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Mechanical Material SILICON? Stiff => Thinning is required for appreciable strain

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Mechanical Material2

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Mechanical Material

SILICON?

Stiff => Thinning is required for appreciable strain

Micromachining of

SILICON?

MICROMACHINING of SILICON => (a) BULK (substrate)(b) SURFACE (films)

Additive Processes: Chemical and Physical Deposition(Thin Layers only) (Single/Poly)

Removal Processes:Chemical and Physical Etching(Wet/Dry/Plasma/Inert/Reactive)

(Bulk/Film) (Anisotropic/Isotropic)

BULK MICROMACHINING(Etchants: Isotropic/Anisotropic)

BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)

BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)

BULK MICROMACHINED(Silicon Capillary for Insulin Infuser)

BULK MICROMACHINED(Silicon Mask for Cylindrical Micromotion Sensor)

BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)

BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)

BULK MICROMACHINED(Series Connected Photovoltaic Converter Battery)

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