION

SANATH PRASAD 13MMT1044

INTRODUCTION……

MEMS

MEMS PRODUCTS…

MEMS PRODUCTS

ACTUATION MECHANISM

MICROSENSORS

SCALING FLUID MECHANICS

• VOLUMETRIC FLOW

• PRESSURE DROP

SINGLE CRYSTAL SILICON

SOME SENSORS USED IN INDUSTRY

CHEMICAL SENSOR

METAL OXIDE GAS SENSOR• SEMICONDUCTING METALS CHANGES ELECTRICAL RESISTANCE WHEN

CERTAIN GAS FALLS ON IT .

OPTICAL SENSORS• PHOTOVOLTAIC JUNCTION ( LIGHT FALLS VOLTAGE INDUCED)

• PHOTO DIODES (CURRENT VARIES ACCORDING TO THE INTENSITY VARIATIONS OF THE LIGHT)

• PHOTO TRANSISTORS

• CHANGES RESISTANCE WHEN LIGHT FALLS ON IT………..(PHOTO RESISTANCE)

PRESSURE SENSOR

CAPACITANCE TYPE PRESSURE SENSOR

MEMS IN AUTOMATION INDUSTRY

MEMS APPLICATIONS –VALVES AND PUMPS

FLAPPER VALVES

DIAPHRAGM VALVE

CHECK VALVE THEORY OF OPERATION

DIAPHRAGM PUMP

PERISTALTIC PUMP

ADVANTAGE OF USING MEMS DEVICE

• BATCH FABRICATION: REDUCED MANUFACTURING COST & TIME.

• EASY TO INTEGRATE INTO SYSTEMS OR MODIFY.

• LITTLE HARM TO ENVIRONMENT AND CAPABLE OF INCORPORATING.

• EXPLOITATION OF NEW PHYSICS DOMAINS.