Maximum Areas in HPK Rule(ATLAS internal only)

Y. Unno (KEK)

2015/1/13, 2015/4/8 updated, Y. Unno 1

Dicing and Active/Implant Diameters

2015/1/13, 2015/4/8 updated, Y. Unno 2

ATLAS12 Design

• ATLAS12 design: – with the distance of inner edge of bias ring-to-dicing line:

• 986 µm (W)/side, 910 µm (H)/side– with the width of active area (inner edge-to-inner edge of the bias ring):

• 95.567 mm (= 74.5 µm x (1282+1) – 16 µm)• The dicing line and the outer edge of the guard ring are well within the

circles.2015/1/13, 2015/4/8 updated, Y. Unno 3

ATLAS”X” Design (Barrel)

• Active area (inside bias ring) being square; – with the width and height of inner edge-to-inner edge of bias ring: 96.718 x 96.718 mm2 – Sensor dicing slightly rectangular: 97.718 (W) x 97.618 (H) mm2

• Outer edge of the guard ring (Al+implant) is within the circle of 137.2 mm.• “Slim edge” design:

– with the distance of inner edge of the bias ring-to-dicing line:• 500 µm (W)/side and 450 µm (H)/side,

• Strip pitch is 75.37 µm– Strip pitch has to be an unit of 0.5 µm (HPK rule).

2015/1/13, 2015/4/8 updated, Y. Unno 4

2.3% more area than ATLAS12

ATLAS”X” with Strip Pitch 75.5 µm

• Strip pitch being an unit of 0.5 µm, 75.5 µm.– the width and height of inner edge-to-inner edge of bias ring: 96.851(W) x 96.585(H) mm2 – Sensor dicing slightly rectangular; 97.851 (W) x 97.485 (H) mm2

• Outer edge of the guard ring (Al+implant) is within the circle of 137.2 mm.• “Slim edge” design:

– with the distance of inner edge of the bias ring-to-dicing line:• 500 µm (W)/side and 450 µm (H)/side,

2015/1/13, 2015/4/8 updated, Y. Unno 5

2.3% more area than ATLAS12

ATLAS”Maxi” Design (Endcap?)

• Outer edge (Al+implant) of the “edge” ring is within the circle of 139.5– with a round edge ring of radius of 0.450 mm at corner.

• “Slim edge” design with the distance of inner edge of bias ring-to-dicing line:– 500 µm (W)/side, 450 µm (H)/side

• Outer edge of the guard ring (Al+implant) is within the circle of 137.2 mm– with a round edge of the bias ring, i.e., un-equal length of strips near the corner.

2015/1/13, 2015/4/8 updated, Y. Unno 6

“Circular” Dicing• Constraint/recommendation of HPK– Polygon of a straight section of 2 mm or larger and

10-20 sections.• Thus, an example is– If the length of an edge is 80 mm, the length of

the straight section becomes 4 mm. – At a radius of 30 cm, an edge of 80 mm become a

polygon of 20 sections with a sagitta of about 27 µm between the adjacent sections.

2015/1/13, 2015/4/8 updated, Y. Unno 7