manip 6” diameter tsp shield top level middle level bottom level lower level cf flanges not...
TRANSCRIPT
Manip 6” Diameter
TSP shield
Top Level
Middle Level
Bottom Level
Lower Level
CF flangesNot threaded except wide boreTable top 3’ high (Al table top)Electro polished + vacuum annealed
8” Diameter
REMOVABLE Baffle to shield turbofrom TSP
Sample (focus) will be offset 1” from chamber center at top level.
TSP filament 8” Diameter
8” LEED 4.5” QMS
2.75” Sputter
6” Viewport
2.75” Wide bore 2.75” Wide bore
2.75” Wide bore2.75” Evap
Top Level – focus to a 2” diameter circle at center of chamber on this level.
12”
11”2”
On QMS port bolts come from inside
4.65”
2.75”
2.75”4.5”
Middle Level – focus to a 2” diameter circle at center of chamber on the top level.
2.75” Wide bore
4.5”2.75”
2.75” Wide bore
2”
Lower Level – point horizontally
4.5”2.75”Wide bore
2.75”
5”
Bottom Level – point horizontally
8”2.75”
2.75”
6”