Matrix 105R Plasma Ash/Descum

220 Cochrane Circle Morgan Hill, CA95037

U.S.A. Tel.:+1-408-778-7788

Fax.:+1-408-904-7168 www.allwin21.com

sales@allwin21.com

1 © 2015 Allwin21 Corp. All Rights Reserved. All specification and information here are subject to change without notice and can not be used for purchase and facility plan.

Production Proven for

Compound Semiconductor materials

Matrix 105R

4

Introduction

The Matrix 105R single-wafer photoresist

asher and descum is an automated tool

designed as a flexible 13.56MHz RF Parallel

Plate plasma photoresist removal and

descum system for compound material

wafer fabrication. Matrix 105R is in direct

response to manufacturer’s concerns for

wafer uniformity, uptime, reliability and

production-proven technology.

Matrix 105R

5

Sales History and Main Customers

Start Year: 2009

Total Sales: 75 Units

Main USA Customers

Skyworks

Anritsu

TriQuint

Stanford University

UC Berkeley

Main Overseas customers

Win Semiconductor

TSMC

MEMSIC Semiconductor

Wavetek Taiwan

National Research Council Canada

Dynax Semiconductor

OMMIC France

3SPT Technologies France

Matrix 105R

6

Applications

• GaAs, InP, GaN, SiC wafer Strip (Mainly)

• GaAs, InP, GaN, SiC wafer Descum (Mainly)

• Thin Film Head Resist Cleaning

• Opto-Electronic Devices Cleaning

• MEMS (Micro Systems Technology)

Photoresist Stripping

• High dose implant (As+, B+, P+)

• Rework

• Post-polysilicon etch

• Post-metal etch

• Post-oxide etch

Controlled Resist Removal

• Post-develop descum (pre-etch)

• Dry/wet process capability

• Uniformity capability (<5% 1σ)

Matrix 105R

7

Main Modules and Assemblies

Chamber PCBs RF and Eurotherm

Integrated Robot

Up to 3 MFCs RF Match PCBs RF Match Network

Center Station Fixed Cassette Station

Matrix 105R

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Key Features Production-proven plasma Asher/Descum system Up to 3%-5% Uniformity. Frontside and backside isotropic removal. Element heating for up to 250C. 50mm-150mm wafer capability. Up to 6.25” wafer. 4 wafer sizes capability without hardware change if necessary. Integrated solid robotic wafer handling, Single wafer process Fixed cassette station and wafer center aligner. Can handle 50um thickness wafer PC controller with Advanced Allwin21 Software Package Endpoint detection with Allwin21 SLOPE technology, Optional Up to 3 gas lines with MFC’s MKS 13.56 MHz RF Generator with air cooling, 300W, 600W option. Pressure control with Throttle Valve Touch screen monitor EMO, Interlocks and Watchdog function GEM/SECS II, Optional Small Footprint : 27”W x 40”D x 59”H (280LBs) Made in U.S.A.

Matrix 105R

9

Chuck and Reaction Chamber

4-6 .125” Chuck 2-4” Chuck

Bellows for Pin Up/Down Element Heating

Matrix 105R

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Configuration

Item Description Remark

1 Main Frame With Circuit Breakers, Solenoid Valves etc.

2 Pentium Class PC with AW SW □ With GEM SECS II ; □W/O GEM SECS II; □Others

3 15-inch Touch Screen 17-inch LCD Monitor is Available if necessary

4 Keyboard, Mouse, USB and Cables USB with SW Backup

5 Chuck /w Heat, Pump Ring ,Lift Pins □2-4”; □2-6”; □4-6”; □6.125”; □6.25”

6 Center Aligner and Cassette Station □One Dimension; □Two Dimensions □Others

7 Anodized Reactor with Door

8 Chamber Base plate with water sensor

9 Ceramic Rings Baste Plate and Reactor; Base Plate and Chuck

10 Up Electrode and Low Electrode

11 Quartz Chamber and Baffle

12 EOP Sensor Optional

Matrix 105R

11

Configuration (Con.)

Item Description Remark

13 Main Control and Distributor PCB

14 Integrated Robust Solid Robot □H1-7X10.5; □Others

15 RF Match Network with PCBs

16 13.56MHz RF Generator with cable □MKS Elite 600HD-01; □ENI OEM-6(Used, Water Cool)

17 MFC /w In-line Filter and Solenoid Valve □1 ; □2; □3 MFC(Common:5 SLM O2 /500 SCCM N2.)

18 AC/DC Box with Temp. Controller □Eurotherm 808(V); □Eurotherm 847(H); □Others

19 MKS Manometer with Pneumatic Valve

20 Throttle Valve

21 Main Vacuum Valve

22 Front EMO, Interlocks System interlock, RF Interlock, Overheat Interlock

23 Lamp Tower Alarm and Alarm Buzzer

24 Vacuum Pump Optional (□With Blower; □Without Blower)

25 Chiller for Chamber Base Plate Optional

Matrix 105R

12

Specifications

Item Description

Wafer Size Up to 6.25 inch Capability

Temperature 60-250 ºC (±2 ºC), Typical processes: 80C, 110C, 150C

Gas Lines Up to three gas lines with MFCs. Popular MFC Range: 5 SLM O2 and 500 SCCM N2.

