marc corthout [email protected]. overview the business we are in the business challenges the...

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Marc Corthout [email protected]

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Page 1: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

Marc [email protected]

Page 2: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

Overview

• The business we are in

• The business challenges

• The technological challenges

• How partnerships can help

Page 4: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

Enabling The Digital Age(nda)

DUV/EUV Light Source Industry~1B$/year

Lithographic Equipment Industry~10 B$/year

Chipmaking Industry~300 B$/year

Electronics Industry~2000 B$/year

Page 5: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

Production SourceTo be ready

* λ / NA

LightSource

Wavelength

193nm

13nm

The technological challenge: reducing the wavelength 15x

15x smaller

248nm

Page 6: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

The technological challenge: the winner takes it all…?

Page 7: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

confidential

Page 8: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

confidential Page 8

Page 9: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

confidential Page 9

Page 10: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

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Page 11: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

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Page 12: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

Integrated with ASML NXE:3100 @ imec

Page 13: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

The Technological Challenges

High Volume Manufacturing

• Power > 10x

• Available 24 x 7 x 365

• High uptime

• Low Cost of OwnershipDUV

EUV

Closing The Maturity Gap …

Page 14: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

Luc Vd hove, CEO Imec

The Technological Challenges

Closing The Maturity Gap … ASAP

Page 15: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

How Partnerships Can Help

Belgium

The Netherlands

Germany

Fraunhofer ILT

Closing the loop on system performance within the Euregio

Having access to all major IC companies through Imec’s litho partners

Creating an ecosystem of specialized module suppliers

Becoming a showcase of hightech for the rest of the world

Page 16: Marc Corthout mcorthout@xtremetec.de. Overview The business we are in The business challenges The technological challenges How partnerships can help

THANK YOU VERY MUCH FOR YOUR ATTENTION