Rate 0.5-1.5 um/min at 200 to 250 ºC, bulk strip; 600 A/min at 100 ºC, Descum

Uniformity In Wafer <±8% (Max-Min) Asher; <±5% (Max-Min) Descum or better , 6 inch

Runs <±5% (Max-Min) Asher, <±3% (Max-Min) Descum or better , 6 inch

Particulate <0.05 /cm2 (0.03um or greater)

Damage CV:<0.1V from control; Mobile Ion:<1-2 E10 ; Vt :0% total shift on 98% of points tested no shift >5%

Process Range

(For bulk strip application) Pressure : 1.0 to 6.5 torr ; Power: 250-475W ;Flow: 1.0-2.5 liters O2

MTBF/MTTA/MTTR 450 Hours/100 Hours/3.5 Hours or Better. 95% uptime

Selectivity >1000:1

Others Contact Allwin21 sales for other applications and specifications

Key Features of Matrix 105R

13

Key Feature Benefit

Production-proven “downstream” Chamber structure

• Low RF damage • Rapid start-up, release for production • Not a “Guinea Pig”

Key Features of Matrix 105R

14

Key Feature Benefit

Pentium Class PC Controller with 15” touch screen.

Advanced control technologies. More useful functions. Better Performance (Uniformity, Repeatability and Stability)

Key Features of AW-105R

15

Key Feature Benefit

Integrated Solid Robotic Wafer Transfer Much Better Reliability Low Particulates Extremely Low Wafer Breakage III-V material substrate handling 50 um thickness substrate handling Integration of Robot and Controller Increase MTBF, Low MTTR

Key Features of Matrix 105R

16

Features Benefit

New air cooled RF Generator No Chiller, low cost, reliable

Multiple wafer sizes for one equipment Low cost, flexible, easy operation

Lamp Tower function Safety, easy operation

Fixed Cassette Stations More Reliable

More gas lines with MFC if necessary Low cost, flexible

Wafer center aligner function III-V wafers. Good repeatability

CE Mark if necessary For all fabs/labs

Key Features of Matrix 105R

17

Key Feature Benefit

Software has been using on different models of thousands of equipment for customers from 40 countries all over the world for more than 20 years.

Reliability Low cost Low risk Not a “Guinea Pig”

Advanced Controller of Matrix 105R

18

Benefit

Easy recipe edit and validation

Advanced Controller of Matrix 105R

19

Benefit

Fast, easier software calibration leading to enhanced process results.

Pressure Calibration

RF Calibration

Gases Calibration

Advanced Controller of Matrix 105R

20

Benefit

Storage of multiple recipes, process, and calibration files so that process and calibration results can be maintained and compared over time.

Storage of error data, log data so that all the activities on the equipment can be traceable.

Advanced Controller of Matrix 105R

21

Benefit

Real time close-loop process control, monitoring, data collection, acquisition, display and analysis

Precise parameters profiles tailored to suit specific process requirements.

Advanced Controller of Matrix 105R

22

Benefit

Easy Software Robot Teach

Advanced Controller of Matrix 105R

23

Benefit

More I/O, A/D, D/A “Exposure” for easier troubleshooting.

Key Features of Allwin21 Main Products

24

Benefit

WTM for easier equipment manual / automatic test

Key Features of Allwin21 Main Products

25

Benefit

Diagnostic Screen for easier monitoring the system at any time.

Advanced Controller of Matrix 105R

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Benefit

Different Users with password for system safety and control.

Advanced Controller of Matrix 105R

27

Benefit

Very reliable and stable EOP function. Wafer to Wafer Repeatability, No need many recipes

Advanced Controller of Matrix 105R

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Benefit

Communication between the equipment and a host controller in a GEM/SEC II enviroment.

Video of Matrix 105R

31 Click the above photo to watch the video at Youtube

220 Cochrane Circle

Morgan Hill, CA95037,U.S.A.

Tel.:+1-408-778-7788

Fax.:+1-408-904-7168

www.allwin21.com

sales@allwin21.com

© 2015 Allwin21 Corp. All Rights Reserved. All specification and information here are subject to change without notice and can not be used for purchase and facility plan. 32

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